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    Charged particle beam apparatus and method for charged particle beam adjustment
    1.
    发明申请
    Charged particle beam apparatus and method for charged particle beam adjustment 有权
    带电粒子束装置和带电粒子束调整方法

    公开(公告)号：US20070284542A1

    公开(公告)日：2007-12-13

    申请号：US11715506

    申请日：2007-03-08

    申请人： Takeshi Ogashiwa ,  Mitsugu Sato ,  Atsushi Takane ,  Toshihide Agemura ,  Yuusuke Narita ,  Takeharu Shichiji ,  Shinichi Tomita ,  Sukehiro Ito ,  Junichi Katane

    发明人： Takeshi Ogashiwa ,  Mitsugu Sato ,  Atsushi Takane ,  Toshihide Agemura ,  Yuusuke Narita ,  Takeharu Shichiji ,  Shinichi Tomita ,  Sukehiro Ito ,  Junichi Katane

    IPC分类号： G01N21/00

    CPC分类号： G01N23/22 ,  H01J37/1471 ,  H01J37/28 ,  H01J2237/1501

    摘要： A charged particle beam apparatus facilitating adjusting the beam center axis of a charged particle beam in a case where optical conditions are modified or in a case where the beam center axis of the charged particle beam is moved due to state variation of the apparatus. When the beam center axis of a primary charged particle beam is adjusted with a deflector (aligner), a processing step (1) for measuring the sensitivity of the aligner and a processing step (2) for detecting the deviation between the center of the primary charged particle beam and the center of the objective aperture are provided. The charged particle beam apparatus has means for determining the aligner set values, using the aligner sensitivity measured in the processing step (1) and the amount of deviation detected in the processing step (2), such that the primary charged particle beam passes through the center of the objective aperture and controlling the aligner using the aligner set values.

    摘要翻译： 在光学条件被修改的情况下或者由于装置的状态变化使带电粒子束的束中心轴移动的情况下，有利于调整带电粒子束的束中心轴的带电粒子束装置。 当用偏转器（对准器）调整初级带电粒子束的束中心轴时，用于测量对准器的灵敏度的处理步骤（1）和用于检测初级带电粒子的中心之间的偏差的处理步骤（2） 提供带电粒子束和物镜孔的中心。 带电粒子束装置具有使用在处理步骤（1）中测量的对准器灵敏度和在处理步骤（2）中检测到的偏差量来确定对准器设定值的装置，使得初级带电粒子束通过 物镜光圈中心，并使用对准器设定值控制对准器。

    Charged particle beam apparatus and method for charged particle beam adjustment
    2.
    发明授权
    Charged particle beam apparatus and method for charged particle beam adjustment 有权
    带电粒子束装置和带电粒子束调整方法

    公开(公告)号：US08026491B2

    公开(公告)日：2011-09-27

    申请号：US11715506

    申请日：2007-03-08

    申请人： Takeshi Ogashiwa ,  Mitsugu Sato ,  Atsushi Takane ,  Toshihide Agemura ,  Yuusuke Narita ,  Takeharu Shichiji ,  Shinichi Tomita ,  Sukehiro Ito ,  Junichi Katane

    发明人： Takeshi Ogashiwa ,  Mitsugu Sato ,  Atsushi Takane ,  Toshihide Agemura ,  Yuusuke Narita ,  Takeharu Shichiji ,  Shinichi Tomita ,  Sukehiro Ito ,  Junichi Katane

    IPC分类号： G01N21/00

    CPC分类号： G01N23/22 ,  H01J37/1471 ,  H01J37/28 ,  H01J2237/1501

    摘要： A charged particle beam apparatus facilitating adjusting a beam center axis of a charged particle beam in a case where optical conditions are modified or in a case where the beam center axis of the charged particle beam is moved due to state variation of the apparatus. When the beam center axis of a primary charged particle beam is adjusted with a deflector (aligner), a first processing step for measuring the sensitivity of the aligner and a second processing step for detecting the deviation between the center of the primary charged particle beam and the center of the objective aperture are provided. The charged particle beam apparatus determines the aligner set values, using the aligner sensitivity measured in the first processing step and the amount of deviation detected in the second processing step, such that the primary charged particle beam passes through the center of the objective aperture and controls the aligner using the aligner set values.

