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公开(公告)号：US06795478B2
公开(公告)日：2004-09-21
申请号：US10109288
申请日：2002-03-28
申请人： Wen-Yen Hwang , Klaus Alexander Anselm , Jun Zheng
发明人： Wen-Yen Hwang , Klaus Alexander Anselm , Jun Zheng
IPC分类号： H01S308
CPC分类号： H01S5/18358 , H01S5/1833 , H01S5/18338 , H01S5/18369 , H01S5/205 , H01S2301/166
摘要： A surface-emitting laser, such as a VCSEL, for generating single-transverse mode laser light at a lasing wavelength, has a first mirror and a second mirror positioned so as to define a laser cavity therebetween, and a semiconductor active region disposed between the first and second mirrors for amplifying, by stimulated emission, light in the laser cavity at the lasing wavelength. An annular antiguide structure is disposed within the laser cavity and between the active region and one of the first and second mirrors, the annular antiguide structure comprising an antiguide material and having a central opening, the central opening comprising a second material having an index of refraction for light at the lasing wavelength smaller than that of the antiguide material, whereby the annular antiguide structure causes preferential antiguiding of higher order transverse lasing modes in the laser cavity.
摘要翻译： 用于产生激光波长的单横模式激光的诸如VCSEL的表面发射激光器具有定位成在其间限定激光腔的第一反射镜和第二反射镜，以及位于 第一和第二镜，用于通过受激发射在激光波长处放大激光腔中的光。 环形防水结构设置在激光腔内并且在有源区域与第一和第二反射镜之一之间，环形防水结构包括防护材料并具有中心开口，中心开口包括具有折射率的第二材料 对于激光波长小于抗蚀剂材料的波长的光，由此环形抗蚀剂结构在激光腔中引起较高阶横向激光模式的优先防御。
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公开(公告)号：US06636544B2
公开(公告)日：2003-10-21
申请号：US09951299
申请日：2001-09-11
IPC分类号： H01S5026
CPC分类号： H01S5/18358 , H01L33/105 , H01S5/18369 , H01S5/18391 , H01S5/4087 , H01S5/423
摘要： A device is provided, the device comprising a first vertical cavity surface-emitting laser (VCSEL) of a monolithic vertical cavity surface-emitting laser (VCSEL) array, the first vertical cavity surface-emitting laser (VCSEL) being tunable to a first plurality of wavelengths. The device also comprises a second vertical cavity surface-emitting laser (VCSEL) of the monolithic vertical cavity surface-emitting laser (VCSEL) array, the second vertical cavity surface-emitting laser (VCSEL) being tunable to a second plurality of wavelengths, wherein at least one wavelength is in both the first plurality of wavelengths and the second plurality of wavelengths.
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公开(公告)号：US06608855B1
公开(公告)日：2003-08-19
申请号：US10159347
申请日：2002-05-31
申请人： Wen-Yen Hwang , Klaus Alexander Anselm , Jun Zheng
发明人： Wen-Yen Hwang , Klaus Alexander Anselm , Jun Zheng
IPC分类号： H01S308
CPC分类号： H01S5/12 , H01S5/1203 , H01S5/124
摘要： An edge-emitting laser for generating single-longitudinal mode laser light at a lasing wavelength. A semiconductor active region amplifies, by stimulated emission, light in the laser cavity at the lasing wavelength. A first grating section adjacent to the active region and having a first reflectance and a first effective index of refraction. A second grating section adjacent to the active region and having a second reflectance and the first effective index of refraction. The first and second grating sections have a Bragg wavelength substantially equal to the lasing wavelength. A gratingless phase-shift section is disposed adjacent to the active region and between the first and second grating sections and has a second index of refraction different than the first index of refraction and a length sufficient to impart a phase shift for light at the lasing wavelength sufficient to achieve single-longitudinal mode operation.
