公开(公告)号：US20080098582A1

公开(公告)日：2008-05-01

申请号：US11962863

申请日：2007-12-21

申请人： Takao OHNISHI ,  Takashi Wada ,  Tomohiro Yamada ,  Makoto Tani

发明人： Takao OHNISHI ,  Takashi Wada ,  Tomohiro Yamada ,  Makoto Tani

IPC分类号： H04R17/00 ,  H01L41/00

CPC分类号： H01L41/0973 ,  H01L41/0475 ,  H01L41/257 ,  Y10T29/42 ,  Y10T29/49155 ,  Y10T29/49163

摘要： A method for manufacturing a piezoelectric/electrostrictive element includes a step of subjecting the piezoelectric/electrostrictive film to a heat treatment and a polarization treatment after the film is allowed to stand until the value of an electric constant has converged after the heat treatment. The piezoelectric/electrostrictive element manufactured in this method has small stress remaining in the piezoelectric/electrostrictive film, and predetermined performance regarding, for example, a displacement amount, a displacement-generating force, and an electric power efficiency (consumed electric power) as a piezoelectric/electrostrictive element (piezoelectric/electrostrictive film) is never spoiled.

摘要翻译： 压电/电致伸缩元件的制造方法包括在使膜静置直到电常数在热处理后收敛的状态下，对压电/电致伸缩薄膜进行热处理和极化处理的步骤。 通过该方法制造的压电/电致伸缩元件在压电/电致伸缩膜中残留的应力小，例如在位移量，位移产生力和电力效率（消耗电力）中作为 压电/电致伸缩元件（压电/电致伸缩膜）从未被破坏。

公开(公告)号：US08291558B2

公开(公告)日：2012-10-23

申请号：US11962863

申请日：2007-12-21

申请人： Takao Ohnishi ,  Takashi Wada ,  Tomohiro Yamada ,  Makoto Tani

发明人： Takao Ohnishi ,  Takashi Wada ,  Tomohiro Yamada ,  Makoto Tani

IPC分类号： H04R17/10 ,  C04B35/64

CPC分类号： H01L41/0973 ,  H01L41/0475 ,  H01L41/257 ,  Y10T29/42 ,  Y10T29/49155 ,  Y10T29/49163

摘要： A method for manufacturing a piezoelectric/electrostrictive element includes a step of subjecting the piezoelectric/electrostrictive film to a heat treatment and a polarization treatment after the film is allowed to stand until the value of an electric constant has converged after the heat treatment. The piezoelectric/electrostrictive element manufactured in this method has small stress remaining in the piezoelectric/electrostrictive film, and predetermined performance regarding, for example, a displacement amount, a displacement-generating force, and an electric power efficiency (consumed electric power) as a piezoelectric/electrostrictive element (piezoelectric/electrostrictive film) is never spoiled.

摘要翻译： 压电/电致伸缩元件的制造方法包括在使膜静置直到电常数在热处理后收敛的状态下，对压电/电致伸缩薄膜进行热处理和极化处理的步骤。 通过该方法制造的压电/电致伸缩元件在压电/电致伸缩膜中残留的应力小，例如在位移量，位移产生力和电力效率（消耗电力）中作为 压电/电致伸缩元件（压电/电致伸缩膜）从未被破坏。

公开(公告)号：US20090095072A1

公开(公告)日：2009-04-16

申请号：US12331694

申请日：2008-12-10

申请人： Hideki Shimizu ,  Takao Ohnishi ,  Tomohiro Yamada

发明人： Hideki Shimizu ,  Takao Ohnishi ,  Tomohiro Yamada

IPC分类号： G01N9/00 ,  H01L41/04 ,  H01L41/22

CPC分类号： G01N29/2462 ,  G01N11/16 ,  G01N29/022 ,  G01N33/0042 ,  G01N33/2835 ,  G01N2291/014 ,  G01N2291/02809 ,  G01N2291/02818 ,  H01L41/0477 ,  H01L41/0973 ,  H01L41/187 ,  H01L41/257 ,  H01L41/314 ,  Y10T29/42

