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公开(公告)号:US11963347B2
公开(公告)日:2024-04-16
申请号:US18304834
申请日:2023-04-21
Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Inventor: Chiung-Ting Ou , Ming-Yih Wang , Jian-Hong Lin
CPC classification number: H10B20/20 , H01L23/481
Abstract: A memory device includes a transistor, an anti-fuse element, a source/drain contact, a first gate via, and a second gate via. The transistor is over a substrate. The anti-fuse element is over the substrate and is connected to the transistor in series. The source/drain contact is connected to a source/drain region of the transistor. The first gate via is connected to a first gate structure of the transistor. The first gate structure of the transistor extends along a first direction in a top view. The second gate via is connected to a second gate structure of the anti-fuse element. The second gate via is between the first gate via and the source/drain contact along the first direction in the top view.
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公开(公告)号:US20180151511A1
公开(公告)日:2018-05-31
申请号:US15396909
申请日:2017-01-03
Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Inventor: Jian-Hong Lin , Kuo-Yen Liu , Hsin-Chun Chang , Tzu-Li Lee , Yu-Ching Lee , Yih-Ching Wang
CPC classification number: H01L23/562 , H01L21/76805 , H01L23/522 , H01L23/5226 , H01L23/585 , H01L27/0248 , H01L2224/06519 , H01L2224/09519 , H01L2224/30519 , H01L2224/33519
Abstract: A semiconductor device and a method of manufacture thereof are provided. The method for manufacturing the semiconductor device includes forming a first dielectric layer on a substrate. Next, forming a first dummy metal layer on the first dielectric layer. Then, forming a second dielectric layer over the first dummy metal layer. Furthermore, forming an opening in the second dielectric layer and the first dummy metal layer. Then, forming a dummy via in the opening, wherein the dummy via extending through the second dielectric layer and at least partially through the first dummy metal layer. Finally, forming a second dummy metal layer on the second dielectric layer and contact the dummy via.
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公开(公告)号:US09761523B2
公开(公告)日:2017-09-12
申请号:US14832055
申请日:2015-08-21
Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Inventor: Jian-Hong Lin , Chwei-Ching Chiu , Yung-Huei Lee , Chien-Neng Liao , Yu-Lun Chueh , Tsung-Cheng Chan , Chun-Lung Huang
IPC: H01L23/48 , H01L23/528 , H01L23/532 , H01L21/288 , H01L21/768
CPC classification number: H01L23/528 , H01L21/2885 , H01L21/76802 , H01L21/76831 , H01L21/76834 , H01L21/76843 , H01L21/76849 , H01L21/76877 , H01L21/76879 , H01L21/76883 , H01L23/53223 , H01L23/53238 , H01L23/53252 , H01L23/53266
Abstract: A semiconductor device structure with twin-boundaries and method for forming the same are provided. The semiconductor device structure includes a substrate and a conductive structure formed over the substrate. The conductive structure includes twin boundaries, and a density of the twin boundaries is in a range from about 25 μm−1 to about 250 μm−1.
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公开(公告)号:US09601373B2
公开(公告)日:2017-03-21
申请号:US15145306
申请日:2016-05-03
Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Inventor: Chin-Shan Wang , Jian-Hong Lin , Shun-Yi Lee
IPC: H01L27/07 , H01L21/768 , H01L27/06 , H01L49/02 , H01L23/522 , H01L29/423 , H01L29/49 , H01L23/485 , H01L29/66 , H01L29/94
CPC classification number: H01L21/76895 , H01L21/76831 , H01L23/485 , H01L23/5223 , H01L27/0629 , H01L27/0635 , H01L27/0716 , H01L28/60 , H01L28/86 , H01L28/90 , H01L29/42372 , H01L29/4916 , H01L29/66568 , H01L29/6659 , H01L29/94 , H01L2924/0002 , H01L2924/00
Abstract: A method for manufacturing a semiconductor device is provided. The method includes the following operations: (i) forming a transistor having a source, a drain and a gate on a semiconductor substrate; (ii) forming a conductive contact located on and in contact with at least one of the source and the drain; and (iii) forming a capacitor having a first electrode and a second electrode on the semiconductor substrate, in which at least one of the first and second electrodes is formed using front-end-of line (FEOL) processes or middle-end-of line (MEOL) processes.
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5.
公开(公告)号:US11665890B2
公开(公告)日:2023-05-30
申请号:US17393621
申请日:2021-08-04
Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Inventor: Chiung-Ting Ou , Ming-Yih Wang , Jian-Hong Lin
IPC: H01L27/112 , H01L23/48
CPC classification number: H01L27/11206 , H01L23/481
Abstract: A memory device includes a transistor, an anti-fuse element, a first gate via, a second gate via, and a bit line. The transistor includes a fin structure and a first gate structure across the fin structure. The anti-fuse element includes the fin structure and a second gate structure across the fin structure. The first gate via is connected to the first gate structure of the transistor and is spaced apart from the fin structure in a top view. The second gate via is connected to the second gate structure of the anti-fuse element and is directly above the fin structure. The bit line is connected to the fin structure and the transistor.
