ELECTROLYTIC COPPER PLATING SOLUTION ANALYZER, AND ELECTROLYTIC COPPER PLATING SOLUTION ANALYSIS METHOD
    4.
    发明申请
    ELECTROLYTIC COPPER PLATING SOLUTION ANALYZER, AND ELECTROLYTIC COPPER PLATING SOLUTION ANALYSIS METHOD 审中-公开
    电解铜溶液分析仪和电解铜溶液分析方法

    公开(公告)号:US20160377573A1

    公开(公告)日:2016-12-29

    申请号:US15259734

    申请日:2016-09-08

    Abstract: An electrolytic copper plating solution analyzer comprises an analysis container for accommodating a part of an electrolytic copper plating solution containing additives including a promoter, an inhibitor and a leveler, a working electrode immersed in the electrolytic copper plating solution accommodated in the analysis container, a reference electrode immersed in the electrolytic copper plating solution and used as a reference when a potential of the working electrode is determined, a counter electrode immersed in the electrolytic copper plating solution, a rotation drive unit for rotating the working electrode at a given speed, a current generation unit passing an electric current with a given current density between the working electrode and the counter electrode, a potential measurement unit for measuring the potential between the working electrode and the reference electrode, and an analysis unit for analyzing the relationship between an elapsed time after the current passage and the potential.

    Abstract translation: 一种电解铜电镀溶液分析仪,包括用于容纳包含助催化剂,抑制剂和整平剂的添加剂的电解铜电镀溶液的一部分的分析容器,浸在容纳在分析容器中的电解铜电镀溶液中的工作电极, 电极浸在电解镀铜溶液中,并且当确定工作电极的电位时用作参考,浸没在电解镀铜溶液中的对电极,以给定速度旋转工作电极的旋转驱动单元,电流 在工作电极和对电极之间通过具有给定电流密度的电流的发电单元,用于测量工作电极和参考电极之间的电位的电位测量单元和用于分析工作电极和参比电极之间的经过时间之间的关系之间的关系的分析单元 当前的段落和 潜力。

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