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23 条记录 (耗时 0.03 秒)

    Method and device for preparing cleaning solution
    2.
    发明授权
    Method and device for preparing cleaning solution 失效
    清洗液制备方法及装置

    公开(公告)号：US06086057A

    公开(公告)日：2000-07-11

    申请号：US103573

    申请日：1998-06-24

    申请人： Kenichi Mitsumori ,  Eui-Yeol Oh ,  Yasuhiko Kasama ,  Tadahiro Ohmi ,  Takashi Imaoka

    发明人： Kenichi Mitsumori ,  Eui-Yeol Oh ,  Yasuhiko Kasama ,  Tadahiro Ohmi ,  Takashi Imaoka

    IPC分类号： B08B3/08 ,  B01F1/00 ,  B01F3/04 ,  C11D7/04 ,  C11D11/00 ,  C11D17/08

    CPC分类号： B01F3/04985

    摘要： A cleaning solution preparation device includes a deionized water supply source, a gas supply source, a gas-dissolving unit, and a gas supply pressure controller. The gas supply source supplies any of an oxidative gas, a reductive gas, an inert gas, a mixed gas of an oxidative gas and an inert gas, or a mixed gas of a reductive gas and an inert gas. The gas-dissolving unit dissolves the gas supplied from the gas supply source in deionized water supplied from the deionized water supply source to supply a gas-dissolved cleaning solution to objects to be cleaned. The gas supply pressure controller controls the pressure of the supplied gas at a value exceeding the atmospheric pressure when dissolving the gas in the deionized water.

    摘要翻译： 清洗液制备装置包括去离子水供应源，气体供应源，气体溶解单元和气体供应压力控制器。 气体供给源供给氧化性气体，还原性气体，惰性气体，氧化性气体和惰性气体的混合气体，还原气体和惰性气体的混合气体。 气体溶解单元将从去离子水供给源供给的去离子水中的从气体供给源供给的气体溶解，将气体溶解的清洗液供给到待清洗对象物。 当将气体溶解在去离子水中时，气体供给压力控制器将供给气体的压力控制在超过大气压的值。

    Method for preparing cleaning solution
    4.
    发明授权
    Method for preparing cleaning solution 有权
    清洗液的制备方法

    公开(公告)号：US06509305B1

    公开(公告)日：2003-01-21

    申请号：US09570575

    申请日：2000-05-12

    申请人： Kenichi Mitsumori ,  Eui-Yeol Oh ,  Yasuhiko Kasama ,  Tadahiro Ohmi ,  Takashi Imaoka

    发明人： Kenichi Mitsumori ,  Eui-Yeol Oh ,  Yasuhiko Kasama ,  Tadahiro Ohmi ,  Takashi Imaoka

    IPC分类号： C11D1100

    CPC分类号： B01F3/04985

    摘要： Deionized water from a deionized water source (21) for electrolysis is supplied by a pressurizing pump (20) to an electrolyzer (2) to obtain a hydrogen gas and ozone gas by means of electrolysis. The pressures of these gasses are maintained at not less than the atmospheric pressure. These gasses at a pressure of the atmospheric pressure or more are dissolved in high-purity water in gas dissolving units (6,7) to obtain ozone water and hydrogen water respectively. These ozone water and hydrogen water are introduced into mixer (8,9) to adjust pH respectively. In this way, highly-concentrated, gas dissolved cleaning solution is prepared in a short period of time.

    摘要翻译： 来自用于电解的去离子水源（21）的去离子水通过加压泵（20）供给电解槽（2），通过电解获得氢气和臭氧气体。 这些气体的压力保持在不低于大气压力。 在大气压或更高的压力下将这些气体溶解在气体溶解单元（6,7）中的高纯度水中，分别得到臭氧水和氢气水。 将这些臭氧水和氢水引入混合器（8,9）中以分别调节pH。 以这种方式，在短时间内制备高浓度，气体溶解的清洁溶液。

    Liquid feed nozzle, wet treatment apparatus and wet treatment method
    5.
    再颁专利
    Liquid feed nozzle, wet treatment apparatus and wet treatment method 失效
    液体进料喷嘴，湿式处理设备和湿法处理方法

