公开(公告)号：US5463667A

公开(公告)日：1995-10-31

申请号：US53240

申请日：1993-04-28

申请人： Toshiaki Ichinose ,  Takanori Ninomiya ,  Asahiro Kuni ,  Kozo Nakahata ,  Toshimitsu Hamada ,  Toshihiko Ayabe

发明人： Toshiaki Ichinose ,  Takanori Ninomiya ,  Asahiro Kuni ,  Kozo Nakahata ,  Toshimitsu Hamada ,  Toshihiko Ayabe

IPC分类号： G01N23/04 ,  H01L21/66 ,  H01L23/50 ,  H05K3/34 ,  H05K13/08

CPC分类号： H05K13/08 ,  G01N23/04

摘要： A method and an apparatus for inspecting a soldered joint with an X-ray, the soldered joint being formed by soldering a lead to a surface of a substrate. The method may include moving the substrate so as to move the surface of the substrate in an XY plane to position the soldered joint at a desired position in the XY plane, rotating the substrate so as to rotate the surface of the substrate in the XY plane to position the soldered joint at a desired orientation in the XY plane, rotating an X-ray source and a detector about the soldered joint in both of two mutually perpendicular planes perpendicular to the XY plane while maintaining the X-ray source and the detector at fixed positions relative to each other to establish a desired oblique irradiation angle between an X-ray from the X-ray source and the lead on the surface of the substrate, irradiating the soldered joint with the X-ray from the X-ray source at the desired oblique irradiation angle such that the X-ray is transmitted through the soldered joint and the substrate, detecting the X-ray transmitted through the soldered joint and the substrate with the detector, the detector producing an output signal indicative of the detected X-ray, and determining a condition of the soldered joint based on the output signal of the detector. The apparatus may operate in the same fashion.

摘要翻译： 一种用X射线检测焊接接头的方法和装置，所述焊接接头通过将引线焊接到基板的表面而形成。 该方法可以包括移动基板以使基板的表面在XY平面中移动，以将焊接接头定位在XY平面中的期望位置，旋转基板以使基板的表面在XY平面中旋转 将焊接接头定位在XY平面中所需的取向上，使X射线源和检测器围绕焊接接头在与XY平面垂直的两个相互垂直的平面中旋转，同时将X射线源和检测器保持在 固定位置，以建立来自X射线源的X射线与衬底表面上的铅之间的期望的倾斜照射角度，用X射线源的X射线照射焊接接头 所需的倾斜照射角度，使得X射线透射通过焊接接头和基板，通过检测器检测透过焊接接头和基板的X射线，检测器产品 选择表示检测到的X射线的输出信号，以及基于检测器的输出信号确定焊接接头的状态。 该装置可以以相同的方式操作。

公开(公告)号：US4776023A

公开(公告)日：1988-10-04

申请号：US850681

申请日：1986-04-11

申请人： Toshimitsu Hamada ,  Mineo Nomoto ,  Kozo Nakahata

发明人： Toshimitsu Hamada ,  Mineo Nomoto ,  Kozo Nakahata

IPC分类号： H04N7/18 ,  G01N21/956 ,  G06T7/00 ,  H01L51/00 ,  G06K9/64

CPC分类号： G06T7/001 ,  G01N21/95607 ,  G06T2207/30148

摘要： Two kinds of image corresponding to a reference pattern and a pattern to be inspected are converted into binary images and local images cut out from the binary images are compared with each other to detect differences between the cut out images and recognize these differences as a defect. One of the main subjects of the inspecting method is to moderate excess sensitivity to the different portions to the extent of allowing non-serious actual defects. By setting don't care areas each of which consists of one pixel row neighboring on a binary boundary line in the image, and comparing the remaining portions of the images other than the don't care areas by logical processing it is possible to detect various defects without regarding the quantization error as a defect.

摘要翻译： 对应于参考图案和待检查图案的两种图像被转换为​​二进制图像，并且将从二进制图像切出的局部图像彼此进行比较，以检测切出的图像之间的差异并将这些差异识别为缺陷。 检查方法的主要课题之一是对不同部位的过度敏感度进行调节，使得不严重的实际缺陷达到程度。 通过设置不关心区域，每个区域由图像中的二进制边界线上相邻的一个像素行组成，并且通过逻辑处理比较除了无关区域之外的图像的剩余部分，可以检测各种 缺陷而不考虑量化误差作为缺陷。