摘要： Disclosed is a piezoelectric/electrostrictive membrane type sensor 20 provided with a ceramic base body 1 and a piezoelectric/electrostrictive element 12. The ceramic base body is provided with a thin diaphragm portion 3, a thick portion 2 and a cavity 10 formed by the portions. The piezoelectric/electrostrictive element is arranged on the ceramic base body 1 and includes a piezoelectric/electrostrictive body 5, and an upper electrode 6 and a lower electrode 4 sandwiching the piezoelectric/electrostrictive body 5. In the piezoelectric/electrostrictive membrane type sensor 20, the piezoelectric/electrostrictive body 5 contains an alkaline metal or an alkaline earth metal, and the upper electrode 6 and the lower electrode 4 contain gold or platinum. When there is a change in the atmosphere at a place where the sensor is used, the sensor copes with such change and at least prevents continuation of low-quality measurement.

摘要翻译： 公开了一种设置有陶瓷基体1和压电/电致伸缩元件12的压电/电致伸缩膜型传感器20.陶瓷基体设置有薄膜部分3，厚部分2和由部分形成的空腔10 。 压电/电致伸缩元件设置在陶瓷基体1上，并且包括压电/电致伸缩体5和夹持压电/电致伸缩体5的上电极6和下电极4.在压电/电致伸缩膜型传感器20中， 压电/电致伸缩体5含有碱金属或碱土金属，上电极6和下电极4含有金或铂。 当在使用传感器的地方存在气氛变化时，传感器处理这种变化，并且至少防止继续进行低质量的测量。

公开(公告)号：US07525324B2

公开(公告)日：2009-04-28

申请号：US11856351

申请日：2007-09-17

申请人： Takao Ohnishi ,  Tomohiro Yamada ,  Takatoshi Nehagi

发明人： Takao Ohnishi ,  Tomohiro Yamada ,  Takatoshi Nehagi

IPC分类号： G01R29/22

CPC分类号： G01R29/22 ,  B41J2/0451 ,  B41J2/04513 ,  B41J2/04541 ,  B41J2/04581 ,  B41J2/14201 ,  H01L41/257

摘要： A method for inspecting a piezoelectric element includes first-inspection-signal application step of applying to the piezoelectric element a first inspection signal Vp(1) having a first predetermined voltage waveform; first-characteristic-value measurement step of measuring, as a first characteristic value, an electrical characteristic value of the piezoelectric element after application of the first inspection signal; second-inspection-signal application step of applying to the piezoelectric element a second inspection signal Vp(2) having a second predetermined voltage waveform and an electrical power greater than that of the first inspection signal; second-characteristic-value measurement step of measuring, as a second characteristic value, the electrical characteristic value of the piezoelectric element after application of the second inspection signal; and anomaly determination step of determining whether or not the piezoelectric element is anomalous on the basis of a value corresponding to the difference between the measured second characteristic value and the measured first characteristic value.

摘要翻译： 一种用于检查压电元件的方法包括：第一检查信号施加步骤，向所述压电元件施加具有第一预定电压波形的第一检查信号Vp（1）; 第一特征值测量步骤，在施加第一检查信号之后测量压电元件的电特性值作为第一特征值; 第二检查信号施加步骤，向所述压电元件施加具有大于所述第一检查信号的第二预定电压波形和电功率的第二检查信号Vp（2） 第二特征值测量步骤，在施加第二检查信号之后测量压电元件的电特性值作为第二特征值; 以及异常判定步骤，基于与所测量的第二特征值和测量的第一特征值之间的差对应的值，确定压电元件是否异常。

公开(公告)号：US07812506B2

公开(公告)日：2010-10-12

申请号：US12331694

申请日：2008-12-10

申请人： Hideki Shimizu ,  Takao Ohnishi ,  Tomohiro Yamada

发明人： Hideki Shimizu ,  Takao Ohnishi ,  Tomohiro Yamada

IPC分类号： H01L41/08

CPC分类号： G01N29/2462 ,  G01N11/16 ,  G01N29/022 ,  G01N33/0042 ,  G01N33/2835 ,  G01N2291/014 ,  G01N2291/02809 ,  G01N2291/02818 ,  H01L41/0477 ,  H01L41/0973 ,  H01L41/187 ,  H01L41/257 ,  H01L41/314 ,  Y10T29/42

