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    MULTIMODE CONFIGURABLE SPECTROMETER
    2.
    发明申请
    MULTIMODE CONFIGURABLE SPECTROMETER 有权

    公开(公告)号：US20220406586A1

    公开(公告)日：2022-12-22

    申请号：US17893685

    申请日：2022-08-23

    Applicant: Verity Instruments, Inc.

    Inventor： Larry Arlos Bullock ,  John D. Corless ,  Richard J. Daignault, JR. ,  Mark Anthony Meloni ,  Mike Whelan

    IPC: H01J49/02 ,  H04N5/378 ,  H04N5/357 ,  G01B11/06 ,  H04N5/372 ,  H04N5/355 ,  H01L27/148 ,  H04N5/347 ,  G01N21/31 ,  G01N21/71

    Abstract: The disclosure provides multimode configurable spectrometers, a method of operating a multimode configurable spectrometer, and an optical monitoring system. In one embodiment the multimode configurable spectrometer includes: (1) an optical sensor configured to receive an optical input and convert the optical input to electrical signals, wherein the optical sensor includes multiple active pixel regions for converting the optical input to the electrical signals, (2) conversion circuitry, having multiple selectable converting circuits, that is configured to receive and convert the electrical signals to a digital output according to a selected one of the selectable converting circuits, and (3) a sensor controller configured to set a synchronized operating mode to direct operation of the optical sensor and select, based on the synchronized operating mode, at least one of the selectable converting circuits to provide the digital output.

    High dynamic range measurement system for process monitoring
    6.
    发明授权
    High dynamic range measurement system for process monitoring 有权
    用于过程监控的高动态范围测量系统

    公开(公告)号：US09310250B1

    公开(公告)日：2016-04-12

    申请号：US14696370

    申请日：2015-04-24

    Applicant: Verity Instruments, Inc.

    Inventor： Larry Arlos Bullock ,  John D. Corless ,  Mark Anthony Meloni ,  Mike Whelan

    IPC: G01J3/28 ,  G01J3/26 ,  G01J3/10 ,  H05B41/30 ,  G01J3/12

    CPC classification number: H05B41/30 ,  G01J3/0205 ,  G01J3/027 ,  G01J3/10 ,  G01J3/26 ,  G01J2003/1278 ,  G01N21/84 ,  G01N2201/061 ,  G01N2201/0696

    Abstract: A flashlamp control system is provided with a capacitor that is statically electrically connected to the high voltage power supply, and a current sensing component is then electrically connected to the static capacitor and digital control electronics to monitor the charge current and/or the discharge current to static capacitor. A dynamically switchable capacitor electrically may also be connected to the high voltage power supply and digital control electronics for isolating the dynamically switchable capacitor from the high voltage power supply based on the monitored charge current and/or discharge current. One or more homogenizing element, comprise of an air gap, diffusing homogenizing element, imaging element, non-imaging element or light pipe homogenizing element, may be disposed in the light path proximate to the flashlamp, such as a multichannel distributor if present, to decrease the coefficient of variation of the optical signal, either temporally and spectrally, or both.

    Abstract translation: 闪光灯控制系统设置有静电电连接到高压电源的电容器，并且电流感测部件然后电连接到静态电容器和数字控制电子器件，以监测充电电流和/或放电电流 静态电容。 电动可切换电容器还可以连接到高压电源和数字控制电子设备，用于基于所监视的充电电流和/或放电电流将动态可切换电容器与高压电源隔离。 包括气隙，扩散匀化元件，成像元件，非成像元件或光管均质元件的一个或多个匀化元件可以设置在接近闪光灯的光路中，例如多通道分配器（如果存在）到 在时间上和光谱上降低光信号的变化系数，或两者。

    Method and Apparatus for Monitoring Pulsed Plasma Processes
    9.
    发明申请
    Method and Apparatus for Monitoring Pulsed Plasma Processes 审中-公开
    脉冲等离子体过程监测方法和装置

    公开(公告)号：US20160131587A1

    公开(公告)日：2016-05-12

    申请号：US14509038

    申请日：2014-10-07

    Applicant: Verity Instruments, Inc.

    Inventor： Mark Anthony Meloni ,  Andrew Weeks Kueny ,  Larry Arlos Bullock ,  Tim Charles Michals ,  Christopher David Pylant

    IPC: G01N21/66 ,  H01J37/32

    CPC classification number: G01N21/68 ,  G01N2021/8416 ,  H01J37/32082 ,  H01J37/32146 ,  H01J37/32926 ,  H01J37/32935 ,  H01J37/32972 ,  H01J37/3299

    Abstract: Emitted light from a pulsed plasma system is detected, amplified and digitized over a plurality of pulse modulation cycles to produce a digitized signal over the plurality of RF modulation periods, each of which contains an amount of random intensity variations. The individual signal periods are then mathematically combined to produce a stable local reference waveform signal that has decreased random intensity variations. One mechanism for creating a stable local reference waveform signal is by subdividing each of the individual signal periods into a plurality of subunits and the mathematically averaging the respective subunits within the modulation period to produce the stable local reference waveform signal for the modulation period. The stable local reference waveform signal can then be compared to other instantaneous waveform signals from the pulsed plasma system, or waveform parameters can be derived using various signal processing techniques such as Fourier analysis.

    Abstract translation: 来自脉冲等离子体系统的发射光在多个脉冲调制周期被检测，放大和数字化，以在多个RF调制周期中产生数字化信号，每个RF调制周期包含一定量的随机强度变化。 然后将各个信号周期数学地组合以产生具有降低的随机强度变化的稳定的局部参考波形信号。 用于产生稳定的局部参考波形信号的一种机制是通过将各个信号周期中的每一个细分为多个子单元，并在调制周期内对各个子单元进行数学平均，以产生用于调制周期的稳定局部参考波形信号。 然后可以将稳定的本地参考波形信号与来自脉冲等离子体系统的其它瞬时波形信号进行比较，或者可以使用诸如傅里叶分析之类的各种信号处理技术来导出波形参数。

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