摘要:
A semiconductor wafer processing apparatus comprises a reaction furnace capable of heating inside thereof, a wafer mount for mounting a semiconductor wafer thereon and a transfer device. The wafermount includes an opening which is greater than the semiconductor wafer and which has a circle shape or a shape substantially similar to an outer periphery of the semiconductor wafer, and includes a wafer supporting portion projecting inwardly of the opening for supporting the semiconductor wafer. The transfer device is capable of holding the wafer mount outside the semiconductor wafer as viewed from a vertical direction, and transferring the wafer mount carrying the semiconductor wafer thereon substantially horizontally into and/or out from the reaction furnace.
摘要:
Over the principal surface of a semiconductor substrate body containing an impurity of a predetermined conduction type, there is formed an epitaxial layer which contains an impurity of the same conduction type as that of the former impurity and the same concentration as the designed one of the former impurity. After this, there are formed a well region which has the same conduction type as that of said impurity and its impurity concentration gradually lowered depthwise of said epitaxial layer. The well region is formed with the gate insulating films of MIS.FETs.
摘要:
Over the principal surface of a semiconductor substrate body containing an impurity of a predetermined conduction type, there is formed an epitaxial layer which contains an impurity of the same conduction type as that of the former impurity and the same concentration as the designed one of the former impurity. After this, there are formed a well region which has the same conduction type as that of said impurity and its impurity concentration gradually lowered depthwise of said epitaxial layer. The well region is formed with the gate insulating films of MIS·FETs.
摘要:
Over the principal surface of a semiconductor substrate body containing an impurity of a predetermined conduction type, there is formed an epitaxial layer which contains an impurity of the same conduction type as that of the former impurity and the same concentration as the designed one of the former impurity. After this, there are formed a well region which has the same conduction type as that of said impurity and its impurity concentration gradually lowered depthwise of said epitaxial layer. The well region is formed with the gate insulating films of MIS·FETs.
摘要:
Over the principal surface of a semiconductor substrate body containing an impurity of a predetermined conduction type, there is formed an epitaxial layer which contains an impurity of the same conduction type as that of the former impurity and the same concentration as the designed one of the former impurity. After this, there are formed a well region which has the same conduction type as that of said impurity and its impurity concentration gradually lowered depthwise of said epitaxial layer. The well region is formed with the gate insulating films of MIS.FETs.
摘要:
An ink jet printer has a print head adapted to move in a printing area and in a wiping area outside of the printing area. The print head ejects ink drops through orifices in accordance with print data while it is moving in the print area. The wiper is disposed in the wiping area. The nozzle plate having orifices formed therethrough is wiped off when the print head moves in the wiping area. A wiper transporting mechanism includes a supporting mechanism for supporting and moving the wiper parallel with the print head when the print head moves in the wiping area, the wiper being transported at a velocity lower than the print head so that the wiper gently wipes the nozzle plate preventing the ink adhering to the wiper from splashing.
摘要:
A control unit for a vehicle air-conditioner system of the type incorporating an in-car sensor and an aspirator fan has a circuit board mounted in a casing equipped with a control panel, an aspirator fan for sucking passenger compartment air into the casing through an air intake in the panel is provided on the circuit board, and a detection element for detecting vehicle passenger compartment temperature is attached to the circuit board to be disposed in the flow path of the passenger compartment air sucked in through the air intake. Some or all necessary components requiring cooling are disposed in the flow path at points downstream of the detection element.
摘要:
A vehicle air-conditioning system which operates in response to the manipulation of momentary switches is provided with discriminating means for discriminating whether any momentary switch is on at the time of system power-up. When the discriminating means finds that one or more momentary switches are on, the vehicle air-conditioning system is set to a predefined initial control state independent of contact information from such momentary switch or switches. As a result, at least the minimum temperature control required for occupant comfort can be secured when shorted contact sticking occurs in a momentary switch provided on an operation panel.
摘要:
An automobile air-conditioner wherein a controlled variable used to determine the control mode of a component of the air-conditioner is corrected or restricted according to the amount of shifting of the head part setting temperature for driving the component of the air-conditioner based on the corrected or restricted controlled variable. With this arrangement, an occupant of the automobile senses an enhanced change of the air-conditioning operation when the head part setting temperature is changed.
摘要:
An automotive air conditioner system including a first detector for detecting a cooling load in the front-seat space of a vehicle passenger compartment, a second detector for detecting a cooling load in the rear-seat space, a discriminator for selecting a larger one of the detected cooling loads, and a controller for controlling operation of a refrigerant compressor in accordance with the selected cooling load.