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公开(公告)号：US20240264534A1
公开(公告)日：2024-08-08
申请号：US17767416
申请日：2020-10-23
发明人： Leijie WANG , Yu ZHU , Ming ZHANG , Jitao XU , Rong CHENG , Jiankun HAO , Kaiming YANG , Xin LI , Siqi GAO , Yujiao FAN
IPC分类号： G03F7/00
CPC分类号： G03F7/70408 , G03F7/70025 , G03F7/70191 , G03F7/7085
摘要： Disclosed is a scanning interference photolithography system, comprising a heterodyne optical path, a first interference optical path, a second interference optical path, a motion platform and a control subsystem, wherein a substrate is carried on the motion platform, a displacement measurement interferometer is used to measure the displacement of the motion platform, a first light beam and a second light beam are focused on the substrate for interference exposure; the control subsystem generates instructions according to various measurement information, adjusts angles of corresponding devices or the phase of a light beam, and locks the phase shift of interference exposure fringes of the first light beam and the second light beam. The system has a high precision of fringe pattern locking and a high laser utilization rate, and can be used for producing a large-area high-precision dense grating line gradient periodic grating.
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公开(公告)号：US20180273212A1
公开(公告)日：2018-09-27
申请号：US15760540
申请日：2016-07-18
发明人： Yu ZHU , Anlin CHEN , Ming ZHANG , Kaiming YANG , Rong CHENG
CPC分类号： B64G1/285 , G01C19/24 , H02K5/1282 , H02K16/00 , H02K16/04 , H02K41/031 , H02K2201/18
摘要： Disclosed is a magnetic-fluid momentum sphere, which is used for satellite attitude adjustment. The magnetic-fluid momentum sphere comprises stators and a spherical shell. The stators are classified into three groups, axes of the three groups of stators are orthogonal to each other, each group comprises two stators arranged symmetrically about the center of the spherical shell, and the inner surfaces of the stators are spherical surfaces. The spherical shell is formed by combining two hemispherical shells, the material of the spherical shell is a non-ferromagnetic material, the inner surfaces of the stators closely adhere to the outer surface of the spherical shell, there is no relative movement between the spherical shell and the inner surfaces of the stators, and the spherical shell is filled with magnetic fluid. The magnetic-fluid momentum sphere achieves a small size and mass, low costs, and small coupling among the axes.
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3.发明公开公开(公告)号：US20230280658A1
公开(公告)日：2023-09-07
申请号：US18004083
申请日：2021-07-01
发明人： Leijie WANG , Yu ZHU , Ming ZHANG , Rong CHENG , Yuezhu YANG , Xin LI , Kaiming YANG
CPC分类号： G03F7/7055 , G01B11/002 , G03F7/70408 , G03F7/70025 , G03F7/7015 , G03F7/70208 , G02B27/126 , G02B26/0816
摘要： A device and a method for regulating and controlling an incident angle of a light beam in a laser interference lithography process are disclosed. The device comprises: a beam splitter prism between a first lens and a second lens, a first position detector, a first decoupling lens between the first position detector and the beam splitter prism, a feedback control system connected to the first position detector and a first universal reflecting mirror. The beam splitter prism reflects first incident light passing through the first universal reflecting mirror, the first decoupling lens enables a first reflected light enter into the first position detector, the first position detector measures the light beam position, the feedback control system outputs a control command according to the measurement result to regulate a mirror base of the first universal reflecting mirror, thereby regulating and controlling an incident angle of an exposure light beam.
