摘要:
A semiconductor device having a memory cell portion and a peripheral circuit portion is provided which achieves suppression of reduction of punch-through margin of transistors in the peripheral circuit portion and offers ensured short margin and enhanced current driving capability. After a high-temperature (800° C. to 1000° C.) thermal treatment that is performed to improve burying characteristics after formation of an interlayer insulating film, and also after a high-temperature (800° C. to 1000° C.) thermal treatment that is performed to enhance refresh characteristics after formation of contact plugs in the memory cell portion, a silicon oxide film and insulating film formed on a semiconductor substrate in the peripheral circuit portion are removed by anisotropic dry-etching, leaving the insulating film as sidewall insulating films on sides of sidewall nitride films. Then an impurity ion implantation process is performed using gate interconnections as implant masks to form source/drain regions in the peripheral circuit portion.
摘要:
A smile oxide film, serving as a gate oxide film, is formed under a three-layer poly-metal gate consisting of a doped polysilicon layer, a tungsten layer, and a SiON layer. The smile oxide film has a first region located beneath an edge of the poly-metal gate and a second region located beneath a central portion of the poly-metal gate. A film thickness of the first region is larger than a film thickness of the second region. An anti-oxidizing film, having a small oxygen diffusion rate compared with the polysilicon layer, entirely covers the poly-metal gate without exposing.
摘要:
The electric reel for fishing includes a spool rotatably supported between the side plates of a reel body and a driving motor arranged on the reel body for driving and rotating the spool. A concave part is formed on the reel body, an armature is rotatably arranged inside the concave part and a magnet constituting a magnetic field is mounted on the inner surface of the concave part opposed to the armature to constitute a driving motor for driving and rotating the spool.
摘要:
An insulating film provided below a floating gate electrode includes a first insulating film located at both end portions below the floating gate electrode, and a second insulating film sandwiched between the first insulating films and located in a middle portion below the floating gate electrode. The first insulating film and the second insulating film are formed in separate steps, and the first insulating film is thicker than the second insulating film. With this structure, when an insulating film is provided between the floating gate electrode and a silicon substrate to have a thickness more increased at its end portion than at its middle portion, the thickness can be increased more freely and a degree of the increase can be controlled more readily.
摘要:
An electric fishing reel has a power transmission mechanism for transmitting rotational driving force based on a drive motor and a manual handle to a spool; and a clutch mechanism for switching the power transmission mechanism between a power transmitting state and a power cutoff state. The power transmission mechanism includes a planetary gear mechanism disposed on the drive motor; a first rotor with which the planetary gear mesh; a second rotor which is driven and coupled to the first rotor through a belt; and a clutch actuating member fitted and rotationally locked in the second rotor to be movable in an axial direction and is moved in the axial direction. An engaging portion of the clutch actuating member is capable of switching the power transmission mechanism between a power transmitting state and a power cutoff state by engaging with or disengaging from a retaining portion of the spool.
摘要:
An insulating film provided below a floating gate electrode includes a first insulating film located at both end portions below the floating gate electrode, and a second insulating film sandwiched between the first insulating films and located in a middle portion below the floating gate electrode. The first insulating film and the second insulating film are formed in separate steps, and the first insulating film is thicker than the second insulating film. With this structure, when an insulating film is provided between the floating gate electrode and a silicon substrate to have a thickness more increased at its end portion than at its middle portion, the thickness can be increased more freely and a degree of the increase can be controlled more readily.
摘要:
An insulating film provided below a floating gate electrode includes a first insulating film located at both end portions below the floating gate electrode, and a second insulating film sandwiched between the first insulating films and located in a middle portion below the floating gate electrode. The first insulating film and the second insulating film are formed in separate steps, and the first insulating film is thicker than the second insulating film. With this structure, when an insulating film is provided between the floating gate electrode and a silicon substrate to have a thickness more increased at its end portion than at its middle portion, the thickness can be increased more freely and a degree of the increase can be controlled more readily.
摘要:
A contact plug 26 formed between adjacent two wirings 14 according to a self-aligning manner is provided. An interlayer oxide film 12 is provided on a substrate layer 10 conductive to the bottom face of the contact plug. A lower insulating film 32 formed of a nitride based insulating film is provided so as to cover the entire surface of the interlayer oxide film 12 except for the contact hole portion. A wiring 12, an upper insulating film 16 formed of a nitride based insulating film, and sidewalls 18 formed of a nitride based insulating film are provided over the lower insulating film 32. The contact hole has a diameter larger than the interval defined between the wirings 14 in the same layer as the interlayer oxide film 12.
摘要:
A method of manufacturing semiconductor device having a structure in which the potential of a gate interconnection is not affected by that of a bit line when a dummy pad contact is formed at an end portion of a memory cell, in which no steps are formed in the vicinity of a memory cell end are obtained. The semiconductor device includes dummy pad contacts arranged in a dotted line, which are smaller than a first pad contact in the memory cell body and are opened using a self-alignment method, and a conduction is cut-off in a path leading from the dummy pad contact to the bit line.
摘要:
Disclosed is a catalyst for the oxidative dimerization of toluene, comprising a composition represented by the general formula:Tl.sub.1 M.sub.a M'.sub.b O.sub.cwhereinM represents at least one element selected from the group consisting of beryllium, magnesium, calcium, strontium and barium; M' represents at least one element selected from the group consisting of lithium, sodium, potassium, rubidium, cesium, scandium, yttrium, lanthanum, cerium, praseodymium, neodymium, samarium, europium, gadolinium, terbium, dysprosium, holmium, erbium, thulium, ytterbium, lutetium, titanium, zirconium, hafnium, niobium, tantalum, zinc, aluminum, gallium, indium and antimony;a is 0.05 to 15;b is 0.05 to 15;c is a number determined by the valences of thallium, M and M';with the proviso that the number of alkali metal atoms is at most 20% of the number of total atoms constituting the catalyst except for oxygen when alkali metal is included in M', and a process for producing 1,2-diphenylethane and 1,2-diphenylethylene by the oxidative dimerization of toluene in the presence of a catalyst comprising a composition represented by the above-mentioned general formula.