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公开(公告)号：US07459833B2
公开(公告)日：2008-12-02
申请号：US11054404
申请日：2005-02-10
申请人： Takashi Kawakubo , Ryoichi Ohara , Tomio Ono , Toshihiko Nagano , Michihiko Nishigaki , Takaaki Yasumoto , Kazuhide Abe , Kenya Sano
发明人： Takashi Kawakubo , Ryoichi Ohara , Tomio Ono , Toshihiko Nagano , Michihiko Nishigaki , Takaaki Yasumoto , Kazuhide Abe , Kenya Sano
IPC分类号： H01L41/08
CPC分类号： H01G7/06 , H01H2057/006 , H01L41/0933 , H01L41/094
摘要： A thin film piezoelectric actuator comprises a driving part at least one end of which is supported by an anchor portion. The driving part includes: a piezoelectric film, a first lower electrode provided under a first region of the piezoelectric film, a second lower electrode provided under a second region different from the first region of the piezoelectric film, a first upper electrode provided opposite to the first lower electrode on the piezoelectric film, a second upper electrode provided opposite to the second lower electrode on the piezoelectric film, a first connection part that electrically connects the first lower electrode and the second upper electrode via a first via hole formed in the piezoelectric film, and a second connection part that electrically connects the second lower electrode and the first upper electrode via a second via hole formed in the piezoelectric film.
摘要翻译： 薄膜压电致动器包括驱动部件，其至少一端由锚固部分支撑。 驱动部包括：压电膜，设置在压电膜的第一区域下方的第一下电极，设置在与压电膜的第一区不同的第二区域下方的第二下电极，与第一下电极相对设置的第一上电极 压电膜上的第一下电极，与压电膜上的第二下电极相对设置的第二上电极，经由形成在压电膜中的第一通孔电连接第一下电极和第二上电极的第一连接部 以及第二连接部，其经由形成在所述压电膜中的第二通路孔电连接所述第二下部电极和所述第一上部电极。
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公开(公告)号：US20070278900A1
公开(公告)日：2007-12-06
申请号：US11781667
申请日：2007-07-23
申请人： Takashi KAWAKUBO , Ryoichi Ohara , Tomio Ono , Toshihiko Nagano , Michihiko Nishigaki , Takaaki Yasumoto , Kazuhide Abe , Kenya Sano
发明人： Takashi KAWAKUBO , Ryoichi Ohara , Tomio Ono , Toshihiko Nagano , Michihiko Nishigaki , Takaaki Yasumoto , Kazuhide Abe , Kenya Sano
IPC分类号： H01L41/08
CPC分类号： H01G7/06 , H01H2057/006 , H01L41/0933 , H01L41/094
摘要： A thin film piezoelectric actuator comprises a driving part at least one end of which is supported by an anchor portion. The driving part includes: a piezoelectric film, a first lower electrode provided under a first region of the piezoelectric film, a second lower electrode provided under a second region different from the first region of the piezoelectric film, a first upper electrode provided opposite to the first lower electrode on the piezoelectric film, a second upper electrode provided opposite to the second lower electrode on the piezoelectric film, a first connection part that electrically connects the first lower electrode and the second upper electrode via a first via hole formed in the piezoelectric film, and a second connection part that electrically connects the second lower electrode and the first upper electrode via a second via hole formed in the piezoelectric film.
