LINEAR PATTERN DETECTION METHOD AND APPARATUS
    1.
    发明申请
    LINEAR PATTERN DETECTION METHOD AND APPARATUS 有权
    线性图案检测方法和装置

    公开(公告)号:US20090220142A1

    公开(公告)日:2009-09-03

    申请号:US12393797

    申请日:2009-02-26

    IPC分类号: G06K9/00

    摘要: The present invention provides a linear pattern detection method which can extract and detect linear patterns distinguished by a microscopic defect distribution profile even if skipped measurements are taken. The linear pattern detection method acquires a defect map created based on results of defect inspection of a wafer; divides the defect map into a plurality of first segments; calculates a correlation coefficient of a point sequence in each of the first segments, the point sequence corresponding to a defect group contained in the first segments; calculates a total number of those first segments in which the correlation coefficient is equal to or larger than a first threshold; and determines that the wafer contains a linear pattern if the total number is equal to or larger than a second threshold.

    摘要翻译: 本发明提供一种线性图案检测方法,其可以提取和检测由微观缺陷分布轮廓区分的线性图案,即使进行了跳过的测量。 线性图案检测方法获取基于晶片的缺陷检查结果创建的缺陷图; 将缺陷图划分成多个第一段; 计算每个第一段中的点序列的相关系数,对应于包含在第一段中的缺陷组的点序列; 计算相关系数等于或大于第一阈值的那些第一段的总数; 并且如果总数等于或大于第二阈值,则确定晶片包含线性模式。

    Polyactic acid polymer composition for thermoforming, polylactic acid polymer sheet for thermoforming, and thermoformed object obtained therefrom
    3.
    发明申请
    Polyactic acid polymer composition for thermoforming, polylactic acid polymer sheet for thermoforming, and thermoformed object obtained therefrom 审中-公开
    用于热成型的聚乳酸聚合物组合物,用于热成型的聚乳酸聚合物片材和由其获得的热成型体

    公开(公告)号:US20060100395A1

    公开(公告)日:2006-05-11

    申请号:US10540752

    申请日:2003-12-24

    申请人: Toshiyuki Aritake

    发明人: Toshiyuki Aritake

    IPC分类号: C08G63/08

    CPC分类号: C08L67/04 C08L2666/18

    摘要: In order to provide a polylactic acid polymer composition to be thermoformed and a polylactic acid polymer sheet to be thermoformed which show good formability during thermoforming while maintaining impact resistance and heat resistance, and a thermoformed article obtained from the polylactic acid polymer sheet, according to the present invention, a polylactic acid polymer composition is used which comprises a mixture of an essentially amorphous polylactic acid polymer and a crystalline polylactic acid polymer, wherein the essentially amorphous polylactic acid polymer is present at the rate of more than 50% of the crystalline polylactic acid.

    摘要翻译: 为了提供热成型的聚乳酸聚合物组合物和热成型的聚乳酸聚合物片材,并且在保持耐冲击性和耐热性的同时在热成型过程中显示出良好的成形性,以及由聚乳酸聚合物片材获得的热成型制品,根据 本发明使用包含基本上无定形聚乳酸聚合物和结晶聚乳酸聚合物的混合物的聚乳酸聚合物组合物,其中基本上无定形的聚乳酸聚合物以超过结晶聚乳酸的50%的速率存在 。

    Linear pattern detection method and apparatus
    4.
    发明授权
    Linear pattern detection method and apparatus 有权
    线性图案检测方法和装置

    公开(公告)号:US08081814B2

    公开(公告)日:2011-12-20

    申请号:US12393797

    申请日:2009-02-26

    IPC分类号: G06K9/00 G01N21/00

    摘要: The present invention provides a linear pattern detection method which can extract and detect linear patterns distinguished by a microscopic defect distribution profile even if skipped measurements are taken. The linear pattern detection method acquires a defect map created based on results of defect inspection of a wafer; divides the defect map into a plurality of first segments; calculates a correlation coefficient of a point sequence in each of the first segments, the point sequence corresponding to a defect group contained in the first segments; calculates a total number of those first segments in which the correlation coefficient is equal to or larger than a first threshold; and determines that the wafer contains a linear pattern if the total number is equal to or larger than a second threshold.

