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公开(公告)号：US20240264534A1
公开(公告)日：2024-08-08
申请号：US17767416
申请日：2020-10-23
发明人： Leijie WANG , Yu ZHU , Ming ZHANG , Jitao XU , Rong CHENG , Jiankun HAO , Kaiming YANG , Xin LI , Siqi GAO , Yujiao FAN
IPC分类号： G03F7/00
CPC分类号： G03F7/70408 , G03F7/70025 , G03F7/70191 , G03F7/7085
摘要： Disclosed is a scanning interference photolithography system, comprising a heterodyne optical path, a first interference optical path, a second interference optical path, a motion platform and a control subsystem, wherein a substrate is carried on the motion platform, a displacement measurement interferometer is used to measure the displacement of the motion platform, a first light beam and a second light beam are focused on the substrate for interference exposure; the control subsystem generates instructions according to various measurement information, adjusts angles of corresponding devices or the phase of a light beam, and locks the phase shift of interference exposure fringes of the first light beam and the second light beam. The system has a high precision of fringe pattern locking and a high laser utilization rate, and can be used for producing a large-area high-precision dense grating line gradient periodic grating.
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公开(公告)号：US20230366667A1
公开(公告)日：2023-11-16
申请号：US18246670
申请日：2021-09-14
发明人： Yu ZHU , Leijie WANG , Ziwen GUO , Ming ZHANG , Rong CHENG , Weinan YE , Zhaokui CHENG
IPC分类号： G01B9/02002
CPC分类号： G01B9/02002 , G01B2290/70
摘要： Disclosed is a heterodyne grating interferometry system based on secondary diffraction, including a single-frequency laser, an input optical fiber, an acousto-optic modulator, a reading head, and a measurement grating, an output optical fiber, a photoelectric conversion unit and an electronic signal processing unit, wherein the single-frequency laser emits a single-frequency laser, which enters the acousto-optic modulator through the input optical fiber, and is divided into a reference light and measurement light to be input to the reading head, wherein the reading head and the measurement grating convert the reference light and measurement light into a reference interference optical signal and a measurement interference optical signal and send them to the photoelectric conversion unit through the output optical fiber and wherein the photoelectric conversion unit converts the measurement interference optical signal and the reference interference optical signal into a measurement interference electrical signal and a reference interference electrical signal.
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公开(公告)号：US20180273212A1
公开(公告)日：2018-09-27
申请号：US15760540
申请日：2016-07-18
发明人： Yu ZHU , Anlin CHEN , Ming ZHANG , Kaiming YANG , Rong CHENG
CPC分类号： B64G1/285 , G01C19/24 , H02K5/1282 , H02K16/00 , H02K16/04 , H02K41/031 , H02K2201/18
摘要： Disclosed is a magnetic-fluid momentum sphere, which is used for satellite attitude adjustment. The magnetic-fluid momentum sphere comprises stators and a spherical shell. The stators are classified into three groups, axes of the three groups of stators are orthogonal to each other, each group comprises two stators arranged symmetrically about the center of the spherical shell, and the inner surfaces of the stators are spherical surfaces. The spherical shell is formed by combining two hemispherical shells, the material of the spherical shell is a non-ferromagnetic material, the inner surfaces of the stators closely adhere to the outer surface of the spherical shell, there is no relative movement between the spherical shell and the inner surfaces of the stators, and the spherical shell is filled with magnetic fluid. The magnetic-fluid momentum sphere achieves a small size and mass, low costs, and small coupling among the axes.
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4.发明公开公开(公告)号：US20230280658A1
公开(公告)日：2023-09-07
申请号：US18004083
申请日：2021-07-01
发明人： Leijie WANG , Yu ZHU , Ming ZHANG , Rong CHENG , Yuezhu YANG , Xin LI , Kaiming YANG
CPC分类号： G03F7/7055 , G01B11/002 , G03F7/70408 , G03F7/70025 , G03F7/7015 , G03F7/70208 , G02B27/126 , G02B26/0816
摘要： A device and a method for regulating and controlling an incident angle of a light beam in a laser interference lithography process are disclosed. The device comprises: a beam splitter prism between a first lens and a second lens, a first position detector, a first decoupling lens between the first position detector and the beam splitter prism, a feedback control system connected to the first position detector and a first universal reflecting mirror. The beam splitter prism reflects first incident light passing through the first universal reflecting mirror, the first decoupling lens enables a first reflected light enter into the first position detector, the first position detector measures the light beam position, the feedback control system outputs a control command according to the measurement result to regulate a mirror base of the first universal reflecting mirror, thereby regulating and controlling an incident angle of an exposure light beam.
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公开(公告)号：US20170115580A1
公开(公告)日：2017-04-27
申请号：US15307752
申请日：2015-04-17
发明人： Yu ZHU , Ming ZHANG , Fan ZHI , Zhao LIU , Rong CHENG , Kaiming YANG , Li ZHANG , Huichao QIN , Yanpo ZHAO , Li TIAN , Weinan YE , Jin ZHANG , Wensheng YIN , Haihua MU , Jinchun HU
IPC分类号： G03F7/20
CPC分类号： G03F7/70716 , G03F7/70725 , G03F7/70733 , G03F7/70758 , G03F7/70766 , G03F7/70775
摘要： A coarse motion and fine motion integrated reticle stage driven by a planar motor comprises a movable platform (100) of the reticle stage, a balance mass (200), a drive motor, a mask plate (101, 102), a base (001), a vibration isolation system (500), and a measuring system, wherein, the vibration isolation system is located between the balance mass and the base, and the mask plate is mounted on the movable platform. The drive motor of the movable platform is a moving-iron type planar motor (300). The reticle stage can lower the design complexity of the drive motor of the movable platform. Compared with a linear motor, the planar motor can provide push forces in more directions, the number of motors is reduced, the structure of the movable platform is more compact, the inherent frequency and the control bandwidth of the movable platform are improved, and thus control precision is improved.
