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公开(公告)号：US5751108A
公开(公告)日：1998-05-12
申请号：US703043
申请日：1996-08-26
申请人： Takashi Kanemura , Masayuki Suzuki , Yutaka Hattori , Nobuei Ito , Tadashi Hattori , Shigeo Kanazawa
发明人： Takashi Kanemura , Masayuki Suzuki , Yutaka Hattori , Nobuei Ito , Tadashi Hattori , Shigeo Kanazawa
CPC分类号： C09K11/7745 , H05B33/14 , H05B33/18
摘要： In an electroluminescent device wherein a first electrode, a first insulating layer, a luminescent layer, a second insulating layer, and a second electrode are laminated in that order on a transparent electrode, the luminescent layer is made of ZnS as a host material and Tb, O, F, and Cl as additives Cl/Tb and Cl/F atomic ratios in the luminescent layer are each between 0.002 and 0.2 inclusively, and Cl concentration in the luminescent layer is between 0.002 at % and 0.2 at % inclusively. By adding a predetermined amount of Cl as mentioned above, the luminescent efficiency and luminescent brightness of the electroluminescent device can be improved.
摘要翻译： 在透明电极上依次层叠第一电极，第一绝缘层，发光层，第二绝缘层和第二电极的电致发光器件，发光层由ZnS作为主体材料，Tb ，O，F和Cl作为发光层中的添加剂Cl / Tb和Cl / F原子比各自在0.002和0.2之间，并且发光层中的Cl浓度在0.002at％和0.2at％之间。 通过如上所述添加预定量的Cl，可以提高电致发光器件的发光效率和发光亮度。
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公开(公告)号：US6036823A
公开(公告)日：2000-03-14
申请号：US126101
申请日：1998-07-30
申请人： Kazuhiro Inoguchi , Yutaka Hattori , Nobuei Ito , Tomoya Uchida , Tadashi Hattori , Koji Noda , Hisayoshi Fujikawa , Shizuo Tokito , Yasunori Taga
发明人： Kazuhiro Inoguchi , Yutaka Hattori , Nobuei Ito , Tomoya Uchida , Tadashi Hattori , Koji Noda , Hisayoshi Fujikawa , Shizuo Tokito , Yasunori Taga
摘要： A thin-film electroluminescent device includes dielectric layers having improved dielectric characteristics. The device is fabricated by forming a first transparent electrode layer of ITO, a first dielectric layer, a luminescent layer, a second dielectric layer, and a second transparent electrode layer of ITO in this order on an insulating substrate. Each of the two dielectric layers is a film constituted by TaSnON. That is, the film includes tantalum, tin, oxygen, and nitrogen.
摘要翻译： 薄膜电致发光器件包括具有改善的介电特性的电介质层。 通过在绝缘基板上依次形成ITO的第一透明电极层，ITO的第一电介质层，发光层，第二电介质层和ITO的第二透明电极层来制造器件。 两个电介质层中的每一个是由TaSnON构成的膜。 也就是说，该膜包括钽，锡，氧和氮。
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公开(公告)号：US5958610A
公开(公告)日：1999-09-28
申请号：US802911
申请日：1997-02-20
CPC分类号： H05B33/22 , H05B33/10 , Y10S428/917 , Y10T428/26 , Y10T428/265
摘要： An EL element having a color filter formed on an upper electrode thereof enables a decrease in the pixel loss or line defects. In the EL element, a lower transparent electrode, first insulating layer, luminescent layer and upper transparent electrode are laminated on a glass substrate. Further, a color filter is formed on the upper transparent electrode. As the color filter there is used a posi-resist having an average molecular weight in a range of from 100 to 50000 or a nega-resist having a polymerization reaction percentage in a range of from 5% to 70%.
摘要翻译： 具有形成在其上电极上的滤色器的EL元件能够减少像素损耗或线缺陷。 在EL元件中，将下透明电极，第一绝缘层，发光层和上透明电极层叠在玻璃基板上。 此外，在上部透明电极上形成滤色器。 作为滤色器，使用平均分子量为100〜50000的抗粘连剂或聚合反应率在5〜70％范围内的负极 - 抗蚀剂。
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公开(公告)号：US5912649A
公开(公告)日：1999-06-15
申请号：US791784
申请日：1997-01-29
申请人： Yutaka Hattori , Shoichi Onda , Tomohiro Yonekawa , Nobuei Ito , Tadashi Hattori
发明人： Yutaka Hattori , Shoichi Onda , Tomohiro Yonekawa , Nobuei Ito , Tadashi Hattori
摘要： An electro-luminescent display apparatus which is capable of displaying two kinds of images is disclosed. The apparatus has a front and a rear electro-luminescent unit therein, and the green light emitted from the front unit directly displays the real image which looks close to a viewer while the orange light emitted from the rear unit is reflected by a reflector disposed at the back of the apparatus and displays a virtual image which looks far from the viewer. In order to reflect the light emitted backward from the front unit and the light emitted forward from the rear unit, reflecting electrodes are provided on the rear surface of the front unit or a reflecting film is disposed in the space between the front and the rear units.