    摘要翻译: 本发明提供一种线性图案检测方法,其可以提取和检测由微观缺陷分布轮廓区分的线性图案,即使进行了跳过的测量。 线性图案检测方法获取基于晶片的缺陷检查结果创建的缺陷图; 将缺陷图划分成多个第一段; 计算每个第一段中的点序列的相关系数,对应于包含在第一段中的缺陷组的点序列; 计算相关系数等于或大于第一阈值的那些第一段的总数; 并且如果总数等于或大于第二阈值,则确定晶片包含线性模式。

    Adhesive tape and process for its production
    5.
    发明授权
    Adhesive tape and process for its production 失效
    胶带及其生产工艺

    公开(公告)号:US4447485A

    公开(公告)日:1984-05-08

    申请号:US397237

    申请日:1982-07-12

    申请人: Toshiyuki Aritake

    发明人: Toshiyuki Aritake

    IPC分类号: C09J7/02 B32B5/16

    摘要: An adhesive tape comprises a base sheet of a polypropylene resin, an adhesive layer formed on one side of the base sheet and a roughened surface layer formed on the other side of the base sheet and composed of a polypropylene resin containing fine inorganic filler particles, in which the roughened surface layer has a thickness of not more than the maximum particle diameter of said fine inorganic filler particles and is substantially free from voids or cracks, and the total percent light transmittance of the tape is at least 90%. Such an adhesive tape is produced by a process which comprises forming an adhesive layer on one side of a base sheet of a polypropylene resin and a surface layer of a polypropylene resin having a melting point lower than that of the polypropylene resin of the base sheet and containing fine inorganic filler particles, on the other side of the base sheet to obtain an unstretched laminated sheet, and then stretching the laminated sheet at a temperature of at least the melting point of the polypropylene resin of the surface layer to bring the thickness of the surface layer to be not more than the maximum particle diameter of said fine inorganic filler particles.

    摘要翻译: 一种胶带包括聚丙烯树脂的基片,在基片的一侧上形成的粘合剂层和形成在基片的另一侧上并由含有无机填料颗粒的聚丙烯树脂组成的粗糙表面层, 粗糙表面层的厚度不大于所述无机填料颗粒的最大粒径,并且基本上没有空隙或裂纹,并且带的总透光率的总和至少为90%。 这种粘合带通过以下方法制造,该方法包括在聚丙烯树脂的基片的一侧上形成粘合剂层和熔点低于基片的聚丙烯树脂的聚丙烯树脂的表面层, 在基片的另一面上含有无机填料粒子,得到未拉伸的层压片材,然后在至少表面层的聚丙烯树脂的熔点的温度下拉伸层叠片材, 表面层不超过所述无机填料颗粒的最大粒径。

    Failure detecting method, failure detecting apparatus, and semiconductor device manufacturing method
    6.
    发明授权
    Failure detecting method, failure detecting apparatus, and semiconductor device manufacturing method 有权
    故障检测方法,故障检测装置和半导体器件制造方法

    公开(公告)号:US08170707B2

    公开(公告)日:2012-05-01

    申请号:US12256265

    申请日:2008-10-22

    IPC分类号: G06F19/00

    摘要: A method for inputting a foreign substance inspection map created by foreign substance inspection for a wafer surface after each processing process in a wafer processing process, inputting a die sort map created by a die sort test after the wafer processing process, setting region segments in the wafer, setting a region number for each segment, calculating foreign substance density of the region segments, based on the foreign substance inspection map, and plotting the foreign substance density, using the region numbers, to calculate a foreign substance inspection map waveform characteristic amount, calculating failure density in the region segments, based on the die sort map, and plotting the failure density, using the region numbers, to calculate a die sort map waveform characteristic amount, calculating similarity between the foreign substance inspection map waveform characteristic amount and the die sort map waveform characteristic amount, and identifying a processing process cause of failure occurrence.

