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公开(公告)号：US06973836B2
公开(公告)日：2005-12-13
申请号：US10785980
申请日：2004-02-26
申请人： Takashi Katsumata , Inao Toyoda , Hiroaki Tanaka
发明人： Takashi Katsumata , Inao Toyoda , Hiroaki Tanaka
CPC分类号： G01L1/2281 , G01L9/0054 , G01L9/065
摘要： A semiconductor pressure sensor includes a semiconductor substrate having a diaphragm for receiving pressure and a bridge circuit for detecting a distortion of the diaphragm corresponding to the pressure. The bridge circuit includes a pair of first gauge resistors and a pair of second gauge resistors. The first gauge resistors are disposed on a center of the diaphragm, and the second gauge resistors are disposed on a periphery of the diaphragm. Each first gauge resistor has a first resistance, which is larger than a second resistance of each second gauge resistor. The TNO property of the sensor is improved, so that the sensor has high detection accuracy.
摘要翻译： 半导体压力传感器包括具有用于接收压力的膜片的半导体衬底和用于检测对应于该压力的膜片的变形的桥接电路。 桥接电路包括一对第一规格电阻器和一对第二规格电阻器。 第一规格电阻器设置在隔膜的中心，并且第二电阻器设置在隔膜的周边上。 每个第一量规电阻器具有大于每个第二规格电阻器的第二电阻的第一电阻。 传感器的TNO性能得到改善，传感器检测精度高。
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公开(公告)号：US06887734B2
公开(公告)日：2005-05-03
申请号：US10791762
申请日：2004-03-04
申请人： Takashi Katsumata , Inao Toyoda
发明人： Takashi Katsumata , Inao Toyoda
CPC分类号： G01L9/0042 , G01L9/065 , Y10S438/973
摘要： In a semiconductor pressure sensor manufacturing method of disposing an etching mask (50) at one-face (11) side of a monocrystal silicon substrate 10 in which the face-direction of the one face 11 corresponds to the (110)-face, and then carrying out anisotropic etching to form a recess portion (20) and a diaphragm (30) at the bottom surface side of the recess portion (20), the etching mask (51) is designed to have a cross-shaped opening portion (51) at which a first area extending along the crystal axis direction and a second area extending along the crystal axis direction cross each other, the area of the opening portion (51a) of the overlap area between the first and second areas in the opening portion (51) being set to be smaller than the area of the diaphragm (30).
摘要翻译： 在半导体压力传感器的制造方法中，在一面11的面方向对应于（110）面的单晶硅衬底10的单面（11）侧设置蚀刻掩模（50），以及 然后进行各向异性蚀刻以在凹部（20）的底面侧形成凹部（20）和隔膜（30），将蚀刻掩模（51）设计成具有十字形的开口部（51） ），其中沿着<110>晶轴方向延伸的第一区域和沿着<100>晶轴方向延伸的第二区域彼此交叉，所述第一区域和第二区域之间的重叠区域的开口部分（51a） 开口部（51）中的第二区域被设定为小于隔膜（30）的面积。
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公开(公告)号：US06865951B2
公开(公告)日：2005-03-15
申请号：US10791890
申请日：2004-03-04
申请人： Takashi Katsumata , Inao Toyoda , Hiroaki Tanaka
发明人： Takashi Katsumata , Inao Toyoda , Hiroaki Tanaka
CPC分类号： G01L9/0054 , G01L9/0042
摘要： In a diaphragm (30) having a square shape comprising four sides of a pair of first sides (31, 32) extending along the crystal axis direction and a pair of second sides (33, 34) extending along the crystal axis direction, when an axis bisecting each of the first sides (31, 32) of the diaphragm (30) and passing through the center point of the diaphragm is set as a first axis K1 and an axis vertically-intersecting to the first axis K1 and passing through the center point of the diaphragm is set as a second axis K2, each of the side gages Rs1, Rs2 is located on a virtual line T1, T2, T3, T4 which extends from the center point of each of the center gages Rc1, Rc2 to the peripheral portion of the diaphragm (30) and intersects to the first axis K1 and the second axis K2 at 45°.