摘要翻译： 用于产生激光波长的单纵模式激光的边缘发射激光器。 半导体有源区通过受激发射以激光波长放大激光腔中的光。 与有源区相邻并具有第一反射率和第一有效折射率的第一光栅区段。 与激活区域相邻并且具有第二反射率和第一有效折射率的第二光栅区段。 第一和第二光栅部分具有基本上等于激光波长的布拉格波长。 无栅相移部分设置在有源区域附近并且在第一和第二光栅部分之间并且具有不同于第一折射率的第二折射率和足以赋予激光波长的光的相移的长度 足以实现单纵模操作。
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4.发明授权Vertical-cavity surface-emitting laser with bottom dielectric distributed bragg reflector 有权垂直腔表面发射激光器与底部介质分布布拉格反射器公开(公告)号：US06549556B1
公开(公告)日：2003-04-15
申请号：US10002997
申请日：2001-11-30
申请人： Wen-Yen Hwang , Klaus Alexander Anselm , Stefan J. Murry , Chih-Hsiang Lin , Jun Zheng , James N. Baillargeon
发明人： Wen-Yen Hwang , Klaus Alexander Anselm , Stefan J. Murry , Chih-Hsiang Lin , Jun Zheng , James N. Baillargeon
IPC分类号： H01S5183
CPC分类号： H01S5/18341 , H01S5/0215 , H01S5/0217 , H01S5/02461 , H01S5/02476 , H01S5/0425 , H01S5/18369 , H01S5/18375 , H01S5/18377
摘要： A metal bonded vertical-cavity surface-emitting laser (VCSEL) structure with a bottom dielectric distributed Bragg reflector (DBR) mirror, and method for fabricating the VCSEL structure. The VCSEL structure consists a metal bonding layer disposed on a submount at a bottom side of the metal bonding layer; a bottom cavity mirror comprising a bottom dielectric distributed Bragg reflector (DBR) disposed within the metal bonding layer, the bottom dielectric DBR having a reflectance band including the lasing wavelength; a bottom current-spreading layer disposed on said bottom dielectric DBR and on a substantially flat, annular top surface of said metal bonding layer; a semiconductor active region disposed on the bottom current-spreading layer, said active region capable of stimulated emission at the lasing wavelength; and a top cavity mirror disposed above the active region and having a reflectance band including the lasing wavelength.
摘要翻译： 具有底部介电分布式布拉格反射镜（DBR）镜的金属结合垂直腔表面发射激光器（VCSEL）结构以及制造VCSEL结构的方法。 VCSEL结构包括设置在金属接合层的底侧的基座上的金属接合层; 包括设置在所述金属接合层内的底部电介质分布布拉格反射器（DBR）的底腔反射镜，所述底部电介质DBR具有包括所述激光波长的反射带; 底部电流扩散层，设置在所述底部电介质DBR上并且在所述金属结合层的基本上平坦的环形顶表面上; 设置在所述底部电流扩展层上的半导体有源区，所述有源区能够以激发波长的受激发射; 以及设置在有源区上方并且具有包括激光波长的反射带的顶腔镜。
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5.发明授权Patterned phase shift layers for wavelength-selectable vertical cavity surface-emitting laser (VCSEL) arrays 有权用于波长可选择的垂直腔表面发射激光器（VCSEL）阵列的图案化相移层公开(公告)号：US06696307B2
公开(公告)日：2004-02-24
申请号：US09951160
申请日：2001-09-11
IPC分类号： H01L2100
CPC分类号： H01S5/18358 , H01L33/105 , H01S5/18369 , H01S5/18391 , H01S5/4087 , H01S5/423
摘要： A method is provided, the method comprising forming a first of n masking layers for a device and forming a first of n phase-shift layers for the device using the first of the n masking layers. The method also comprises forming a second of n masking layers for a device, and forming a second of n phase-shift layers for the device using the second of the n masking layers and forming at least n+1 and at most 2n different optical thicknesses for the device using the n masking layers and the n phase-shift layers.
