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公开(公告)号：US6157701A
公开(公告)日：2000-12-05
申请号：US876331
申请日：1997-06-16
申请人： Hideo Hirose , Tamio Hara , Kozo Ando , Yoshinobu Aoyagi
发明人： Hideo Hirose , Tamio Hara , Kozo Ando , Yoshinobu Aoyagi
摘要： An X-ray generating apparatus in which X-rays are emitted from laser plasma, the X-ray generating apparatus including a strong magnetic field generating device for generating a magnetic field component substantially parallel with the target surface in the vicinity of the laser plasma. The magnetic field component is arranged to generate a magnetic force which acts directly on charged particles in the laser plasma to bend the tracks of the charged particles, causing the charged particles to be confined in a magnetic field formed by the magnetic field component. The magnetic flux of the strong magnetic field is directed to a direction which is different from the direction in which the laser plasma is generated. An X-ray supply object is disposed in the laser plasma generating direction. Charged particles, liable to be directed to the X-ray supply object, are mainly confined in the strong magnetic field.
摘要翻译： 一种其中从激光等离子体发射X射线的X射线产生装置，该X射线产生装置包括用于产生与激光等离子体附近的目标表面大致平行的磁场分量的强磁场产生装置。 磁场分量被布置成产生直接作用在激光等离子体中的带电粒子上的磁力，以使带电粒子的轨道弯曲，使得带电粒子被限制在由磁场分量形成的磁场中。 强磁场的磁通量指向与激光等离子体产生方向不同的方向。 在激光等离子体产生方向设置X射线供给对象物。 容易被引导到X射线供应物体的带电粒子主要局限在强磁场中。
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公开(公告)号：US5680429A
公开(公告)日：1997-10-21
申请号：US587915
申请日：1996-01-17
申请人： Hideo Hirose , Tamio Hara , Kozo Ando , Yoshinobu Aoyagi
发明人： Hideo Hirose , Tamio Hara , Kozo Ando , Yoshinobu Aoyagi
摘要： An X-ray generating apparatus generates X-rays from plasma formed by irradiating a laser beam to a target. The apparatus includes an X-ray transmitting film disposed at at least one side of the target with a predetermined gap provided therebetween. The X-ray transmitting film has a thickness such that the film is not broken due to an action in the X-ray generating process. The X-rays are taken out through the X-ray transmitting film. An X-ray microscope can employ such an X-ray generating apparatus, with the X-rays from the apparatus being guided to the sample, with the sample to be observed being disposed in the vicinity of the X-ray transmitting film, and with a detecting device for detecting an X-ray image formed by X-rays transmitted through the sample.
摘要翻译： X射线产生装置通过将激光束照射到靶而形成的等离子体产生X射线。 该装置包括设置在目标的至少一侧的X射线透射膜，其间设置有预定的间隙。 X射线透射膜具有使得由于X射线产生过程中的作用而不破坏膜的厚度。 通过X射线透射膜取出X射线。 X射线显微镜可以使用这样的X射线产生装置，其中来自装置的X射线被引导到样品，待观察的样品设置在X射线透射膜附近，并且与 检测装置，用于检测通过样品透射的X射线形成的X射线图像。
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公开(公告)号：US5832052A
公开(公告)日：1998-11-03
申请号：US669709
申请日：1996-06-24
申请人： Hideo Hirose , Kozo Ando , Yoshinobu Aoyagi , Tamio Hara
发明人： Hideo Hirose , Kozo Ando , Yoshinobu Aoyagi , Tamio Hara
IPC分类号： G21K7/00
CPC分类号： G21K7/00
摘要： An X-ray microscope utilizing X-rays radiating from a laser-irradiated target so as to form an X-ray image of a specimen placed in a sample cell, the X-ray microscope includes a target for radiating X-rays when the same is irradiated with a laser beam, a sample cell for housing a specimen, the sample cell provided near the surface of target placed opposite to where the target is irradiated with the laser beam, and a detector for forming an X-ray image of the specimen by X-ray penetration, wherein the target, the sample cell and the detector are unified in a unit. The unit is placed at a place where the laser beam is irradiated to the target. A spacer is provided between the target and the sample cell, wherein the size of the spacer is determined depending on a distance between the specimen and the target. With this construction, this facilitates the fabrication of the unit. The unit is placed in the miniature vacuum chamber which comprises a division for housing the unit, and a space provided toward the target. And the vacuum chamber housing the unit is placed in an X-ray microscope.
