摘要:
A wafer handler featuring a carriage movable along a rail path, the carriage supporting an upright rotatable arm with a cantilevered wafer chuck. Elevators for raising and lowering trays containing wafer stacks are disposed on either side of the rail path. Each elevator has a curved track section which may be interposed along the rail path. The upright arm has a track follower, parallel to a boom supporting the wafer chuck and freely movable along the rail path, except when it encounters a curved track section. In this instance, the track follower will follow the curved track section, causing rotation of the arm, boom and wafer chuck, bringing the chuck into the wafer stack at an elevation determined by the elevator. In this manner, motion in the X, Y and Z planes may be provided for stacked wafers over extended distances.
摘要:
A wafer orienting apparatus having inwardly biased rollers, spaced about the circumferential edge of a wafer in contact with the edge. Two of the rollers are spaced apart a distance less than the dimension of a primary flat registration edge and are mounted to follow the wafer edge upon rotation of the wafer. When a flat registration edge passes these closely spaced rollers they move inwardly, activating switches associated with a coincidence circuit. When both switches are simultaneously activated, the coincidence circuit produces a signal which stops wafer rotation, thereby orienting the wafer. The rollers are mounted so that they can be moved from the path of wafer travel after wafer orientation, permitting a queue of wafers to be oriented, one after the other.
摘要:
An instrument for computing resistivity based upon measurements of thickness and conductance. A conductance transducer is a solenoid in an annular ferrite cup connected to a tank circuit for an eddy current measurement of conductance. Within the center of the annular ferrite cup concentric acoustic wave sending and receiving channels are disposed for making an acoustic pressure wave measurement which is used for a thickness measurement using two gauge heads, spaced on opposite sides of an article to be measured. Each gauge head contains identical conductance and thickness transducers. The thickness measurement is divided by the conductance measurement to derive resistivity.
摘要:
A measurement system wherein an acoustic distance measuring transducer is moved over a flat reference surface, measuring the distance from the transducer to a calibration surface and then to a test surface. The transducer is moved along a path within a ring while the top edge of the ring is used to support the calibration surface and then the test surface. The ring is mounted for rotation so that the transducer can scan a supported surface at a locus of points. Scans across the calibration surface and then the test surface are compared to measure deviations of the test surface from calibration surface.
摘要:
Apparatus for measuring distance between a gauge head orifice, and the front planar surface of an object by sensing acoustic pressure near the gauge head orifice. The acoustic pressure is initially generated by an audio oscillator activating a speaker which emits acoustic waves through a first orifice. Acoustic pressure is sensed through a second orifice, proximate to the first, and the pressure is converted to an electrical signal which is processed to yield a distance signal for a display. Two similar distance gauges spaced apart on opposite sides of a planar member at a known distance are used to compute the thickness of the planar member.
摘要:
A surface profile measuring instrument, which has a stylus supported on a counterbalanced scanner arm, in turn supported in a gimbal mounting having two axes, one of which is adjustable by a servo. A connected electronics package provides axis compensation for levelling through the servo, as well as zero adjustment of a display device and discrimination against small, unwanted slops. Stylus motion is translated into an analog signal by a linear position differential transformer. To achieve slope discrimination, the analog signal is differentiated and compared in a comparator to a reference for rejection of signals corresponding to small slopes. The signal is then integrated and displayed, with reference to a selected zero of a display device.
摘要:
A probe for determining the p or n-type of semiconductor material wherein a conductive wire is positioned for point contact with the semiconductor, forming a diode. The wire is energized by r.f. current passing through a capacitor so that the current is rectified at the diode, charging the capacitor. A voltage comparator is connected to the capacitor for determining the polarity of charge on the capacitor and hence the p or n-type of the semiconductor wafer. The semiconductor is supported on a non-diffusing dielectric over a conductive carrier such that r.f. current passes through the dielectric to the carrier, thereby completing the circuit.
摘要:
A parallel hardware-based multithreaded processor is described. The processor includes a general purpose processor that coordinates system functions and a plurality of microengines that support multiple hardware threads. The processor also includes a memory control system that has a first memory controller that sorts memory references based on whether the memory references are directed to an even bank or an odd bank of memory and a second memory controller that optimizes memory references based upon whether the memory references are read references or write references.
摘要:
Simulating a logic design having combinatorial logic and state logic includes representing the combinatorial logic and the state logic using separate graphic elements, identifying clock domains for the combinatorial logic and the state logic using the separate graphic elements, generating computer code that simulates operation of portions of the logic design, the computer code being generated based on the clock domains, and associating the computer code with graphic elements that correspond to the portions of the logic design.
摘要:
A technique for designing a logic circuit includes specifying a model. The model including combinatorial blocks, state elements and graphical library elements. The technique maintains a data structure representative of the model, and generates an architectural model and an implementation model from the data structure. The data structure represents a descriptive net list of the model. The architectural model includes C++ code and the implementation model includes Verilog.