摘要:
A deposition system in accordance with one embodiment of the present invention includes a process chamber, a stationary pedestal for supporting a substrate in the process chamber, and a moveable shield forming at least a portion of an enclosure defining the process chamber. Motion of the shield with respect to the stationary pedestal controls a variable gas conductance path for gases flowing through the process chamber thereby modulating the pressure of the process chamber with respect to an external volume. The moveable shield in accordance with an embodiment of the present invention may include several gas channel openings for introducing various process gases into the process chamber. In some embodiments, the moveable shield may alternatively or additionally include an interior cooling or heating channel for temperature control.
摘要:
A deposition system includes a process chamber for conducting an ALD process to deposit layers on a substrate. An electrostatic chuck (ESC) retains the substrate. A backside gas increases thermal coupling between the substrate and the ESC. The ESC is cooled via a coolant flowing through a coolant plate and heated via a resistive heater. Various arrangements are disclosed.
摘要:
FIG. 1 is a perspective view of the Arduino matrix screen enclosure; FIG. 2 is a back view thereof; FIG. 3 is a right side view thereof; FIG. 4 is a left side view thereof; FIG. 5 is a top side view thereof; FIG. 6 is a bottom view thereof; and, FIG. 7 is an exploded view thereof.
摘要:
A combined fill and safety vent plug adapted to being mounted in a port in a pressure tank. A valve housing member is adapted to being mounted in a port in a pressure vessel. A fill valve is located in a fill valve socket in the valve housing member. A vent valve and an overflow system are also provided in the valve housing member. All of the functions of filling, venting, dispensing, and overflow protection are provided by elements contained in one single plug in one single port in a pressure vessel. For safety purposes, the vent valve dumps excess fluid generally laterally of the valve housing member.
摘要:
The present invention is directed to an apparatus for applying markings, particularly to springs, that are clean (ink in self contained storage units), allows quick color changes and reduces wasted ink or paint. An application means that does not dry out during short down time periods, keeps up with production rates, and is cost effective.
摘要:
The present invention is directed to an apparatus for applying markings, particularly to springs, that are clean (ink in self contained storage units), allows quick color changes and reduces wasted ink or paint. An application means that does not dry out during short down time periods, keeps up with production rates, and is cost effective.
摘要:
The invention relates to efficient, high-throughput methods, systems, and DNA constructs for identification and isolation of transcription termination sequences. The invention relates further to specific terminator sequences identified by said methods isolated from rice.
摘要:
A storage array presents virtual arrays to hosts through use of virtual port IDs. The storage array includes groups of logical units of storage. The groups are coupled to a switch through at least one physical port. Each group is assigned a unique virtual port ID for each physical port to which it is coupled. The virtual port IDs are assignable by the switch. The virtual port IDs are used by hosts coupled to the switch to exchange data with the groups to which the virtual port IDs are assigned. Further, a zoning table in the switch can associate each virtual port ID to a host facing port on the switch. In this case each host can communicate only with groups of logical units that are assigned virtual IDs associated with the host facing port to which it is coupled.
摘要:
In a first aspect, a first method of reducing command processing latency while maintaining memory coherence is provided. The first method includes the steps of (1) providing a memory map including memory addresses available to a system; and (2) arranging the memory addresses into a plurality of groups. At least one of the groups does not require the system, in response to a command that requires access to a memory address in the group from a bus unit, to get permission from all remaining bus units included in the system to maintain memory coherence. Numerous other aspects are provided.