摘要:
An electrostatic levitating electrode (10) is split into four equal segments on a circular insulating substrate (4) with isolating strips (11a, 11b) interposed between them. A positive voltage and a negative voltage are alternately applied to these four electrodes (10a, 10b, 10c, 10d), which are sector-shaped. In order to prevent the concentration of electric charge in such case, the corner portions of the sector-shaped electrodes (10a, 10b, 10c, 10d) are formed to have roundness (13). Furthermore, a lead wire (12a) is connected to the outer side of the sector-shaped electrode (10a), a lead wire (12b) is connected to the outer side of the sector-shaped electrode (10b), a lead wire (12c) is connected to the outer side of sector-shaped electrode (10c), and a lead wire (12d) is connected to the outer side of sector-shaped electrode (10d). Accordingly, the maximum attraction force and levitational rigidity are increased without damage to electrodes at lead portions and it possible to convey a levitated body with accuracy.
摘要:
A substrate illumination and inspection system provides for illuminating and inspecting a substrate particularly the substrate edge. The system uses a light diffuser with a plurality of lights disposed at its exterior or interior for providing uniform diffuse illumination of a substrate. An optic and imaging system exterior of the light diffuser are used to inspect the plurality of surfaces of the substrate including specular surfaces. The optic can be rotated radially relative to a center point of the substrate edge to allow for focused inspection of all surfaces of the substrate edge.
摘要:
A substrate illumination and inspection system provides for illuminating and inspecting a substrate particularly the substrate edge. The system uses a light diffuser with a plurality of lights disposed at its exterior or interior for providing uniform diffuse illumination of a substrate. An optic and imaging system exterior of the light diffuser are used to inspect the plurality of surfaces of the substrate including specular surfaces. An automatic defect characterization processor is provided.
摘要:
A substrate illumination and inspection system provides for illuminating and inspecting a substrate particularly the substrate edge. The system a image processor to automatically detect and characterize defects on the wafer's edge.
摘要:
A substrate illumination and inspection system provides for illuminating and inspecting a substrate particularly the substrate edge. The system uses a light diffuser with a plurality of lights disposed at its exterior or interior for providing uniform diffuse illumination of a substrate. An optic and imaging system exterior of the light diffuser are used to inspect the plurality of surfaces of the substrate including specular surfaces. The optic can be rotated radially relative to a center point of the substrate edge to allow for focused inspection of all surfaces of the substrate edge.
摘要:
An auto focus method for passive auto focus systems consists of an image acquisition and processing engine, as well as an acutance index calculation engine. An auto focus method measures image's acutance index rather than image's contrast value. A passive auto focus system employing the auto focus method of the present invention can accurately and reliably detect the best focus point and thus preventing auto focus malfunction even under the condition that illumination uniformity changes dramatically.
摘要:
An auto focus system comprises an image capturing optical unit, an image capturing camera, an image acquisition and processing engine, an acutance index calculation engine, a motion control engine, a motion controller and a lens driving unit. An auto focus method measures image's acutance index rather than image's contrast value. An auto focus system employing the auto focus method of the present invention can accurately and reliably detect the best focus point and thus preventing auto focus malfunction even under the condition that illumination uniformity changes dramatically.
摘要:
A fully automated inspection system provides for inspection, measurement and characterization of a wire mesh tube, particularly a stent. The system uses an optical imaging subsystem to capture high resolution color images of both exterior and interior surfaces of a stent. Defects are defected by processing the captured images using proprietary algorithms. Geometric dimensional features of a stent are measured by processing the stitched 2-D map of the stent. In addition, a surface-scanning profiling subsystem is used to measure the surface roughness of drug films or metallic surfaces. It also measures the 3-D profile of a stent strut.
摘要:
A dexibupropen syrup composition comprising dexibupropen ((S)-ibupropen) having an average particle size ranging from 10 to 300 μm as an active ingredient, which does not contain glycerine and has a viscosity ranging from 500 to 3,000 cps and pH ranging from 3.0 to 6.0, shows improved safety, uniformity of efficacy, and taste.