SOLID-STATE IMAGE PICKUP DEVICE AND FABRICATION METHOD THEREOF
    1.
    发明申请
    SOLID-STATE IMAGE PICKUP DEVICE AND FABRICATION METHOD THEREOF 有权
    固态图像拾取器件及其制造方法

    公开(公告)号:US20090039454A1

    公开(公告)日:2009-02-12

    申请号:US12186157

    申请日:2008-08-05

    IPC分类号: H01L31/0232 H01L21/02

    摘要: Provided is a solid-state image pickup device capable of suppressing deterioration of characteristic caused due to an antireflection film itself absorbing a light. In the solid-state image pickup device of the present invention, a plurality of color filters 8a, 8b, and 8c having spectral characteristics, respectively, different from each other are provided so as to correspond to a plurality of light reception sections 2, respectively, aligned on a semiconductor substrate 1. Further, a plurality of microlenses 10 are provided above the plurality of color filters 8a, 8b, and 8c, respectively. A plurality of antireflection films 11a are selectively formed on surfaces of the microlenses 10 provided above color filters 8b each having a predetermined spectral characteristic.

    摘要翻译: 提供一种能够抑制由吸收光的抗反射膜本身引起的特性劣化的固态图像拾取装置。 在本发明的固态图像拾取装置中,分别具有彼此不同的分光特性的多个滤色器8a,8b和8c分别对应于多个光接收部2 在半导体衬底1上对准。此外,多个微透镜10分别设置在多个滤色器8a,8b和8c上方。 多个防反射膜11a选择性地形成在设置在具有预定光谱特性的滤色器8b之上的微透镜10的表面上。

    Solid-state image pickup device
    2.
    发明授权
    Solid-state image pickup device 有权
    固态图像拾取装置

    公开(公告)号:US07750360B2

    公开(公告)日:2010-07-06

    申请号:US12186157

    申请日:2008-08-05

    摘要: Provided is a solid-state image pickup device capable of suppressing deterioration of characteristic caused due to an antireflection film itself absorbing a light. In the solid-state image pickup device of the present invention, a plurality of color filters 8a, 8b, and 8c having spectral characteristics, respectively, different from each other are provided so as to correspond to a plurality of light reception sections 2, respectively, aligned on a semiconductor substrate 1. Further, a plurality of microlenses 10 are provided above the plurality of color filters 8a, 8b, and 8c, respectively. A plurality of antireflection films 11a are selectively formed on surfaces of the microlenses 10 provided above color filters 8b each having a predetermined spectral characteristic.

    摘要翻译: 提供一种能够抑制由吸收光的抗反射膜本身引起的特性劣化的固态图像拾取装置。 在本发明的固态图像拾取装置中,分别具有彼此不同的分光特性的多个滤色器8a,8b和8c分别对应于多个光接收部2 在半导体衬底1上对准。此外,多个微透镜10分别设置在多个滤色器8a,8b和8c上方。 多个防反射膜11a选择性地形成在设置在具有预定光谱特性的滤色器8b之上的微透镜10的表面上。

    Solid-state imaging device
    3.
    发明授权
    Solid-state imaging device 有权
    固态成像装置

    公开(公告)号:US08093672B2

    公开(公告)日:2012-01-10

    申请号:US11523698

    申请日:2006-09-20

    IPC分类号: H01L31/0232

    摘要: Provided is a manufacturing method of a solid-state imaging device, which is able to realize a solid-state imaging device whose reflection prevention coating is even and that does not have image noise in case of adopting a spincoating method in applying a material of the reflection prevention coating onto microlenses of the solid-state imaging device. In the solid-state imaging device 1 according to the present invention, a barrier wall pattern 7 is formed, as a step alleviating structure, in dicing areas 5X formed between adjacent imaging areas 9. The barrier wall pattern 7 has a rectangular sectional form. With use of the barrier wall pattern 7 in the spincoating method, reflection prevention coating 8 is coated onto the microlenses 6 more evenly than in conventional cases.

