Optically controlled MEM switches
    1.
    发明授权
    Optically controlled MEM switches 有权
    光控MEM开关

    公开(公告)号:US06639205B2

    公开(公告)日:2003-10-28

    申请号:US09978314

    申请日:2001-10-15

    IPC分类号: G01J136

    摘要: An optically controlled micro-electromechanical (MEM) switch is described which desirably utilizes photoconductive properties of a semiconductive substrate upon which MEM switches are fabricated. In one embodiment the bias voltage provided for actuation of the switch is altered by illuminating an optoelectric portion of the switch to deactivate the switch. In an alternative embodiment, a photovoltaic device provides voltage to actuate the switch without any bias lines at all. Due to the hysteresis of the electromechanical switching as a function of applied voltage, only modest variation of voltage applied to the switch is necessary to cause the switch to open or close sharply under optical control.

    摘要翻译: 描述了一种光学控制的微机电(MEM)开关,其理想地利用其上制造有MEM开关的半导体基板的光导特性。 在一个实施例中,通过照亮开关的光电部分来改变为开关的启动提供的偏置电压,以使开关失效。 在替代实施例中,光伏器件提供电压以完全启动开关而没有任何偏置线。 由于作为施加电压的函数的机电开关的滞后,仅需要施加到开关的电压的适度变化,以使开关在光学控制下急剧地打开或闭合。

    Optically controlled MEM switches
    2.
    发明授权
    Optically controlled MEM switches 失效
    光控MEM开关

    公开(公告)号:US06803559B2

    公开(公告)日:2004-10-12

    申请号:US10439624

    申请日:2003-05-15

    IPC分类号: G01J136

    摘要: An optically controlled micro-electromechanical (MEM) switch is described which desirably utilizes photoconductive properties of a semiconductive substrate upon which MEM switches are fabricated. In one embodiment the bias voltage provided for actuation of the switch is altered by illuminating an optoelectric portion of the switch to deactivate the switch. In an alternative embodiment, a photovoltaic device provides voltage to actuate the switch without any bias lines at all. Due to the hysteresis of the electromechanical switching as a function of applied voltage, only modest variation of voltage applied to the switch is necessary to cause the switch to open or close sharply under optical control.

    摘要翻译: 描述了一种光学控制的微机电(MEM)开关,其理想地利用其上制造有MEM开关的半导体基板的光导特性。 在一个实施例中,通过照亮开关的光电部分来改变为开关的启动提供的偏置电压,以使开关失效。 在替代实施例中,光伏器件提供电压以完全启动开关而没有任何偏置线。 由于作为施加电压的函数的机电开关的滞后,仅需要施加到开关的电压的适度变化,以使开关在光学控制下急剧地打开或闭合。

    Microelectromechanical correlation device and method
    3.
    发明授权
    Microelectromechanical correlation device and method 失效
    微机电相关装置及方法

    公开(公告)号:US06604425B1

    公开(公告)日:2003-08-12

    申请号:US09591113

    申请日:2000-06-09

    IPC分类号: G01L912

    CPC分类号: G01L1/148 G01L1/086

    摘要: A method and apparatus for comparing a force to a signal, or comparing two signals, through mechanical movement of capacitive plates in a transducer. The transducer plates are separated by d, which in one embodiment is preferably a linear function of a pressure or force F. In that embodiment, application of a signal i(t+&tgr;) to the plates will cause a voltage representing a correlation between F and i to appear between the plates. In another embodiment, instead of an external mechanical force or pressure, an electrical signal V related to a signal S may drive the transducer plates to achieve a voltage indicating a correlation between S and the signal input i(t+&tgr;). Transducers to practice the invention may be microelectromechanical devices fabricated using integrated circuit techniques to permit small size and low cost.

