公开(公告)号：US20130292152A1

公开(公告)日：2013-11-07

申请号：US13977968

申请日：2011-12-26

申请人： Takashi Kayamoto ,  Shinji Saito ,  Yuichiro Yamauchi

发明人： Takashi Kayamoto ,  Shinji Saito ,  Yuichiro Yamauchi

IPC分类号： H01B5/02

CPC分类号： H01B5/02 ,  C23C24/04 ,  H01B1/02

摘要： A conductive member disposed as a power supply line and the like includes: a first conductive material and a second conductive material, at least one of which includes a conductive material having electrical resistance lower than that of aluminum; and a metal film formed by depositing powder including a metal, which is accelerated together with a gas and sprayed, in a sold state, onto a surface of a butting part, where the first conductive material and the second conductive material are butted against each other.

摘要翻译： 设置为电源线等的导电部件包括：第一导电材料和第二导电材料，其至少一个包括具有比铝的电阻低的导电材料; 以及金属膜，其通过沉积包括金属的粉末形成，所述金属与气体一起被加速并以销售状态喷射到对接部分的表面上，其中所述第一导电材料和所述第二导电材料彼此抵接 。

公开(公告)号：US09070487B2

公开(公告)日：2015-06-30

申请号：US13977968

申请日：2011-12-26

申请人： Takashi Kayamoto ,  Shinji Saito ,  Yuichiro Yamauchi

发明人： Takashi Kayamoto ,  Shinji Saito ,  Yuichiro Yamauchi

IPC分类号： B32B15/00 ,  H01B5/02 ,  C23C24/04 ,  H01B1/02

CPC分类号： H01B5/02 ,  C23C24/04 ,  H01B1/02

摘要： A conductive member disposed as a power supply line and the like includes: a first conductive material and a second conductive material, at least one of which includes a conductive material having electrical resistance lower than that of aluminum; and a metal film formed by depositing powder including a metal, which is accelerated together with a gas and sprayed, in a sold state, onto a surface of a butting part, where the first conductive material and the second conductive material are butted against each other.

摘要翻译： 设置为电源线等的导电部件包括：第一导电材料和第二导电材料，其至少一个包括具有比铝的电阻低的导电材料; 以及金属膜，其通过沉积包括金属的粉末形成，所述金属与气体一起被加速并以销售状态喷射到对接部分的表面上，其中所述第一导电材料和所述第二导电材料彼此抵接 。

公开(公告)号：US06687113B2

公开(公告)日：2004-02-03

申请号：US09840691

申请日：2001-04-20

申请人： Shinji Saito ,  Toshihiko Hanamachi ,  Takashi Kayamoto

发明人： Shinji Saito ,  Toshihiko Hanamachi ,  Takashi Kayamoto

IPC分类号： B23B3128

CPC分类号： B23Q3/154 ,  H01L21/6831 ,  H01L21/6833 ,  H02N13/00 ,  Y10T279/23

摘要： An electrostatic chuck comprising a ceramic chuck body having an adsorption face and an electrode for applying a potential to the adsorption face, the chuck body including a ceramic consisting mainly of MgO. The ceramic that consists mainly of MgO is doped with one or more additives selected from a group including TiC, TiO2, ZrO2, V2O5, Nb2O5, Ta2O5, Co3O4, Cr2O3, and NiO so that its electrical resistivity in a working temperature region ranges from 1×108 to 1×1012 &OHgr;·cm. This electrostatic chuck is highly resistant to a corrosive environment such as fluoride plasma.

摘要翻译： 一种静电吸盘，包括具有吸附面的陶瓷卡盘体和用于向吸附面施加电位的电极，卡盘主体包括主要由MgO组成的陶瓷。 主要由MgO组成的陶瓷掺杂有选自TiC，TiO2，ZrO2，V2O5，Nb2O5，Ta2O5，Co3O4，Cr2O3和NiO的一种或多种添加剂，使得其在工作温度范围内的电阻率范围为1×10 8至1×10 12Ω·cm。 这种静电卡盘对诸如氟化物等离子体的腐蚀性环境具有很高的抵抗力。

公开(公告)号：US6074604A

公开(公告)日：2000-06-13

申请号：US87205

申请日：1998-05-29

申请人： Shinji Saito ,  Takashi Kayamoto

发明人： Shinji Saito ,  Takashi Kayamoto

IPC分类号： B23K1/19 ,  B23K35/30 ,  C22C9/02 ,  C22C9/06 ,  C22C19/03 ,  C22C19/05 ,  C22C30/00

CPC分类号： B23K35/3033 ,  B23K35/302 ,  C22C9/02 ,  C22C9/06 ,  B23K2203/05

摘要： Provided is a brazing filler metal for brazing stainless steel at low temperatures so as not to adversely affect the properties of the stainless steel, and without producing any brittleness in the brazed joint. The brazing filler metal essentially consists of 5 to 30 weight % of Mn or Sn, 20 to 70 weight % of Cu, inevitable impurities, and a balance of Ni. The brazing filler metal may further include no more than 3 weight % of Cr and/or Si.