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6.发明公开公开(公告)号：US20240319619A1
公开(公告)日：2024-09-26
申请号：US17767420
申请日：2020-10-23
发明人： Yu ZHU , Leijie WANG , Ming ZHANG , Jitao XU , Rong CHENG , Jiankun HAO , Xin LI , Kaiming YANG , Yujiao FAN , Siqi GAO
CPC分类号： G03F7/7085 , G01J9/02 , G02B27/285 , G02B27/286 , G03F7/70408 , G03F7/70825 , G03F7/70975 , G02B5/1857
摘要： Disclosed is a phase measurement device, comprising: a first wave plate, a first polarization splitting prism, a fourth wave plate, a retroreflector, a third wave plate, a reflector, a second wave plate, a polarizer, a second polarization splitting prism, a third polarization splitting prism, a first photoelectric detector, a second photoelectric detector, and a base, wherein the first to third polarization splitting prisms and the first and second photoelectric detectors are fixed on the base; the first to fourth wave plates are respectively arranged around the periphery of the first polarization splitting prism; the polarizer is arranged on an emitting surface of the third polarization splitting prism; the retroreflector is arranged on an outer side of the fourth wave plate; and the reflector is arranged on an outer side of the third wave plate. An interferometric signal is resolved to obtain a measurement light beam phase.
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公开(公告)号：US20210262834A1
公开(公告)日：2021-08-26
申请号：US17257173
申请日：2019-06-26
发明人： Ming ZHANG , Yu ZHU , Fuzhong YANG , Leijie WANG , Rong CHENG , Xin LI , Weinan YE , Jinchun HU
摘要： A five-degree-of-freedom heterodyne grating interferometry system comprises: a single-frequency laser for emitting single-frequency laser light, the single-frequency laser light can be split into a reference light beam and a measurement light beam; an interferometer lens set and a measurement grating for converting the reference light and the measurement light into a reference interference signal and a measurement interference signal; and multiple optical fiber bundles, respectively receiving the measurement interference signal and the reference interference signal, wherein each optical fiber bundle has multiple multi-mode optical fibers respectively receiving interference signals at different positions on the same plane. The measurement system is not over-sensitive to the environment, is small and light, and is easy to arrange. Six-degree-of-freedom ultra-precision measurement can be achieved by arranging multiple five-degree-of-freedom interferometry systems and using redundant information, thereby meeting the needs of a lithography machine workpiece table for six-degree-of-freedom position and orientation measurement.
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公开(公告)号：US20210164772A1
公开(公告)日：2021-06-03
申请号：US17257219
申请日：2019-06-26
发明人： Yu ZHU , Ming ZHANG , Leijie WANG , Fuzhong YANG , Rong CHENG , Xin LI , Weinan YE , Jinchun HU
摘要： A two-degree-of-freedom heterodyne grating interferometry measurement system, comprising: a single-frequency laser device for emitting a single-frequency laser, and the single-frequency laser can be split into a beam of reference light and a beam of measurement light; an interferometer mirror group and a measurement grating for forming a reference interference signal and a measurement interference signal from the reference light and the measurement light; and a receiving optical fiber for receiving the reference interference signal and the measurement interference signal, wherein a core diameter of the receiving optical fiber is smaller than a width of an interference fringe of the reference interference signal and the measurement interference signal, so that the receiving optical fiber receives a part of the reference interference signal and the measurement interference signal. The measurement system has advantages of insensitivity to grating rotation angle error, small volume, light weight, and a facilitating arrangement.
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9.发明公开公开(公告)号：US20240061352A1
公开(公告)日：2024-02-22
申请号：US17767399
申请日：2020-10-23
发明人： Leijie WANG , Yu ZHU , Ming ZHANG , Jitao XU , Rong CHENG , Xin LI , Kaiming YANG , Jinchun HU
CPC分类号： G03F7/7085 , G03F7/2006 , G03F7/70408
摘要： An exposure light beam phase measurement method for laser interference photolithography comprises: separating a measurement light from an exposure light beam and inputting light into a laser phase measurement interferometer to carry out phase measurement on the exposure light beam; inputting a reference light beam homologous with the exposure light beam into the laser phase measurement interferometer; processing the reference light beam to form an interference measurement optical signal; calculating to obtain the phase of the exposure light beam. A laser interference photolithography system using the method comprises a laser phase measurement interferometer, a controller and phase modulators, the laser phase measurement interferometer measures whether the phase of an exposure light beam drifts, the controller controls phase modulators to carry out phase modulation, to achieve locking of exposure stripe phase drift and manufacturing of a high-precision variable-period optical grating.
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公开(公告)号：US20240053683A1
公开(公告)日：2024-02-15
申请号：US17767424
申请日：2020-10-23
发明人： Leijie WANG , Yu ZHU , Ming ZHANG , Jitao XU , Xin LI , Rong CHENG , Kaiming YANG , Jinchun HU
IPC分类号： G03F7/20
CPC分类号： G03F7/2053
摘要： A laser interference photolithography system, comprising a laser device, a first reflector, a grating beam-splitter, a second reflector, a first universal reflector, a first lens, a second universal reflector, a second lens, a beam splitting prism, a control module, an angle measurement module, a third lens and a substrate. The control module comprises a signal processing terminal, a controller, and a driver. The signal processing terminal is connected to the angle measurement module, the controller is connected to both the signal processing terminal and the driver, and the driver is connected to both the first universal reflector and the second universal reflector. The laser emits a laser light that is split into two beams of light by the system, and the two beams of light are focused on the substrate for exposure.
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