摘要翻译： 薄膜压电致动器包括驱动部件，其至少一端由锚固部分支撑。 驱动部包括：压电膜，设置在压电膜的第一区域下方的第一下电极，设置在与压电膜的第一区不同的第二区域下方的第二下电极，与第一下电极相对设置的第一上电极 压电膜上的第一下电极，与压电膜上的第二下电极相对设置的第二上电极，经由形成在压电膜中的第一通孔电连接第一下电极和第二上电极的第一连接部 以及第二连接部，其经由形成在所述压电膜中的第二通路孔电连接所述第二下部电极和所述第一上部电极。
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公开(公告)号：US07675222B2
公开(公告)日：2010-03-09
申请号：US11781667
申请日：2007-07-23
申请人： Takashi Kawakubo , Ryoichi Ohara , Tomio Ono , Toshihiko Nagano , Michihiko Nishigaki , Takaaki Yasumoto , Kazuhide Abe , Kenya Sano
发明人： Takashi Kawakubo , Ryoichi Ohara , Tomio Ono , Toshihiko Nagano , Michihiko Nishigaki , Takaaki Yasumoto , Kazuhide Abe , Kenya Sano
IPC分类号： H01L41/08
CPC分类号： H01G7/06 , H01H2057/006 , H01L41/0933 , H01L41/094
摘要： A thin film piezoelectric actuator comprises a driving part at least one end of which is supported by an anchor portion. The driving part includes: a piezoelectric film, a first lower electrode provided under a first region of the piezoelectric film, a second lower electrode provided under a second region different from the first region of the piezoelectric film, a first upper electrode provided opposite to the first lower electrode on the piezoelectric film, a second upper electrode provided opposite to the second lower electrode on the piezoelectric film, a first connection part that electrically connects the first lower electrode and the second upper electrode via a first via hole formed in the piezoelectric film, and a second connection part that electrically connects the second lower electrode and the first upper electrode via a second via hole formed in the piezoelectric film.
摘要翻译： 薄膜压电致动器包括驱动部件，其至少一端由锚固部分支撑。 驱动部包括：压电膜，设置在压电膜的第一区域下方的第一下电极，设置在与压电膜的第一区不同的第二区域下方的第二下电极，与第一下电极相对设置的第一上电极 压电膜上的第一下电极，与压电膜上的第二下电极相对设置的第二上电极，经由形成在压电膜中的第一通孔电连接第一下电极和第二上电极的第一连接部 以及第二连接部，其经由形成在所述压电膜中的第二通路孔电连接所述第二下部电极和所述第一上部电极。
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4.发明授权Piezoelectric MEMS element and tunable filter equipped with the piezoelectric MEMS element 失效配有压电MEMS元件的压电MEMS元件和可调谐滤波器公开(公告)号：US07471031B2
公开(公告)日：2008-12-30
申请号：US11229694
申请日：2005-09-20
IPC分类号： H01L41/09
CPC分类号： H03H9/542 , H01G5/16 , H01H57/00 , H01H2057/006 , H03H9/605 , H03H2007/008 , H03H2210/025 , H03H2210/033
摘要： In a MEMS type variable capacity having a piezoelectric driving mechanism, a movable head having movable electrodes are arranged thereon, stationary electrodes is positioned to face the movable electrodes, and a piezoelectric driving beam structure is joined to the movable head and have one end fixed to the substrate. The movable electrode and the stationary electrode form a variable capacity. In the variable capacity, the distance and capacitance between the movable electrode and the stationary electrode of the variable capacity can be maintained constant so as to realize a reproducibility and a reliable controllability.
摘要翻译： 在具有压电驱动机构的MEMS型可变容量中，具有可移动电极的可动头布置在其上，固定电极被定位成面对可动电极，并且压电驱动梁结构接合到可动头部，并且一端固定到 底物。 可动电极和固定电极形成可变容量。 在可变容量中，可变电容和可变电容的固定电极之间的距离和电容可以保持恒定，从而实现再现性和可靠的可控性。
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公开(公告)号：US20050194867A1
公开(公告)日：2005-09-08
申请号：US11054404
申请日：2005-02-10
申请人： Takashi Kawakubo , Ryoichi Ohara , Tomio Ono , Toshihiko Nagano , Michihiko Nishigaki , Takaaki Yasumoto , Kazuhide Abe , Kenya Sano
发明人： Takashi Kawakubo , Ryoichi Ohara , Tomio Ono , Toshihiko Nagano , Michihiko Nishigaki , Takaaki Yasumoto , Kazuhide Abe , Kenya Sano
IPC分类号： H01L41/09 , H01G7/06 , H01L41/053 , H01L41/08 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/29 , H01L41/316
CPC分类号： H01G7/06 , H01H2057/006 , H01L41/0933 , H01L41/094
摘要： A thin film piezoelectric actuator comprises a driving part at least one end of which is supported by an anchor portion. The driving part includes: a piezoelectric film, a first lower electrode provided under a first region of the piezoelectric film, a second lower electrode provided under a second region different from the first region of the piezoelectric film, a first upper electrode provided opposite to the first lower electrode on the piezoelectric film, a second upper electrode provided opposite to the second lower electrode on the piezoelectric film, a first connection part that electrically connects the first lower electrode and the second upper electrode via a first via hole formed in the piezoelectric film, and a second connection part that electrically connects the second lower electrode and the first upper electrode via a second via hole formed in the piezoelectric film.