摘要翻译： 一种利用从激光照射对象物放射的X射线以形成放置在样品池中的试样的X射线图像的X射线显微镜，所述X射线显微镜包括：X射线显微镜 照射激光束的样品池，用于容纳样品的样品池，设置在与靶被照射激光束相对的靶的表面附近的样品池，以及用于形成试样的X射线图像的检测器 通过X射线穿透，其中靶，样品池和检测器以一个单元统一。 该单元放置在激光束照射到目标的地方。 在靶和样品池之间设置间隔物，其中间隔物的尺寸取决于样品和靶之间的距离。 利用这种结构，这有利于单元的制造。 该单元被放置在微型真空室中，其包括用于容纳该单元的分隔件和朝向该目标物提供的空间。 将该单元的真空室放置在X射线显微镜中。
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公开(公告)号：US4749912A
公开(公告)日：1988-06-07
申请号：US54496
申请日：1987-05-27
申请人： Tamio Hara , Manabu Hamagaki , Yoshinobu Aoyagi , Susumu Namba , Nobuo Ishii , Naoki Takayama , Kohei Kawamura
发明人： Tamio Hara , Manabu Hamagaki , Yoshinobu Aoyagi , Susumu Namba , Nobuo Ishii , Naoki Takayama , Kohei Kawamura
CPC分类号： H01J27/08
摘要： An ion-producing apparatus comprises an electron-producing vessel having an electron-producing chamber, an ion-producing vessel having an ion-producing chamber communicating with the electron-producing chamber, a cathode provided at one end of the electron-producing vessel, an accelerating electrode provided within the ion-producing chamber, for allowing passage of electrons, an anode provided between the cathode and the accelerating electrode, and a power supply circuit for providing a potential difference between the cathode and the anode, thereby to produce electrons in the gap between the cathode and the anode. A vacuum pump is provided for evacuating gas from the ion-producing chamber. A partition is provided within the electron-producing vessel, between the cathode and the anode to divide the electron-producing vessel into a cathode-side chamber and an anode-side chamber, and hinders a gas flow from the cathode-side chamber to the anode-side chamber to apply a pressure difference between both chambers.
摘要翻译： 离子产生装置包括具有电子产生室的电子产生容器，具有与电子产生室连通的离子产生室的离子产生容器，设置在电子产生容器的一端的阴极， 设置在离子产生室内的用于允许电子通过的加速电极，设置在阴极和加速电极之间的阳极，以及用于在阴极和阳极之间提供电位差的电源电路，从而在 阴极和阳极之间的间隙。 提供真空泵用于从离子产生室排出气体。 在电子产生容器内，在阴极和阳极之间设置隔板，以将电子产生容器分成阴极侧室和阳极侧室，并阻止气体从阴极侧室流向 阳极侧室，以在两个室之间施加压力差。
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公开(公告)号：US4749910A
公开(公告)日：1988-06-07
申请号：US868350
申请日：1986-05-28
申请人： Tamio Hara , Manabu Hamagaki , Yoshinobu Aoyagi , Susumu Namba
发明人： Tamio Hara , Manabu Hamagaki , Yoshinobu Aoyagi , Susumu Namba
摘要： An electron beam-excited ion beam source having a plasma region, an accelerating cathode, an electron beam accelerating region, an accelerating anode, an ion producing region and a target cathode in this order, and further comprising means for applying a negative electric potential to the target cathode as against the accelerating cathode and an ion extracting electrode for extracting positive ions or negative ions produced in the ion producing region whereby a high current ion beam can be obtained in a low input power.
