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公开(公告)号：US5510158A
公开(公告)日：1996-04-23
申请号：US348259
申请日：1994-11-28
CPC分类号： H01L21/31138 , B08B7/0057 , C03C23/0075 , C23G5/00
摘要： An oxidation process for an article to be treated in which, by generating ozone with a high concentration, a high treatment rate is achieved. In particular, an oxygen-containing fluid is irradiated with a vacuum ultraviolet rays emitted from a dielectric barrier discharge lamp in which xenon gas is encapsulated, producing a photochemical reaction from which ozone and an activated oxygen result. By causing this ozone and activated oxygen to contact the surface of the article to be treated, the surface of the article is oxidized. An even higher treatment rate can be achieved by generating the activated oxygen with the simultaneous use of a far ultraviolet ray source, thereby increasing the activity of the activated oxygen. Advantageously, the oxidation of the article to be treated with the vacuum ultraviolet rays and far ultraviolet rays is performed in accordance with the relationship:(p.times.d)/(1+I.sup.1/2)=0.33where I is a radiation density (mW/cm.sup.2) of the far ultraviolet rays on a surface of the article to be treated in which there is no light absorption between the far ultraviolet ray source and the surface of the article to be treated, d is a shortest distance (cm) of passage of the vacuum ultraviolet rays emitted from the dielectric barrier discharge lamp to the surface of the article to be treated, and p is an oxygen partial pressure (atm) of the oxygen-containing gas, which is present between the dielectric barrier discharge lamp and the article to be treated.
摘要翻译： 通过产生高浓度臭氧，处理率高的待处理物品的氧化处理。 特别地，从包封有氙气的电介质阻挡放电灯发出的真空紫外线照射含氧流体，产生产生臭氧和活性氧的光化学反应。 通过使该臭氧和活性氧与被处理物的表面接触，制品的表面被氧化。 通过同时使用远紫外线源产生活性氧，从而提高活性氧的活性，可以实现更高的治疗率。 有利地，根据以下关系进行用真空紫外线和远紫外线处理的制品的氧化：（pxd）/（1 + I1 / 2）= 0.33其中I是辐射密度（mW / cm2 ）在远紫外线源和被处理物的表面之间不存在光吸收的待处理物品的表面上的远紫外线的距离d为通过的最短距离（cm） 从介电阻挡放电灯发射到待处理物体的表面的真空紫外线，p是存在于电介质阻挡放电灯与制品之间的含氧气体的氧分压（atm）， 被处理。
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公开(公告)号：US5581152A
公开(公告)日：1996-12-03
申请号：US303033
申请日：1994-09-08
申请人： Hiromitsu Matsuno , Tatsushi Igarashi , Tatsumi Hiramoto , Fumitoshi Takemoto , Nobuyuki Hishinuma , Yasuo Oonishi , Kunio Kasagi , Takashi Asahina , Yasuhiko Wakahata
发明人： Hiromitsu Matsuno , Tatsushi Igarashi , Tatsumi Hiramoto , Fumitoshi Takemoto , Nobuyuki Hishinuma , Yasuo Oonishi , Kunio Kasagi , Takashi Asahina , Yasuhiko Wakahata
IPC分类号： H01J65/00 , H01J65/04 , H01J61/067
CPC分类号： H01J65/046 , H01J65/00
摘要： In a dielectric barrier discharge lamp, in which a discharge vessel, in which a discharge gas forming "excimer" molecules is encapsulated, is provided with a dielectric provided with a netlike electrode and a window, through which the light goes, the first object of the invention is achieved by an arrangement in which a thickness of ends of the above-described netlike electrodes is greater than the average thickness of the entire electrode. Another object of the invention is achieved by an arrangement in which a holder incorporated in the discharge vessel has an outer dimension that is less than/equal to an outer dimension of the netlike electrodes. A further object of the invention is achieved by an arrangement by which the discharge vessel has a hollow cylindrical shape formed from an external tube and an internal tube and a means for hermetic sealing is arranged inside the internal tube.