摘要翻译： 提供了一种方法，所述方法包括为器件形成n个掩模层中的第一个，并且使用n个掩模层中的第一个掩模层为器件形成n个相移层中的第一个相移层。 该方法还包括为器件形成n个掩模层中的第二个，并且使用n个掩模层中的第二个掩模层形成用于器件的n个相移层中的第二个，并形成至少n + 1和至多2
使用n个掩模层和n个相移层的器件的不同光学厚度。 -
公开(公告)号：US06638773B1
公开(公告)日：2003-10-28
申请号：US10159361
申请日：2002-05-31
申请人： Wen-Yen Hwang , Klaus Alexander Anselm , Jun Zheng
发明人： Wen-Yen Hwang , Klaus Alexander Anselm , Jun Zheng
IPC分类号： H01L2120
CPC分类号： H01S5/1082 , H01S5/1203 , H01S5/1243
摘要： A method for fabricating a laser for generating single-longitudinal mode laser light at a lasing wavelength. A semiconductor active region for amplifying, by stimulated emission, light in the laser cavity at the lasing wavelength is formed. A grating is formed adjacent to the active region, the grating having a grating period corresponding to a Bragg wavelength substantially equal to the lasing wavelength. An intermediate section of the grating is removed to result in first and second pluralities of gratings separated by a gratingless intermediate section. First and second grating sections are formed comprising the first and second pluralities of gratings, where the first and second grating sections each have a first effective index of refraction. A gratingless phase-shift section is formed in said intermediate section, the phase-shift section being disposed adjacent to the active region and between the first and second grating sections and having a second index of refraction different than the first index of refraction. The phase-shift section has a length sufficient to impart a phase shift for light at the lasing wavelength sufficient to achieve single-longitudinal mode operation. Alternatively, a grating material layer is deposited adjacent to the active region, the grating material layer having a first section, a second section, and an intermediate section between the first and second sections. Gratings are formed in the first and second sections to form a first grating section in the first section, a second grating section in the second section, leaving a gratingless phase-shift section in the intermediate section.
摘要翻译： 一种制造用于产生激光波长的单纵模激光的激光器的方法。 形成用于通过受激发射以激光波长放大激光腔中的光的半导体有源区。 光栅相邻于有源区形成，光栅具有对应于基本上等于激发波长的布拉格波长的光栅周期。 去除光栅的中间部分，以产生由无光栅中间部分分开的第一和第二多个光栅。 形成包括第一和第二多个光栅的第一和第二光栅部分，其中第一和第二光栅部分各自具有第一有效的折射率。 在所述中间部分中形成无栅相移部分，所述相移部分设置成与所述有源区域相邻并且在所述第一和第二光栅部分之间并且具有与所述第一折射率不同的第二折射率。 相移部分具有足以给激光波长的光进行相移以足以实现单纵模操作的长度。 或者，光栅材料层沉积在有源区附近，光栅材料层具有第一部分，第二部分和第一和第二部分之间的中间部分。 在第一部分和第二部分中形成光栅，以在第一部分中形成第一光栅部分，在第二部分中形成第二光栅部分，在中间部分留下无光栅相移部分。
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7.发明授权Multiple reflectivity band reflector with non-uniform profile and laser system employing same for laser wavelength monitoring 有权具有不均匀轮廓的多反射带反射器和采用相同激光波长监测的激光系统公开(公告)号：US06765939B2
公开(公告)日：2004-07-20
申请号：US10198528
申请日：2002-07-18
IPC分类号： H01S510
CPC分类号： H01S3/1303 , H01S3/131 , H01S3/1392 , H01S5/0687
摘要： A monitored laser system has a laser having a first mirror; an exit mirror, at least a portion of a laser cavity defined by the first mirror and the exit mirror; and an active region located in the laser cavity, the active region containing a material that is capable of stimulated emission at one or more wavelengths of laser light within a tuning range of the laser. A multiple reflectivity band reflector (MRBR) is coupled to at least a portion of laser light emitted from the laser and transmits filtered laser light. The MRBR has a plurality of layers of material arranged in parallel such that the reflector has a plurality of reflectivity peaks within the tuning range, each reflectivity peak separated from neighboring reflectivity peak by a reflectivity trough having a trough minimum, said reflectivity peaks characterized by a peak profile and said trough minima between said reflectivity peaks characterized by a trough profile. At least one of the peak and trough profiles has a substantially non-constant relationship of wavelength to reflectivity. A first photodiode coupled to at least a portion of the filtered laser light produces an output based on the amount of light received. The emitted wavelength of the laser is adjusted toward a desired wavelength within the tuning range based at least in part on the output of the first photodiode.