摘要翻译： 依次具有等离子体区域，加速阴极，电子束加速区域，加速阳极，离子产生区域和目标阴极的电子束激发离子束源，还包括用于将负电位施加到 对于加速阴极的目标阴极和用于提取在离子产生区域中产生的正离子或负离子的离子提取电极，由此可以以低输入功率获得高电流离子束。
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公开(公告)号：US20090039563A1
公开(公告)日：2009-02-12
申请号：US12065246
申请日：2006-08-25
IPC分类号： B29C59/16
CPC分类号： G03F7/0002 , B81C1/00031 , B81C1/00111 , B81C2201/0152 , B81C2201/0153 , B82Y10/00 , B82Y40/00 , H01L21/31 , H01L21/3121 , H01L21/316 , H01L21/76817
摘要： A method of fine-pattern formation in which in forming a pattern, a fine pattern formed in a mold can be transferred to a pattering material in a short time at a low temperature and low pressure and, after the transfer of the fine pattern to the patterning material, the fine pattern formed in the patterning material does not readily deform. The method for fine-pattern formation comprises: a first step in which a mold having a fine structure with recesses/protrusions is pressed against a pattering material comprising a polysilane; a second step in which the patterning material is irradiated with ultraviolet to photooxidize the patterning material; a third in which the pressing of the mold against the patterning material is relieved and the mold is drawn from the pattering material; and a fourth step in which that surface of the patterning material to which the fine pattern has been transferred is irradiated with an oxygen plasma to oxidize the surface.
摘要翻译： 精细图案形成方法在形成图案时，在模具中形成的精细图案可以在低温低压下在短时间内转印到图案材料，并且在精细图案转印到 图案形成材料中形成的微细图案不容易变形。 精细图案形成方法包括：第一步骤，其中具有凹陷/突起的精细结构的模具被压在包含聚硅烷的图案材料上; 第二步骤，其中图案形成材料被紫外线照射以对图案材料进行光氧化; 第三，其中将模具压靠在图案形成材料上被释放并且模具从图案材料中拉出; 以及第四步骤，其中已经转印有精细图案的图案形成材料的表面用氧等离子体照射以氧化该表面。
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公开(公告)号：US20080203620A1
公开(公告)日：2008-08-28
申请号：US11845618
申请日：2007-08-27
IPC分类号： B29C35/08
CPC分类号： B29C35/0888 , B29C37/0053 , B29C2035/0827
摘要： There is provided a method for forming minute patterns ranging from nanometer scale to micrometer scale with high aspect ratio at one time under a single condition of low temperature, low pressure, and a short period of time. A method of forming a minute pattern according to the present invention includes: applying, onto a substrate, a patterning material containing a polysilane and a silicone compound; pressing a mold on which a predetermined minute pattern has been formed to the patterning material which has been applied onto the substrate; irradiating energy rays from a side of the substrate while the mold is contacted by press with the patterning material; releasing the mold; and irradiating the patterning material with energy rays from a side to which the mold has been pressed.
摘要翻译： 提供一种在低温，低压和短时间的单一条件下一次形成从纳米尺度到微米级的高纵横比的微小图案的方法。 根据本发明的形成微细图案的方法包括：在基材上涂布含有聚硅烷和硅氧烷化合物的图案形成材料; 将已经形成有预定的微小图案的模具按压到已经施加到基板上的图案形成材料上; 在模具与图案形成材料接触的同时，从基板侧照射能量射线; 释放模具; 并用能量射线照射图案形成材料，该能量射线从模具被按压的一侧。
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8.发明授权Charged particle beam apparatus and method of forming electrodes having narrow gap therebetween by using the same 失效带电粒子束装置和通过使用它们形成具有窄间隙的电极的方法公开(公告)号：US07301159B2
公开(公告)日：2007-11-27
申请号：US11196094
申请日：2005-08-03
申请人： Toshiaki Fujii , Masao Abe , Kunji Shigeto , Minuru Kawamura , Alekber Yu Kasumov , Kazuhito Tsukagoshi , Yoshinobu Aoyagi
发明人： Toshiaki Fujii , Masao Abe , Kunji Shigeto , Minuru Kawamura , Alekber Yu Kasumov , Kazuhito Tsukagoshi , Yoshinobu Aoyagi
IPC分类号： A61N5/00
CPC分类号： H01J37/3056 , H01J37/304 , H01J2237/043 , H01J2237/30466 , H01J2237/31732 , H01J2237/31737 , H01J2237/31749
摘要： A focused ion beam apparatus having two pieces of probers brought into contact with two points of a surface of a sample, a voltage source for applying a constant voltage between the two points with which the probers are brought into contact, and an ammeter for measuring a current flowing between the two points, in which a conductive film is formed to narrow a gap thereof between the two points by operating a deflection electrode and a gas gun and the current flowing between the two points is monitored, and when the current becomes a predetermined value, a focused charged particle beam irradiated to the surface of the sample is made OFF by the blanking electrode.