摘要翻译： 在具有沿着<110>晶轴方向延伸的一对第一边（31,32）的四边的正方形的隔膜（30）和沿着<110>晶体轴方向延伸的一对第二侧（33,34） 当将隔膜（30）的每个第一边（31,32）平分并穿过隔膜的中心点的轴设置为第一轴线K1和与第一轴线垂直相交的轴线时，晶轴方向 K1并且通过隔膜的中心点被设定为第二轴线K2，侧面规格Rs1，Rs2中的每一个位于从中心的每个中心点延伸的虚拟线T1，T2，T3，T4上 将Rc1，Rc2测量到隔膜（30）的周边部分，并且以45°与第一轴线K1和第二轴线K2相交。
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公开(公告)号：US08225660B2
公开(公告)日：2012-07-24
申请号：US12792404
申请日：2010-06-02
CPC分类号： G01C19/5747 , B81B2207/012 , B81C99/0045 , G01C25/00 , H01L29/84
摘要： A dynamic quantity sensor includes a sensor chip, a base member, and bumps. The sensor chip includes a semiconductor substrate, a sensor part, and sensor pads electrically coupled with the sensor part. The base member includes a base substrate and base pads disposed on the base substrate. The bumps mechanically and electrically couple the sensor pads and the base pads, respectively, in a state where the sensor chip is curved with respect to the base member. The sensor pads include input pads and output pads. The first surface of the semiconductor substrate includes a first portion and a second portion. The first portion is closer to the base substrate than the second portion is. At least one of the input pads is disposed on the first portion and at least one of the output pads is disposed on the second portion.
摘要翻译： 动态量传感器包括传感器芯片，基底构件和凸块。 传感器芯片包括半导体衬底，传感器部分和与传感器部件电耦合的传感器衬垫。 基座构件包括基底基板和设置在基底基板上的基座垫。 在传感器芯片相对于基座构件弯曲的状态下，凸块分别机械地和电耦接传感器焊盘和基座。 传感器焊盘包括输入焊盘和输出焊盘。 半导体衬底的第一表面包括第一部分和第二部分。 第一部分比第二部分更靠近基底基板。 至少一个输入焊盘设置在第一部分上，并且至少一个输出焊盘设置在第二部分上。
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公开(公告)号：US20110271759A1
公开(公告)日：2011-11-10
申请号：US13101175
申请日：2011-05-05
申请人： Minekazu SAKAI , Tomoya Jomori , Takashi Katsumata
发明人： Minekazu SAKAI , Tomoya Jomori , Takashi Katsumata
IPC分类号： G01C19/56
CPC分类号： G01C19/5747
摘要： In an angular velocity sensor, a vibrator is coupled with a substrate through a beam part, and is movable in a first direction and a second direction that is perpendicular to the first direction. A driving part is configured to vibrate the vibrator in the first direction. A detecting part is configured to detect displacement of the vibrator in the second direction as a change in capacitance, the displacement being caused by Coriolis force generated in the vibrator due to vibration of the vibrator and an angular velocity around a third direction that is perpendicular to the first direction and the second direction. A restricting part is configured to restrict displacement of the vibrator in the second direction based on the change in capacitance. The angular velocity sensor is configured to satisfy a condition where β sin θ is equal to or less than 1.