公开(公告)号：US4872187A

公开(公告)日：1989-10-03

申请号：US156179

申请日：1988-02-16

申请人： Kozo Nakahata ,  Toshimitsu Hamada ,  Yasuo Nakagawa ,  Mineo Nomoto

发明人： Kozo Nakahata ,  Toshimitsu Hamada ,  Yasuo Nakagawa ,  Mineo Nomoto

IPC分类号： G01N23/04 ,  G01N23/18

CPC分类号： G01N23/18 ,  G01N23/046 ,  G01N2223/419

摘要： In an X-ray tomographic imaging system and method, an object to be inspected is irradiated with X-rays from an X-ray source to obtain an X-ray transmission image of the object. The X-ray transmission image is converted by an X-ray fluorescence image intensifier into a detection image. The intensity of the detection image is also intensified by the X-ray fluorescence image intensifier. A photo-electric converter converts the intensified detection image from the X-ray fluorescence image intensifier into an electrical signal. The object to be inspected is held by an object holder rotatably at a position in proximity to the X-ray source and movably in a direction of the axis of rotation of the object and a direction perpendicular to the rotation axis. The electrical signal from the photo-electric converter is processed to a cross-sectional image.

摘要翻译： 在X射线层析成像系统和方法中，从X射线源照射X射线检查对象物，得到被检体的X射线透过图像。 通过X射线荧光图像增强器将X射线透射图像转换成检测图像。 X射线荧光图像增强器也增强了检测图像的强度。 光电转换器将强化的检测图像从X射线荧光图像增强器转换成电信号。 待检查对象由物体保持器可旋转地保持在靠近X射线源的位置，并且可沿物体的旋转轴线和垂直于旋转轴线的方向移动。 来自光电转换器的电信号被处理成横截面图像。

公开(公告)号：US5493594A

公开(公告)日：1996-02-20

申请号：US207796

申请日：1994-03-07

申请人： Toshimitsu Hamada ,  Kozo Nakahata ,  Yoshifumi Morioka

发明人： Toshimitsu Hamada ,  Kozo Nakahata ,  Yoshifumi Morioka

IPC分类号： G01N23/04 ,  B23K1/00 ,  G01N23/18 ,  H05K1/18 ,  H05K3/34 ,  G01N23/02

CPC分类号： G01N23/04

摘要： A method and apparatus for inspecting a solder joint by an X-ray fluoroscopic image in which an X-ray is irradiated on an object to be inspected located by a specimen stage and having a lead of an electronic part soldered to a substrate to detect an X-ray fluoroscopic image signal, a position of a lead in a tip direction is obtained by a distribution of projection with said X-ray fluoroscopic image signal projected in a lead row direction, a position of a lead in a row direction is obtained by a distribution of projection with said X-ray fluoroscopic image projected in a lead tip direction to extract a position of a solder joint as an object to be inspected, and said X-ray fluoroscopic image is evaluated every solder joint in accordance with the postion information to effect a defect detection.

摘要翻译： 一种用于通过X射线透视图像来检查焊点的方法和装置，其中X射线被照射在被检体的位置上，并且具有被焊接到基底的电子部件的引线以检测 X射线透视图像信号，通过在引导行方向上投影的所述X射线透视图像信号的投影分布来获得尖端方向上的引线位置，通过以下方式获得引线在行方向上的位置： 利用所述X射线透视图像在引线尖端方向上投射的突起的分布，以提取作为被检查对象的焊点的位置，并且根据位置信息对每个焊点评估所述X射线透视图像 以实现缺陷检测。

公开(公告)号：US4254432A

公开(公告)日：1981-03-03

申请号：US872578

申请日：1978-01-26

申请人： Kozo Nakahata

发明人： Kozo Nakahata

IPC分类号： H01J9/42 ,  H01J9/44 ,  H04N9/28 ,  H04N17/04 ,  H04N9/62

CPC分类号： H04N9/28 ,  H04N17/04

摘要： A raster, for example in magenta, generated on a phosphor screen of a color picture tube is picked up by a television camera through an optical filter which allows a magenta component to pass therethrough predominantly. The television camera scans the displayed raster in the horizontal direction on the line base thereby to produce a video signal representing luminances at individual points on the raster lines. A sample and hold circuit is provided to extract paired video signal values at paired points on the raster lines located symmetrically to each other relative to a vertical center line of the display screen. One of the paired video signal values extracted through the timed sampling operation is subtracted from the other at a processing circuit.

