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公开(公告)号：US12085588B2
公开(公告)日：2024-09-10
申请号：US17308636
申请日：2021-05-05
Applicant: Technoprobe S.p.A.
Inventor： Stefano Felici
IPC: G01R1/073
CPC classification number: G01R1/07342
Abstract: A probe head for testing a device under test includes an upper guide and a lower guide parallel to each other and spaced apart. Each of the guides is provided with a respective plurality of guide holes, a plurality of contact probes housed in the guide holes and provided each with a first end and with a second end, the first end being adapted to contact pads of a device under test. At least one additional guide is associated with one of the guides. The additional guide includes first guide holes, housing a first group of the contact probes, and second guide holes, housing a second group of the contact probes. The first and second guide holes are shifted with respect to the guide holes of the guide which said additional guide is associated with, and the shift of the first guide holes is in a direction opposite the shift of the second guide holes.
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公开(公告)号：US10782319B2
公开(公告)日：2020-09-22
申请号：US16219783
申请日：2018-12-13
Applicant: TECHNOPROBE S.P.A.
Inventor： Roberto Crippa , Stefano Felici
Abstract: A probe card for testing of electronic devices comprises a testing head with plural contact probes inserted into guide holes of an upper guide and a lower guide, and a space transformer, each of the contact probes having a first terminal portion projecting from the lower guide with a first length and ending with a contact tip adapted to abut onto a respective contact pad of a device to be tested, and a second terminal portion projecting from the upper guide with a second length and ending with a contact head adapted to abut onto a contact pad of the space transformer. The probe card comprises a spacer element interposed between the space transformer and the upper guide and removable to adjust the first length of the first terminal portion by changing the second length of the second terminal portion and approaching the upper guide and the space transformer.
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公开(公告)号：US11029336B2
公开(公告)日：2021-06-08
申请号：US16537770
申请日：2019-08-12
Applicant: TECHNOPROBE S.P.A.
Inventor： Riccardo Vettori , Stefano Felici
Abstract: A probe card for a testing apparatus of electronic devices comprises a testing head, which houses a plurality of contact elements extending along a longitudinal axis (H-H) between a first end portion and a second end portion, a support plate, onto which the first end portion is adapted to abut, and a flexible membrane which comprises a first face and a second and opposite face. Conveniently, the first portion of the flexible membrane is arranged on at least one support and comprises a plurality of strips extending between a proximal end and a distal end, the probe card further including a plurality of micro contact probes comprising a body extending along the longitudinal axis (H-H) between a first end portion and a second end portion, the second end portion of each contact element abutting onto the first face of the flexible membrane at the distal end of a respective strip, and the first end portion of each micro contact probe abutting onto the second face of the flexible membrane at a respective contact element, the flexible membrane being electrically connected to the support plate through a second portion thereof, the second end portion of the micro contact probes being apt to contact the contact pads of a device to be tested, wherein the at least one support is provided with a plurality of guide holes for the housing of the plurality of micro contact probes.
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Patent Agency Ranking
公开(公告)号：US11953522B2
公开(公告)日：2024-04-09
申请号：US17783440
申请日：2020-12-17
Applicant: TECHNOPROBE S.P.A.
Inventor： Roberto Crippa , Stefano Felici
CPC classification number: G01R1/0735 , G01R1/06744 , G01R1/06755 , G01R1/07357 , G01R1/07378 , G01R31/2889
Abstract: A probe head for a testing apparatus integrated on a semiconductor wafer is disclosed having a first plurality of contact probes having a first transversal diameter, a second plurality of micro contact probes having a second transversal diameter, smaller than the first transversal diameter, and a flexible membrane having conductive tracks for connecting a first plurality contact probe with a corresponding second plurality micro contact probe. The second plurality contact probes are arranged between the testing apparatus and the flexible membrane, and the second plurality micro contact probes are arranged between the flexible membrane and a semiconductor wafer. The second plurality micro contact probes are configured to abut onto contact pads of a device under test integrated in the semiconductor wafer, with each first plurality contact probe being in contact with a corresponding second plurality micro contact probe through a conductive track of the flexible membrane to connect the device under test with the testing apparatus.
