公开(公告)号：US4749912A

公开(公告)日：1988-06-07

申请号：US54496

申请日：1987-05-27

申请人： Tamio Hara ,  Manabu Hamagaki ,  Yoshinobu Aoyagi ,  Susumu Namba ,  Nobuo Ishii ,  Naoki Takayama ,  Kohei Kawamura

发明人： Tamio Hara ,  Manabu Hamagaki ,  Yoshinobu Aoyagi ,  Susumu Namba ,  Nobuo Ishii ,  Naoki Takayama ,  Kohei Kawamura

IPC分类号： H01J27/08 ,  G01T1/20 ,  H01J27/00

CPC分类号： H01J27/08

摘要： An ion-producing apparatus comprises an electron-producing vessel having an electron-producing chamber, an ion-producing vessel having an ion-producing chamber communicating with the electron-producing chamber, a cathode provided at one end of the electron-producing vessel, an accelerating electrode provided within the ion-producing chamber, for allowing passage of electrons, an anode provided between the cathode and the accelerating electrode, and a power supply circuit for providing a potential difference between the cathode and the anode, thereby to produce electrons in the gap between the cathode and the anode. A vacuum pump is provided for evacuating gas from the ion-producing chamber. A partition is provided within the electron-producing vessel, between the cathode and the anode to divide the electron-producing vessel into a cathode-side chamber and an anode-side chamber, and hinders a gas flow from the cathode-side chamber to the anode-side chamber to apply a pressure difference between both chambers.

摘要翻译： 离子产生装置包括具有电子产生室的电子产生容器，具有与电子产生室连通的离子产生室的离子产生容器，设置在电子产生容器的一端的阴极， 设置在离子产生室内的用于允许电子通过的加速电极，设置在阴极和加速电极之间的阳极，以及用于在阴极和阳极之间提供电位差的电源电路，从而在 阴极和阳极之间的间隙。 提供真空泵用于从离子产生室排出气体。 在电子产生容器内，在阴极和阳极之间设置隔板，以将电子产生容器分成阴极侧室和阳极侧室，并阻止气体从阴极侧室流向 阳极侧室，以在两个室之间施加压力差。

公开(公告)号：US4749910A

公开(公告)日：1988-06-07

申请号：US868350

申请日：1986-05-28

申请人： Tamio Hara ,  Manabu Hamagaki ,  Yoshinobu Aoyagi ,  Susumu Namba

发明人： Tamio Hara ,  Manabu Hamagaki ,  Yoshinobu Aoyagi ,  Susumu Namba

IPC分类号： H01J27/02 ,  H01J27/20 ,  H01J37/08 ,  H01J7/24 ,  H05B31/26

CPC分类号： H01J27/02 ,  H01J27/20 ,  H01J37/08

摘要： An electron beam-excited ion beam source having a plasma region, an accelerating cathode, an electron beam accelerating region, an accelerating anode, an ion producing region and a target cathode in this order, and further comprising means for applying a negative electric potential to the target cathode as against the accelerating cathode and an ion extracting electrode for extracting positive ions or negative ions produced in the ion producing region whereby a high current ion beam can be obtained in a low input power.

摘要翻译： 依次具有等离子体区域，加速阴极，电子束加速区域，加速阳极，离子产生区域和目标阴极的电子束激发离子束源，还包括用于将负电位施加到 对于加速阴极的目标阴极和用于提取在离子产生区域中产生的正离子或负离子的离子提取电极，由此可以以低输入功率获得高电流离子束。

公开(公告)号：US5326981A

公开(公告)日：1994-07-05

申请号：US950661

申请日：1992-09-25

申请人： Tamio Hara ,  Manabu Hamagaki ,  Katsunobu Aoyagi ,  Takeshi Yamada ,  Makoto Ryoji ,  Masakuni Tokai ,  Yosuke Kajiyama

发明人： Tamio Hara ,  Manabu Hamagaki ,  Katsunobu Aoyagi ,  Takeshi Yamada ,  Makoto Ryoji ,  Masakuni Tokai ,  Yosuke Kajiyama

IPC分类号： H01J27/04 ,  H01J37/305 ,  H01J37/32 ,  H01J37/30

CPC分类号： H01J37/3266 ,  H01J27/04 ,  H01J37/305

摘要： In an electron beam excited ion irradiation apparatus which irradiates ions to a material, an electrical discharge changes an inert gas into a plasma. Electrons are drawn from this plasma and are made into electron beams. The electron beams are passed through an active gas to create ion. When the ion is irradiated to a material, electron components of the electron beams, which are irradiated vertically to a surface of the material are changed their irradiation direction. Control of the range of electron beam irradiation is performed by a magnetic filed formed so as to surround the ion beams.

