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公开(公告)号：US20240107890A1
公开(公告)日：2024-03-28
申请号：US17972569
申请日：2022-10-24
发明人： Hui-Lin Wang , Chen-Yi Weng , Ching-Hua Hsu , Jing-Yin Jhang
CPC分类号： H01L43/12 , H01L27/222 , H01L43/02
摘要： A method for fabricating semiconductor device includes the steps of forming an inter-metal dielectric (IMD) layer on a substrate, forming a metal interconnection in the IMD layer, forming a magnetic tunneling junction (MTJ) on the metal interconnection, and performing a trimming process to shape the MTJ. Preferably, the MTJ includes a first slope and a second slope and the first slope is less than the second slope.
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公开(公告)号：US20240032439A1
公开(公告)日：2024-01-25
申请号：US18373295
申请日：2023-09-27
发明人： Hui-Lin Wang , Chen-Yi Weng , Chin-Yang Hsieh , Yi-Hui Lee , Ying-Cheng Liu , Yi-An Shih , Jing-Yin Jhang , I-Ming Tseng , Yu-Ping Wang , Chien-Ting Lin , Kun-Chen Ho , Yi-Syun Chou , Chang-Min Li , Yi-Wei Tseng , Yu-Tsung Lai , JUN XIE
摘要： A method of fabricating magnetoresistive random access memory, including providing a substrate, forming a bottom electrode layer, a magnetic tunnel junction stack, a top electrode layer and a hard mask layer sequentially on the substrate, wherein a material of the top electrode layer is titanium nitride, a material of the hard mask layer is tantalum or tantalum nitride, and a percentage of nitrogen in the titanium nitride gradually decreases from a top surface of top electrode layer to a bottom surface of top electrode layer, and patterning the bottom electrode layer, the magnetic tunnel junction stack, the top electrode layer and the hard mask layer into multiple magnetoresistive random access memory cells.
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公开(公告)号：US20240027550A1
公开(公告)日：2024-01-25
申请号：US18376843
申请日：2023-10-05
发明人： Hui-Lin Wang , Chen-Yi Weng , Che-Wei Chang , Si-Han Tsai , Ching-Hua Hsu , Jing-Yin Jhang , Yu-Ping Wang
CPC分类号： G01R33/093 , G01R33/098 , G11C11/02 , H10B61/00 , H10N50/01 , H10N50/10 , H10N50/80 , H10N50/85
摘要： A method for fabricating semiconductor device includes the steps of first forming a magnetic tunneling junction (MTJ) stack on a substrate, in which the MTJ stack includes a pinned layer on the substrate, a barrier layer on the pinned layer, and a free layer on the barrier layer. Next, a top electrode is formed on the MTJ stack, the top electrode, the free layer, and the barrier layer are removed, a first cap layer is formed on the top electrode, the free layer, and the barrier layer, and the first cap layer and the pinned layer are removed to form a MTJ and a spacer adjacent to the MTJ.
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公开(公告)号：US11864468B2
公开(公告)日：2024-01-02
申请号：US17348776
申请日：2021-06-16
发明人： Hui-Lin Wang , Si-Han Tsai , Dong-Ming Wu , Chen-Yi Weng , Ching-Hua Hsu , Ju-Chun Fan , Yi-Yu Lin , Che-Wei Chang , Po-Kai Hsu , Jing-Yin Jhang
CPC分类号： H10N50/10 , G11C11/161 , H01F10/3254 , H10B61/00 , H10N50/80 , H10N50/85
摘要： A magnetoresistive random access memory (MRAM) device includes a first array region and a second array region on a substrate, a first magnetic tunneling junction (MTJ) on the first array region, a first top electrode on the first MTJ, a second MTJ on the second array region, and a second top electrode on the second MTJ. Preferably, the first top electrode and the second top electrode include different nitrogen to titanium (N/Ti) ratios.
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公开(公告)号：US11812669B2
公开(公告)日：2023-11-07
申请号：US17835986
申请日：2022-06-09
发明人： Hui-Lin Wang , Chen-Yi Weng , Chin-Yang Hsieh , Yi-Hui Lee , Ying-Cheng Liu , Yi-An Shih , Jing-Yin Jhang , I-Ming Tseng , Yu-Ping Wang , Chien-Ting Lin , Kun-Chen Ho , Yi-Syun Chou , Chang-Min Li , Yi-Wei Tseng , Yu-Tsung Lai , Jun Xie
摘要： A magnetoresistive random access memory (MRAM), including a bottom electrode layer on a substrate, a magnetic tunnel junction stack on the bottom electrode layer, a top electrode layer on the magnetic tunnel junction stack, and a hard mask layer on said top electrode layer, wherein the material of top electrode layer is titanium nitride, a material of said hard mask layer is tantalum or tantalum nitride, and the percentage of nitrogen in the titanium nitride gradually decreases from the top surface of top electrode layer to the bottom surface of top electrode layer.