    摘要翻译: 一种用于通过传感器中的电容板的机械移动来比较力与信号或比较两个信号的方法和装置。 传感器板被d分开,在一个实施例中,传感器板优选地是压力或力F的线性函数。在该实施例中,将信号i(t +τ)施加到板将导致表示F 我出现在盘子之间。 在另一个实施例中,代替外部机械力或压力,与信号S相关的电信号V可以驱动换能器板以实现指示S与信号输入i(t +τ)之间的相关性的电压。 用于实践本发明的传感器可以是使用集成电路技术制造的微机电装置,以允许小尺寸和低成本。

    Optically controlled MEM switches
    4.
    发明授权
    Optically controlled MEM switches 失效
    光控MEM开关

    公开(公告)号:US06310339B1

    公开(公告)日:2001-10-30

    申请号:US09429234

    申请日:1999-10-28

    IPC分类号: H01L3100

    摘要: An optically controlled micro-electromechanical (MEM) switch is described which desirably utilizes photoconductive properties of a semiconductive substrate upon which MEM switches are fabricated. In one embodiment the bias voltage provided for actuation of the switch is altered by illuminating an optoelectric portion of the switch to deactivate the switch. In an alternative embodiment, a photovoltaic device provides voltage to actuate the switch without any bias lines at all. Due to the hysteresis of the electromechanical switching as a function of applied voltage, only modest variation of voltage applied to the switch is necessary to cause the switch to open or close sharply under optical control.

    摘要翻译: 描述了一种光学控制的微机电(MEM)开关,其理想地利用其上制造有MEM开关的半导体基板的光导特性。 在一个实施例中,通过照亮开关的光电部分来改变为开关的启动提供的偏置电压,以使开关失效。 在替代实施例中,光伏器件提供电压以完全启动开关而没有任何偏置线。 由于作为施加电压的函数的机电开关的滞后,仅需要对开关施加的适当的电压变化使得开关在光学控制下急剧地打开或闭合。

    Ultrabroadband, adaptive phased array antenna systems using
microelectromechanical electromagnetic components
    5.
    发明授权
    Ultrabroadband, adaptive phased array antenna systems using microelectromechanical electromagnetic components 失效
    超宽带,使用微机电电磁元件的自适应相控阵天线系统

    公开(公告)号:US5757319A

    公开(公告)日:1998-05-26

    申请号:US740409

    申请日:1996-10-29

    摘要: A phased array radar system employs programmable microelectromechanical (MEM) switches and transmission lines to provide true time delays or phase shifts in order to steer the array beam. The array includes an excitation signal source, a power division network for dividing the excitation signal into a plurality of excitation signal components, a plurality of programmable time delay/phase shift circuits including the transmission lines and MEM switches, and a plurality of radiating elements. An adaptive controller provides the control signals to set the MEM switches and select the time delay/phase shift through each time delay/phase shift circuit, thereby steering the array beam to a desired direction.

    摘要翻译: 相控阵雷达系统采用可编程微机电(MEM)开关和传输线来提供真正的时间延迟或相移,以引导阵列波束。 阵列包括激励信号源,用于将激励信号分成多个激励信号分量的功率分配网络,包括传输线和MEM开关的多个可编程延时/相移电路以及多个辐射元件。 自适应控制器提供控制信号来设置MEM开关,并通过每个时间延迟/相移电路选择时间延迟/相移,从而将阵列光束转向所需的方向。

    Multiband antenna system using RF micro-electro-mechanical switches, method for transmitting multiband signals, and signal produced therefrom
    6.
    发明授权
    Multiband antenna system using RF micro-electro-mechanical switches, method for transmitting multiband signals, and signal produced therefrom 有权
    使用RF微机电开关的多频带天线系统,用于发送多频带信号的方法和由其产生的信号

    公开(公告)号:US06307519B1

    公开(公告)日:2001-10-23

    申请号:US09470700

    申请日:1999-12-23

    IPC分类号: H01Q1300

    CPC分类号: H01Q13/10

    摘要: A method and system for transmitting, and a signal comprising multiple frequency bands from a single slot antenna are disclosed. The system comprises a slot antenna and a micro-electro-mechanical (MEM) switch, coupled to the slot antenna. The MEM switch is opened and closed, thereby changing the resonant frequency of the slot antenna. The slot antenna transmits a first frequency when the MEM switch is open and a second frequency when the MEM switch is closed. The method for transmitting a first frequency and a second frequency from a slot antenna comprises the steps of transmitting the first frequency from the slot antenna, closing a micro-electro-mechanical (MEM) switch coupled across the slot antenna, therein changing the resonant frequency of the slot antenna, and transmitting the second frequency from the slot antenna after the MEM switch is closed. A signal comprising a first and second frequency in accordance with the present invention is transmitted by an array of antennas, wherein the array of antennas comprises at least one slot, the slot being reconfigurable through a RF MEM switch coupled to the slot, by performing the steps of transmitting the first frequency from the slot antenna, closing a micro-electro-mechanical (MEM) switch coupled across the slot antenna, therein changing the resonant frequency of the slot antenna, and transmitting the second frequency from the slot antenna after the MEM switch is closed.