摘要翻译： 在其中封装了形成“准分子”分子的放电气体的放电容器的电介质阻挡放电灯中，设置有电介质，所述电介质设置有网状电极和窗，光通过该电介质，第一物体 本发明通过上述网状电极的端部的厚度大于整个电极的平均厚度的结构来实现。 本发明的另一个目的是通过一种结构实现的，其中结合在放电容器中的保持器的外形尺寸小于/等于网状电极的外部尺寸。 本发明的另一个目的是通过这样一种布置实现放电容器具有由外管和内管形成的中空圆筒形状，并且用于气密密封的装置设置在内管的内部。
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公开(公告)号：US5589735A
公开(公告)日：1996-12-31
申请号：US506829
申请日：1995-07-25
申请人： Akiyasu Yamaguchi , Yukio Yasuda , Tsuneo Okanuma , Tatsushi Igarashi , Hiromitsu Matsuno , Tatsumi Hiramoto
发明人： Akiyasu Yamaguchi , Yukio Yasuda , Tsuneo Okanuma , Tatsushi Igarashi , Hiromitsu Matsuno , Tatsumi Hiramoto
CPC分类号： G03F7/70016 , H01J61/30 , H01J61/74
摘要： An emission device which operates a cadmium lamp with a light intensity sufficient for used in industrial applications is achieved by an emission device having a cadmium lamp with a fluorescent tube within which a cathode and an anode are space a small distance apart and a buffer gas for easier initiation of luminous operation and metallic cadmium in an amount per unit volume of the fluorescent tube of 1.times.10.sup.-4 g/cm.sup.3 to 3.times.10.sup.-3 g/cm.sup.3 are encapsulated, and a power source device for supplying an electrical input between the cathode and the anode in an electrical input range from 0.5 kW to 5.0 kW with the condition:6.03+2.79 W.ltoreq.r.ltoreq.40being satisfied, where the electrical input of the power source device into the cadmium lamp in steady-state luminous operation is W (kW) and the maximum inside radius of the fluorescent tube is r (mm).
摘要翻译： 操作具有足以用于工业应用的光强度的镉灯的发射装置通过具有镉灯的发射装置来实现，所述镉灯具有荧光管，阴极和阳极间隔开小间隔，并且缓冲气体用于 封装了1×10 -4 g / cm 3〜3×10 -3 g / cm 3的荧光灯的单位体积的发光操作的更容易的起始和金属镉，以及用于在阴极和阴极之间提供电输入的电源装置 在0.5kW至5.0kW的电输入范围内的阳极，条件为：6.03 + 2.79W
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公开(公告)号：US5481159A
公开(公告)日：1996-01-02
申请号：US237906
申请日：1994-05-04
CPC分类号： G03F7/70016 , H01J61/18 , H01J61/82 , H01J61/86
摘要： A discharge lamp uses resonance lines which are emitted by ions in an excitation state and has a high short wave ultraviolet ray output. The lamp is provided with a pair of electrodes, having a reciprocal spacing of equal to or smaller than 12 mm, and is of the electrode-stable type. As the major emission material, cadmium is encapsulated in a quantity permitting a partial pressure P in operation of 3.times.10.sup.3 Pa to 1.3.times.10.sup.5 Pa. The lighting operation is performed in a state in which a lamp current J.sub.L fulfills the following condition (a):0.7
摘要翻译： 放电灯使用由激发状态的离子发射并具有高短波紫外线输出的谐振线。 该灯具有一对电极，具有等于或小于12mm的往复间隔，并且是电极稳定型的。 作为主要的发光材料，镉以3×10 3 Pa〜1.3×10 5 Pa的运转状态下的分压P被包封，在灯电流JL满足以下条件（a）的状态下进行点亮操作：0.7
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公开(公告)号：US5444331A
公开(公告)日：1995-08-22
申请号：US184143
申请日：1994-01-21
CPC分类号： H01J61/26 , H01J65/046
摘要： A dielectric barrier discharge lamp has a discharge vessel having a discharge chamber filled with a discharge gas. Excimer molecules are developed due to a dielectric barrier discharge. The discharge vessel is equipped with a window for the output of the light radiated from the excimer molecules. A getter space, equipped with a getter, communicates with the discharge chamber. A common wall separates the discharge chamber from the getter space, or a separately arranged getter space is connected to the discharge chamber via a tube. In one form, the discharge vessel and window is made of quartz glass containing less than 10 ppm of OH radicals by weight.
摘要翻译： 电介质阻挡放电灯具有放电室，其具有填充有放电气体的放电室。 由于介电阻挡放电，准分子发展。 放电容器配备有用于输出从准分子分子辐射的光的窗口。 配有吸气剂的吸气室与排气室相通。 一个普通的墙将排气室与吸气剂空间分开，或者一个单独布置的吸气室通过一个管连接到排气室。 在一种形式中，放电容器和窗户由含有少于10ppm重量的OH自由基的石英玻璃制成。
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公开(公告)号：US5757132A
公开(公告)日：1998-05-26
申请号：US725039
申请日：1996-10-02
申请人： Hiromitsu Matsuno , Nobuyuki Hishinuma , Kenichi Hirose , Kunio Kasagi , Fumitoshi Takemoto , Yoshinori Aiura , Tatsushi Igarashi
发明人： Hiromitsu Matsuno , Nobuyuki Hishinuma , Kenichi Hirose , Kunio Kasagi , Fumitoshi Takemoto , Yoshinori Aiura , Tatsushi Igarashi
IPC分类号： H01J65/00 , H01J61/067
CPC分类号： H01J65/046
摘要： To maintain the relative positional relationship between an inner tube and an inner electrode of a dielectric barrier discharge tube having a roughly cylindrical, double tube arrangement of an outer tube coaxially arranged about an inner tube with a discharge space defined therebetween, an outer electrode on an outer surface of the outer tube, an inner electrode on an inner surface of the inner tube, and a discharge gas which forms excimer molecules by a dielectric barrier discharge filling said discharge space, despite repeated expansion and contraction of the inner electrode due to the dielectric barrier discharge lamp being repeatedly turned on and off, according to the invention, the inner electrode is formed of a substantially tubular metal component or the like, and a motion preventing component is provided at opposite ends of the inner electrode for maintaining an axial position of the inner electrode relative to the inner tube.