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公开(公告)号：US20170115580A1
公开(公告)日：2017-04-27
申请号：US15307752
申请日：2015-04-17
发明人： Yu ZHU , Ming ZHANG , Fan ZHI , Zhao LIU , Rong CHENG , Kaiming YANG , Li ZHANG , Huichao QIN , Yanpo ZHAO , Li TIAN , Weinan YE , Jin ZHANG , Wensheng YIN , Haihua MU , Jinchun HU
IPC分类号： G03F7/20
CPC分类号： G03F7/70716 , G03F7/70725 , G03F7/70733 , G03F7/70758 , G03F7/70766 , G03F7/70775
摘要： A coarse motion and fine motion integrated reticle stage driven by a planar motor comprises a movable platform (100) of the reticle stage, a balance mass (200), a drive motor, a mask plate (101, 102), a base (001), a vibration isolation system (500), and a measuring system, wherein, the vibration isolation system is located between the balance mass and the base, and the mask plate is mounted on the movable platform. The drive motor of the movable platform is a moving-iron type planar motor (300). The reticle stage can lower the design complexity of the drive motor of the movable platform. Compared with a linear motor, the planar motor can provide push forces in more directions, the number of motors is reduced, the structure of the movable platform is more compact, the inherent frequency and the control bandwidth of the movable platform are improved, and thus control precision is improved.
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5.发明公开公开(公告)号：US20240319619A1
公开(公告)日：2024-09-26
申请号：US17767420
申请日：2020-10-23
发明人： Yu ZHU , Leijie WANG , Ming ZHANG , Jitao XU , Rong CHENG , Jiankun HAO , Xin LI , Kaiming YANG , Yujiao FAN , Siqi GAO
CPC分类号： G03F7/7085 , G01J9/02 , G02B27/285 , G02B27/286 , G03F7/70408 , G03F7/70825 , G03F7/70975 , G02B5/1857
摘要： Disclosed is a phase measurement device, comprising: a first wave plate, a first polarization splitting prism, a fourth wave plate, a retroreflector, a third wave plate, a reflector, a second wave plate, a polarizer, a second polarization splitting prism, a third polarization splitting prism, a first photoelectric detector, a second photoelectric detector, and a base, wherein the first to third polarization splitting prisms and the first and second photoelectric detectors are fixed on the base; the first to fourth wave plates are respectively arranged around the periphery of the first polarization splitting prism; the polarizer is arranged on an emitting surface of the third polarization splitting prism; the retroreflector is arranged on an outer side of the fourth wave plate; and the reflector is arranged on an outer side of the third wave plate. An interferometric signal is resolved to obtain a measurement light beam phase.
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6.发明公开公开(公告)号：US20240061352A1
公开(公告)日：2024-02-22
申请号：US17767399
申请日：2020-10-23
发明人： Leijie WANG , Yu ZHU , Ming ZHANG , Jitao XU , Rong CHENG , Xin LI , Kaiming YANG , Jinchun HU
CPC分类号： G03F7/7085 , G03F7/2006 , G03F7/70408
摘要： An exposure light beam phase measurement method for laser interference photolithography comprises: separating a measurement light from an exposure light beam and inputting light into a laser phase measurement interferometer to carry out phase measurement on the exposure light beam; inputting a reference light beam homologous with the exposure light beam into the laser phase measurement interferometer; processing the reference light beam to form an interference measurement optical signal; calculating to obtain the phase of the exposure light beam. A laser interference photolithography system using the method comprises a laser phase measurement interferometer, a controller and phase modulators, the laser phase measurement interferometer measures whether the phase of an exposure light beam drifts, the controller controls phase modulators to carry out phase modulation, to achieve locking of exposure stripe phase drift and manufacturing of a high-precision variable-period optical grating.
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公开(公告)号：US20240053683A1
公开(公告)日：2024-02-15
申请号：US17767424
申请日：2020-10-23
发明人： Leijie WANG , Yu ZHU , Ming ZHANG , Jitao XU , Xin LI , Rong CHENG , Kaiming YANG , Jinchun HU
IPC分类号： G03F7/20
CPC分类号： G03F7/2053
摘要： A laser interference photolithography system, comprising a laser device, a first reflector, a grating beam-splitter, a second reflector, a first universal reflector, a first lens, a second universal reflector, a second lens, a beam splitting prism, a control module, an angle measurement module, a third lens and a substrate. The control module comprises a signal processing terminal, a controller, and a driver. The signal processing terminal is connected to the angle measurement module, the controller is connected to both the signal processing terminal and the driver, and the driver is connected to both the first universal reflector and the second universal reflector. The laser emits a laser light that is split into two beams of light by the system, and the two beams of light are focused on the substrate for exposure.