摘要翻译： 薄膜压电致动器包括驱动部件，其至少一端由锚固部分支撑。 驱动部包括：压电膜，设置在压电膜的第一区域下方的第一下电极，设置在与压电膜的第一区不同的第二区域下方的第二下电极，与第一下电极相对设置的第一上电极 压电膜上的第一下电极，与压电膜上的第二下电极相对设置的第二上电极，经由形成在压电膜中的第一通孔电连接第一下电极和第二上电极的第一连接部 以及第二连接部，其经由形成在所述压电膜中的第二通路孔电连接所述第二下部电极和所述第一上部电极。
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6.发明申请Piezoelectric MEMS element and tunable filter equipped with the piezoelectric MEMS element 失效配有压电MEMS元件的压电MEMS元件和可调谐滤波器公开(公告)号：US20060067840A1
公开(公告)日：2006-03-30
申请号：US11229694
申请日：2005-09-20
CPC分类号： H03H9/542 , H01G5/16 , H01H57/00 , H01H2057/006 , H03H9/605 , H03H2007/008 , H03H2210/025 , H03H2210/033
摘要： In a MEMS type variable capacity having a piezoelectric driving mechanism, a movable head having movable electrodes are arranged thereon, stationary electrodes is positioned to face the movable electrodes, and a piezoelectric driving beam structure is joined to the movable head and have one end fixed to the substrate. The movable electrode and the stationary electrode form a variable capacity. In the variable capacity, the distance and capacitance between the movable electrode and the stationary electrode of the variable capacity can be maintained constant so as to realize a reproducibility and a reliable controllability.
摘要翻译： 在具有压电驱动机构的MEMS型可变容量中，具有可移动电极的可动头布置在其上，固定电极被定位成面对可动电极，并且压电驱动梁结构接合到可动头部，并且一端固定到 底物。 可动电极和固定电极形成可变容量。 在可变容量中，可变电容和可变电容的固定电极之间的距离和电容可以保持恒定，从而实现再现性和可靠的可控性。
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公开(公告)号：US08038890B2
公开(公告)日：2011-10-18
申请号：US12038568
申请日：2008-02-27
IPC分类号： G01D15/00 , G11B5/127 , H01L21/00 , H01L21/302 , H01L21/461
CPC分类号： H01H57/00 , B81B3/0021 , H01G5/16 , H01G5/18 , H01H59/0009 , H01H2057/006 , H01L41/0933 , H01L41/094
摘要： A piezoelectric-driven MEMS device can be fabricated reliably and consistently. The piezoelectric-driven MEMS device includes: a movable flat beam having a piezoelectric film disposed above a substrate with a recessed portion such that the piezoelectric film is bridged over the recessed portion, piezoelectric drive mechanisms disposed at both ends of the piezoelectric film and configured to drive the piezoelectric film, and a first electrode disposed at the center of the substrate-side of the piezoelectric film, and a second electrode disposed on a flat part of the recessed portion of the substrate and facing the first electrode of the movable flat beam.
摘要翻译： 可以可靠且一致地制造压电驱动的MEMS器件。 压电驱动MEMS器件包括：可移动平板光束，其具有设置在具有凹部的基板上方的压电膜，使得压电膜桥接在凹部上，压电驱动机构设置在压电膜的两端并被配置为 驱动所述压电膜，以及设置在所述压电膜的基板侧的中心的第一电极，以及设置在所述基板的所述凹部的平坦部分上并且面对所述可动平坦梁的所述第一电极的第二电极。
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8.发明授权Micro-mechanical device, micro-switch, variable capacitor high frequency circuit and optical switch 失效微机械装置，微动开关，可变电容高频电路和光开关公开(公告)号：US07567018B2
公开(公告)日：2009-07-28
申请号：US11400407
申请日：2006-04-10
IPC分类号： H01L41/08
CPC分类号： B81B3/0021 , B81B2201/014 , B81B2201/045 , G02B26/0858 , H01G5/18 , H01G5/40 , H01H2057/006
摘要： A micro-mechanical device includes a first piezoelectric actuator including a piezoelectric film, and lower and upper electrodes interleaving the piezoelectric film, and extending from a first fixing part on a substrate to a first operating end, and a second piezoelectric actuator connected to the first piezoelectric actuator via a connecting part at the first operating end of the first piezoelectric actuator, and extending from the connecting part to a second operating end, the second piezoelectric actuator being shorter than the first piezoelectric actuator.