摘要翻译： 为了保持介质阻挡放电管的内管和内电极之间的相对位置关系，所述介质阻挡放电管具有围绕内管同轴布置的外管的大致圆筒形双管布置，其间限定有放电空间，外电极 外管的外表面，内管的内表面上的内电极和通过填充所述放电空间的介电阻挡放电形成准分子分子的放电气体，尽管内电极由于电介质的反复膨胀和收缩 根据本发明，根据本发明，内部电极由基本上管状的金属部件等形成，并且在内部电极的相对端设置防止运动部件，用于保持轴向位置 内部电极相对于内管。
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7.发明授权
公开(公告)号：US5739636A
公开(公告)日：1998-04-14
申请号：US589703
申请日：1996-01-22
IPC分类号： G02B21/16 , G03F7/20 , H01J61/16 , H01J61/18 , H01J61/35 , H01J61/52 , H01J61/86 , H01J61/12
CPC分类号： G03F7/70016 , H01J61/18 , H01J61/35 , H01J61/52 , H01J61/86
摘要： A cadmium discharge lamp which can emit line spectra with wavelengths of 214.+-.2 nm with high power is achieved by encapsulating metallic cadmium, in an amount producing a pressure in stationary lighting operation in the range from 2 kPa to 13.7 kPa, together with at least one of the rare gases xenon, krypton, argon and neon, in a temperature-controlled arc tube which is provided with electrodes located adjacently opposite one another, and by operating the lamp such that J/P is in the range from 1.4 to 75, where J is the discharge current in stationary lighting operation in amperes and the P is the cadmium pressure in stationary lighting operation.
摘要翻译： 可以通过在2kPa至13.7kPa的范围内将固定照明操作中产生压力的金属镉密封在一起，可以发射波长为214 +/- 2nm的线光谱的镉放电灯， 至少有一种稀有气体氙气，氪气，氩气和氖气在一个温度控制的电弧管中，其中设置有彼此相邻的电极，并通过操作灯使得J / P在1.4〜 75，其中J是静止照明中的放电电流，以安培为单位，P是静止照明操作中的镉压力。
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8.发明授权
公开(公告)号：US5763999A
公开(公告)日：1998-06-09
申请号：US531374
申请日：1995-09-20
申请人： Hiromitsu Matsuno , Nobuyuki Hishinuma , Masashi Okamoto , Tatsushi Igarashi , Fumitoshi Takemoto
发明人： Hiromitsu Matsuno , Nobuyuki Hishinuma , Masashi Okamoto , Tatsushi Igarashi , Fumitoshi Takemoto
IPC分类号： G21K5/00 , H01J65/00 , H01J65/04 , H01J61/067
CPC分类号： H01J65/046
摘要： A light source device in which the radiated light from the dielectric barrier discharge lamp can always be stabilized even if the discharge vessel of the dielectric barrier discharge lamp is large or the load on the tube wall within the discharge vessel is small. This is achieved according to the invention by the provision of a light source device having a discharge lamp which has a generally cylindrical, coaxial double-tube arrangement of an outer tube and an inner tube, in which there is an outer electrode on the outer tube, in which there is an inner electrode on the inner tube, and in which a discharge space between the inner and outer tubes is filled with a discharge gas for formation of excimer molecules by a dielectric barrier discharge, and of a power source for operating this discharge lamp in accordance with the relationship: Vs/Vp.ltoreq.0.5 where Vs is the starting voltage and Vp is the voltage applied to the discharge lamp during steady-state luminous operation.