摘要翻译： 一种聚焦离子束装置，其具有与样品表面的两个点接触的两个探测器，用于在与探测器接触的两个点之间施加恒定电压的电压源，以及用于测量 在两点之间流动的电流，其中通过操作偏转电极和气枪来形成导电膜以使两点间的间隙变窄，并且监测在两点之间流动的电流，并且当电流变为预定的 通过消隐电极使照射到样品表面的聚焦带电粒子束截止。
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9.发明申请公开(公告)号：US20050122568A1
公开(公告)日：2005-06-09
申请号：US11033296
申请日：2005-01-12
申请人： Kanna Aoki , Hideki Hirayama , Yoshinobu Aoyagi , Hideki Miyazaki
发明人： Kanna Aoki , Hideki Hirayama , Yoshinobu Aoyagi , Hideki Miyazaki
IPC分类号： G02B6/12 , G01R31/02 , G02B6/122 , G02B6/13 , G02B26/00 , G02F1/00 , H01L33/28 , H01L33/32 , H01L33/34 , H01L33/44
CPC分类号： B82Y20/00 , G02B6/1225 , G02B6/13
摘要： The present invention provides a practically effective three-dimensional photonic crystal, and a process for the production thereof as well as a probe used therefor wherein a three-dimensional photonic crystal comprises a plurality of two-dimensional photonic crystal plates each provided with through holes and different types of two-dimensional photonic crystals; a plurality of positioning members to be located in the above-described through holes in the plurality of the two-dimensional photonic crystal plates; and the above-described positioning members being located in the through holes in the two-dimensional photonic crystal plates adjacent to each other among the pluralities of two-dimensional photonic crystal plates to be laminated in such that the pluralities of the two-dimensional photonic crystal plates obtain a periodic structure in response to wavelengths of light.
摘要翻译： 本发明提供一种实用有效的三维光子晶体及其制造方法及其用途的探针，其中三维光子晶体包括多个二维光子晶体板，每个二维光子晶体板均设有通孔， 不同类型的二维光子晶体; 多个定位构件，位于多个二维光子晶体板的上述通孔中; 并且上述定位构件位于要层叠的多个二维光子晶体板中彼此相邻的二维光子晶体板的通孔中，使得多个二维光子晶体 板获得响应于光的波长的周期性结构。
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10.发明授权公开(公告)号：US08698168B2
公开(公告)日：2014-04-15
申请号：US13039978
申请日：2011-03-03
IPC分类号： H01L27/15
CPC分类号： H01L21/0262 , H01L21/0237 , H01L21/02381 , H01L21/0243 , H01L21/02458 , H01L21/0254 , H01L21/02639 , H01L21/02658 , H01L33/007
摘要： A method of crystal growth is provided which can suppress development of dislocations and cracks and a warp in a substrate. The method of crystal growth of a group III nitride semiconductor has: a step of heating a silicon substrate; and a step of forming a depressed structure on the substrate surface by advance-feeding onto the heated silicon substrate a gas containing at least TMA (trimethylaluminum).
摘要翻译： 提供一种晶体生长方法，其可以抑制位错和裂纹的发展以及基板中的翘曲。 III族氮化物半导体的晶体生长方法具有以下步骤：加热硅衬底; 以及通过向加热的硅衬底上预先给予至少含有TMA（三甲基铝）的气体，在衬底表面上形成凹陷结构的步骤。
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