摘要翻译： 微机械装置包括：第一压电致动器，其包括压电膜，下电极和上电极交错压电膜，并从衬底上的第一固定部分延伸到第一操作端;以及第二压电致动器， 压电致动器经由第一压电致动器的第一操作端处的连接部分并且从连接部分延伸到第二操作端，第二压电致动器比第一压电致动器短。
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公开(公告)号：US07420320B2
公开(公告)日：2008-09-02
申请号：US11946913
申请日：2007-11-29
申请人： Kenya Sano , Ryoichi Ohara , Naoko Yanase , Takaaki Yasumoto , Kazuhiko Itaya , Takashi Kawakubo , Hiroshi Toyoda , Masahiko Hasunuma , Toshihiko Nagano , Kazuhide Abe , Michihiko Nishigaki , Hironobu Shibata
发明人： Kenya Sano , Ryoichi Ohara , Naoko Yanase , Takaaki Yasumoto , Kazuhiko Itaya , Takashi Kawakubo , Hiroshi Toyoda , Masahiko Hasunuma , Toshihiko Nagano , Kazuhide Abe , Michihiko Nishigaki , Hironobu Shibata
CPC分类号： H03H9/02015 , H01H2057/006 , H01L41/0477 , H01L41/094 , H01L41/316 , H01L41/319 , H03H3/02 , H03H9/02094 , H03H9/173 , H03H9/174 , H03H9/175 , H03H9/542 , H03H9/582 , H03H9/605 , H03H2003/021 , H03H2003/023 , H03H2003/025 , Y10T29/42 , Y10T29/435 , Y10T29/49002 , Y10T29/49005 , Y10T29/49117 , Y10T29/49155
摘要： A piezoelectric thin film device includes an amorphous metal film disposed on a substrate and a piezoelectric film disposed on the amorphous metal. One of crystal axis of the piezoelectric film is aligned in a direction perpendicular to a surface of the amorphous metal.
摘要翻译： 压电薄膜器件包括设置在衬底上的非晶金属膜和设置在非晶态金属上的压电膜。 压电膜的晶轴之一在垂直于非晶态金属表面的方向上排列。
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公开(公告)号：US20050242687A1
公开(公告)日：2005-11-03
申请号：US11115107
申请日：2005-04-27
IPC分类号： B81B3/00 , H01G5/18 , H01G7/06 , H01H57/00 , H01H59/00 , H01L41/08 , H01L41/09 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/29 , H02N1/00 , H03H9/24
CPC分类号： H01H57/00 , B81B3/0021 , H01G5/16 , H01G5/18 , H01H59/0009 , H01H2057/006 , H01L41/0933 , H01L41/094
摘要： A piezoelectric-driven MEMS device can be fabricated reliably and consistently. The piezoelectric-driven MEMS device includes: a movable flat beam having a piezoelectric film disposed above a substrate with a recessed portion such that the piezoelectric film is bridged over the recessed portion, piezoelectric drive mechanisms disposed at both ends of the piezoelectric film and configured to drive the piezoelectric film, and a first electrode disposed at the center of the substrate-side of the piezoelectric film, and a second electrode disposed on a flat part of the recessed portion of the substrate and facing the first electrode of the movable flat beam.
摘要翻译： 可以可靠且一致地制造压电驱动的MEMS器件。 压电驱动MEMS器件包括：可移动平板光束，其具有设置在具有凹部的基板上方的压电膜，使得压电膜桥接在凹部上，压电驱动机构设置在压电膜的两端并被配置为 驱动所述压电膜，以及设置在所述压电膜的基板侧的中心的第一电极，以及设置在所述基板的所述凹部的平坦部分上并且面对所述可动平坦梁的所述第一电极的第二电极。
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