    摘要翻译: 一种用于在晶片处理过程中的每个处理过程之后输入通过异物检查创建的异物检查图的方法,输入在晶片处理过程之后通过管芯分类测试创建的管芯分类图,在 晶片,根据异物检查图来计算各段的区域编号,计算区域段的异物密度,并使用区域编号绘制异物密度,计算异物检查图波形特征量, 计算区域段中的故障密度,并使用区域编号绘制故障密度,计算模具分类图波形特征量,计算异物检查图波形特征量与模具之间的相似度 排序图波形特征量,并识别处理过程原因 的失败发生。

    FAILURE DETECTING METHOD, FAILURE DETECTING APPARATUS, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
    7.
    发明申请
    FAILURE DETECTING METHOD, FAILURE DETECTING APPARATUS, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD 有权
    故障检测方法,故障检测装置和半导体器件制造方法

    公开(公告)号:US20090117673A1

    公开(公告)日:2009-05-07

    申请号:US12256265

    申请日:2008-10-22

    IPC分类号: G01R31/26

    摘要: A failure detecting method has inputting a foreign substance inspection map created by foreign substance inspection for a wafer surface after each processing process in a wafer processing process, inputting a die sort map created by a die sort test after the wafer processing process, setting a plurality of region segments in the wafer, setting a region number for each of the region segments, calculating foreign substance density in each of the region segments, based on the foreign substance inspection map, and plotting the foreign substance density, using the region numbers, to calculate a foreign substance inspection map waveform characteristic amount, calculating failure density in each of the region segments, based on the die sort map, and plotting the failure density, using the region numbers, to calculate a die sort map waveform characteristic amount, calculating similarity between the foreign substance inspection map waveform characteristic amount and the die sort map waveform characteristic amount, and identifying a processing process that is a cause of failure occurrence, based on the similarity.

    摘要翻译: 失败检测方法在晶片处理过程中,在每个处理过程之后输入通过异物检查产生的异物检查图,在晶片处理过程之后输入通过管芯分类测试创建的管芯分类图,设置多个 的区域段,根据异物检查图,设定各区域段的区域编号,计算各区域段中的异物密度,使用区域编号绘制异物密度, 计算异物检查图波形特征量,根据模具分类图计算每个区域段中的故障密度,并使用区域编号绘制故障密度,计算模具分类图波形特征量,计算相似度 异物检查图波形特征量和管芯分类图波形ch之间 基于相似性,确定作为故障发生的原因的处理过程。

    Adhesive tape and process for its production
    9.
    发明授权
    Adhesive tape and process for its production 失效
    胶带及其生产工艺

    公开(公告)号:US4513028A

    公开(公告)日:1985-04-23

    申请号:US567870

    申请日:1984-03-05

    申请人: Toshiyuki Aritake

    发明人: Toshiyuki Aritake

    IPC分类号: C09J7/02 B32B31/16

    摘要: An adhesive tape comprises a base sheet of a polypropylene resin, an adhesive layer formed on one side of the base sheet and a roughened surface layer formed on the other side of the base sheet and composed of a polypropylene resin containing fine inorganic filler particles, in which the roughened surface layer has a thickness of not more than the maximum particle diameter of said fine inorganic filler particles and is substantially free from voids or cracks, and the total percent light transmittance of the tape is at least 90%. Such an adhesive tape is produced by a process which comprises forming an adhesive layer on one side of a base sheet of a polypropylene resin and a surface layer of a polypropylene resin having a melting point lower than that of the polypropylene resin of the base sheet and containing fine inorganic filler particles, on the other side of the base sheet to obtain an unstretched laminated sheet, and then stretching the laminated sheet at a temperature of at least the melting point of the polypropylene resin of the surface layer to bring the thickness of the surface layer to be not more than the maximum particle diameter of said fine inorganic filler particles.

    摘要翻译: 一种胶带包括聚丙烯树脂的基片,在基片的一侧上形成的粘合剂层和形成在基片的另一侧上并由含有无机填料颗粒的聚丙烯树脂组成的粗糙表面层, 粗糙表面层的厚度不大于所述无机填料颗粒的最大粒径,并且基本上没有空隙或裂纹,并且带的总透光率的总和至少为90%。 这种粘合带通过以下方法制造,该方法包括在聚丙烯树脂的基片的一侧上形成粘合剂层和熔点低于基片的聚丙烯树脂的聚丙烯树脂的表面层, 在基片的另一面上含有无机填料粒子,得到未拉伸的层压片材,然后在至少表面层的聚丙烯树脂的熔点的温度下拉伸层叠片材, 表面层不超过所述无机填料颗粒的最大粒径。