摘要翻译： 公开了能够显示两种图像的电致发光显示装置。 该装置在其中具有前后电致发光单元，并且从前单元发射的绿光直接显示看起来靠近观察者的实像，而从后单元发出的橙光被布置在 该装置的背面并且显示远离观察者的虚像。 为了反射从前单元向后发射的光和从后单元向前发射的光，反射电极设置在前单元的后表面上，或者反射膜设置在前单元和后单元之间的空间中 。
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公开(公告)号：US5470618A
公开(公告)日：1995-11-28
申请号：US274149
申请日：1994-07-14
申请人： Fumio Ohara , Tadashi Hattori , Nobuei Ito , Yutaka Hattori , Masumi Arai
发明人： Fumio Ohara , Tadashi Hattori , Nobuei Ito , Yutaka Hattori , Masumi Arai
CPC分类号： C23C14/086
摘要： A zinc oxide-based transparent conductive film containing of gallium or indium and having a resistivity of not more than 10.sup.-3 .OMEGA..cm is provided by evaporating a source of zinc oxide containing 0.5 to 5% by weight of gallium oxide or 0.3 to 4.5% by weight of indium oxide and depositing same onto a substrate after activating the vapor of the source by a plasma.
摘要翻译： 通过蒸发含有0.5至5重量％的氧化镓或0.3至4.5的氧化锌源，提供含有镓或铟并且电阻率不大于10-3欧米汞厘米的氧化锌基透明导电膜 重量％的氧化铟，并通过等离子体激活源的蒸气之后将其沉积到基底上。
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公开(公告)号：US5883465A
公开(公告)日：1999-03-16
申请号：US414093
申请日：1995-03-31
摘要： A thin-film EL display panel which has excellent packageability, high reliability and stable performance characteristics, and which can prevent nonuniformity of brightness and color from occurring and a fabrication method thereof are provided. In the above thin-film EL display panel, two thin-film EL elements 1 and 2 formed by sequentially laminating first electrodes 12 and 22, first insulating layers, luminescent layers, second insulating layers and second electrodes 16 and 26 respectively on glass substrates 11 and 21 are laminated into position and connecting terminal portions 12a, 22a, 16a and 26a for connecting the first electrodes 12 and 22 and second electrodes 16 and 26 are formed on the edge portions of the substrates 11 and 21 of the thin-film EL elements 1 and 2. Connecting pad portions 17 and 18 which correspond respectively to the connecting terminal portions 22a and 26a of the thin-film EL element 2 are provided on the edge portions on the substrate of the thin-film EL element 1, the connecting pad portions are connected to the connecting terminal portions of the other thin-film EL element via conductive coupling sections 19 and the connecting pad portions and the connecting terminal portions to which lead wires are connected are provided on the edge portion of one substrate at a position where both substrates will not be laminated.
