公开(公告)号：US10211043B2

公开(公告)日：2019-02-19

申请号：US15599930

申请日：2017-05-19

Applicant: TDK CORPORATION

Inventor： Takao Noguchi ,  Yoshihiko Yano

IPC: H01L21/70 ,  H01L21/82 ,  H01L27/02 ,  H01L27/06 ,  H01L27/12 ,  H01L21/02 ,  H01L21/822 ,  H01L29/51 ,  H01L41/08 ,  H01L41/319 ,  H01L49/02 ,  H01H57/00

Abstract: A stacked film is a stacked film including an oxide film, and a metal film provided on the oxide film, in which the oxide film includes a ZrO2 film of which a main surface is a (001) plane, the metal film includes a Pt film or a Pd film that has a single orientation and of which a main surface is a (001) plane, and a [100] axis of the ZrO2 film and a [100] axis of the metal film are parallel to an interface between the oxide film and the metal film, and the axes of both are parallel to each other.

公开(公告)号：US11594668B2

公开(公告)日：2023-02-28

申请号：US16719009

申请日：2019-12-18

Applicant: TDK Corporation

Inventor： Kenta Ishii ,  Masaru Nanao ,  Hitoshi Sakuma ,  Takao Noguchi

IPC: H01L41/04 ,  H01L41/047 ,  H01L41/08 ,  C23C16/48 ,  C23C16/06 ,  C23C14/08 ,  C23C14/34 ,  C23C16/40 ,  H01L41/187

Abstract: A thin film laminate comprises a metal layer consisting of a metal, and a thin film laminated on the surface of the metal layer, wherein a first direction is defined as one direction parallel to the surface of the metal layer, and a second direction is defined as one direction parallel to the surface of the metal layer and crossing the first direction; and the metal layer contains a plurality of first metal grains consisting of the metal and extending in the first direction on the surface of the metal layer, and a plurality of second metal grains consisting of the metal and extending in the second direction on the surface of the metal layer.

公开(公告)号：US10608162B2

公开(公告)日：2020-03-31

申请号：US15599981

申请日：2017-05-19

Applicant: TDK CORPORATION

Inventor： Takao Noguchi

IPC: H01L41/08 ,  H01L41/09 ,  H01L41/187 ,  H01L41/047 ,  H01L41/083 ,  H01L41/18 ,  H01L41/27 ,  H01H57/00

Abstract: A stacked film includes an oxide film including a ZrO2 film, a metal oxide film provided on the oxide film, and a predetermined metal film provided on the metal oxide film and having a single orientation, and the metal oxide film is a PtO film or a PdO film. In the case of this structure, the predetermined metal film has a single orientation, and characteristics of the piezoelectric film such as PZT formed on the predetermined metal film are improved. Therefore, excellent characteristics such as an increase in the driving force due to the piezoelectric film or a reduction in leakage current can be exhibited.