    摘要翻译: 公开了一种用于从单个时隙天线发送和包括多个频带的信号的方法和系统。 该系统包括缝隙天线和耦合到缝隙天线的微机电(MEM)开关。 MEM开关被打开和关闭,从而改变缝隙天线的谐振频率。 当MEM开关打开时,缝隙天线发送第一个频率,当MEM开关闭合时,发射第二个频率。 用于从缝隙天线发送第一频率和第二频率的方法包括以下步骤:从缝隙天线发射第一频率,闭合跨越缝隙天线耦合的微机电(MEM)开关,其中改变谐振频率 并且在MEM开关闭合之后从缝隙天线发送第二频率。 根据本发明的包括第一和第二频率的信号由天线阵列传输,其中天线阵列包括至少一个时隙,所述时隙可通过耦合到时隙的RF MEM开关重新配置,通过执行 从缝隙天线发送第一频率的步骤,闭合跨越缝隙天线耦合的微机电(MEM)开关,其中改变缝隙天线的谐振频率,以及在MEM之后从缝隙天线发射第二频率 开关关闭。

    Wire diamond lattice structure for phased array side lobe suppression
and fabrication method
    7.
    发明授权
    Wire diamond lattice structure for phased array side lobe suppression and fabrication method 失效
    用于相控阵旁瓣抑制和制造方法的金刚石晶格结构

    公开(公告)号:US5679604A

    公开(公告)日:1997-10-21

    申请号:US725148

    申请日:1996-10-02

    摘要: A diamond matrix metallic mesh suppresses RF energy, and particularly side lobe energy, in a phased array antenna, while passing main beam energy. The metal mesh emulates the structure of the bond segments joining the carbon atoms in a diamond structure. The wire diamond lattice structure is placed above an array of radiating elements to absorb side lobe energy. The wire lattice structure is fabricated through use of complementary forms which compress a wire into a required unit shape. Many unit shaped wires are placed in a form which hold the wires in the proper position. Other unit shaped wires are rotated 90 degrees and attached in place to the held wires. Additional unit shaped wires are added to form the basic interlocking cube structure of the diamond lattice.

    摘要翻译: 菱形矩阵金属网在通过主波束能量的同时,在相控阵天线中抑制RF能量,特别是侧波能量。 金属网模拟结合金刚石结构中的碳原子的键段的结构。 导线金刚石晶格结构放置在辐射元件阵列上方以吸收旁瓣能量。 通过使用将电线压缩成所需单元形状的互补形式来制造线晶格结构。 许多单元形导线以将电线固定在适当位置的形式放置。 其他单体形状的线旋转90度并且附接到保持的电线的适当位置。 添加额外的单位形状的线以形成金刚石晶格的基本互锁立方体结构。

    Plasma/radiation assisted molecular beam epitaxy method
    8.
    发明授权
    Plasma/radiation assisted molecular beam epitaxy method 失效
    等离子/辐射辅助分子束外延法

    公开(公告)号:US5152866A

    公开(公告)日:1992-10-06

    申请号:US532144

    申请日:1990-05-31

    IPC分类号: C30B23/02

    CPC分类号: C30B23/02 C30B29/48

    摘要: A molecular beam epitaxy (MBE) growth method and apparatus is disclosed which achieves a significantly improved sticking coefficient for materials like Hg upon a substrate, and thus a higher efficiency. A highly ionized, low pressure plasma is formed consisting of a mixture of ions of one substance of a compound to be epitaxially grown, neutral particles of the substance and electrons, and also preferably both ionization and excitation radiation. The plasma is directed onto a substrate together with a flux of the other substance in the compound; the flux can be in the form of either a vapor, or a second plasma. Radiation assisted epitaxial growth for Hg compounds in which ionization and excitation radiation are formed from Hg vapor and used to assist epitaxial growth with neutral Hg particles is also described. The plasma is formed in a special discharge chamber having a hollow cathode with an emissive-mix-free cathode insert. The source is preferably a refractory metal such as rolled tantalum foil, which is substantially emissive-material-free and does not contaminate the plasma. Good results are obtained by allowing the plasma to simply diffuse out through an exit port in the discharge chamber, without special extraction assemblies required by prior ion thrusters. Hg sticking coefficients have been improved by a factor of 40 or more.