摘要翻译： 即使介电阻挡放电灯的放电容量大或者放电容器内的管壁上的负荷较小，来自电介质阻挡放电灯的辐射光总能稳定的光源装置。 根据本发明，通过提供一种具有放电灯的光源装置来实现，所述放电灯具有外管和内管的大致圆筒形同轴双管布置，其中在外管上具有外电极 其中在内管上存在内电极，并且其中内管和外管之间的放电空间填充有用于通过电介质阻挡放电形成准分子的放电气体，以及用于操作该电极的电源 放电灯按照Vs / Vp
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公开(公告)号：US5666026A
公开(公告)日：1997-09-09
申请号：US530655
申请日：1995-09-20
申请人： Hiromitsu Matsuno , Nobuyuki Hishinuma , Kenichi Hirose , Kunio Kasagi , Fumitoshi Takemoto , Yoshinori Aiura , Tatsushi Igarashi
发明人： Hiromitsu Matsuno , Nobuyuki Hishinuma , Kenichi Hirose , Kunio Kasagi , Fumitoshi Takemoto , Yoshinori Aiura , Tatsushi Igarashi
CPC分类号： H01J65/046
摘要： A dielectric barrier discharge lamp having a generally cylindrical double-tube arrangement of an outer tube coaxially disposed about an inner tube, with an outer electrode disposed on an outside surface of the outer tube, an inner electrode disposed on an inside surface of the inner tube, and a discharge space provided between the outer tube and the inner tube which is filled with a discharge gas for formation of excimer molecules by dielectric barrier discharge achieves firm engagement of the inner electrode against the inner tube and a stable discharge over a long time even if part of the electrode corrodes due to the ozone produced or it wears. This is achieved by embodiments in which the inner electrode is a generally tubular part which is slit in an axial direction along the full length thereof. The tubular part can be a single cylindrically sheet having opposite longitudinally extending edges spaced from each other by a gap or overlapped. Alternatively, the tubular part can be formed of a pair of substantially semi-cylindrical parts which are separated by a gap between each pair of longitudinally extending edges.
摘要翻译： 一种电介质阻挡放电灯，其具有大致圆柱形的双管布置，外管同轴地设置在内管周围，外电极设置在外管的外表面上，内电极设置在内管的内表面上 并且设置在外管和内管之间的放电空间，其填充有用于通过电介质阻挡放电形成准分子分子的放电气体，使得内部电极与内管牢固接合，并且长时间稳定地放电甚至 如果电极的一部分由于产生的臭氧或其磨损而腐蚀。 这是通过其中内部电极是沿着其整个长度沿轴向方向狭缝的大致管状部分的实施例来实现的。 管状部件可以是单个圆柱形片材，其具有彼此间隔开或重叠的相对的纵向延伸边缘。 或者，管状部分可以由一对基本上半圆柱形的部分形成，这些部分由每对纵向延伸边缘之间的间隙分开。
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公开(公告)号：US5541481A
公开(公告)日：1996-07-30
申请号：US282267
申请日：1994-07-29
CPC分类号： H01J61/86 , H01J61/12 , H01J61/18 , H01J61/302
摘要： A cadmium rare gas discharge lamp of the short arc type that has a high power of the spectra in a wavelength range of 210 nm to 230 nm and a stable lamp voltage in lighting operation for a long period. An arc tube 1 is provided within which are disposed opposed, spaced apart electrodes 2, 3 and thermal insulation films 6, 7. A rare gas is encapsulated together with metal cadmium and a quartz glass is used for the material of the arc tube whose OH radical has a weight content of no more than 200 ppm. Electrodes 4 and 5 are spaced apart no more than 10 mm, so that with a lamp current at least 20 amperes, an arc of the electrode-stable type is formed and radiant light of Cd ions obtained. For the encapsulated rare gas, in one embodiment at least one of the rare gases neon, argon or krypton, are used and are encapsulated at a gas pressure of 35 kPa to 2.5 MPa at a standard temperature of 25.degree. C. The arc tube 1 is formed of quartz glass, electrodes 2 and 3 are placed opposite one another. In another embodiment, a halogen gas is encapsulated in the arc to in an amount from 4.5.times.10.sup.-10 mol/cm.sup.3 of arc tube volume to 2.1.times.10.sup.-7 mol/cm.sup.3 of are tube volume.
摘要翻译： 一种短弧型的镉稀释气体放电灯，其在210nm至230nm的波长范围内具有高功率的光谱，并且在长时间的照明操作中具有稳定的灯电压。 设置有电弧管1，其中设置相对的间隔开的电极2,3和绝热膜6,7，稀有气体与金属镉一起被密封，并且石英玻璃用于电弧管的材料，其OH 自由基的重量含量不超过200ppm。 电极4和5的间隔不超过10毫米，使得灯电流至少为20安培，形成电极稳定型弧，并获得Cd离子的辐射光。 对于包封的稀有气体，在一个实施方案中，使用至少一种稀有气体氖，氩或氪，并在25℃的标准温度下以35kPa至2.5MPa的气体压力包封。电弧管1 由石英玻璃形成，电极2和3彼此相对放置。 在另一个实施方案中，将卤素气体以弧形管体积的4.5×10 -10 mol / cm 3封装到管体积的2.1×10 -7 mol / cm 3的量。
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