Wafer handling apparatus
    1.
    发明授权
    Wafer handling apparatus 失效
    晶圆处理装置

    公开(公告)号:US4597708A

    公开(公告)日:1986-07-01

    申请号:US616979

    申请日:1984-06-04

    IPC分类号: H01L21/677 B65G1/06

    摘要: A wafer handler featuring a carriage movable along a rail path, the carriage supporting an upright rotatable arm with a cantilevered wafer chuck. Elevators for raising and lowering trays containing wafer stacks are disposed on either side of the rail path. Each elevator has a curved track section which may be interposed along the rail path. The upright arm has a track follower, parallel to a boom supporting the wafer chuck and freely movable along the rail path, except when it encounters a curved track section. In this instance, the track follower will follow the curved track section, causing rotation of the arm, boom and wafer chuck, bringing the chuck into the wafer stack at an elevation determined by the elevator. In this manner, motion in the X, Y and Z planes may be provided for stacked wafers over extended distances.

    摘要翻译: 具有可沿轨道移动的支架的晶片处理器,该支架支撑具有悬臂晶片卡盘的直立可旋转臂。 用于升高和降低包含晶片堆叠的托盘的升降机设置在轨道的任一侧。 每个电梯具有弯曲的轨道部分,其可以沿着轨道路线插入。 直立臂具有轨道跟随器,平行于支撑晶片卡盘的悬臂,并且可以沿着轨道路径自由移动,除非它遇到弯曲的轨道部分。 在这种情况下,跟踪跟随器将跟随弯曲的轨道部分,引起臂,吊臂和晶片卡盘的旋转,使得卡盘以电梯确定的仰角进入晶片堆叠。 以这种方式,X,Y和Z平面中的运动可以用于延长距离上的堆叠晶片。

    Wafer orientation system
    2.
    发明授权
    Wafer orientation system 失效
    晶圆定向系统

    公开(公告)号:US4376482A

    公开(公告)日:1983-03-15

    申请号:US265412

    申请日:1981-05-19

    CPC分类号: H01L21/68 B65G47/244

    摘要: A wafer orienting apparatus having inwardly biased rollers, spaced about the circumferential edge of a wafer in contact with the edge. Two of the rollers are spaced apart a distance less than the dimension of a primary flat registration edge and are mounted to follow the wafer edge upon rotation of the wafer. When a flat registration edge passes these closely spaced rollers they move inwardly, activating switches associated with a coincidence circuit. When both switches are simultaneously activated, the coincidence circuit produces a signal which stops wafer rotation, thereby orienting the wafer. The rollers are mounted so that they can be moved from the path of wafer travel after wafer orientation, permitting a queue of wafers to be oriented, one after the other.

    摘要翻译: 具有向内偏压的辊的晶片定向装置,其间隔开与所述边缘接触的晶片的周边边缘。 两个辊间隔开一个小于主平面配准边缘的尺寸的距离,并且在晶片旋转时安装成跟随晶片边缘。 当平面配准边缘通过这些紧密间隔的辊时,它们向内移动,启动与重合电路相关联的开关。 当两个开关同时被激活时,符合电路产生停止晶片旋转的信号,从而使晶片定向。 辊子被安装成使得它们可以在晶片取向之后从晶片移动的路径移动,从而允许晶片排队一个接一个地定向。

    Non-contacting resistivity instrument with structurally related
conductance and distance measuring transducers
    3.
    发明授权
    Non-contacting resistivity instrument with structurally related conductance and distance measuring transducers 失效
    具有结构相关电导和距离测量传感器的非接触电阻率仪器

    公开(公告)号:US4302721A

    公开(公告)日:1981-11-24

    申请号:US39303

    申请日:1979-05-15

    摘要: An instrument for computing resistivity based upon measurements of thickness and conductance. A conductance transducer is a solenoid in an annular ferrite cup connected to a tank circuit for an eddy current measurement of conductance. Within the center of the annular ferrite cup concentric acoustic wave sending and receiving channels are disposed for making an acoustic pressure wave measurement which is used for a thickness measurement using two gauge heads, spaced on opposite sides of an article to be measured. Each gauge head contains identical conductance and thickness transducers. The thickness measurement is divided by the conductance measurement to derive resistivity.