摘要翻译： 在向材料照射离子的电子束激发离子照射装置中，放电将惰性气体变成等离子体。 电子从该等离子体中抽出并制成电子束。 电子束通过活性气体产生离子。 当离子被照射到材料时，垂直于材料表面照射的电子束的电子分量改变其照射方向。 电子束照射范围的控制是通过围绕离子束形成的磁场进行的。

公开(公告)号：US6157701A

公开(公告)日：2000-12-05

申请号：US876331

申请日：1997-06-16

申请人： Hideo Hirose ,  Tamio Hara ,  Kozo Ando ,  Yoshinobu Aoyagi

发明人： Hideo Hirose ,  Tamio Hara ,  Kozo Ando ,  Yoshinobu Aoyagi

IPC分类号： G21K7/00 ,  H05G2/00

CPC分类号： H05G2/001 ,  G21K7/00

摘要： An X-ray generating apparatus in which X-rays are emitted from laser plasma, the X-ray generating apparatus including a strong magnetic field generating device for generating a magnetic field component substantially parallel with the target surface in the vicinity of the laser plasma. The magnetic field component is arranged to generate a magnetic force which acts directly on charged particles in the laser plasma to bend the tracks of the charged particles, causing the charged particles to be confined in a magnetic field formed by the magnetic field component. The magnetic flux of the strong magnetic field is directed to a direction which is different from the direction in which the laser plasma is generated. An X-ray supply object is disposed in the laser plasma generating direction. Charged particles, liable to be directed to the X-ray supply object, are mainly confined in the strong magnetic field.

摘要翻译： 一种其中从激光等离子体发射X射线的X射线产生装置，该X射线产生装置包括用于产生与激光等离子体附近的目标表面大致平行的磁场分量的强磁场产生装置。 磁场分量被布置成产生直接作用在激光等离子体中的带电粒子上的磁力，以使带电粒子的轨道弯曲，使得带电粒子被限制在由磁场分量形成的磁场中。 强磁场的磁通量指向与激光等离子体产生方向不同的方向。 在激光等离子体产生方向设置X射线供给对象物。 容易被引导到X射线供应物体的带电粒子主要局限在强磁场中。

公开(公告)号：US5680429A

公开(公告)日：1997-10-21

申请号：US587915

申请日：1996-01-17

申请人： Hideo Hirose ,  Tamio Hara ,  Kozo Ando ,  Yoshinobu Aoyagi

发明人： Hideo Hirose ,  Tamio Hara ,  Kozo Ando ,  Yoshinobu Aoyagi

IPC分类号： G21K7/00 ,  H05G2/00

CPC分类号： H05G2/001 ,  G21K7/00

摘要： An X-ray generating apparatus generates X-rays from plasma formed by irradiating a laser beam to a target. The apparatus includes an X-ray transmitting film disposed at at least one side of the target with a predetermined gap provided therebetween. The X-ray transmitting film has a thickness such that the film is not broken due to an action in the X-ray generating process. The X-rays are taken out through the X-ray transmitting film. An X-ray microscope can employ such an X-ray generating apparatus, with the X-rays from the apparatus being guided to the sample, with the sample to be observed being disposed in the vicinity of the X-ray transmitting film, and with a detecting device for detecting an X-ray image formed by X-rays transmitted through the sample.

摘要翻译： X射线产生装置通过将激光束照射到靶而形成的等离子体产生X射线。 该装置包括设置在目标的至少一侧的X射线透射膜，其间设置有预定的间隙。 X射线透射膜具有使得由于X射线产生过程中的作用而不破坏膜的厚度。 通过X射线透射膜取出X射线。 X射线显微镜可以使用这样的X射线产生装置，其中来自装置的X射线被引导到样品，待观察的样品设置在X射线透射膜附近，并且与 检测装置，用于检测通过样品透射的X射线形成的X射线图像。