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公开(公告)号：US20230309414A1
公开(公告)日：2023-09-28
申请号：US18202275
申请日：2023-05-25
发明人： Hui-Lin Wang , Yu-Ping Wang , Chen-Yi Weng , Chin-Yang Hsieh , Si-Han Tsai , Che-Wei Chang , Jing-Yin Jhang
摘要： A semiconductor device includes: a substrate comprising a magnetic tunneling junction (MTJ) region and a logic region; a first MTJ on the MTJ region; a first metal interconnection on the logic region; and a cap layer extending from a sidewall of the first MTJ to a sidewall of the first metal interconnection. Preferably, the cap layer on the MTJ region and the cap layer on the logic region comprise different thicknesses.
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公开(公告)号：US11715499B2
公开(公告)日：2023-08-01
申请号：US17224153
申请日：2021-04-07
发明人： Po-Kai Hsu , Hung-Yueh Chen , Kun-I Chou , Jing-Yin Jhang , Hui-Lin Wang , Yu-Ping Wang
摘要： A MRAM structure, which is provided with multiple source lines between active areas, each source line has multiple branches electrically connecting with the active areas at opposite sides in alternating arrangement. Multiple word lines traverse through the active areas to form transistors. Multiple storage units are disposed between the word lines on the active areas in staggered array arrangement, and multiple bit lines electrically connect with storage units on corresponding active areas, wherein each storage cell includes one of the storage unit, two of the transistors respectively at both sides of the storage unit, and two branches of the source line.
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公开(公告)号：US20230050587A1
公开(公告)日：2023-02-16
申请号：US17980529
申请日：2022-11-03
发明人： Chen-Yi Weng , Jing-Yin Jhang , Hui-Lin Wang , Chin-Yang Hsieh
摘要： A manufacturing method of a semiconductor device includes the following steps. A first inter-metal dielectric (IMD) layer is formed on a substrate. A cap layer is formed on the first IMD layer. A connection structure is formed on the substrate and penetrates the cap layer and the first IMD layer. A magnetic tunnel junction (MTJ) stack is formed on the connection structure and the cap layer. A patterning process is performed to the MTJ stack for forming a MTJ structure on the connection structure and removing the cap layer. A spacer is formed on a sidewall of the MTJ structure and a sidewall of the connection structure. A second IMD layer is formed on the first IMD layer and surrounds the MTJ structure. The dielectric constant of the first IMD layer is lower than the dielectric constant of the second IMD layer.
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公开(公告)号：US11508904B2
公开(公告)日：2022-11-22
申请号：US17308057
申请日：2021-05-05
发明人： Hui-Lin Wang , Chen-Yi Weng , Yi-Wei Tseng , Chin-Yang Hsieh , Jing-Yin Jhang , Yi-Hui Lee , Ying-Cheng Liu , Yi-An Shih , I-Ming Tseng , Yu-Ping Wang
摘要： A method for fabricating semiconductor device includes the steps of: forming a first magnetic tunneling junction (MTJ) on a substrate; forming a first liner on the MTJ; forming a second liner on the first liner; forming an inter-metal dielectric (IMD) layer on the MTJ, and forming a metal interconnection in the IMD layer, the second liner, and the first liner to electrically connect the MTJ. Preferably, the first liner and the second liner are made of different materials.
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公开(公告)号：US20220367791A1
公开(公告)日：2022-11-17
申请号：US17348776
申请日：2021-06-16
发明人： Hui-Lin Wang , Si-Han Tsai , Dong-Ming Wu , Chen-Yi Weng , Ching-Hua Hsu , Ju-Chun Fan , Yi-Yu Lin , Che-Wei Chang , Po-Kai Hsu , Jing-Yin Jhang
摘要： A magnetoresistive random access memory (MRAM) device includes a first array region and a second array region on a substrate, a first magnetic tunneling junction (MTJ) on the first array region, a first top electrode on the first MTJ, a second MTJ on the second array region, and a second top electrode on the second MTJ. Preferably, the first top electrode and the second top electrode include different nitrogen to titanium (N/Ti) ratios.
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