    摘要翻译： 在光学条件被修改的情况下或者由于装置的状态变化使带电粒子束的束中心轴移动的情况下，有利于调整带电粒子束的束中心轴的带电粒子束装置。 当用偏转器（对准器）调整初级带电粒子束的束中心轴时，用于测量对准器的灵敏度的第一处理步骤和用于检测初级带电粒子束的中心与第一带电粒子束的中心之间的偏差的第二处理步骤 提供了物镜孔的中心。 带电粒子束装置使用在第一处理步骤中测量的对准器灵敏度和在第二处理步骤中检测到的偏差量来确定对准器设定值，使得初级带电粒子束通过物镜孔的中心并控制 对齐器使用对准器设置值。

    Charged particle beam apparatus, method of displaying sample image, and method of measuring image shift sensitivity
    3.
    发明申请
    Charged particle beam apparatus, method of displaying sample image, and method of measuring image shift sensitivity 审中-公开
    带电粒子束装置，显示样本图像的方法以及测量图像偏移灵敏度的方法

    公开(公告)号：US20060219907A1

    公开(公告)日：2006-10-05

    申请号：US11311425

    申请日：2005-12-20

    申请人： Takeshi Ogashiwa ,  Mitsugu Sato ,  Atsushi Takane

    发明人： Takeshi Ogashiwa ,  Mitsugu Sato ,  Atsushi Takane

    IPC分类号： G21K7/00 ,  G01N23/00

    CPC分类号： H01J37/222

    摘要： A sample image display method and an image shift sensitivity measuring method to be executed in a charged particle beam apparatus are provided for accurately correcting an image drift in any observing and analyzing condition such as an accelerating voltage, a working distance or a raster rotation. When obtaining a reference image used for detecting a drift, the process is executed to obtain an image having the different image shift amount from that of the reference image at a time and to occasionally measure an image shift sensitivity. Then, the process is executed to automatically register this reference image and the image shift sensitivity and to detect a drift amount and control an image shift (correct a drift) according to the registered conditions when correcting the drift.

    摘要翻译： 在带电粒子束装置中执行的样本图像显示方法和图像偏移灵敏度测量方法被提供用于在诸如加速电压，工作距离或光栅旋转的观察和分析条件中精确校正图像漂移。 当获得用于检测漂移的参考图像时，执行该处理以一次获得具有与参考图像的图像偏移量不同的图像偏移量的图像，并且偶尔测量图像偏移灵敏度。 然后，执行该处理以自动登记该参考图像和图像移位灵敏度，并且在校正漂移时根据注册条件来检测漂移量并控制图像偏移（校正漂移）。

    Method of forming a sample image and charged particle beam apparatus
    6.
    发明授权
    Method of forming a sample image and charged particle beam apparatus 有权
    形成样品图像和带电粒子束装置的方法

    公开(公告)号：US07800059B2

    公开(公告)日：2010-09-21

    申请号：US12073359

    申请日：2008-03-04

    申请人： Mitsugu Sato ,  Atsushi Takane ,  Takashi Iizumi ,  Tadashi Otaka ,  Hideo Todokoro ,  Satoru Yamaguchi ,  Kazutaka Nimura

    发明人： Mitsugu Sato ,  Atsushi Takane ,  Takashi Iizumi ,  Tadashi Otaka ,  Hideo Todokoro ,  Satoru Yamaguchi ,  Kazutaka Nimura

    IPC分类号： G01N23/22 ,  H01J37/26 ,  H01J37/28 ,  G21K7/00

    CPC分类号： G01N23/22 ,  H01J37/222 ,  H01J37/28

    摘要： An object of the present invention is to provide a sample image forming method and a charged particle beam apparatus which are suitable for realizing suppressing of the view area displacement with high accuracy while the influence of charging due to irradiation of the charged particle beam is being suppressed.In order to attain the above object, the present invention provide a method of forming a sample image by scanning a charged particle beam on a sample and forming an image based on secondary signals emitted from the sample, the method comprising the steps of forming a plurality of composite images by superposing a plurality of images obtained by a plurality of scanning times; and forming a further composite image by correcting positional displacements among the plurality of composite images and superposing the plurality of composite images, and a charged particle beam apparatus for realizing the above method.