摘要： A piezoelectric/electrostrictive membrane type sensor is provided with a ceramic base body and a piezoelectric/electrostrictive element. The ceramic base body includes a thin diaphragm portion, a thick portion and a cavity formed by the portions. The piezoelectric/electrostrictive element is arranged on the ceramic base body and also includes a piezoelectric/electrostrictive body, and an upper electrode and a lower electrode sandwiching the piezoelectric/electrostrictive body. Further, the piezoelectric/electrostrictive body contains an alkaline metal or an alkaline earth metal, with the upper electrode and the lower electrode containing gold or platinum. When there is a change in the atmosphere at a place where the sensor is used, the sensor copes with such change and at least prevents the continuation of a low-quality measurement.

摘要翻译： 压电/电致伸缩膜型传感器设置有陶瓷基体和压电/电致伸缩元件。 陶瓷基体包括薄膜部分，厚部分和由这些部分形成的空腔。 压电/电致伸缩元件设置在陶瓷基体上，还包括压电/电致伸缩体，以及夹着压电/电致伸缩体的上电极和下电极。 此外，压电/电致伸缩体包含碱金属或碱土金属，上电极和下电极含有金或铂。 当在使用传感器的地方存在气氛变化时，传感器处理这种变化，并且至少防止继续进行低质量的测量。

公开(公告)号：US07427820B2

公开(公告)日：2008-09-23

申请号：US11960923

申请日：2007-12-20

申请人： Kunihiko Yoshioka ,  Takao Ohnishi ,  Tomohiro Yamada

发明人： Kunihiko Yoshioka ,  Takao Ohnishi ,  Tomohiro Yamada

IPC分类号： H01L41/047

CPC分类号： H01L41/0973 ,  H01L41/0475 ,  H01L41/257 ,  Y10T29/42 ,  Y10T29/49155 ,  Y10T29/49163

摘要： A lower electrode 4 and an auxiliary electrode 8, a piezoelectric/electrostrictive film 5, and an upper electrode 6 are sequentially arranged in layers on a substrate 1. The lower electrode 4 is continuously formed in a region ranging from a first portion of the thick-walled portion 2 to a thin-walled diaphragm portion 3. The auxiliary electrode 8 is continuously formed in a region ranging from a second portion of the thick-walled portion 2 opposite the first portion to a position on the thin-walled diaphragm portion 3, the position being separated from the lower electrode 4. The upper electrode 6 is formed in such a manner as to overlie the piezoelectric/electrostrictive film 5 and the auxiliary electrode 8. Furthermore, a connection electrode 20 is provided for electrically connecting the upper electrode 6 and the auxiliary electrode 8. Thus, a plurality of paths are provided for electrically connecting the upper electrode 6 and the auxiliary electrode 8. Therefore, even when connection through a certain path is cut off due to fracture of a portion of the upper electrode 6 caused by deterioration in insulating performance of the piezoelectric/electrostrictive film 5, electrical connection between the upper electrode 6 and the auxiliary electrode 8 can be maintained through the remaining path(s).

摘要翻译： 下部电极4和辅助电极8，压电/电致伸缩膜5和上部电极6依次排列在基板1上。 下部电极4连续形成在从厚壁部2的第一部分到薄壁膜部3的范围内。 辅助电极8连续地形成在与第一部分相对的厚壁部分2的第二部分到薄壁隔膜部分3上的位置，该位置与下部电极4分离。 上电极6以覆盖压电/电致伸缩膜5和辅助电极8的方式形成。 此外，设置连接电极20用于电连接上电极6和辅助电极8。 因此，设置多个路径用于电连接上电极6和辅助电极8。 因此，即使由于由于压电/电致伸缩膜5的绝缘性能的劣化而导致的上部电极6的一部分的断裂，通过某一路径的连接被切断时，上部电极6与辅助电极8之间的电连接也可以 通过剩余的路径进行维护。