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公开(公告)号：US20220260452A1
公开(公告)日：2022-08-18
申请号：US17610730
申请日：2020-05-13
发明人： Leijie WANG , Ming ZHANG , Yu ZHU , Jiankun HAO , Xin LI , Rong CHENG , Kaiming YANG , Jinchun HU
摘要： Disclosed is a plane grating calibration system, comprising an optical subsystem, a frame , first vibration isolator, a vacuum chuck, a workpiece stage, second vibration isolator, a base platform and a controller; the optical subsystem is mounted on the frame, and the frame is isolated from vibration by the first vibration isolator; the vacuum chuck is rotatably mounted on the workpiece stage, the workpiece stage is positioned on the base platform, and the base platform is isolated from vibration by the second vibration isolator. A displacement interferometer is integrated into the optical subsystem, the entire optical subsystem adopts a method of sharing a light source, thereby avoiding the problems of low wavelength precision and poor coherence of separate light sources.
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公开(公告)号：US20180170581A1
公开(公告)日：2018-06-21
申请号：US15568581
申请日：2016-03-15
发明人： Ming ZHANG , Yu ZHU , Anlin CHEN , Kaiming YANG , Rong CHENG , Feng LIU , Jinchun HU , Chuxiong HU , Dengfeng XU , Haihua MU
摘要： A magnetic levitation reaction sphere includes a spherical-housing-shaped rotor and three groups of stators. Each group includes two stators using the sphere center of the rotor as a symcenter. Axes of the three groups are mutually orthogonal. Each stator comprises a stator core and a coil array. An air gap is reserved between an inner surface of each stator core and the outer surface of the rotor. Through grooves are radially formed in the stator cores. The coil arrays are disc-type motor stator windings. Two effective sides of each coil in each coil array are respectively placed in two through grooves of the corresponding stator core. The magnetic levitation reaction sphere has low cost; levitation and rotation driving are integrated; the magnetic levitation reaction sphere has a simple and compact structure, a small size and a low mass, and relates to inherent stable levitation; and the levitation control is simple.
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10.发明申请公开(公告)号：US20170052461A1
公开(公告)日：2017-02-23
申请号：US15307797
申请日：2015-04-17
发明人： Ming ZHANG , Yu ZHU , Fan ZHI , Rong CHENG , Kaiming YANG , Zhao LIU , Li ZHANG , Huichao QIN , Yanpo ZHAO , Li TIAN , Weinan YE , Jin ZHANG , Wensheng YIN , Haihua MU , Jinchun HU
IPC分类号： G03F7/20
CPC分类号： G03F7/70758 , G03F7/20 , G03F7/70716 , G03F7/70766 , G03F7/70775
摘要： A magnetically suspended coarse motion and fine motion integrated reticle stage driven by a planar motor comprises a movable platform (100), a balance mass (200), a drive motor, a mask plate (101), a base (001), a vibration isolation system (500), and a measuring system, wherein, the vibration isolation system is located between the balance mass and the base, and the mask plate is mounted on the movable platform. The drive motor of the movable platform is a moving-iron type planar motor (300). The reticle stage can lower the design complexity of the drive motor of the movable platform. Compared with a linear motor, the planar motor can provide push forces in more directions, the number of motors is reduced, the structure of the movable platform is more compact, the inherent frequency and the control bandwidth of the movable platform are improved, and thus control precision is improved.
摘要翻译： 由平面电动机驱动的磁悬浮的粗略运动和精细运动的集成标线片台包括可移动平台（100），平衡块（200），驱动马达，掩模板（101），基座（001），振动 隔离系统（500）和测量系统，其中，隔振系统位于平衡块和基座之间，并且掩模板安装在可移动平台上。 可移动平台的驱动马达是移动式平面马达（300）。 标线台可以降低可移动平台的驱动电机的设计复杂性。 与线性电动机相比，平面电机可以在更多方向上提供推力，减少电机数量，可移动平台的结构更紧凑，提高了可移动平台的固有频率和控制带宽，从而 控制精度提高。
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