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    FIBEROPTICAL CABLE ASSEMBLIES AND INTERFACES FOR SPECTROMETERS
    1.
    发明公开
    FIBEROPTICAL CABLE ASSEMBLIES AND INTERFACES FOR SPECTROMETERS 审中-公开

    公开(公告)号：US20230280560A1

    公开(公告)日：2023-09-07

    申请号：US18178421

    申请日：2023-03-03

    Applicant: Verity Instruments, Inc.

    Inventor： Larry Bullock ,  Mike Whelan ,  Mark Meloni ,  William Elliott ,  David Friedersdorff

    IPC: G02B6/44

    CPC classification number: G02B6/4495 ,  G02B6/4471

    Abstract: The disclosure provides an improved fiber optic cable assembly that can protect spectrometers against one or more of the external noise and discharge sources. The improved fiber optic cable assembly provides electrical isolation and/or insulation (EII) protection for optical instruments, such as a spectrometer, in which the fiber optic cable assembly is terminated. The EII protection can include one or more of a non-conductive sheathing at least partially covering the termination and the sheathing, a dielectric break providing electrical isolation between the termination and the sheathing, an isolation boot, and a grounding tether. In one example a fiber optical cable assembly includes: (1) a termination, (2) sheathing, and (3) a dielectric break providing electrical isolation between the termination and the sheathing. A fiber optically coupled system having an improved fiber optic cable assembly is also disclosed.

    SYSTEM AND METHOD FOR FAULT DETECTION AND OPERATIONAL READINESS FOR OPTICAL INSTRUMENTS FOR SEMICONDUCTOR PROCESSES
    3.
    发明公开
    SYSTEM AND METHOD FOR FAULT DETECTION AND OPERATIONAL READINESS FOR OPTICAL INSTRUMENTS FOR SEMICONDUCTOR PROCESSES 审中-公开

    公开(公告)号：US20240019305A1

    公开(公告)日：2024-01-18

    申请号：US18352058

    申请日：2023-07-13

    Applicant: Verity Instruments, Inc.

    Inventor： Andrew Weeks Kueny ,  Mike Whelan

    IPC: G01J3/28

    CPC classification number: G01J3/28

    Abstract: The disclosure recognizes that it is better to not start monitoring a controllable process than to monitor that process with an optical instrument, such as a process controlling instrument/sensor, when that optical instrument is not operating properly. Accordingly, the disclosure relates to novel features for checking that an optical instrument, such as a spectrometer, is working properly before being used to monitor a semiconductor process. In one aspect the disclosure provides a system for evaluation and verification of an operational state of an optical instrument. In one example, the system includes: (1) an integrated light source, (2) an optical sensor for collecting light from the integrated light source, (3) a controller controlling the integrated light source and the optical sensor, and (4) a processor for processing collected optical signal data obtained from the light and deriving a metric indicative of the operational state.

    MULTIMODE CONFIGURABLE SPECTROMETER
    4.
    发明申请
    MULTIMODE CONFIGURABLE SPECTROMETER 有权

    公开(公告)号：US20220406586A1

    公开(公告)日：2022-12-22

    申请号：US17893685

    申请日：2022-08-23

    Applicant: Verity Instruments, Inc.

    Inventor： Larry Arlos Bullock ,  John D. Corless ,  Richard J. Daignault, JR. ,  Mark Anthony Meloni ,  Mike Whelan

    IPC: H01J49/02 ,  H04N5/378 ,  H04N5/357 ,  G01B11/06 ,  H04N5/372 ,  H04N5/355 ,  H01L27/148 ,  H04N5/347 ,  G01N21/31 ,  G01N21/71

    Abstract: The disclosure provides multimode configurable spectrometers, a method of operating a multimode configurable spectrometer, and an optical monitoring system. In one embodiment the multimode configurable spectrometer includes: (1) an optical sensor configured to receive an optical input and convert the optical input to electrical signals, wherein the optical sensor includes multiple active pixel regions for converting the optical input to the electrical signals, (2) conversion circuitry, having multiple selectable converting circuits, that is configured to receive and convert the electrical signals to a digital output according to a selected one of the selectable converting circuits, and (3) a sensor controller configured to set a synchronized operating mode to direct operation of the optical sensor and select, based on the synchronized operating mode, at least one of the selectable converting circuits to provide the digital output.

    High dynamic range measurement system for process monitoring
    10.
    发明授权
    High dynamic range measurement system for process monitoring 有权
    用于过程监控的高动态范围测量系统

    公开(公告)号：US09310250B1

    公开(公告)日：2016-04-12

    申请号：US14696370

    申请日：2015-04-24

    Applicant: Verity Instruments, Inc.

    Inventor： Larry Arlos Bullock ,  John D. Corless ,  Mark Anthony Meloni ,  Mike Whelan

    IPC: G01J3/28 ,  G01J3/26 ,  G01J3/10 ,  H05B41/30 ,  G01J3/12

    CPC classification number: H05B41/30 ,  G01J3/0205 ,  G01J3/027 ,  G01J3/10 ,  G01J3/26 ,  G01J2003/1278 ,  G01N21/84 ,  G01N2201/061 ,  G01N2201/0696

    Abstract: A flashlamp control system is provided with a capacitor that is statically electrically connected to the high voltage power supply, and a current sensing component is then electrically connected to the static capacitor and digital control electronics to monitor the charge current and/or the discharge current to static capacitor. A dynamically switchable capacitor electrically may also be connected to the high voltage power supply and digital control electronics for isolating the dynamically switchable capacitor from the high voltage power supply based on the monitored charge current and/or discharge current. One or more homogenizing element, comprise of an air gap, diffusing homogenizing element, imaging element, non-imaging element or light pipe homogenizing element, may be disposed in the light path proximate to the flashlamp, such as a multichannel distributor if present, to decrease the coefficient of variation of the optical signal, either temporally and spectrally, or both.

    Abstract translation: 闪光灯控制系统设置有静电电连接到高压电源的电容器，并且电流感测部件然后电连接到静态电容器和数字控制电子器件，以监测充电电流和/或放电电流 静态电容。 电动可切换电容器还可以连接到高压电源和数字控制电子设备，用于基于所监视的充电电流和/或放电电流将动态可切换电容器与高压电源隔离。 包括气隙，扩散匀化元件，成像元件，非成像元件或光管均质元件的一个或多个匀化元件可以设置在接近闪光灯的光路中，例如多通道分配器（如果存在）到 在时间上和光谱上降低光信号的变化系数，或两者。

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