摘要翻译： 本发明提供一种用于低温钎焊不锈钢的钎料，以不会不利地影响不锈钢的性能，并且不会在钎焊接头中产生任何脆性。 钎焊料基本上由Mn或Sn的5〜30重量％，Cu的20〜70重量％，不可避免的杂质和余量的Ni组成。 该钎料可以进一步包括不超过3重量％的Cr和/或Si。

公开(公告)号：US20130056187A1

公开(公告)日：2013-03-07

申请号：US13696156

申请日：2011-04-19

申请人： Takashi Kayamoto ,  Gou Takahara

发明人： Takashi Kayamoto ,  Gou Takahara

IPC分类号： F28F3/12 ,  B05D1/12

CPC分类号： C23C24/04 ,  F28D1/0478 ,  F28F1/04 ,  F28F7/02 ,  F28F21/08 ,  F28F2275/02 ,  H01L21/67109

摘要： A temperature regulator or the like that can circulate a desired thermal medium and efficiently transfer the heat of the thermal medium is provided. The temperature regulator includes a pipe that is made of a metal or alloy with corrosion resistance to a predetermined thermal medium and that serves as a flow path for circulating the thermal medium; and a plate in which the pipe is buried, wherein the plate is formed by accelerating powder made of aluminum (Al) or alloy together with a gas and thereafter spraying the powder remaining in a solid phase toward the pipe so that the powder is deposited on the pipe.

摘要翻译： 提供了可以循环期望的热介质并有效地传递热介质的热量的温度调节器等。 温度调节器包括由具有对预定热介质的耐腐蚀性的金属或合金制成并用作循环热介质的流动通道的管道; 以及其中埋设管的板，其中通过将由铝（Al）或合金制成的粉末与气体一起加速形成板，然后将残留在固相中的粉末喷射到管道上，使得粉末沉积在 管道。

公开(公告)号：US20130043635A1

公开(公告)日：2013-02-21

申请号：US13695647

申请日：2011-04-19

申请人： Takashi Kayamoto ,  Satoshi Hirano

发明人： Takashi Kayamoto ,  Satoshi Hirano

IPC分类号： H01L21/683 ,  B05D1/12

CPC分类号： H01L21/67103 ,  C23C16/4586 ,  H01L21/68792

摘要： A stage heater and a method of manufacturing a shaft capable of suppressing heat transfer from a heating substrate toward the shaft. The stage heater includes: a heating substrate made of aluminum or an alloy containing aluminum; and a shaft that is bonded to one surface of the heating substrate and supports the heating substrate. The shaft includes: a pipe made of a metal having a lower heat conductivity than a material of the heating substrate; and a bonding layer formed on a side of the pipe to be bonded to the heating substrate by accelerating a powder material of aluminum or a powder material of an alloy containing aluminum together with a gas and blowing the powder material while being maintained in a solid phase to the pipe so as to deposit thereon.

摘要翻译： 一种舞台加热器和制造能够抑制从加热基板朝向轴的热传递的轴的方法。 舞台加热器包括：由铝制成的加热基板或含有铝的合金; 以及轴，其结合到加热基板的一个表面并支撑加热基板。 轴包括：具有比加热基板的材料低的导热性的由金属制成的管; 以及通过将铝的粉末材料或含有铝的合金的粉末材料与气体一起加速并且将粉末材料保持在固相中来加热粉末材料而形成在待加热基板的管的一侧上的接合层 到管子上以便沉积在其上。

公开(公告)号：US07220319B2

公开(公告)日：2007-05-22

申请号：US10413136

申请日：2003-04-15

申请人： Yasumi Sago ,  Kazuaki Kaneko ,  Takuji Okada ,  Masayoshi Ikeda ,  Toshihiro Tachikawa ,  Tadashi Inokuchi ,  Takashi Kayamoto

发明人： Yasumi Sago ,  Kazuaki Kaneko ,  Takuji Okada ,  Masayoshi Ikeda ,  Toshihiro Tachikawa ,  Tadashi Inokuchi ,  Takashi Kayamoto

IPC分类号： H01L21/00 ,  C23C16/00

CPC分类号： B25B11/002 ,  Y10T279/23

摘要： This application discloses the structure of an ESC stage where a chucking electrode is sandwiched by a moderation layer and a covering layer. The moderation layer and the covering layer have the thermal expansion coefficients between the dielectric plate and the chucking electrode. This application also discloses the structure of an ESC stage where a chucking electrode is sandwiched by a moderation layer and a covering layer, which have internal stress directed oppositely to that of the chucking electrode. This application further discloses a substrate processing apparatus for carrying out a process onto a substrate as the substrate is maintained at a temperature higher than room temperature, comprising the electrostatic chucking stage for holding the substrate during the process.