摘要翻译： 在角速度传感器中，振动器通过梁部与基板连接，并且能够在垂直于第一方向的第一方向和第二方向上移动。 驱动部构造成使振动体沿第一方向振动。 检测部被配置为检测振动器在第二方向上的位移作为电容的变化，该位移是由振动器产生的科里奥利力引起的，由于振动器的振动以及与第三方向垂直的第三方向的角速度 第一个方向和第二个方向。 限制部件被配置为基于电容的变化来限制振动器在第二方向上的位移。 角速度传感器被配置为满足条件，其中＆bgr; 罪与假 等于或小于1。
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公开(公告)号：US20070199377A1
公开(公告)日：2007-08-30
申请号：US11653344
申请日：2007-01-16
IPC分类号： G01P15/125
CPC分类号： G01C19/5719
摘要： An angular velocity sensor includes first and second vibrators having a movable portion with driving and detecting purpose movable electrodes and a fixed portion with first and second side driving and detecting purpose fixed electrodes. The driving voltages applied to the first side driving purpose fixed electrode in the first vibrator is a first driving voltage including direct and alternating voltages. The driving voltage applied to the second side driving purpose fixed electrode in the first vibrator is a second driving voltage including direct and alternating voltages. At least one of the direct voltages, one of the alternating voltages, or one of duty ratios of the first and second driving voltages is controlled so that the first vibrator vibrates opposite to the second vibrator.
摘要翻译： 角速度传感器包括第一振动器和第二振动器，该第一振动器和第二振动器具有带有驱动和检测目的的可移动电极的可移动部分和具有第一和第二侧驱动和检测目的的固定电极的固定部分。 施加到第一振动器中的第一侧驱动用固定电极的驱动电压是包括直流和交流电压的第一驱动电压。 施加到第一振动器中的第二侧驱动用固定电极的驱动电压是包括直流和交流电压的第二驱动电压。 控制直流电压中的至少一个，交流电压之一或第一和第二驱动电压的占空比中的一个，使得第一振动器与第二振动器相反地振动。
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公开(公告)号：US08601873B2
公开(公告)日：2013-12-10
申请号：US13101175
申请日：2011-05-05
申请人： Minekazu Sakai , Tomoya Jomori , Takashi Katsumata
发明人： Minekazu Sakai , Tomoya Jomori , Takashi Katsumata
IPC分类号： G01C19/56
CPC分类号： G01C19/5747
摘要： In an angular velocity sensor, a vibrator is coupled with a substrate through a beam part, and is movable in a first direction and a second direction that is perpendicular to the first direction. A driving part is configured to vibrate the vibrator in the first direction. A detecting part is configured to detect displacement of the vibrator in the second direction as a change in capacitance, the displacement being caused by Coriolis force generated in the vibrator due to vibration of the vibrator and an angular velocity around a third direction that is perpendicular to the first direction and the second direction. A restricting part is configured to restrict displacement of the vibrator in the second direction based on the change in capacitance. The angular velocity sensor is configured to satisfy a condition where β sin θ is equal to or less than 1.
摘要翻译： 在角速度传感器中，振动器通过梁部与基板连接，并且能够在垂直于第一方向的第一方向和第二方向上移动。 驱动部构造成使振动体沿第一方向振动。 检测部被配置为检测振动器在第二方向上的位移作为电容的变化，该位移是由振动器产生的科里奥利力引起的，由于振动器的振动以及与第三方向垂直的第三方向的角速度 第一个方向和第二个方向。 限制部件被配置为基于电容的变化来限制振动器在第二方向上的位移。 角速度传感器被配置为满足βsinθ等于或小于1的条件。
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公开(公告)号：US07762134B2
公开(公告)日：2010-07-27
申请号：US11892818
申请日：2007-08-28
申请人： Takashi Katsumata
发明人： Takashi Katsumata
IPC分类号： G01P9/04
CPC分类号： G01P1/023 , G01C19/5719 , G01P15/125
摘要： A dynamic quantity sensor includes a base, a sensor chip made of a rectangular board having a corner portion, and a bump. The sensor chip includes a detector, and a plurality of pads. The detector has a movable part, which is displaceable when a dynamic quantity is applied thereto, and detects the dynamic quantity based on a capacitance variation in accordance with a displacement of the movable part. The bump connects the plurality of pads of the sensor chip and the base. The corner portion of the sensor chip is released from the base such that the plurality of pads of the sensor chip is arranged at a location a predetermined distance from the corner portion of the sensor chip.