    摘要翻译: 基于厚度和电导测量计算电阻率的仪器。 电导传感器是连接到用于电导涡流测量的电路的环形铁氧体杯中的螺线管。 在环形铁氧体杯的中心内,设置同心声波发送和接收通道,用于进行声压测量,其用于使用两个测量头进行厚度测量,间隔在待测物品的相对两侧。 每个测量头包含相同的电导和厚度换能器。 厚度测量除以电导测量以导出电阻率。

    Acoustic method and apparatus for measuring surfaces of wafers and
similar articles
    4.
    发明授权
    Acoustic method and apparatus for measuring surfaces of wafers and similar articles 失效
    用于测量晶片和类似物品的表面的声学方法和装置

    公开(公告)号:US4280354A

    公开(公告)日:1981-07-28

    申请号:US120932

    申请日:1980-02-12

    IPC分类号: G01B17/08 G10K11/35 G01N29/00

    CPC分类号: G10K11/355 G01B17/08

    摘要: A measurement system wherein an acoustic distance measuring transducer is moved over a flat reference surface, measuring the distance from the transducer to a calibration surface and then to a test surface. The transducer is moved along a path within a ring while the top edge of the ring is used to support the calibration surface and then the test surface. The ring is mounted for rotation so that the transducer can scan a supported surface at a locus of points. Scans across the calibration surface and then the test surface are compared to measure deviations of the test surface from calibration surface.

    摘要翻译: 一种测量系统,其中声学距离测量传感器在平坦的参考表面上移动,测量从换能器到校准表面的距离,然后测量到测试表面。 传感器沿着环内的路径移动,而环的顶部边缘用于支撑校准表面,然后测试表面。 环安装为旋转,以便换能器可以在点的轨迹扫描受支撑的表面。 扫描校准表面,然后将测试表面进行比较,以测量测试表面与校准表面的偏差。

    Gauge for measuring distance to planar surfaces and thicknesses of
planar members
    5.
    发明授权
    Gauge for measuring distance to planar surfaces and thicknesses of planar members 失效
    用于测量平面表面距离和平面构件厚度的量具

    公开(公告)号:US4175441A

    公开(公告)日:1979-11-27

    申请号:US903493

    申请日:1978-05-08

    CPC分类号: G01R31/2648 G01S15/32

    摘要: Apparatus for measuring distance between a gauge head orifice, and the front planar surface of an object by sensing acoustic pressure near the gauge head orifice. The acoustic pressure is initially generated by an audio oscillator activating a speaker which emits acoustic waves through a first orifice. Acoustic pressure is sensed through a second orifice, proximate to the first, and the pressure is converted to an electrical signal which is processed to yield a distance signal for a display. Two similar distance gauges spaced apart on opposite sides of a planar member at a known distance are used to compute the thickness of the planar member.

    摘要翻译: 用于通过感测测量头孔口附近的声压测量仪表头孔和物体的前平面之间的距离的装置。 声压最初由音频振荡器产生,该音频振荡器激活通过第一孔口发出声波的扬声器。 通过靠近第一孔的第二孔检测声压,并将压力转换成电信号,该信号被处理以产生显示器的距离信号。 使用在已知距离处的平面构件的相对侧上间隔开的两个相似的距离计,以计算平面构件的厚度。

    Metrology instrument for measuring vertical profiles of integrated
circuits
    6.
    发明授权
    Metrology instrument for measuring vertical profiles of integrated circuits 失效
    用于测量集成电路垂直剖面的测量仪器

    公开(公告)号:US4103542A

    公开(公告)日:1978-08-01

    申请号:US831870

    申请日:1977-09-09

    CPC分类号: G01B5/0002 G01B7/10 G01B7/28

    摘要: A surface profile measuring instrument, which has a stylus supported on a counterbalanced scanner arm, in turn supported in a gimbal mounting having two axes, one of which is adjustable by a servo. A connected electronics package provides axis compensation for levelling through the servo, as well as zero adjustment of a display device and discrimination against small, unwanted slops. Stylus motion is translated into an analog signal by a linear position differential transformer. To achieve slope discrimination, the analog signal is differentiated and compared in a comparator to a reference for rejection of signals corresponding to small slopes. The signal is then integrated and displayed, with reference to a selected zero of a display device.