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公开(公告)号：US11867723B2
公开(公告)日：2024-01-09
申请号：US17357833
申请日：2021-06-24
Applicant: Technoprobe S.p.A.
Inventor： Stefano Felici
IPC: G01R1/073
CPC classification number: G01R1/07371
Abstract: A probe head for testing a device under test integrated on a semiconductor wafer includes a plurality of contact probes, each having a first end and a second end, and at least one first lower guide and one second lower guide at the first end. The guides are parallel to each other and have a respective plurality of first and second guide holes for slidingly housing the contact probes. At least one third lower guide is substantially parallel to the first lower guide and to the second lower guide and includes a plurality of third guide holes for slidingly housing the contact probes. The guide holes are disposed in a shifted arrangement to eliminate a scrub movement of the first ends of each contact probe of the probe head.
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公开(公告)号：US11112431B2
公开(公告)日：2021-09-07
申请号：US16537727
申请日：2019-08-12
Applicant: TECHNOPROBE S.P.A.
Inventor： Stefano Felici
Abstract: A probe card of a testing apparatus of electronic devices comprises a testing head, which houses a plurality of contact elements extending along a longitudinal axis between a first end portion and a second end portion, a support plate, onto which the first end portion is adapted to abut, and a flexible membrane. Suitably, the testing head is arranged between the support plate and a first portion of the flexible membrane, which is connected to the support plate through a second portion thereof, the probe card further comprising a plurality of contact tips arranged on a first face of the flexible membrane at the first portion thereof, the second end portion of each contact element being apt to abut onto a second face of the flexible membrane, opposite to the first face, the number and distribution of the contact elements being different to the number and distribution of the contact tips.
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公开(公告)号：US09829508B2
公开(公告)日：2017-11-28
申请号：US14791012
申请日：2015-07-02
Applicant: TECHNOPROBE S.p.A.
Inventor： Stefano Felici , Raffaele Vallauri , Roberto Crippa
CPC classification number: G01R1/07321 , G01R1/07357
Abstract: It is described a testing head for a testing equipment of an electronic device comprising at least one upper guide and a lower guide provided with guide holes, a plurality of contact probes inserted into the guide holes of the upper and lower guides and at least one containment element of the probes being is disposed between the upper and lower guides, each of the contact probes having at least one terminal portion which ends with a contact tip adapted to abut on a respective contact pad of the electronic device to be tested; at least one spacer element sandwiched between the containment element and at least one of the upper and lower guides, the spacer element being removable to adjust a length of the terminal portions of the contact probes projecting from the lower guide.
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公开(公告)号：US20150309076A1
公开(公告)日：2015-10-29
申请号：US14791012
申请日：2015-07-02
Applicant: TECHNOPROBE S.p.A.
Inventor： Stefano Felici , Raffaele Vallauri , Roberto Crippa
IPC: G01R1/073
CPC classification number: G01R1/07321 , G01R1/07357
Abstract: It is described a testing head for a testing equipment of an electronic device comprising at least one upper guide and a lower guide provided with guide holes, a plurality of contact probes inserted into the guide holes of the upper and lower guides and at least one containment element of the probes being is disposed between the upper and lower guides, each of the contact probes having at least one terminal portion which ends with a contact tip adapted to abut on a respective contact pad of the electronic device to be tested; at least one spacer element sandwiched between the containment element and at least one of the upper and lower guides, the spacer element being removable to adjust a length of the terminal portions of the contact probes projecting from the lower guide.
Abstract translation: 描述了一种用于电子设备的测试设备的测试头，其包括至少一个上引导件和设置有引导孔的下引导件，插入到上引导件和下引导件的引导孔中的多个接触探针和至少一个容纳件 探针的元件设置在上引导件和下引导件之间，每个接触探针具有至少一个末端部分，端接部分以接触末端为末端，接触头部适于邻接待测试的电子设备的相应接触焊盘; 夹在所述容纳元件与所述上导向件和所述下导向件中的至少一个之间的至少一个间隔元件，所述间隔元件可移除以调节从所述下引导件突出的所述接触探针的端子部分的长度。
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