摘要翻译： 本申请公开了一种ESC阶段的结构，其中夹持电极被中间层和覆盖层夹持。 调节层和覆盖层在电介质板和夹持电极之间具有热膨胀系数。 本申请还公开了一种ESC台的结构，其中夹持电极被夹持在与夹持电极相反的内部应力的调节层和覆盖层。 本申请进一步公开了一种用于在基板保持在高于室温的温度下进行基板上的处理的基板处理装置，其包括在该过程期间保持基板的静电夹持台。

公开(公告)号：US20130072075A1

公开(公告)日：2013-03-21

申请号：US13642624

申请日：2011-04-19

申请人： Takashi Kayamoto

发明人： Takashi Kayamoto

IPC分类号： H01R13/02 ,  H01R43/16

CPC分类号： C23C24/04 ,  C23C28/021 ,  C23C28/023 ,  C23C28/025 ,  H01R4/20 ,  H01R13/03 ,  H01R43/16 ,  H01R43/28

摘要： Provided are a conductive member that is connectable to aluminum metal and can suppress a decrease in electrical conductivity, and a method of manufacturing the same. The conductive member is formed of aluminum or an alloy containing aluminum, and includes an electrical wire connection unit and a fastening unit, which are a base provided with a connection surface to be connected to another member, and a connection layer formed on the base by accelerating a powder of a metal or alloy, which has a lower ionization tendency than the base and has electrical conductivity equal to that of the base or higher, together with gas, and spraying and depositing the powder in the solid state on the connection surface.

摘要翻译： 提供一种可连接到铝金属并可以抑制导电性降低的导电构件及其制造方法。 导电构件由铝或含有铝的合金形成，并且包括电线连接单元和紧固单元，该电线连接单元和紧固单元是设置有与另一构件连接的连接表面的基座，以及在基座上形成的连接层， 加速金属或合金的粉末，其具有比碱基更低的电离倾向并且具有等于或高于碱的电导率等于气体的粉末，并且在固体状态下在连接表面上喷射和沉积粉末。

公开(公告)号：US06535371B1

公开(公告)日：2003-03-18

申请号：US09299807

申请日：1999-04-26

申请人： Takashi Kayamoto ,  Toshihiko Hanamachi ,  Tadashi Inokuchi ,  Ryusuke Adachi

发明人： Takashi Kayamoto ,  Toshihiko Hanamachi ,  Tadashi Inokuchi ,  Ryusuke Adachi

IPC分类号： H02H2300

CPC分类号： H01L21/67103 ,  H01L21/6833 ,  H01L21/68757 ,  H05B3/143

摘要： A combination of a ceramic layer essentially consisting of magnesia ceramic material and a metallic layer is proposed for a layered assembly for use in applications such as electrostatic chucks which are subjected to thermal stress. A combination of magnesia ceramic material and ferritic stainless steel is preferred because of the similarities of the thermal expansion coefficients of these materials. When a larger difference in the thermal expansion coefficients exists between the selected combination of materials, a damper layer having an intermediate thermal expansion coefficient may be used so as to accommodate the difference in the thermal expansion of the two layers.

摘要翻译： 提出了一种基本上由氧化镁陶瓷材料和金属层组成的陶瓷层的组合用于分层组件，用于诸如受到热应力的静电卡盘的应用。 由于这些材料的热膨胀系数的相似性，因此优选氧化镁陶瓷材料和铁素体不锈钢的组合。 当选择的材料组合之间存在较大的热膨胀系数差时，可以使用具有中间热膨胀系数的阻尼层，以适应两层热膨胀的差异。

公开(公告)号：US09556524B2

公开(公告)日：2017-01-31

申请号：US13696156

申请日：2011-04-19

申请人： Takashi Kayamoto ,  Gou Takahara

发明人： Takashi Kayamoto ,  Gou Takahara

IPC分类号： F28F3/12 ,  B23P15/26 ,  B05D1/12 ,  C23C24/04 ,  F28D1/047 ,  F28F1/04 ,  F28F7/02 ,  F28F21/08 ,  H01L21/67

CPC分类号： C23C24/04 ,  F28D1/0478 ,  F28F1/04 ,  F28F7/02 ,  F28F21/08 ,  F28F2275/02 ,  H01L21/67109

摘要： A temperature regulator or the like that can circulate a desired thermal medium and efficiently transfer the heat of the thermal medium is provided. The temperature regulator includes a pipe that is made of a metal or alloy with corrosion resistance to a predetermined thermal medium and that serves as a flow path for circulating the thermal medium; and a plate in which the pipe is buried, wherein the plate is formed by accelerating powder made of aluminum (Al) or alloy together with a gas and thereafter spraying the powder remaining in a solid phase toward the pipe so that the powder is deposited on the pipe.

摘要翻译： 提供了可以循环期望的热介质并有效地传递热介质的热量的温度调节器等。 温度调节器包括由具有对预定热介质的耐腐蚀性的金属或合金制成并用作循环热介质的流动通道的管道; 以及其中埋设管的板，其中通过将由铝（Al）或合金制成的粉末与气体一起加速形成板，然后将残留在固相中的粉末喷射到管道上，使得粉末沉积在 管道。