Inspection apparatus, substrate mounting device and inspection method
    2.
    发明授权
    Inspection apparatus, substrate mounting device and inspection method 有权
    检查装置,基板安装装置及检查方法

    公开(公告)号:US08723536B2

    公开(公告)日:2014-05-13

    申请号:US13580473

    申请日:2011-01-14

    IPC分类号: G01R31/00

    摘要: Non-contact type displacement sensors which measure the height of a substrate surface are installed above the substrate in order to hold the upper surface of the substrate at a desired height or to maintain the flatness of the substrate. A substrate mounting device is such that a plurality of grooves and of barriers are provided on the upper surface of a table and air is supplied between the substrate and the table to enable the pressure of air to displace the substrate. In addition, the substrate mounting device has such a structure as to make it possible to deform the substrate into an arbitrary convex-concave shape or to make the substrate flat by feeding back the output of the displacement sensor.

    摘要翻译: 测量衬底表面高度的非接触型位移传感器安装在衬底上方,以将衬底的上表面保持在期望的高度或保持衬底的平坦度。 衬底安装装置使得在桌子的上表面上设置多个凹槽和屏障,并且在衬底和工作台之间提供空气以使得空气的压力能够移动衬底。 此外,基板安装装置具有能够使基板变形成任意的凸凹形状或通过反馈位移传感器的输出而使基板平坦化的结构。

    Optical defect inspection apparatus
    3.
    发明授权
    Optical defect inspection apparatus 有权
    光学缺陷检查装置

    公开(公告)号:US07894052B2

    公开(公告)日:2011-02-22

    申请号:US12705031

    申请日:2010-02-12

    IPC分类号: G01N21/00

    摘要: A laser beam oscillated from a laser source is folded in its path by first and second plane mirrors and enters a beam expander. The surface of each plane mirror is deteriorated with illumination by the laser beam and the reflectance is reduced. To avoid a light quantity of the laser beam entering the beam expander from being reduced below a reference value, when the laser beam is illuminated over a certain time, a position on each of the first and second plane mirrors at which the laser beam is illuminated is changed by a structure for rotating and/or translating a reflecting surface of each plane mirror on a plane, which includes the plane mirror, while an optical axis is kept same. Thus, the useful life of each plane mirror can be prolonged without displacing the optical axis.

    摘要翻译: 从激光源振荡的激光束在其路径中被第一和第二平面镜折叠并进入光束扩展器。 每个平面镜的表面由激光照射而劣化,反射率降低。 为了避免进入光束扩展器的激光束的光量减小到低于参考值,当在一定时间内照射激光束时,激光束被照亮的第一和第二平面镜中的每一个上的位置 通过用于在包括平面镜的平面上旋转和/或平移每个平面镜的反射表面的结构改变,同时光轴保持相同。 因此,可以延长每个平面镜的使用寿命而不移动光轴。

    Substrate holding apparatus, and inspection or processing apparatus
    4.
    发明授权
    Substrate holding apparatus, and inspection or processing apparatus 有权
    基板保持装置,检查或处理装置

    公开(公告)号:US07723709B2

    公开(公告)日:2010-05-25

    申请号:US11896291

    申请日:2007-08-30

    IPC分类号: G01N21/86 G01V8/00

    摘要: In order to enable high accuracy positioning and strong pressing of a substrate, the present invention provides a substrate holding apparatus including: a rotating bed having an inclined surface supporting a lower side of an outer circumferential side surface of the substrate, which bed rotates on a normal line of the substrate as the rotation axis together with the substrate; a position restriction unit rotating together with the rotating bed and restricting the substrate in a predetermined position on the rotating bed by pressing a plurality of points on the circumference on an upper side of the outer circumferential side surface of the substrate prior to the rotation; and a pressing unit rotating together with the rotating bed and pressing the substrate against the inclined surface by pressing a plurality of points on the upper side of the outer circumferential side surface of the substrate during the rotation.

