III-V nitride resonate structure based photoacoustic sensor

    公开(公告)号:US10266397B2

    公开(公告)日:2019-04-23

    申请号:US14824269

    申请日:2015-08-12

    Abstract: A microcantilever based photoacoustic sensor is generally provided. In one embodiment, the microcantilever includes: a substrate; a GaN layer on the substrate, wherein the GaN layer defines a cantilever extending beyond an edge of the substrate, with a base area of the cantilever defined by the area spanning the edge of the substrate; a heterojunction field effect transistor (HFET) deflection transducer positioned on the cantilever; a pair of electrical contacts, each electrically connected to the HFET deflection transducer; and a microfluidic channel in fluid communication with an analyte reservoir, wherein the analyte reservoir is positioned at the base of the cantilever. A sensing system is also generally provided.

    III-V nitride resonate based photoacoustic sensor

    公开(公告)号:US10899607B2

    公开(公告)日:2021-01-26

    申请号:US16245962

    申请日:2019-01-11

    Abstract: The invention relates to a micro cantilever beam sensor and making method, including a chip, and its character: there is at least a group of sensor cells set on the chip, where the sensor cell is composed of the completely same four force-sensitive resistors composing a Wheatstone bridge and two cantilever beams, two of these resistors are on the substrate of the chip, the other two are on the two cantilever beams, respectively, one cantilever beam acts on a measuring cantilever beam and the other one acts on a reference cantilever beam, and the measuring cantilever beam is set with a sensitive layer on the surface. It can design and prepare in a liquid-flow micro-tank by front etching and silicon-glass bonding techniques, to directly detect liquid biomolecule. Whether applied to gas sensor or biosensor, it will play an important role in reducing device size, enhancing device sensitivity and realizing sensor multi-functionality. It has wide prospects for the fields of environment monitoring, clinic diagnosis and therapy, new drug development, food safety, industrial processing control, military and so on.

    Microcantilever Based Selective Volatile Organic Compound (VOC) Sensors and Methods
    6.
    发明申请
    Microcantilever Based Selective Volatile Organic Compound (VOC) Sensors and Methods 审中-公开
    基于微型悬臂梁的选择性挥发性有机化合物(VOC)传感器和方法

    公开(公告)号:US20160109395A1

    公开(公告)日:2016-04-21

    申请号:US14887448

    申请日:2015-10-20

    CPC classification number: G01N27/128 G01N27/125

    Abstract: Microcantilevers and systems incorporating the microcantilevers are described that can be utilized to perform selective detection of VOCs. The systems can detect VOCs at temperatures below the auto-ignition temperature of the VOCs and the microcantilevers need not be functionalized with any reactive groups particularly designed for the VOCs to be detected. The microcantilevers are triangular microcantilevers that can be formed of high bandgap semiconductors such as AlGaN/GaN heterojunction semiconductors.

    Abstract translation: 描述了结合微悬臂梁的微悬臂梁和系统,其可用于执行VOC的选择性检测。 这些系统可以在低于VOC的自燃温度的温度下检测VOC,并且微悬臂不需要用特别为要检测的VOC而设计的任何反应基团进行功能​​化。 微悬臂梁是可以由诸如AlGaN / GaN异质结半导体的高带隙半导体形成的三角形微悬臂梁。

    Microcantilever based selective volatile organic compound (VOC) sensors and methods

    公开(公告)号:US10191004B2

    公开(公告)日:2019-01-29

    申请号:US14887448

    申请日:2015-10-20

    Abstract: Microcantilevers and systems incorporating the microcantilevers are described that can be utilized to perform selective detection of VOCs. The systems can detect VOCs at temperatures below the auto-ignition temperature of the VOCs and the microcantilevers need not be functionalized with any reactive groups particularly designed for the VOCs to be detected. The microcantilevers are triangular microcantilevers that can be formed of high bandgap semiconductors such as AlGaN/GaN heterojunction semiconductors.

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