    摘要翻译: 提供一种固态成像装置的制造方法,其能够实现防反射涂层均匀的固态成像装置,并且在应用旋涂方法的情况下不具有图像噪声 反射防止涂层在固态成像装置的微透镜上。 在根据本发明的固态成像装置1中,在形成在相邻成像区域9之间的切割区域5X中形成阻挡壁图案7作为阶梯缓和结构。阻挡壁图案7具有矩形截面形状。 通过使用旋涂法中的阻挡壁图案7,与常规情况相比,防反射涂层8更均匀地涂覆在微透镜6上。

    Solid-state imaging device and manufacturing method thereof
    6.
    发明申请
    Solid-state imaging device and manufacturing method thereof 有权
    固态成像装置及其制造方法

    公开(公告)号:US20070096243A1

    公开(公告)日:2007-05-03

    申请号:US11523698

    申请日:2006-09-20

    IPC分类号: H01L31/06

    摘要: Provided is a manufacturing method of a solid-state imaging device, which is able to realize a solid-state imaging device whose reflection prevention coating is even and that does not have image noise in case of adopting a spincoating method in applying a material of the reflection prevention coating onto microlenses of the solid-state imaging device. In the solid-state imaging device 1 according to the present invention, a barrier wall pattern 7 is formed, as a step alleviating structure, in dicing areas 5X formed between adjacent imaging areas 9. The barrier wall pattern 7 has a rectangular sectional form. With use of the barrier wall pattern 7 in the spincoating method, reflection prevention coating 8 is coated onto the microlenses 6 more evenly than in conventional cases.

    摘要翻译: 提供一种固态成像装置的制造方法,其能够实现防反射涂层均匀的固态成像装置,并且在应用旋涂方法的情况下不具有图像噪声 反射防止涂层在固态成像装置的微透镜上。 在根据本发明的固态成像装置1中,在相邻成像区域9之间形成的切割区域5中形成有阻挡壁图案7作为阶梯缓和结构。 阻挡壁图案7具有矩形截面形状。 通过使用旋涂法中的阻挡壁图案7,与常规情况相比,防反射涂层8更均匀地涂覆在微透镜6上。

    Solid state imaging device and method for manufacturing the same
    7.
    发明授权
    Solid state imaging device and method for manufacturing the same 有权
    固态成像装置及其制造方法

    公开(公告)号:US07619678B2

    公开(公告)日:2009-11-17

    申请号:US11584560

    申请日:2006-10-23

    IPC分类号: H04N5/225

    摘要: A solid state imaging device includes: a solid state imaging element including a light receiving element, a microlens formed above the light receiving element, a first transparent layer formed on the microlens and a second transparent layer formed on or above the microlens and harder than the first transparent layer; a transparent component formed above the second transparent layer; and an adhesive layer for bonding the second transparent layer and the transparent component. The hard second transparent layer prevents the occurrence of scratches during a dicing step.

    摘要翻译: 固态成像装置包括:固态成像元件,包括光接收元件,形成在光接收元件上方的微透镜,形成在微透镜上的第一透明层和形成在微透镜上或之上的第二透明层,并且硬 第一透明层; 形成在所述第二透明层上方的透明部件; 以及用于粘合第二透明层和透明部件的粘合剂层。 硬的第二透明层防止在切割步骤期间发生划痕。

    Solid state imaging device and method for manufacturing the same
    9.
    发明申请
    Solid state imaging device and method for manufacturing the same 有权
    固态成像装置及其制造方法

    公开(公告)号:US20070117349A1

    公开(公告)日:2007-05-24

    申请号:US11584560

    申请日:2006-10-23

    IPC分类号: H04N5/225 H01L21/30 H01L23/02

    摘要: A solid state imaging device includes: a solid state imaging element including a light receiving element, a microlens formed above the light receiving element, a first transparent layer formed on the microlens and a second transparent layer formed on or above the microlens and harder than the first transparent layer; a transparent component formed above the second transparent layer; and an adhesive layer for bonding the second transparent layer and the transparent component. The hard second transparent layer prevents the occurrence of scratches during a dicing step.

    摘要翻译: 固态成像装置包括:固态成像元件,包括光接收元件,形成在光接收元件上方的微透镜,形成在微透镜上的第一透明层和形成在微透镜上或上方的第二透明层, 第一透明层; 形成在所述第二透明层上方的透明部件; 以及用于粘合第二透明层和透明部件的粘合剂层。 硬的第二透明层防止在切割步骤期间发生划痕。