公开(公告)号：US5832052A

公开(公告)日：1998-11-03

申请号：US669709

申请日：1996-06-24

申请人： Hideo Hirose ,  Kozo Ando ,  Yoshinobu Aoyagi ,  Tamio Hara

发明人： Hideo Hirose ,  Kozo Ando ,  Yoshinobu Aoyagi ,  Tamio Hara

IPC分类号： G21K7/00

CPC分类号： G21K7/00

摘要： An X-ray microscope utilizing X-rays radiating from a laser-irradiated target so as to form an X-ray image of a specimen placed in a sample cell, the X-ray microscope includes a target for radiating X-rays when the same is irradiated with a laser beam, a sample cell for housing a specimen, the sample cell provided near the surface of target placed opposite to where the target is irradiated with the laser beam, and a detector for forming an X-ray image of the specimen by X-ray penetration, wherein the target, the sample cell and the detector are unified in a unit. The unit is placed at a place where the laser beam is irradiated to the target. A spacer is provided between the target and the sample cell, wherein the size of the spacer is determined depending on a distance between the specimen and the target. With this construction, this facilitates the fabrication of the unit. The unit is placed in the miniature vacuum chamber which comprises a division for housing the unit, and a space provided toward the target. And the vacuum chamber housing the unit is placed in an X-ray microscope.

摘要翻译： 一种利用从激光照射对象物放射的X射线以形成放置在样品池中的试样的X射线图像的X射线显微镜，所述X射线显微镜包括：X射线显微镜 照射激光束的样品池，用于容纳样品的样品池，设置在与靶被照射激光束相对的靶的表面附近的样品池，以及用于形成试样的X射线图像的检测器 通过X射线穿透，其中靶，样品池和检测器以一个单元统一。 该单元放置在激光束照射到目标的地方。 在靶和样品池之间设置间隔物，其中间隔物的尺寸取决于样品和靶之间的距离。 利用这种结构，这有利于单元的制造。 该单元被放置在微型真空室中，其包括用于容纳该单元的分隔件和朝向该目标物提供的空间。 将该单元的真空室放置在X射线显微镜中。

公开(公告)号：US08835636B2

公开(公告)日：2014-09-16

申请号：US14036433

申请日：2013-09-25

申请人： Tamio Hara ,  Naoki Norimatsu ,  Hiroaki Kurushima ,  Takuya Kano

发明人： Tamio Hara ,  Naoki Norimatsu ,  Hiroaki Kurushima ,  Takuya Kano

IPC分类号： C07D241/18 ,  C07D241/16 ,  C07D241/24

CPC分类号： C07D241/18 ,  C07D241/16 ,  C07D241/24

摘要： A method for producing a hydroxypyrazine derivative represented by formula (I) (wherein R1 represents a halogen atom), the method including reacting a pyrazine derivative represented by formula (III) (wherein R2 represents a nitrile group, an N-unsubstituted or N-substituted carbamoyl group, an ester group or a carboxyl group, M represents a cation capable of forming a salt, and n represents a number corresponding with the valence of M) with a halogenating agent. According to the present invention, a hydroxypyrazine derivative that functions as a production intermediate for the dichloropyrazine derivative can be produced efficiently at low cost.

摘要翻译： 一种制备由式（I）表示的羟基吡嗪衍生物（其中R1表示卤素原子）的方法，包括使式（III）表示的吡嗪衍生物（其中R2表示腈基，N-未取代的或N- 取代的氨基甲酰基，酯基或羧基，M表示能够形成盐的阳离子，n表示与M的化合价相对应的数）与卤化剂反应。 根据本发明，可以以低成本有效地制备作为二氯吡嗪衍生物的生产中间体的羟基吡嗪衍生物。

公开(公告)号：US20110275817A1

公开(公告)日：2011-11-10

申请号：US13144735

申请日：2010-01-14

申请人： Tamio Hara ,  Naoki Norimatsu ,  Hiroaki Kurushima ,  Takuya Kano

发明人： Tamio Hara ,  Naoki Norimatsu ,  Hiroaki Kurushima ,  Takuya Kano

IPC分类号： C07D241/16

CPC分类号： C07D241/18 ,  C07D241/16 ,  C07D241/24

摘要： A method for producing a hydroxypyrazine derivative represented by formula (I) (wherein R1 represents a halogen atom), the method including reacting a pyrazine derivative represented by formula (III) (wherein R2 represents a nitrile group, an N-unsubstituted or N-substituted carbamoyl group, an ester group or a carboxyl group, M represents a cation capable of forming a salt, and n represents a number corresponding with the valence of M) with a halogenating agent. Also, a method for producing a dichloropyrazine derivative represented by formula (II) (wherein R21 represents a nitrile group, an N-unsubstituted or N-substituted carbamoyl group, an ester group, a carboxyl group, or a group formed as a result of a change in the functional group of R2 during chlorination), the method including reacting the hydroxypyrazine derivative (I) with a chlorinating agent. According to the present invention, a dichloropyrazine derivative can be produced efficiently at low cost, and a hydroxypyrazine derivative that functions as a production intermediate for the dichloropyrazine derivative can be produced efficiently at low cost.