    摘要翻译: 具有支撑在平衡扫描器臂上的触针的表面轮廓测量仪器又支撑在具有两个轴的万向架安装件中,其中一个可由伺服机构调节。 连接的电子封装提供了通过伺服调平的轴补偿,以及显示装置的零调整和对小的不需要的斜坡的区分。 触针运动由线性位置差分变换器转换为模拟信号。 为了实现斜率鉴别,模拟信号被微分,并在比较器中进行比较,用于对应于小斜率的信号的抑制。 然后参照显示装置的选定的零点对信号进行积分和显示。

    Probe for determining p or n-type conductivity of semiconductor material
    7.
    发明授权
    Probe for determining p or n-type conductivity of semiconductor material 失效
    用于确定半导体材料的p型或n型导电性的探针

    公开(公告)号:US4282483A

    公开(公告)日:1981-08-04

    申请号:US69272

    申请日:1979-08-24

    摘要: A probe for determining the p or n-type of semiconductor material wherein a conductive wire is positioned for point contact with the semiconductor, forming a diode. The wire is energized by r.f. current passing through a capacitor so that the current is rectified at the diode, charging the capacitor. A voltage comparator is connected to the capacitor for determining the polarity of charge on the capacitor and hence the p or n-type of the semiconductor wafer. The semiconductor is supported on a non-diffusing dielectric over a conductive carrier such that r.f. current passes through the dielectric to the carrier, thereby completing the circuit.

    摘要翻译: 用于确定p型或n型半导体材料的探针,其中定位导线以与半导体点接触,形成二极管。 线由r.f.通电。 电流通过电容器,使得电流在二极管处整流,对电容器充电。 将电压比较器连接到电容器,以确定电容器上的电荷的极性,因此确定p型或n型半导体晶片。 半导体被支撑在导电载体上的非扩散电介质上,使得r.f. 电流通过电介质到载体,从而完成电路。

    MEMORY CONTROLLERS FOR PROCESSOR HAVING MULTIPLE PROGRAMMABLE UNITS
    8.
    发明申请
    MEMORY CONTROLLERS FOR PROCESSOR HAVING MULTIPLE PROGRAMMABLE UNITS 有权
    具有多个可编程单元的处理器的存储器控​​制器

    公开(公告)号:US20090024804A1

    公开(公告)日:2009-01-22

    申请号:US12207476

    申请日:2008-09-09

    IPC分类号: G06F12/10

    CPC分类号: G06F13/1642

    摘要: A parallel hardware-based multithreaded processor is described. The processor includes a general purpose processor that coordinates system functions and a plurality of microengines that support multiple hardware threads. The processor also includes a memory control system that has a first memory controller that sorts memory references based on whether the memory references are directed to an even bank or an odd bank of memory and a second memory controller that optimizes memory references based upon whether the memory references are read references or write references.

    摘要翻译: 描述了基于并行硬件的多线程处理器。 处理器包括协调系统功能的通用处理器和支持多个硬件线程的多个微启动器。 处理器还包括存储器控制系统,该存储器控制系统具有第一存储器控制器,该第一存储器控制器基于存储器引用是针对偶数存储体还是存储器的奇数存储器来分类存储器引用;以及第二存储器控制器,其基于存储器是否优化存储器引用 引用是读取引用或写入引用。

    Simulating a logic design
    9.
    发明授权
    Simulating a logic design 有权
    模拟逻辑设计

    公开(公告)号:US07107201B2

    公开(公告)日:2006-09-12

    申请号:US09941952

    申请日:2001-08-29

    IPC分类号: G06F17/50 G06F9/455 G06F9/44

    CPC分类号: G06F17/5022

    摘要: Simulating a logic design having combinatorial logic and state logic includes representing the combinatorial logic and the state logic using separate graphic elements, identifying clock domains for the combinatorial logic and the state logic using the separate graphic elements, generating computer code that simulates operation of portions of the logic design, the computer code being generated based on the clock domains, and associating the computer code with graphic elements that correspond to the portions of the logic design.

    摘要翻译: 模拟具有组合逻辑和状态逻辑的逻辑设计包括使用分离的图形元素表示组合逻辑和状态逻辑,识别用于组合逻辑的时钟域和使用分离的图形元素的状态逻辑,生成计算机代码,其模拟部分的操作 逻辑设计,基于时钟域产生的计算机代码,以及将计算机代码与对应于逻辑设计的部分的图形元素相关联。