LOW-VOLTAGE THIN-FILM FIELD-EFFECT TRANSISTORS
    1.
    发明申请
    LOW-VOLTAGE THIN-FILM FIELD-EFFECT TRANSISTORS 审中-公开
    低电压薄膜场效应晶体管

    公开(公告)号:US20110113859A1

    公开(公告)日:2011-05-19

    申请号:US13002703

    申请日:2010-01-14

    摘要: A low-voltage thin-film field-effect transistor is formed by forming a gate, forming a dielectric layer on the surface of the gate, forming a source region and a drain region, and forming a semiconductor layer adjacent the dielectric layer. The dielectric layer is formed as a native oxide layer by oxidizing the surface of the gate. The semiconductor layer is deposited by spray pyrolysis. The dielectric layer may be functionalized with a self-assembling monolayer dielectric layer. The dielectric layer may be formed as a self-assembling monolayer, without first forming a native oxide (or other) dielectric layer.

    摘要翻译: 通过形成栅极形成低电压薄膜场效应晶体管,在栅极的表面上形成电介质层,形成源极区域和漏极区域,并形成与电介质层相邻的半导体层。 介电层通过氧化栅极的表面而形成为天然氧化物层。 半导体层通过喷雾热解沉积。 介电层可以用自组装单层介电层进行功能化。 介电层可以形成为自组装单层,而不首先形成自然氧化物(或其它)电介质层。

    IMPROVED OXIDE-BASED FIELD-EFFECT TRANSISTORS
    2.
    发明申请
    IMPROVED OXIDE-BASED FIELD-EFFECT TRANSISTORS 审中-公开
    改进的基于氧化物的场效应晶体管

    公开(公告)号:US20100059755A1

    公开(公告)日:2010-03-11

    申请号:US12595305

    申请日:2008-04-11

    IPC分类号: H01L29/786 H01L21/336

    摘要: A field-effect transistor includes a source region; a drain region; a semiconductor layer disposed between the source and drain regions; a gate region; and a dielectric region disposed between the semiconductor layer and the gate region. The semiconductor layer comprises a titanium dioxide film. The transistor may be light sending, gas- or bio-sensing, or used in a visual display or in electronic circuits. The transistor is formed by forming a dielectric layer adjacent a gate region; forming a source region and a drain region; and forming a semiconductor layer on the dielectric layer, the semiconductor layer comprising titanium dioxide. The titanium dioxide semiconductor layer may be deposited by spray pyrolysis, or alternatively mesoporous TiO2 films of nanocrystalline morphology may be formed by spin coating, doctor-blading or screen-printing techniques.

    摘要翻译: 场效应晶体管包括源区; 漏区; 设置在源区和漏区之间的半导体层; 门区; 以及设置在半导体层和栅极区之间的电介质区域。 半导体层包括二氧化钛膜。 晶体管可以是发光,气体或生物感测,或用于视觉显示器或电子电路中。 晶体管通过在栅极区域附近形成电介质层而形成; 形成源区和漏区; 以及在所述电介质层上形成半导体层,所述半导体层包含二氧化钛。 可以通过喷雾热解沉积二氧化钛半导体层,或者可以通过旋涂,刮涂或丝网印刷技术形成纳米晶形态的介孔TiO 2膜。

    FABRICATION METHOD FOR THIN-FILM FIELD-EFFECT TRANSISTORS
    3.
    发明申请
    FABRICATION METHOD FOR THIN-FILM FIELD-EFFECT TRANSISTORS 审中-公开
    薄膜场效应晶体管的制造方法

    公开(公告)号:US20120058597A1

    公开(公告)日:2012-03-08

    申请号:US13002113

    申请日:2009-06-30

    IPC分类号: H01L21/34

    摘要: A thin-film field-effect transistor is formed by forming a dielectric layer adjacent a gate, forming a source region and a drain region, and forming a semiconductor layer on the dielectric layer. The semiconductor layer is deposited by spray pyrolysis and comprises a material selected from a group comprising: oxides; oxide-based materials; mixed oxides; metallic type oxides; group I-IV, II-VI, III-VI, IV-VI, V-VI and VIII-VI binary chalcogenides; and group I-II-VI, II-II-VI, II-III-VI, II-VI-VI and V-II-VI ternary chalcogenides.

    摘要翻译: 通过在栅极附近形成电介质层,形成源极区和漏极区,并在电介质层上形成半导体层,形成薄膜场效应晶体管。 半导体层通过喷雾热解沉积,并且包括选自以下的材料:氧化物; 氧化物基材料; 混合氧化物; 金属型氧化物; I-IV族,II-VI族,III-VI族,IV-VI族,V-VI族和VIII-VI族二硫化物; 和I-II-VI族,II-II-VI族,II-III-VI族,II-VI-VI族和V-II-VI族三元硫属化合物。