    摘要翻译： 本发明的目的是提供一种在抑制由于带电粒子束的照射引起的充电的影响被抑制的情况下，能够高精度地实现视区域位移的抑制的样本图像形成方法和带电粒子束装置 。 为了实现上述目的，本发明提供一种通过在样品上扫描带电粒子束并基于从样品发射的二次信号形成图像来形成样品图像的方法，该方法包括以下步骤：形成多个 通过叠加通过多个扫描时间获得的多个图像的合成图像; 以及通过校正多个合成图像之间的位置偏移并叠加多个合成图像来形成另一个合成图像，以及用于实现上述方法的带电粒子束装置。

    Charged particle beam equipment and charged particle microscopy
    7.
    发明授权
    Charged particle beam equipment and charged particle microscopy 有权
    带电粒子束设备和带电粒子显微镜

    公开(公告)号：US07435957B2

    公开(公告)日：2008-10-14

    申请号：US11302323

    申请日：2005-12-14

    申请人： Hiromi Inada ,  Mitsugu Sato ,  Atsushi Takane

    发明人： Hiromi Inada ,  Mitsugu Sato ,  Atsushi Takane

    IPC分类号： G01N23/00

    CPC分类号： H01J37/28 ,  H01J37/222 ,  H01J37/265 ,  H01J2237/223 ,  H01J2237/2826 ,  H01J2237/3045

    摘要： On the basis of a displacement of the field of view before and after a deflection of a charged particle beam, extracted from a first specimen image, including a displacement of the field of view recorded by causing a charged particle beam to deflect by a predetermined amount by a beam deflector in an image in which a specimen image is captured at a first magnification calibrated by using a specimen enlarged image of a specimen as a magnification standard, and also a displacement of the field of view before and after a deflection of the charged particle beam, extracted from a second specimen image, including a displacement of the field of view recorded by causing a charged particle beam to deflect by the predetermined amount by the beam deflector in an image in which a specimen image is captured at a second magnification, the second magnification is calibrated.

    摘要翻译： 基于从包括通过使带电粒子束偏转预定量而记录的视野的位移的第一标本图像提取的带电粒子束的偏转之前和之后的视场位移的基础上， 通过在通过使用样本的样本放大图像作为放大标准校准的第一倍率捕获样本图像的图像中的光束偏转器，以及在充电的偏转之前和之后的视场位移 从第二标本图像中提取出的粒子束，包括通过使带电粒子束在第二放大倍数下拍摄样本图像的图像中的光束偏转器偏转预定量而记录的视野的位移， 校准第二放大倍数。

    Charged particle beam apparatus and dimension measuring method
    9.
    发明申请
    Charged particle beam apparatus and dimension measuring method 有权
    带电粒子束装置和尺寸测量方法

    公开(公告)号：US20080100832A1

    公开(公告)日：2008-05-01

    申请号：US11723457

    申请日：2007-03-20

    申请人： Mitsugu Sato ,  Katsuhiko Sakai ,  Atsushi Takane ,  Yoshihiko Nakayama

    发明人： Mitsugu Sato ,  Katsuhiko Sakai ,  Atsushi Takane ,  Yoshihiko Nakayama

    IPC分类号： G01N21/00 ,  G01N23/00

    CPC分类号： H01J37/244 ,  H01J37/21 ,  H01J37/222 ,  H01J37/28 ,  H01J2237/21 ,  H01J2237/221 ,  H01J2237/24578 ,  H01J2237/24592 ,  H01J2237/2816 ,  H01J2237/2817

    摘要： There is provided a charged particle beam apparatus which allows implementation of a high-reliability and high-accuracy dimension measurement even if height differences exist on the surface of a sample. The charged particle beam apparatus includes the following configuration components: An acquisition unit for acquiring a plurality of SEM images whose focus widths are varied in correspondence with the focal depths, a determination unit for determining, from the plurality of SEM images acquired, a SEM image for which the image sharpness degree of the partial domain including a dimension-measuring domain becomes the maximum value, and a measurement unit for measuring the dimension of the predetermined domain from the SEM image whose image sharpness degree is the maximum value.

    摘要翻译： 提供了一种带电粒子束装置，即使在样品的表面上存在高差也允许实现高可靠性和高精度尺寸测量。 带电粒子束装置包括以下配置部件：用于获取与焦点深度相对应的聚焦宽度变化的多个SEM图像的获取单元，确定单元，用于从所获取的多个SEM图像中确定SEM图像 包括尺寸测量区域的部分域的图像清晰度变为最大值;以及测量单元，用于从图像锐度度为最大值的SEM图像测量预定域的尺寸。