摘要:
A very small and economical acceleration sensor which can detect acting acceleration with high sensitivity and high accuracy by precisely processing a semiconductor substrate and the like by using the photoengraving technique in a semiconductor manufacturing process to accurately form the elements themselves such as a sensor case, a cavity, a heater, a temperature-sensing resistor element, and a heat-type temperature-sensing resistor element, and the relative placement of each element. One embodiment of the acceleration sensor can detect acceleration acting from any of the three-dimensional directions.
摘要:
A very small and economical acceleration sensor which can detect acting acceleration with high sensitivity and high accuracy by precisely processing a semiconductor substrate and the like by using the photoengraving technique in a semiconductor manufacturing process to accurately form the elements themselves such as a sensor case, a cavity, a heater, a temperature-sensing resistor element, and a heat-type temperature-sensing resistor element, and the relative placement of each element. One embodiment of the acceleration sensor can detect acceleration acting from any of the three-dimensional directions.
摘要:
A hybrid sensor which is comprised of an acceleration sensor for detecting acceleration based on a temperature distribution of a predetermined gas hermetically enclosed within a fluid-tight space, and an angular velocity sensor for detecting angular velocity based on a deviation of a flow of a predetermined gas. The acceleration sensor and the angular velocity sensor are formed in one piece by the use of semiconductor processing technology in such a manner that the acceleration sensor and the angular velocity sensor are formed on a plurality of semiconductor substrates, and then the plurality of semiconductor substrates are superposed one upon another and united into a laminate.
摘要:
A gas flow type angular velocity sensor comprising two semiconductor substrates wherein only the first semiconductor substrate is provided with a groove etched thereon constituting the gas path and the second semiconductor substrate is provided with paired heat wires formed thereon. The two semiconductor substrates are coupled and bonded to each other to form the sensor body.
摘要:
This invention relates to a semiconductor sensor for detecting external physical forces, such as acceleration, contact pressures, air pressures, mechanical vibrations, etc. The semiconductor sensor according to this invention is characterized by the use of compound semiconductors of high piezoelectricity, such as GaAs, etc. Conventionally sensors of the cantilever type, diaphragm type, etc. are made of silicon. These prior art sensors have low detection sensitivity, and their characteristics tend to deteriorate. The sensor according to this invention is made of GaAs, which has high piezoelectricity and can retain good characteristics of the semiconductor even at high temperatures and includes a field-effect transistor formed on the GaAs for sensing a stress. The FET is driven by a constant current or a constant voltage so as to detect a change of an electrical characteristic (e.g., threshold characteristic) due to a stress. The structure of the sensor according to this invention enables the sizes of the sensors not only to be diminished but also to reduce the fabrication costs. When a stress is applied to the FET, the transconductance changes, and the temperature changes, consequently the I-V characteristic changes. An a.c. signal biased by a direct current is supplied to the gate of the FET, and a drain current is detected in an a.c. component and a d.c. component so as to detect a temperature concurrently with a detection of a stress.
摘要:
This invention relates to a semiconductor sensor for detecting external physical forces, such as acceleration, contact pressures, air pressures, mechanical vibrations, etc. The semiconductor sensor according to this invention is characterized by the use of compound semiconductors of high piezoelectricity, such as GaAs, etc. Conventionally sensors of the cantilever type, diaphragm type, etc. are made of silicon. These prior art sensors have low detection sensitivity, and their characteristics tend to deteriorate. The sensor according to this invention is made of GaAs, which has high piezoelectricity and can retain good characteristics of the semiconductor even at high temperatures and includes a field-effect transistor formed on the GaAs for sensing a stress. The FET is driven by a constant current or a constant voltage so as to detect a change of an electrical characteristic (e.g., threshold characteristic) due to a stress. The structure of the sensor according to this invention enables the sizes of the sensors not only to be diminished but also to reduce the fabrication costs. When a stress is applied to the FET, the transconductance changes, and the temperature changes, consequently the I-V characteristic changes. An a.c. signal biased by a direct current is supplied to the gate of the FET, and a drain current is detected in an a.c. component and a d.c. component so as to detect a temperature concurrently with a detection of a stress.
摘要:
A power supply unit has a capacitor unit for supplying electric power to a load. The capacitor unit has at least two blocks each having a plurality of electric double-layer capacitors connected in series. The manner of connection of the at least two blocks is changed over between series connection and parallel connection in dependence on an output required by the load. A switching regulator is connected to the electric charge-storing device. An electric vehicle having the power supply unit installed thereon is also provided.
摘要:
A dieting support system includes a function that detects a component of biogas and that measures concentration of the biogas, a function that accumulates and analyzes the measured result, and a function that determines suitable timing for taking a meal or suitable timing for doing exercise, depending on the analyzed result.
摘要:
A mobile communications system for transferring packets to a mobile communications terminal according to address information of the mobile communications terminal is disclosed. The mobile communications terminal is located in a moving network connected to a given node in a core network. The address information of the mobile communications terminal includes common information related to the given node to which the moving network is connected, and individual information which is unrelated to the given node to which the moving network is connected and is unchanged when the given node to which the moving network is connected is changed.
摘要:
A molecular communication system includes a molecular transmitter (20) configured to transmit an information molecules (15) onto which prescribed information is encoded; a molecular receiver (30) configured to receive the information molecule, a molecule propagation channel (40) extending from the molecular transmitter to the molecular receiver, and a molecular capsule (10) configured to encapsulate the information molecules to be transmitted from the molecular transmitter to the molecular receiver, wherein the surfaces of the molecular transmitter, the molecular receiver, and the molecular capsule have lipid bilayer membrane structure, and wherein the system further includes encapsulation means for applying a first chemical substance to the molecular transmitter, or to the molecular transmitter and the molecular capsule to encapsulate the information molecules into the molecular capsule, and decapsulation means for applying a second chemical substance to the molecular capsule and the molecular receiver to take the information molecules out of the molecular capsule and take them into the molecular receiver.