摘要翻译： 提供了具有优异的可封装性，高可靠性和稳定的性能特性的薄膜EL显示面板，并且可以防止发生亮度和颜色的不均匀性及其制造方法。 在上述薄膜EL显示面板中，通过将玻璃基板11上的第一电极12和22，第一绝缘层，发光层，第二绝缘层和第二电极16和26依次层叠而形成的两个薄膜EL元件1和2 和21层压到位置，并且用于连接第一电极12和22的连接端子部分12a，22a，16a和26a和第二电极16和26形成在薄膜EL元件的基板11和21的边缘部分上 在薄膜EL元件1的基板上的边缘部分上设置有与薄膜EL元件2的连接端子部分22a和26a相对应的连接焊盘部分17和18，连接焊盘 部分经由导电耦合部分19和连接焊盘部分和连接端子部分连接到另一薄膜EL元件的连接端子部分，引线 连接在一个基板的边缘部分上，两个基板将不被层压的位置。
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7.发明授权Process for the production of electroluminescence element, electroluminescence element 失效电致发光元件，电致发光元件的制造方法
公开(公告)号：US5853552A
公开(公告)日：1998-12-29
申请号：US300552
申请日：1994-09-07
IPC分类号： C09K11/61 , C09K11/77 , C23C14/00 , C23C14/06 , H05B33/10 , H05B33/14 , H05B33/18 , C23C14/34
CPC分类号： C23C14/0057 , C09K11/612 , C09K11/7745 , C09K11/776 , C23C14/0629 , H05B33/10 , H05B33/14 , H05B33/18
摘要： A process for producing an electroluminescence element provided with a luminescent layer sandwiched between two electrodes on an insulating substrate, the luminescent layer being composed of a host material with a luminescent center element added. The process comprises a step of forming the aforesaid luminescent layer as a film onto the insulating substrate by either sputtering or evaporation, by use of a source material composed of a compound of an element of Group II and an element of Group VI, to which a halide of a rare earth element is added as the luminescent center element. The atmosphere at the time of the film formation contains either a halogen gas or halide gas. The aforesaid luminescent layer is formed as a film onto the insulating substrate by either sputtering or evaporation, by use of a source material composed of the aforesaid compound of an element of Group II and an element of Group VI, to which a fluoride or fluorine compound of the luminescent center element and a halide other than fluoride of the element of Group II are added. The film formation atmosphere may be pretreated with a chlorine-containing gas prior to a film formation step of forming the luminescent layer as a film onto the insulating substrate by a sputtering method by use of a source material composed of the host material with the luminescent center element. An electro-luminescence element is further disclosed, wherein the X-ray diffraction spectrum thereof has only a single peak at an X-ray diffraction angle from the luminescent layer, ranging from 25.degree. to 30.degree. according to a thin film X-ray diffraction measuring method using Cu-Kd radiation, and no other peaks of the X-ray diffraction spectrum exist at an X-ray diffraction angle of approximately 27.degree..
摘要翻译： 一种制造电致发光元件的方法，所述电致发光元件在绝缘基板上具有夹在两个电极之间的发光层，所述发光层由添加有发光中心元件的主体材料构成。 该方法包括通过溅射或蒸发，通过使用由II族元素和VI族元素的化合物组成的源材料，通过溅射或蒸发将上述发光层作为膜形成在绝缘基板上的步骤，其中 加入稀土元素的卤化物作为发光中心元件。 成膜时的气氛中含有卤素气体或卤化物气体。 上述发光层通过溅射或蒸镀通过使用由上述化合物II族元素和VI族元素组成的源材料形成为绝缘基板，氟化物或氟化合物 的发光中心元素和除了II族元素的氟化物之外的卤化物。 成膜气氛可以在通过使用由主体材料与发光中心构成的源材料通过溅射法将形成发光层作为膜的成膜步骤之前用含氯气体预处理 元件。 进一步公开了一种电致发光元件，其中，根据薄膜X射线衍射，其X射线衍射光谱在距发光层的X射线衍射角仅为单峰，为25〜30° 使用Cu-Kd辐射的测量方法，并且在大约27°的X射线衍射角处不存在X射线衍射光谱的其它峰。
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公开(公告)号：US5789860A
公开(公告)日：1998-08-04
申请号：US695609
申请日：1996-08-12
申请人： Kazuhiro Inoguchi , Yutaka Hattori , Nobuei Ito , Tomoya Uchida , Tadashi Hattori , Koji Noda , Hisayoshi Fujikawa , Shizuo Tokito , Yasunori Taga
发明人： Kazuhiro Inoguchi , Yutaka Hattori , Nobuei Ito , Tomoya Uchida , Tadashi Hattori , Koji Noda , Hisayoshi Fujikawa , Shizuo Tokito , Yasunori Taga
摘要： A thin-film electroluminescent device includes dielectric layers having improved dielectric characteristics. The device is fabricated by forming a first transparent electrode layer of ITO, a first dielectric layer, a luminescent layer, a second dielectric layer, and a second transparent electrode layer of ITO in this order on an insulating substrate. Each of the two dielectric layers is a film constituted by TaSnON. That is, the film includes tantalum, tin, oxygen, and nitrogen.
