摘要:
A method for inspecting a piezoelectric element includes first-inspection-signal application step of applying to the piezoelectric element a first inspection signal Vp(1) having a first predetermined voltage waveform; first-characteristic-value measurement step of measuring, as a first characteristic value, an electrical characteristic value of the piezoelectric element after application of the first inspection signal; second-inspection-signal application step of applying to the piezoelectric element a second inspection signal Vp(2) having a second predetermined voltage waveform and an electrical power greater than that of the first inspection signal; second-characteristic-value measurement step of measuring, as a second characteristic value, the electrical characteristic value of the piezoelectric element after application of the second inspection signal; and anomaly determination step of determining whether or not the piezoelectric element is anomalous on the basis of a value corresponding to the difference between the measured second characteristic value and the measured first characteristic value.
摘要:
A method for inspecting a piezoelectric element includes first-inspection-signal application step of applying to the piezoelectric element a first inspection signal Vp(1) having a first predetermined voltage waveform; first-characteristic-value measurement step of measuring, as a first characteristic value, an electrical characteristic value of the piezoelectric element after application of the first inspection signal; second-inspection-signal application step of applying to the piezoelectric element a second inspection signal Vp(2) having a second predetermined voltage waveform and an electrical power greater than that of the first inspection signal; second-characteristic-value measurement step of measuring, as a second characteristic value, the electrical characteristic value of the piezoelectric element after application of the second inspection signal; and anomaly determination step of determining whether or not the piezoelectric element is anomalous on the basis of a value corresponding to the difference between the measured second characteristic value and the measured first characteristic value.
摘要:
A method for inspecting a piezoelectric element includes first-inspection-signal application step of applying to the piezoelectric element a first inspection signal Vp(1) having a first predetermined voltage waveform; first-characteristic-value measurement step of measuring, as a first characteristic value, an electrical characteristic value of the piezoelectric element after application of the first inspection signal; second-inspection-signal application step of applying to the piezoelectric element a second inspection signal Vp(2) having a second predetermined voltage waveform and an electrical power greater than that of the first inspection signal; second-characteristic-value measurement step of measuring, as a second characteristic value, the electrical characteristic value of the piezoelectric element after application of the second inspection signal; and anomaly determination step of determining whether or not the piezoelectric element is anomalous on the basis of a value corresponding to the difference between the measured second characteristic value and the measured first characteristic value.
摘要:
In an inspecting method of a piezoelectric/electrostrictive actuator having a piezoelectric/electrostrictive element and two or more electrodes, the frequency response characteristics is picked up when a vibration is given to the piezoelectric/electrostrictive actuator, and the amount of displacement of the piezoelectric/electrostrictive actuator is predicted by the frequency response characteristics. The piezoelectric/electrostrictive actuator is precisely inspected without dissolution and destruction and without actual driving as a product.
摘要:
In an inspecting method of a piezoelectric/electrostrictive actuator having a piezoelectric/electrostrictive element and two or more electrodes, the frequency response characteristics is picked up when a vibration is given to the piezoelectric/electrostrictive actuator, and the amount of displacement of the piezoelectric/electrostrictive actuator is predicted by the frequency response characteristics. The piezoelectric/electrostrictive actuator is precisely inspected without dissolution and destruction and without actual driving as a product.
摘要:
Disclosed is a piezoelectric/electrostrictive membrane type sensor 20 provided with a ceramic base body 1 and a piezoelectric/electrostrictive element 12. The ceramic base body is provided with a thin diaphragm portion 3, a thick portion 2 and a cavity 10 formed by the portions. The piezoelectric/electrostrictive element is arranged on the ceramic base body 1 and includes a piezoelectric/electrostrictive body 5, and an upper electrode 6 and a lower electrode 4 sandwiching the piezoelectric/electrostrictive body 5. In the piezoelectric/electrostrictive membrane type sensor 20, the piezoelectric/electrostrictive body 5 contains an alkaline metal or an alkaline earth metal, and the upper electrode 6 and the lower electrode 4 contain gold or platinum. When there is a change in the atmosphere at a place where the sensor is used, the sensor copes with such change and at least prevents continuation of low-quality measurement.
摘要:
A method for manufacturing a piezoelectric/electrostrictive element includes a step of subjecting the piezoelectric/electrostrictive film to a heat treatment and a polarization treatment after the film is allowed to stand until the value of an electric constant has converged after the heat treatment. The piezoelectric/electrostrictive element manufactured in this method has small stress remaining in the piezoelectric/electrostrictive film, and predetermined performance regarding, for example, a displacement amount, a displacement-generating force, and an electric power efficiency (consumed electric power) as a piezoelectric/electrostrictive element (piezoelectric/electrostrictive film) is never spoiled.
摘要:
A lower electrode 4 and an auxiliary electrode 8, a piezoelectric/electrostrictive film 5, and an upper electrode 6 are sequentially arranged in layers on a substrate 1. The lower electrode 4 is continuously formed in a region ranging from a first portion of the thick-walled portion 2 to a thin-walled diaphragm portion 3. The auxiliary electrode 8 is continuously formed in a region ranging from a second portion of the thick-walled portion 2 opposite the first portion to a position on the thin-walled diaphragm portion 3, the position being separated from the lower electrode 4. The upper electrode 6 is formed in such a manner as to overlie the piezoelectric/electrostrictive film 5 and the auxiliary electrode 8. Furthermore, a connection electrode 20 is provided for electrically connecting the upper electrode 6 and the auxiliary electrode 8. Thus, a plurality of paths are provided for electrically connecting the upper electrode 6 and the auxiliary electrode 8. Therefore, even when connection through a certain path is cut off due to fracture of a portion of the upper electrode 6 caused by deterioration in insulating performance of the piezoelectric/electrostrictive film 5, electrical connection between the upper electrode 6 and the auxiliary electrode 8 can be maintained through the remaining path(s).
摘要:
A method for manufacturing a piezoelectric/electrostrictive element includes a step of subjecting the piezoelectric/electrostrictive film to a heat treatment and a polarization treatment after the film is allowed to stand until the value of an electric constant has converged after the heat treatment. The piezoelectric/electrostrictive element manufactured in this method has small stress remaining in the piezoelectric/electrostrictive film, and predetermined performance regarding, for example, a displacement amount, a displacement-generating force, and an electric power efficiency (consumed electric power) as a piezoelectric/electrostrictive element (piezoelectric/electrostrictive film) is never spoiled.
摘要:
A piezoelectric/electrostrictive membrane type sensor is provided with a ceramic base body and a piezoelectric/electrostrictive element. The ceramic base body includes a thin diaphragm portion, a thick portion and a cavity formed by the portions. The piezoelectric/electrostrictive element is arranged on the ceramic base body and also includes a piezoelectric/electrostrictive body, and an upper electrode and a lower electrode sandwiching the piezoelectric/electrostrictive body. Further, the piezoelectric/electrostrictive body contains an alkaline metal or an alkaline earth metal, with the upper electrode and the lower electrode containing gold or platinum. When there is a change in the atmosphere at a place where the sensor is used, the sensor copes with such change and at least prevents the continuation of a low-quality measurement.