摘要翻译： 所监视的激光系统具有具有第一反射镜的激光器; 出射镜，由第一反射镜和出射镜限定的激光腔的至少一部分; 以及位于所述激光腔中的有源区域，所述有源区域包含能够在所述激光器的调谐范围内的激光的一个或多个波长处受激发射的材料。 多反射带式反射器（MRBR）耦合到从激光器发射的激光的至少一部分并透射滤波的激光。 MRBR具有平行布置的多层材料，使得反射器在调谐范围内具有多个反射率峰值，每个反射率峰值与相邻反射率峰值分离具有波谷最小值的反射率波谷，所述反射率峰值以 在所述反射率峰值之间的峰值曲线和所述的谷值最小值，其特征在于波谷曲线。 峰值和谷值曲线中的至少一个具有波长与反射率之间基本上不恒定的关系。 耦合到滤波的激光的至少一部分的第一光电二极管基于所接收的光量产生输出。 至少部分地基于第一光电二极管的输出，在调谐范围内将激光的发射波长调节到期望的波长。
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8.发明授权Method and system employing multiple reflectivity band reflector for laser wavelength monitoring 失效用于激光波长监测的多反射带反射体的方法和系统公开(公告)号：US06763046B2
公开(公告)日：2004-07-13
申请号：US10029008
申请日：2001-12-20
IPC分类号： H01S510
CPC分类号： H01S3/1303 , H01S3/131 , H01S3/1392 , H01S5/0687
摘要： A monitored laser system includes a laser with a first mirror and an exit mirror. The laser also has a laser cavity defined at least in part by the first mirror and the exit mirror. Within the laser cavity is an active region that contains material that is capable of stimulated emission at one or more wavelengths such that laser light is emitted from the laser. A power source is coupled to the active region. A multiple reflectivity band reflector (MRBR) is coupled to at least a portion of the emitted laser light. The MRBR has at least first and second wavelength bands with reflectivity above a particular reflectivity separated by at least a third wavelength band having reflectivity below the particular reflectivity. A first photodiode is coupled to at least a portion of the filtered laser light and produces an output based on the amount and wavelength of light received. A means for adjusting the emitted wavelength of the laser toward a particular wavelength in one of the at least first, second, and third wavelength bands based at least in part on the output of the first photodiode.