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公开(公告)号:US10777510B2
公开(公告)日:2020-09-15
申请号:US15396909
申请日:2017-01-03
Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Inventor: Jian-Hong Lin , Kuo-Yen Liu , Hsin-Chun Chang , Tzu-Li Lee , Yu-Ching Lee , Yih-Ching Wang
IPC: H01L23/00 , H01L23/58 , H01L27/02 , H01L23/522 , H01L21/768
Abstract: A semiconductor device and a method of manufacture thereof are provided. The method for manufacturing the semiconductor device includes forming a first dielectric layer on a substrate. Next, forming a first dummy metal layer on the first dielectric layer. Then, forming a second dielectric layer over the first dummy metal layer. Furthermore, forming an opening in the second dielectric layer and the first dummy metal layer. Then, forming a dummy via in the opening, wherein the dummy via extending through the second dielectric layer and at least partially through the first dummy metal layer. Finally, forming a second dummy metal layer on the second dielectric layer and contact the dummy via.
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公开(公告)号:US10431541B2
公开(公告)日:2019-10-01
申请号:US15463105
申请日:2017-03-20
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Jian-Hong Lin , Hsin-Chun Chang , Hui Lee , Yung-Sheng Huang , Yung-Huei Lee
IPC: G06F17/50 , H01L27/02 , H01L23/522 , H01L23/528
Abstract: A semiconductor device for fabricating an IC is provided. The semiconductor device includes an interconnect structure and a first conductive line. The interconnect structure is made of conductive material and includes a first interconnect portion and a second interconnect portion. The second interconnect portion is connected to a first end of the first interconnect portion, and a width of the second interconnect portion is less than a width of the first interconnect portion. The first conductive line is arranged over or below the first interconnect portion and providing an electrical connection between the interconnect structure and an electrical structure. A distance between the first conductive line and the first end is less than a distance between the first conductive line and a second end of the first interconnect portion which is opposite to the first end.
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公开(公告)号:US11616002B2
公开(公告)日:2023-03-28
申请号:US17162584
申请日:2021-01-29
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Jian-Hong Lin , Hsin-Chun Chang , Ming-Hong Hsieh , Ming-Yih Wang , Yinlung Lu
IPC: H01L23/48 , H01L23/522 , H01L21/768 , H01L23/528
Abstract: An integrated circuit (IC) with through-circuit vias (TCVs) and methods of forming the same are disclosed. The IC includes a semiconductor device, first and second interconnect structures disposed on first and second surfaces of the semiconductor device, respectively, first and second inter-layer dielectric (ILD) layers disposed on front and back surfaces of the substrate, respectively, and a TCV disposed within the first and second interconnect structures, the first and second ILD layers, and the substrate. The TCV is spaced apart from the semiconductor device by a portion of the substrate and portions of the first and second ILD layers. A first end of the TCV, disposed over the front surface of the substrate, is connected to a conductive line of the first interconnect structure and a second end of the TCV, disposed over the back surface of the substrate, is connected to a conductive line of the second interconnect structure.
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9.
公开(公告)号:US11094702B1
公开(公告)日:2021-08-17
申请号:US16786099
申请日:2020-02-10
Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Inventor: Chiung-Ting Ou , Ming-Yih Wang , Jian-Hong Lin
IPC: H01L27/112 , H01L23/48
Abstract: A memory device includes a transistor, an anti-fuse element, a gate via, and a bit line. The transistor includes two source/drain regions. The anti-fuse element is connected to one of the source/drain regions of the transistor. The anti-fuse element includes a channel and a gate structure above the channel. The gate via is above the gate structure of the anti-fuse element. A lateral distance between a center of the gate via and a sidewall of the channel is less than a width of the gate via. The bit line is connected to another of the source/drain regions of the transistor.
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公开(公告)号:US11955441B2
公开(公告)日:2024-04-09
申请号:US17706039
申请日:2022-03-28
Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Inventor: Jian-Hong Lin , Kuo-Yen Liu , Hsin-Chun Chang , Tzu-Li Lee , Yu-Ching Lee , Yih-Ching Wang
IPC: H01L23/00 , H01L23/522 , H01L23/58 , H01L27/02 , H01L21/768
CPC classification number: H01L23/562 , H01L23/522 , H01L23/5226 , H01L23/585 , H01L27/0248 , H01L21/76805 , H01L2224/06519 , H01L2224/09519 , H01L2224/30519 , H01L2224/33519
Abstract: An interconnect structure comprises a first dielectric layer, a first metal layer, a second dielectric layer, a metal via, and a second metal layer. The first dielectric layer is over a substrate. The first metal layer is over the first dielectric layer. The first metal layer comprises a first portion and a second portion spaced apart from the first portion. The second dielectric layer is over the first metal layer. The metal via has an upper portion in the second dielectric layer, a middle portion between the first and second portions of the first metal layer, and a lower portion in the first dielectric layer. The second metal layer is over the metal via. From a top view the second metal layer comprises a metal line having longitudinal sides respectively set back from opposite sides of the first portion of the first metal layer.
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