    摘要翻译: 为了实现基板的高精度定位和强压,本发明提供了一种基板保持装置,其包括:旋转台,其具有支撑基板的外周侧表面的下侧的倾斜面,该床在 基板的法线与基板一起作为旋转轴; 位置限制单元,与旋转床一起旋转,并且在旋转之前通过在基板的外周侧表面的上侧按压圆周上的多个点将基板限制在旋转床上的预定位置; 以及与旋转床一起旋转的按压单元,并且通过在旋转期间按压基板的外周侧面的上侧的多个点,将基板压靠在倾斜面上。

    Object holding apparatus, and inspection apparatus
    5.
    发明授权
    Object holding apparatus, and inspection apparatus 有权
    物体保持装置和检查装置

    公开(公告)号:US08686383B2

    公开(公告)日:2014-04-01

    申请号:US13454897

    申请日:2012-04-24

    IPC分类号: H01L21/68

    摘要: In order to enable high accuracy positioning and strong pressing of a substrate, the present invention provides a substrate holding apparatus including: a rotating bed having an inclined surface supporting a lower side of an outer circumferential side surface of the substrate, which bed rotates on a normal line of the substrate as the rotation axis together with the substrate; a position restriction unit rotating together with the rotating bed and restricting the substrate in a predetermined position on the rotating bed by pressing a plurality of points on the circumference on an upper side of the outer circumferential side surface of the substrate prior to the rotation; and a pressing unit rotating together with the rotating bed and pressing the substrate against the inclined surface by pressing a plurality of points on the upper side of the outer circumferential side surface of the substrate during the rotation.

    摘要翻译: 为了实现基板的高精度定位和强压,本发明提供了一种基板保持装置,其包括:旋转台,其具有支撑基板的外周侧表面的下侧的倾斜面,该床在 基板的法线与基板一起作为旋转轴; 位置限制单元,与旋转床一起旋转,并且在旋转之前通过在基板的外周侧表面的上侧按压圆周上的多个点将基板限制在旋转床上的预定位置; 以及与旋转床一起旋转的按压单元,并且通过在旋转期间按压基板的外周侧面的上侧的多个点,将基板压靠在倾斜面上。

    Substrate holding apparatus, and inspection or processing apparatus
    7.
    发明授权
    Substrate holding apparatus, and inspection or processing apparatus 有权
    基板保持装置,检查或处理装置

    公开(公告)号:US07999242B2

    公开(公告)日:2011-08-16

    申请号:US12754927

    申请日:2010-04-06

    IPC分类号: H01L21/68

    摘要: In order to enable high accuracy positioning and strong pressing of a substrate, the present invention provides a substrate holding apparatus including: a rotating bed having an inclined surface supporting a lower side of an outer circumferential side surface of the substrate, which bed rotates on a normal line of the substrate as the rotation axis together with the substrate; a position restriction unit rotating together with the rotating bed and restricting the substrate in a predetermined position on the rotating bed by pressing a plurality of points on the circumference on an upper side of the outer circumferential side surface of the substrate prior to the rotation; and a pressing unit rotating together with the rotating bed and pressing the substrate against the inclined surface by pressing a plurality of points on the upper side of the outer circumferential side surface of the substrate during the rotation.

    摘要翻译: 为了实现基板的高精度定位和强压,本发明提供了一种基板保持装置,其包括:旋转台,其具有支撑基板的外周侧表面的下侧的倾斜面,该床在 基板的法线与基板一起作为旋转轴; 位置限制单元,与旋转床一起旋转,并且在旋转之前通过在基板的外周侧表面的上侧按压圆周上的多个点将基板限制在旋转床上的预定位置; 以及与旋转床一起旋转的按压单元,并且通过在旋转期间按压基板的外周侧面的上侧的多个点,将基板压靠在倾斜面上。

    OPTICAL DEFECT INSPECTION APPARATUS
    8.
    发明申请
    OPTICAL DEFECT INSPECTION APPARATUS 有权
    光学缺陷检测装置

    公开(公告)号:US20100141936A1

    公开(公告)日:2010-06-10

    申请号:US12705031

    申请日:2010-02-12

    IPC分类号: G01N21/00

    摘要: A laser beam oscillated from a laser source is folded in its path by first and second plane mirrors and enters a beam expander. The surface of each plane mirror is deteriorated with illumination by the laser beam and the reflectance is reduced. To avoid a light quantity of the laser beam entering the beam expander from being reduced below a reference value, when the laser beam is illuminated over a certain time, a position on each of the first and second plane mirrors at which the laser beam is illuminated is changed by a structure for rotating and/or translating a reflecting surface of each plane mirror on a plane, which includes the plane mirror, while an optical axis is kept same. Thus, the useful life of each plane mirror can be prolonged without displacing the optical axis.