摘要翻译： 动态量传感器包括基座，由具有拐角部分的矩形板制成的传感器芯片和凸块。 传感器芯片包括检测器和多个焊盘。 检测器具有可动部，当向其施加动态量时可移动部，并且根据可动部的位移，基于电容变化检测动态量。 凸块连接传感器芯片和基座的多个焊盘。 传感器芯片的角部从基座释放，使得传感器芯片的多个焊盘布置在距传感器芯片的角部预定距离的位置处。
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公开(公告)号：US07007550B2
公开(公告)日：2006-03-07
申请号：US10806278
申请日：2004-03-23
申请人： Minekazu Sakai , Takashi Katsumata
发明人： Minekazu Sakai , Takashi Katsumata
IPC分类号： G01P15/10 , G01P15/125
CPC分类号： G01P15/18 , G01P15/125 , G01P2015/082
摘要： In a semiconductor dynamic quantity sensor, a mass serving as a weight portion for detecting application of a dynamic quantity is divided into three masses (301, 302, 303) in series. The masses (301, 302, 303) thus divided are connected to one another by connecting beams (CB1, CB2, CB3, CB4). The masses (301, 302, 303) located at both the end portions are supported through beams (B1, B2, B3, B4) by a semiconductor substrate (1) so as to be allowed to be displaced in the direction orthogonal to the connection direction of the masses. The center mass (302) connected to the masses (301, 302, 303) through the connecting beams (CB1, CB2, CB3, CB4) is allowed to be displaced only in the connecting direction of the masses by the connecting beams (CB1, CB2, CB3, CB4).
摘要翻译： 在半导体动态量传感器中，用作检测动态量的应用的重量部分的质量被串联分成三个质量（301,302,303）。 这样被分割的质量块（301,302,303）通过连接梁（CB 1，CB 2，CB 3，CB 4）相互连接。 位于两个端部的质量块（301,302,303）通过半导体衬底（1）通过光束（B 1，B 2，B 3，B 4）支撑，以便允许其在方向 正交于质量的连接方向。 通过连接梁（CB 1，CB 2，CB 3，CB 4）连接到质量块（301,302,303）的中心质量块（302）仅通过连接件在质量块的连接方向上移位 梁（CB 1，CB 2，CB 3，CB 4）。
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公开(公告)号：US20080245296A1
公开(公告)日：2008-10-09
申请号：US11569507
申请日：2005-03-23
IPC分类号： B05B7/24
CPC分类号： B05B3/1057 , B05B3/1014 , B05B3/1064
摘要： A coating machine is capable of reducing VOC and CO2 by atomizing a paint to increase depositing efficiency without lowering production efficiency and the rotary atomizing head of the coating machine. The coating machine includes the rotary atomizing head in which a paint chamber receiving the supply of paint is formed on the rear side thereof. A plurality of rims formed in a roughly truncated conical shape for extending the paint flowing out of the paint chamber by a centrifugal force and atomizing the paint at the tip thereof are fitted in the rotary atomizing head overlappingly at specific clearances. The clearances are opened to the peripheral surface part of the paint chamber. Accordingly, VOC and CO2 can be reduced by reducing the total jetted amount of paint to enable the atomization of the paint at low rotating speeds so as the increase the deposit efficiency.
摘要翻译： 涂布机能够通过雾化涂料来降低VOC和CO 2 2，从而提高沉积效率而不降低生产效率和涂布机的旋转雾化头。 涂布机包括旋转雾化头，其中在其后侧形成有接收油漆供应的涂料室。 形成为大致圆锥形状的多个边缘，用于通过离心力延伸从油漆室流出的油漆并使其顶端的油漆雾化，以特定间隙重叠地安装在旋转雾化头中。 间隙向油漆室的外周表面部分打开。 因此，可以通过减少涂料的总喷射量来降低VOC和CO 2 2，从而能够以低转速使涂料雾化，从而提高沉积效率。
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