摘要翻译： 在彩色显像管的荧光屏上生成的例如品红色的光栅由电视摄像机通过允许品红色成分主要通过的滤光片拾取。 电视摄像机在线基上沿水平方向扫描显示的光栅，从而产生表示光栅线上各个点的亮度的视频信号。 提供采样和保持电路以相对于显示屏的垂直中心线彼此对称放置的光栅线上的成对点提取成对视频信号值。 在处理电路中从另一个中减去通过定时采样操作提取的成对视频信号值之一。

公开(公告)号：US4528634A

公开(公告)日：1985-07-09

申请号：US433405

申请日：1982-10-08

申请人： Kozo Nakahata ,  Ikuo Kawaguchi ,  Kazuo Yamaguchi

发明人： Kozo Nakahata ,  Ikuo Kawaguchi ,  Kazuo Yamaguchi

IPC分类号： G01B21/20 ,  G06F1/03 ,  G06T7/00 ,  G06T11/20 ,  G09G5/42 ,  H01L21/027 ,  H01L21/30 ,  H01L21/66 ,  G06F15/40

CPC分类号： H01L21/30 ,  G06F1/03 ,  G09G5/42

摘要： A bit pattern generator includes two memories which are provided for storing a bit pattern for a scanning line produced from design data. When a bit pattern is created and stored in one of the memories, the previously created and stored bit pattern is read out from the other memory. For the creation of each bit pattern, a scanning line is divided into a plurality of bytes. Model patterns of bit patterns existing in the respective bytes are stored in a ROM. From the combination of start point and end point addresses specifying the byte positions and the ROM addresses, a ROM address for each byte is logically determined so that any model patterns in the ROM are sequentially stored in the first mentioned memories.

摘要翻译： 位模式发生器包括两个存储器，用于存储由设计数据产生的扫描线的位模式。 当一个位模式被创建并存储在一个存储器中时，先前创建和存储的位模式从另一个存储器读出。 为了创建每个位模式，扫描线被分成多个字节。 存储在各个字节中的位模式的模型模式存储在ROM中。 根据指定字节位置和ROM地址的起始点和终点地址的组合，逻辑地确定每个字节的ROM地址，使得ROM中的任何模型模式被顺序地存储在首先提到的存储器中。

公开(公告)号：USD247676S

公开(公告)日：1978-04-04

申请号：US698635

申请日：1976-06-22

申请人： Kozo Nakahata

设计人： Kozo Nakahata

公开(公告)号：US5051585A

公开(公告)日：1991-09-24

申请号：US373223

申请日：1989-06-28

申请人： Hiroya Koshishiba ,  Satoru Fushimi ,  Yasuo Nakagawa ,  Kozo Nakahata

发明人： Hiroya Koshishiba ,  Satoru Fushimi ,  Yasuo Nakagawa ,  Kozo Nakahata

IPC分类号： G01B15/00 ,  G01N23/04 ,  G01Q30/02 ,  G01Q30/04 ,  G03F1/00 ,  H01J37/147 ,  H01J37/22 ,  H01J37/244 ,  H01J37/28 ,  H01J37/30 ,  H01L21/027 ,  H01L21/30 ,  H01L21/66

CPC分类号： G03F1/86 ,  H01J37/28 ,  H01J37/3005

摘要： A pattern detection apparatus based on a scanning transmission electron microscope having an electron gun for generating and accelerating an electron beam, a plurality of convergent lenses for converging the electron beam, a deflection circuit for deflecting the electron beam so that it scans an object to be inspected, such as an X-ray mask, a detection circuit which receives electrons that have been dispersed and transmitted in the object and converts the detected electrons into an electrical signal, and an image forming circuit which forms a detected image of the object under test in response to the detected signal from the detection circuit and in synchronism with the deflection signal applied to the deflection circuit.

公开(公告)号：US4628531A

公开(公告)日：1986-12-09

申请号：US583867

申请日：1984-02-27

申请人： Keiichi Okamoto ,  Kozo Nakahata ,  Yukio Matsuyama ,  Hideaki Doi ,  Susumu Aiuchi ,  Mineo Nomoto

发明人： Keiichi Okamoto ,  Kozo Nakahata ,  Yukio Matsuyama ,  Hideaki Doi ,  Susumu Aiuchi ,  Mineo Nomoto

IPC分类号： G01B11/24 ,  G01N21/88 ,  G01N21/956 ,  G06T7/00 ,  G06K9/00

CPC分类号： G06T7/001 ,  G01N21/956 ,  G06T2207/10056 ,  G06T2207/30148

摘要： A pattern checking apparatus carries out the detection of candidate defects through a primary selection with a sensitivity high enough to detect any existing defect, and then carries out a detailed analysis by a controlling processor for a pattern including the periphery of the detected candidate defect through a secondary selection in which a candidate defect which is not a defect in a practical sense is removed from candidates, so that only real defects are detected.

摘要翻译： 模式检查装置通过具有足够高的灵敏度的主要选择来执行候选缺陷的检测，以检测任何现有缺陷，然后通过控制处理器对包括检测到的候选缺陷的外围的图案进行详细分析，通过 从候选者中删除不是实际意义上的缺陷的候选缺陷的次要选择，从而仅检测到真实的缺陷。