公开(公告)号：US20080111453A1

公开(公告)日：2008-05-15

申请号：US11960923

申请日：2007-12-20

申请人： Kunihiko YOSHIOKA ,  Takao Ohnishi ,  Tomohiro Yamada

发明人： Kunihiko YOSHIOKA ,  Takao Ohnishi ,  Tomohiro Yamada

IPC分类号： H01L41/00

CPC分类号： H01L41/0973 ,  H01L41/0475 ,  H01L41/257 ,  Y10T29/42 ,  Y10T29/49155 ,  Y10T29/49163

摘要： A lower electrode 4 and an auxiliary electrode 8, a piezoelectric/electrostrictive film 5, and an upper electrode 6 are sequentially arranged in layers on a substrate 1. The lower electrode 4 is continuously formed in a region ranging from a first portion of the thick-walled portion 2 to a thin-walled diaphragm portion 3. The auxiliary electrode 8 is continuously formed in a region ranging from a second portion of the thick-walled portion 2 opposite the first portion to a position on the thin-walled diaphragm portion 3, the position being separated from the lower electrode 4. The upper electrode 6 is formed in such a manner as to overlie the piezoelectric/electrostrictive film 5 and the auxiliary electrode 8. Furthermore, a connection electrode 20 is provided for electrically connecting the upper electrode 6 and the auxiliary electrode 8. Thus, a plurality of paths are provided for electrically connecting the upper electrode 6 and the auxiliary electrode 8. Therefore, even when connection through a certain path is cut off due to fracture of a portion of the upper electrode 6 caused by deterioration in insulating performance of the piezoelectric/electrostrictive film 5, electrical connection between the upper electrode 6 and the auxiliary electrode 8 can be maintained through the remaining path(s).

摘要翻译： 下部电极4和辅助电极8，压电/电致伸缩膜5和上部电极6依次排列在基板1上。 下部电极4连续形成在从厚壁部2的第一部分到薄壁膜部3的范围内。 辅助电极8连续地形成在与第一部分相对的厚壁部分2的第二部分到薄壁隔膜部分3上的位置，该位置与下部电极4分离。 上电极6以覆盖压电/电致伸缩膜5和辅助电极8的方式形成。 此外，设置连接电极20用于电连接上电极6和辅助电极8。 因此，设置多个路径用于电连接上电极6和辅助电极8。 因此，即使由于由于压电/电致伸缩膜5的绝缘性能的劣化而导致的上部电极6的一部分的断裂，通过某一路径的连接被切断时，上部电极6与辅助电极8之间的电连接也可以 通过剩余的路径进行维护。

公开(公告)号：US20080030102A1

公开(公告)日：2008-02-07

申请号：US11856351

申请日：2007-09-17

申请人： Takao Ohnishi ,  Tomohiro Yamada ,  Takatoshi Nehagi

发明人： Takao Ohnishi ,  Tomohiro Yamada ,  Takatoshi Nehagi

IPC分类号： H01L41/09

CPC分类号： G01R29/22 ,  B41J2/0451 ,  B41J2/04513 ,  B41J2/04541 ,  B41J2/04581 ,  B41J2/14201 ,  H01L41/257

摘要： A method for inspecting a piezoelectric element includes first-inspection-signal application step of applying to the piezoelectric element a first inspection signal Vp(1) having a first predetermined voltage waveform; first-characteristic-value measurement step of measuring, as a first characteristic value, an electrical characteristic value of the piezoelectric element after application of the first inspection signal; second-inspection-signal application step of applying to the piezoelectric element a second inspection signal Vp(2) having a second predetermined voltage waveform and an electrical power greater than that of the first inspection signal; second-characteristic-value measurement step of measuring, as a second characteristic value, the electrical characteristic value of the piezoelectric element after application of the second inspection signal; and anomaly determination step of determining whether or not the piezoelectric element is anomalous on the basis of a value corresponding to the difference between the measured second characteristic value and the measured first characteristic value.