    摘要翻译: 公开了一种分子束外延(MBE)生长方法和装置,其实现了对衬底上的诸如Hg的材料的显着改善的粘附系数,并且因此具有更高的效率。 形成高离子化的低压等离子体,其由外延生长的化合物的一种物质的离子和物质的中性粒子和电子的混合物组成,并且还优选电离和激发辐射。 等离子体与化合物中另一种物质的助熔剂一起引导到基底上; 通量可以是蒸汽或第二等离子体的形式。 还描述了汞化合物的辐射辅助外延生长,其中电离和激发辐射由Hg蒸气形成并用于辅助外延生长与中性Hg颗粒。 等离子体形成在具有空心阴极的特殊放电室中,其具有无发射混合阴极插入物。 来源优选是难熔金属,例如轧制钽箔,其基本上不发射材料,并且不污染等离子体。 通过允许等离子体简单地通过放电室中的出口扩散出来,而不需要先前的离子推进器所需的特殊提取组件,可获得良好的结果。 Hg粘附系数提高了40倍以上。

    Bistatic and multistatic system for space situational awareness
    9.
    发明授权
    Bistatic and multistatic system for space situational awareness 有权
    用于空间情境意识的双基地和多基系统

    公开(公告)号:US07119732B1

    公开(公告)日:2006-10-10

    申请号:US11292014

    申请日:2005-12-01

    摘要: Provided is a bistatic and multistatic system for detecting and identifying a target in close proximity to an orbiting satellite. An electromagnetic fence is established to surround the satellite, using a ground-based communication uplink from a gateway antenna. A contact or breach of the electromagnetic fence by the target is detected by the satellite, or at other sensor locations, and an exact position, range and ISAR image of the target is calculated using scattered RF energy from the fence. Identification data is transmitted to satellite system monitors, whereby the data is used to decide on a corrective course of action.

    摘要翻译: 提供了用于检测和识别靠近轨道卫星的目标的双基地和多基地系统。 建立电磁围栏以围绕卫星,使用来自网关天线的基于地面的通信上行链路。 由卫星或其他传感器位置检测目标的电磁围栏的接触或破裂,并使用来自围栏的分散的射频能量来计算目标的精确位置,范围和ISAR图像。 识别数据被传送到卫星系统监视器,由此数据用于决定纠正行动过程。

    Mixing and modulating methods and structures using nonlinear optical
amplifiers
    10.
    发明授权
    Mixing and modulating methods and structures using nonlinear optical amplifiers 失效
    使用非线性光学放大器的混合和调制方法和结构

    公开(公告)号:US5859611A

    公开(公告)日:1999-01-12

    申请号:US803963

    申请日:1997-02-21

    摘要: Mixing and modulating methods are described for nonlinear optical amplifiers (30) which can generate intermodulation products of radio-frequency signals in an optical carrier signal (26) without the penalty of an optical conversion loss and without the need for radio-frequency mixers, electro-optic modulators and expensive polarization-maintaining optical fibers. The radio-frequency signals can be applied to either a bias port (36) or an optical input port (32) of the optical amplifier and are used to upconvert and downconvert signals in phased-array antenna and remote antenna embodiments of the invention.

    摘要翻译: 描述了用于非光学放大器(30)的混合和调制方法,其可以在光载波信号(26)中产生射频信号的互调产物,而不损失光转换损耗,并且不需要射频混频器 - 光学调制器和昂贵的偏振保持光纤。 射频信号可以应用于光放大器的偏置端口(36)或光输入端口(32),并用于上变频和下变频本发明的相控阵天线和远端天线实施例中的信号。