摘要翻译： 一种制备由式（I）表示的羟基吡嗪衍生物（其中R1表示卤素原子）的方法，包括使式（III）表示的吡嗪衍生物（其中R2表示腈基，N-未取代的或N- 取代的氨基甲酰基，酯基或羧基，M表示能够形成盐的阳离子，n表示与M的化合价相对应的数）与卤化剂反应。 另外，由式（II）表示的二氯吡嗪衍生物的制造方法（式中，R 21表示腈基，N-未取代或N-取代氨基甲酰基，酯基，羧基或作为 在氯化期间R2的官能团的变化），该方法包括使羟基吡嗪衍生物（I）与氯化剂反应。 根据本发明，可以低成本有效地制备二氯吡嗪衍生物，并且可以低成本有效地制备用作二氯吡嗪衍生物的生产中间体的羟基吡嗪衍生物。

公开(公告)号：US5832007A

公开(公告)日：1998-11-03

申请号：US803245

申请日：1997-02-20

申请人： Tamio Hara ,  Naohiro Yamaguchi ,  Toshio Sata

发明人： Tamio Hara ,  Naohiro Yamaguchi ,  Toshio Sata

IPC分类号： H01S3/094 ,  H01S4/00 ,  H01S3/30

CPC分类号： H01S4/00

摘要： An X-ray laser generating apparatus comprises a laser oscillator for generating a pulse laser beam, a pulse train converter for converting the pulse laser beam into a pulse train laser beam, an optical device for focusing the pulse train laser beam to a thin line, a target material placed at the laser beam focused position and generating high temperature plasma containing highly charged ions with irradiation of the linearly focused pulse train laser beam, a vacuum chamber for keeping a vicinity of the irradiated region of the target material under a decompressed state, and a pair of X-ray reflecting mirrors positioned on both sides of the target material and on the extended thin line, and at least one of the paired mirrors partially transmits X-ray.

摘要翻译： 一种X射线激光发生装置，包括用于产生脉冲激光束的激光振荡器，用于将脉冲激光束转换为脉冲串激光束的脉冲串转换器，用于将脉冲串激光束聚焦到细线的光学装置， 放置在激光束聚焦位置的目标材料，并且通过线性聚焦脉冲串激光束的照射产生包含高电荷离子的高温等离子体，用于将目标材料的照射区域附近保持在减压状态的真空室， 以及位于目标材料的两侧和延伸的细线上的一对X射线反射镜，并且至少一个成对的反射镜部分地透射X射线。

公开(公告)号：US5887048A

公开(公告)日：1999-03-23

申请号：US848069

申请日：1997-04-28

申请人： Toshio Sata ,  Tamio Hara ,  Naohiro Yamaguchi

发明人： Toshio Sata ,  Tamio Hara ,  Naohiro Yamaguchi

IPC分类号： G02B5/10 ,  G21K1/06

CPC分类号： G21K1/06 ,  G21K2201/064 ,  G21K2201/067

摘要： A reflecting mirror of an X-ray reflecting device is produced by a spherical surface machining method, and when the device is used, a desired aspherical reflecting surface can be obtained by elastically deforming the mirror with application of an external force. The device has the mirror 11 and a support member 17. The mirror 11 is made of elastically deformable material. A surface 11a of the mirror 11 is finished by the spherical surface machining method. When the device is used, pressure is applied against a rear surface 11b of the mirror 11 and the mirror 11 is deformed into a desired aspherical shape.

摘要翻译： 通过球面加工方法制造X射线反射装置的反射镜，当使用该装置时，可以通过施加外力使镜子弹性变形来获得期望的非球面反射面。 该装置具有反射镜11和支撑构件17.反射镜11由可弹性变形的材料制成。 反射镜11的表面11a通过球面加工方法精加工。 当使用装置时，对反射镜11的后表面11b施加压力，并且反射镜11变形为期望的非球面形状。