    摘要翻译: 从激光源振荡的激光束在其路径中被第一和第二平面镜折叠并进入光束扩展器。 每个平面镜的表面由激光照射而劣化,反射率降低。 为了避免进入光束扩展器的激光束的光量减小到低于参考值,当在一定时间内照射激光束时,激光束被照亮的第一和第二平面镜中的每一个上的位置 通过用于在包括平面镜的平面上旋转和/或平移每个平面镜的反射表面的结构改变,同时光轴保持相同。 因此,可以延长每个平面镜的使用寿命而不移动光轴。

    Substrate holding apparatus, and inspection or processing apparatus
    9.
    发明申请
    Substrate holding apparatus, and inspection or processing apparatus 有权
    基板保持装置,检查或处理装置

    公开(公告)号:US20080054197A1

    公开(公告)日:2008-03-06

    申请号:US11896291

    申请日:2007-08-30

    IPC分类号: G01N21/86 H01L21/68

    摘要: In order to enable high accuracy positioning and strong pressing of a substrate, the present invention provides a substrate holding apparatus including: a rotating bed having an inclined surface supporting a lower side of an outer circumferential side surface of the substrate, which bed rotates on a normal line of the substrate as the rotation axis together with the substrate; a position restriction unit rotating together with the rotating bed and restricting the substrate in a predetermined position on the rotating bed by pressing a plurality of points on the circumference on an upper side of the outer circumferential side surface of the substrate prior to the rotation; and a pressing unit rotating together with the rotating bed and pressing the substrate against the inclined surface by pressing a plurality of points on the upper side of the outer circumferential side surface of the substrate during the rotation.

    摘要翻译: 为了实现基板的高精度定位和强压,本发明提供了一种基板保持装置,其包括:旋转台,其具有支撑基板的外周侧表面的下侧的倾斜面,该床在 基板的法线与基板一起作为旋转轴; 位置限制单元,与旋转床一起旋转,并且在旋转之前通过在基板的外周侧表面的上侧按压圆周上的多个点将基板限制在旋转床上的预定位置; 以及与旋转床一起旋转的按压单元,并且通过在旋转期间按压基板的外周侧面的上侧的多个点,将基板压靠在倾斜面上。

    Noodles containing tofu puree
    10.
    发明授权
    Noodles containing tofu puree 失效
    面条含豆腐泥

    公开(公告)号:US06641855B1

    公开(公告)日:2003-11-04

    申请号:US09926348

    申请日:2001-10-18

    IPC分类号: A23L116

    摘要: The purpose is to provide noodles having excellent texture and good taste that contain tofu puree having specific physicochemical properties, and relates to noodles containing tofu puree having the following physicochemical properties: a) viscosity of 20 to 3,000 mPa·s, b) dynamic storage modulus of 0.2 to 600 Pa, c) dynamic loss modulus of 0.2 to 250 Pa, and d) the average particle diameter of particles contained in the tofu puree of 2 to 15 &mgr;m and the 90% particle diameter of the particles of 35 &mgr;m or smaller.

    摘要翻译: 其目的在于提供含有具有特定物理化学性质的豆腐泥的质地优良,味道好的面条,具有以下物理化学性质的含有豆腐泥的面条:a)20〜3,000mPa.s的粘度,b)动态储能模量 为0.2〜600Pa,c)动态损耗模量为0.2〜250Pa,d)豆粉中含有的粉末的平均粒径为2〜15μm,粒径为90μm以下的粒子的平均粒径为35μm以下。 。