    公开(公告)号：USRE42420E1

    公开(公告)日：2011-06-07

    申请号：US11043890

    申请日：2005-01-26

    申请人： Kenichi Mitsumori ,  Yasuhiko Kasama ,  Akira Abe ,  Oh Eui Yeol ,  Tadahiro Ohmi ,  Takashi Imaoka ,  Masayuki Toda

    发明人： Kenichi Mitsumori ,  Yasuhiko Kasama ,  Akira Abe ,  Oh Eui Yeol ,  Tadahiro Ohmi ,  Takashi Imaoka ,  Masayuki Toda

    IPC分类号： B08B3/04 ,  B08B3/12

    CPC分类号： H01L21/6708 ,  B08B3/022 ,  B08B3/041 ,  B08B3/123 ,  B08B2203/0288 ,  H01L21/67051

    摘要： The wet treatment liquid feed nozzle of the invention comprises an introducing path having an introducing port, a discharging path having a discharging port, a crossing section formed by causing the introducing path and the discharging path to cross at the other ends thereof, a nozzle assembly having an opening section opening to an object to be treated, provided at the crossing section, and pressure control means, for controlling the difference between the pressure of the wet treatment liquid in contact with the object to be treated and the atmospheric pressure provided at least on the discharging path side so that the wet treatment liquid having been in contact with the object to be treated via the opening section does not flow to outside the discharging path.

    摘要翻译： 本发明的湿式处理液体进料喷嘴包括一个具有一个引入口的引入通道，一个具有排出口的排出通道，一个通过使引入通道和排放通道在其另一端处交叉而形成的交叉部分，一个喷嘴组件 具有开口部分，设置在交叉部分处的待处理对象;以及压力控制装置，用于控制与待处理物体接触的湿处理液体的压力与至少提供的大气压力之间的差异 在放电路径侧，使得经由开口部分与待处理物体接触的湿处理液体不会流到排出路径的外部。

    Liquid feed nozzle, wet treatment, apparatus and wet treatment method
    9.
    再颁专利
    Liquid feed nozzle, wet treatment, apparatus and wet treatment method 失效
    液体进料喷嘴，湿式处理，设备和湿法处理方法

    公开(公告)号：USRE42566E1

    公开(公告)日：2011-07-26

    申请号：US10439658

    申请日：2003-05-15

    申请人： Kenichi Mitsumori ,  Yasuhiko Kasama ,  Akira Abe ,  Oh Eui Yeol ,  Tadahiro Ohmi ,  Takashi Imaoka ,  Masayuki Toda

    发明人： Kenichi Mitsumori ,  Yasuhiko Kasama ,  Akira Abe ,  Oh Eui Yeol ,  Tadahiro Ohmi ,  Takashi Imaoka ,  Masayuki Toda

    IPC分类号： B08B3/12

    CPC分类号： H01L21/6708 ,  B08B3/022 ,  B08B3/041 ,  B08B3/123 ,  B08B2203/0288 ,  H01L21/67051

    摘要： The wet treatment liquid feed nozzle of the invention comprises an introducing path 10 having an introducing port 7, a discharging path 12 having a discharging port 15, a crossing section 14 formed by causing the introducing path 10 and the discharging path 12 to cross at the other ends thereof, a nozzle assembly 50 having an opening section 6 opening to an object to be treated 1, provided at the crossing section 14, and pressure control means 13, for controlling the difference between the pressure of the wet treatment liquid in contact with the object to be treated 1 and the atmospheric pressure provided at least on the discharging path 12 side so that the wet treatment liquid having been in contact with the object to be treated 1 via the opening section 6 does not flow to outside the discharging path 12.

    摘要翻译： 本发明的湿处理液体供给喷嘴包括具有引入口7的引入路径10，具有排出口15的排出路径12，通过使引入路径10和排出路径12在 设置在交叉部分14处的具有开口部分6的开口部分6的喷嘴组件50，以及压力控制装置13，用于控制接触到的湿处理液体的压力之间的差异 待处理物体1和至少设置在排出路径12侧的大气压力，使得经由开口部6与待处理物体1接触的湿处理液体不流到排出路径12的外部 。