摘要翻译： 被监视的激光系统包括具有第一反射镜和出射镜的激光器。 激光器还具有至少部分地由第一反射镜和出射镜限定的激光腔。 在激光腔内是包含能够在一个或多个波长处被激发的材料的激活区域，使得激光从激光器发射。 电源耦合到有源区。 多反射带反射器（MRBR）耦合到所发射的激光的至少一部分。 MRBR具有至少第一和第二波长带，其具有高于具有低于特定反射率的反射率的至少第三波长带隔开的特定反射率的反射率。 第一光电二极管被耦合到滤波的激光的至少一部分，并且基于所接收的光的量和波长产生输出。 用于至少部分地基于第一光电二极管的输出，将至少第一，第二和第三波长带中的一个波长的激光发射波长调整到特定波长的装置。
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公开(公告)号：US06788466B2
公开(公告)日：2004-09-07
申请号：US10198683
申请日：2002-07-18
IPC分类号： G02B528
CPC分类号： H01S3/1303 , H01S3/131 , H01S3/1392 , H01S5/0687
摘要： A multiple reflectivity band reflector (MRBR) includes a stack of dielectric layers, arranged so that the reflector has a reflectivity profile comprising a plurality of reflectivity bands, e.g. at least first and second wavelength bands with reflectivity above a lasing threshold reflectivity, separated by a third wavelength band between the first and second wavelength bands having reflectivity below the lasing threshold reflectivity. A laser having at least a first mirror and an MRBR as the second mirror has a laser cavity, at least a portion of which is defined by the first mirror and the MRBR. An active region located within the laser cavity contains a material that is capable of stimulated emission at one or more wavelengths in the first and second wavelength bands. The gain spectrum of the laser is adjusted to select one of the first and second wavelength bands, thereby providing for lasing at a wavelength within the selected wavelength band. The laser may be, e.g., a monolithic VCSEL or a one-section or two-section external-cavity VECSEL having the MRBR as one of its cavity mirrors.
摘要翻译： 多反射带反射器（MRBR）包括一叠电介质层，其布置成使得反射器具有包括多个反射带的反射率分布， 具有高于激光阈值反射率的反射率的至少第一和第二波长带，其具有低于激光阈值反射率的反射率的第一和第二波长带之间的第三波长带分隔开。 具有至少第一反射镜和MRBR作为第二反射镜的激光器具有激光腔，其至少一部分由第一反射镜和MRBR限定。 位于激光腔内的有源区域包含能够在第一和第二波长带中的一个或多个波长处受激发射的材料。 调整激光器的增益光谱以选择第一和第二波长带中的一个，从而提供在所选波长带内的波长处的激光。 激光器可以是例如单片VCSEL或具有MRBR作为其腔镜之一的单段或两段外腔VECSEL。
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公开(公告)号：US06763053B2
公开(公告)日：2004-07-13
申请号：US10198373
申请日：2002-07-18
IPC分类号： H01S5183
CPC分类号： H01S3/1303 , H01S3/131 , H01S3/1392 , H01S5/0687
摘要： A multiple reflectivity band reflector (MRBR) includes a stack of dielectric layers, arranged so that the reflector has a reflectivity profile comprising a plurality of reflectivity bands, e.g. at least first and second wavelength bands with reflectivity above a lasing threshold reflectivity, separated by a third wavelength band between the first and second wavelength bands having reflectivity below the lasing threshold reflectivity. A laser having at least a first mirror and an MRBR as the second mirror has a laser cavity, at least a portion of which is defined by the first mirror and the MRBR. An active region located within the laser cavity contains a material that is capable of stimulated emission at one or more wavelengths in the first and second wavelength bands. The gain spectrum of the laser is adjusted to select one of the first and second wavelength bands, thereby providing for lasing at a wavelength within the selected wavelength band. The laser may be, e.g., a monolithic VCSEL or a one-section or two-section external-cavity VECSEL having the MRBR as one of its cavity mirrors.
摘要翻译： 多反射带反射器（MRBR）包括一叠电介质层，其布置成使得反射器具有包括多个反射带的反射率分布， 具有高于激光阈值反射率的反射率的至少第一和第二波长带，其具有低于激光阈值反射率的反射率的第一和第二波长带之间的第三波长带分隔开。 具有至少第一反射镜和MRBR作为第二反射镜的激光器具有激光腔，其至少一部分由第一反射镜和MRBR限定。 位于激光腔内的有源区域包含能够在第一和第二波长带中的一个或多个波长处受激发射的材料。 调整激光器的增益光谱以选择第一和第二波长带中的一个，从而提供在所选波长带内的波长处的激光。 激光器可以是例如单片VCSEL或具有MRBR作为其腔镜之一的单段或两段外腔VECSEL。
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