SHAPE CHARACTERISTIC VALUE ESTIMATION APPARATUS, SHAPE CHARACTERISTIC VALUE ESTIMATION METHOD, AND STORAGE MEDIUM

    公开(公告)号:US20210201516A1

    公开(公告)日:2021-07-01

    申请号:US17109614

    申请日:2020-12-02

    Abstract: An apparatus includes: a processed-image acquisition part for acquiring a processed image including image information of a surface of a substrate having a target film formed thereon; an estimation part for estimating a shape characteristic value of the target film, by applying an estimation model for estimating the shape characteristic value of the target film to the processed image; an underlying influence model creation part for creating an underlying influence model associated with a correlation between a difference between an estimation result of the shape characteristic value of the target film and a shape characteristic value of the target film acquired without using the estimation model, and information related to a color of a surface of an underlying substrate before the target film is formed, and an estimated-result correction part for correcting the estimation result of the shape characteristic value of the target film based on the underlying influence model.

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