公开(公告)号：US20150053927A1

公开(公告)日：2015-02-26

申请号：US13971177

申请日：2013-08-20

Applicant: Wisconsin Alumni Research Foundation

Inventor： Michael S. Arnold ,  Feng Xu

IPC: H01L29/775 ,  H01L29/66

CPC classification number: H01L29/775 ,  H01L29/66439 ,  H01L51/0048 ,  H01L51/0097 ,  H01L51/0562 ,  Y10S977/938

Abstract: Thin-film transistors comprising buckled films comprising carbon nanotubes as the conductive channel are provided. Also provided are methods of fabricating the transistors. The transistors, which are highly stretchable and bendable, exhibit stable performance even when operated under high tensile strains.

Abstract translation: 提供了包括碳纳米管作为导电通道的带扣膜的薄膜晶体管。 还提供了制造晶体管的方法。 高伸缩性和可弯曲的晶体管即使在高拉伸应变下操作也表现出稳定的性能。

公开(公告)号：US09105480B2

公开(公告)日：2015-08-11

申请号：US13829078

申请日：2013-03-14

Applicant: Wisconsin Alumni Research Foundation

Inventor： Michael S. Arnold ,  Padma Gopalan ,  Nathaniel S. Safron ,  Myungwoong Kim ,  Jonathan Woosun Choi

IPC: C01B31/04 ,  H01L21/04 ,  H01L21/3065 ,  H01L21/308 ,  H01L21/3105 ,  H01L21/311 ,  B82Y10/00

CPC classification number: H01L21/042 ,  B82Y10/00 ,  B82Y40/00 ,  C01B32/194 ,  C01B2204/065 ,  H01L21/3065 ,  H01L21/3086 ,  H01L21/31058 ,  H01L21/31116 ,  H01L21/31138 ,  H01L29/0673 ,  H01L29/1606 ,  H01L29/66015 ,  H01L29/66439 ,  H01L29/778

Abstract: Methods of fabricating patterned substrates, including patterned graphene substrates, using etch masks formed from self-assembled block copolymer films are provided. Some embodiments of the methods are based on block copolymer (BCP) lithography in combination with graphoepitaxy. Some embodiments of the methods are based on BCP lithography techniques that utilize hybrid organic/inorganic etch masks derived from BCP templates. Also provided are field effect transistors incorporating graphene nanoribbon arrays as the conducting channel and methods for fabricating such transistors.

Abstract translation: 提供了使用由自组装嵌段共聚物膜形成的蚀刻掩模来制造包括图案化石墨烯衬底的图案化衬底的方法。 该方法的一些实施方案基于嵌段共聚物（BCP）平版印刷术与组合蛋白质外延法。 该方法的一些实施方案基于利用衍生自BCP模板的混合有机/无机蚀刻掩模的BCP光刻技术。 还提供了结合了石墨烯纳米线阵列作为导电沟道的场效应晶体管以及用于制造这种晶体管的方法。

公开(公告)号：US08987707B2

公开(公告)日：2015-03-24

申请号：US13971177

申请日：2013-08-20

Applicant: Wisconsin Alumni Research Foundation

Inventor： Michael S. Arnold ,  Feng Xu

IPC: H01L29/78 ,  H01L29/775 ,  H01L29/66

CPC classification number: H01L29/775 ,  H01L29/66439 ,  H01L51/0048 ,  H01L51/0097 ,  H01L51/0562 ,  Y10S977/938

Abstract: Thin-film transistors comprising buckled films comprising carbon nanotubes as the conductive channel are provided. Also provided are methods of fabricating the transistors. The transistors, which are highly stretchable and bendable, exhibit stable performance even when operated under high tensile strains.

Abstract translation: 提供了包括碳纳米管作为导电通道的带扣膜的薄膜晶体管。 还提供了制造晶体管的方法。 高伸缩性和可弯曲的晶体管即使在高拉伸应变下操作也表现出稳定的性能。

公开(公告)号：US20140273361A1

公开(公告)日：2014-09-18

申请号：US13829078

申请日：2013-03-14

Applicant: Wisconsin Alumni Research Foundation

Inventor： Michael S. Arnold ,  Padma Gopalan ,  Nathaniel S. Safron ,  Myungwoong Kim ,  Jonathan Woosun Choi

IPC: H01L21/04 ,  H01L21/027 ,  C01B31/04 ,  H01L21/02

CPC classification number: H01L21/042 ,  B82Y10/00 ,  B82Y40/00 ,  C01B32/194 ,  C01B2204/065 ,  H01L21/3065 ,  H01L21/3086 ,  H01L21/31058 ,  H01L21/31116 ,  H01L21/31138 ,  H01L29/0673 ,  H01L29/1606 ,  H01L29/66015 ,  H01L29/66439 ,  H01L29/778

Abstract: Methods of fabricating patterned substrates, including patterned graphene substrates, using etch masks formed from self-assembled block copolymer films are provided. Some embodiments of the methods are based on block copolymer (BCP) lithography in combination with graphoepitaxy. Some embodiments of the methods are based on BCP lithography techniques that utilize hybrid organic/inorganic etch masks derived from BCP templates. Also provided are field effect transistors incorporating graphene nanoribbon arrays as the conducting channel and methods for fabricating such transistors.

Abstract translation: 提供了使用由自组装嵌段共聚物膜形成的蚀刻掩模来制造包括图案化石墨烯衬底的图案化衬底的方法。 该方法的一些实施方案基于嵌段共聚物（BCP）平版印刷术与组合蛋白质外延法。 该方法的一些实施方案基于利用衍生自BCP模板的混合有机/无机蚀刻掩模的BCP光刻技术。 还提供了结合了石墨烯纳米线阵列作为导电沟道的场效应晶体管以及用于制造这种晶体管的方法。