摘要翻译： 一种用于检查压电元件的方法包括：第一检查信号施加步骤，向所述压电元件施加具有第一预定电压波形的第一检查信号Vp（1）; 第一特征值测量步骤，在施加第一检查信号之后测量压电元件的电特性值作为第一特征值; 第二检查信号施加步骤，向所述压电元件施加具有大于所述第一检查信号的第二预定电压波形和电功率的第二检查信号Vp（2） 第二特征值测量步骤，在施加第二检查信号之后测量压电元件的电特性值作为第二特征值; 以及异常判定步骤，基于与所测量的第二特征值和测量的第一特征值之间的差对应的值，确定压电元件是否异常。

公开(公告)号：US20090174419A1

公开(公告)日：2009-07-09

申请号：US12398343

申请日：2009-03-05

申请人： Takao Ohnishi ,  Tomohiro Yamada ,  Takatoshi Nehagi

发明人： Takao Ohnishi ,  Tomohiro Yamada ,  Takatoshi Nehagi

IPC分类号： G01R29/22

CPC分类号： G01R29/22 ,  B41J2/0451 ,  B41J2/04513 ,  B41J2/04541 ,  B41J2/04581 ,  B41J2/14201 ,  H01L41/257

摘要： A method for inspecting a piezoelectric element includes first-inspection-signal application step of applying to the piezoelectric element a first inspection signal Vp(1) having a first predetermined voltage waveform; first-characteristic-value measurement step of measuring, as a first characteristic value, an electrical characteristic value of the piezoelectric element after application of the first inspection signal; second-inspection-signal application step of applying to the piezoelectric element a second inspection signal Vp(2) having a second predetermined voltage waveform and an electrical power greater than that of the first inspection signal; second-characteristic-value measurement step of measuring, as a second characteristic value, the electrical characteristic value of the piezoelectric element after application of the second inspection signal; and anomaly determination step of determining whether or not the piezoelectric element is anomalous on the basis of a value corresponding to the difference between the measured second characteristic value and the measured first characteristic value.

摘要翻译： 一种用于检查压电元件的方法包括：第一检查信号施加步骤，向所述压电元件施加具有第一预定电压波形的第一检查信号Vp（1）; 第一特征值测量步骤，在施加第一检查信号之后测量压电元件的电特性值作为第一特征值; 第二检查信号施加步骤，向所述压电元件施加具有大于所述第一检查信号的第二预定电压波形和电功率的第二检查信号Vp（2） 第二特征值测量步骤，在施加第二检查信号之后测量压电元件的电特性值作为第二特征值; 以及异常判定步骤，基于与所测量的第二特征值和测量的第一特征值之间的差对应的值，确定压电元件是否异常。

公开(公告)号：US08877519B2

公开(公告)日：2014-11-04

申请号：US12738228

申请日：2008-10-29

申请人： Tomohiro Yamada ,  Yoichiro Handa

发明人： Tomohiro Yamada ,  Yoichiro Handa

IPC分类号： G01N33/553 ,  G01N21/55 ,  G01N21/27

CPC分类号： G01N21/554 ,  G01N21/27 ,  Y10S436/805

摘要： A chemical sensor element contains a resonator having a first reflector in which particles of a fine metal structure are arranged two-dimensionally and periodically is counterposed with interposition of a dielectric layer to a second reflector, wherein the resonance wavelength of a resonator in which the entire of the first reflector is replaced by a metal thin film having the same thickness as the metal fine structure is different from the surface plasmon resonance wavelength induced in the metal fine structure; and the mode of the surface plasmon resonance excited in the metal fine structure is coupled with the mode of the resonator in which the entire of the first reflector is replaced by the metal thin film.

摘要翻译： 化学传感器元件包括具有第一反射器的谐振器，其中精细金属结构的颗粒被二维地周期性布置，并且与第二反射器插入电介质层，其中整个谐振器的谐振波长 由具有与金属精细结构相同的厚度的金属薄膜替换为与金属精细结构中诱发的表面等离子体共振波长不同的金属薄膜; 并且在金属精细结构中激发的表面等离子体激元谐振的模式与谐振器的模式耦合，其中整个第一反射器被金属薄膜代替。