摘要翻译： 薄膜电致发光器件包括具有改善的介电特性的电介质层。 通过在绝缘基板上依次形成ITO的第一透明电极层，ITO的第一电介质层，发光层，第二电介质层和ITO的第二透明电极层来制造器件。 两个电介质层中的每一个是由TaSnON构成的膜。 也就是说，该膜包括钽，锡，氧和氮。
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公开(公告)号：US06262531B1
公开(公告)日：2001-07-17
申请号：US09187454
申请日：1998-11-05
IPC分类号： H01J162
摘要： A thin-film EL display panel which has excellent packageability, high reliability and stable performance characteristics, and which can prevent nonuniformity of brightness and color from occurring and a fabrication method thereof are provided. In the above thin-film EL display panel, two thin-film EL elements 1 and 2 formed by sequentially laminating first electrodes 12 and 22, first insulating layers, luminescent layers, second insulating layers and second electrodes 16 and 26 respectively on glass substrates 11 and 21 are laminated into position and connecting terminal portions 12a, 22a, 16a and 26a for connecting the first electrodes 12 and 22 and second electrodes 16 and 26 are formed on the edge portions of the substrates 11 and 21 of the thin-film EL elements 1 and 2. connecting pad portions 17 and 18 which correspond respectively to the connecting terminal portions 22a and 26a of the thin-film EL element 2 are provided on the edge portions on the substrate of the thin-film EL element 1, the connecting pad portions are connected to the connecting terminal portions of the other thin-film EL element via conductive coupling sections 19 and the connecting pad portions and the connecting terminal portions to which lead wires are connected are provided on the edge portion of one substrate at a position where both substrates will not be laminated.
摘要翻译： 提供了具有优异的可封装性，高可靠性和稳定的性能特性的薄膜EL显示面板，并且可以防止发生亮度和颜色的不均匀性及其制造方法。 在上述薄膜EL显示面板中，通过将玻璃基板11上的第一电极12和22，第一绝缘层，发光层，第二绝缘层和第二电极16和26依次层叠而形成的两个薄膜EL元件1和2 和21层压到位置，并且用于连接第一电极12和22的连接端子部分12a，22a，16a和26a和第二电极16和26形成在薄膜EL元件的基板11和21的边缘部分上 在薄膜EL元件1的基板上的边缘部分设置有与薄膜EL元件2的连接端子部分22a和26a相对应的连接焊盘部分17和18，连接焊盘 部分经由导电耦合部分19和连接焊盘部分和连接端子部分连接到另一薄膜EL元件的连接端子部分，引线 连接在一个基板的边缘部分上，两个基板将不被层压的位置。
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10.发明授权Dry etching method and manufacturing method of manufacturing EL element using same 失效干蚀刻方法和使用其制造EL元件的制造方法
公开(公告)号：US5888410A
公开(公告)日：1999-03-30
申请号：US825579
申请日：1997-03-31
IPC分类号： C23F4/00 , H01L21/302 , H01L21/3065 , H01L21/461 , H01L21/465 , H05B33/10 , H05B33/12 , H05B33/14 , B44C1/22
CPC分类号： H05B33/10 , H01L21/465
摘要： A dry etching method performing dry etching of a material containing zinc forms and patterns a resist on the material to be etched, and etches the material using an etching gas which is a mixed gas of methane gas and an inert gas. A dry etching method that dry etches a material containing zinc etches the material using an etching gas that consists only of methane gas, an inert gas, and hydrogen gas alone. Another dry etching method that dry etches a material containing zinc introduces an etching gas that contains methane gas, an inert gas, and hydrogen gas into a dry etching device, in which the flow rate of the hydrogen gas is set such that it is equal to or greater than the value at which the amount of dissociated hydrogen becomes saturated, and etches the material using the etching gas. An EL element manufacturing method forms a first luminescent material containing zinc in its composition on a first insulated layer, forms a first resist that has a first pattern on the first luminescent material, dry etches the first luminescent material through the first resist, thereby forming the first luminescent layer; forms a second luminescent material having zinc in its composition on the first luminescent layer, forms a second resist on the second luminescent material, and dry etches the second luminescent material through the second resist.
摘要翻译： 对含有锌的材料进行干蚀刻的干式蚀刻方法形成并在待蚀刻材料上形成抗蚀剂，并使用作为甲烷气体和惰性气体的混合气体的蚀刻气体蚀刻材料。 使用仅由甲烷气体，惰性气体和氢气单独构成的蚀刻气体来干燥蚀刻含锌材料的干蚀刻方法蚀刻材料。 对含有锌的材料进行干蚀刻的另一种干蚀刻方法将含有甲烷气体，惰性气体和氢气的蚀刻气体引入到干法蚀刻装置中，其中氢气的流量设定为等于 或大于解离氢的量饱和的值，并且使用蚀刻气体蚀刻该材料。 EL元件制造方法在第一绝缘层上形成含有锌的第一发光材料，在第一发光材料上形成具有第一图案的第一抗蚀剂，通过第一抗蚀剂干燥蚀刻第一发光材料，从而形成 第一发光层; 在第一发光层上形成具有锌组成的第二发光材料，在第二发光材料上形成第二抗蚀剂，并通过第二抗蚀剂干蚀刻第二发光材料。
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