Apparatus and Method of Manufacturing Graphene Film
    5.
    发明申请
    Apparatus and Method of Manufacturing Graphene Film 审中-公开
    制造石墨烯膜的设备和方法

    公开(公告)号:US20170029279A1

    公开(公告)日:2017-02-02

    申请号:US15149612

    申请日:2016-05-09

    摘要: Disclosed is an apparatus and method of manufacturing a graphene film, wherein the apparatus includes a wrinkle flattening device configured to flatten wrinkles in a lamination structure including a base substrate and a graphene film laminated on the base substrate; and a first lamination apparatus configured to laminate a first substrate on the graphene film, wherein the wrinkle flattening device applies a vacuum to the base substrate when the wrinkle flattening device is in contact with the base substrate.

    摘要翻译: 公开了一种制造石墨烯薄膜的装置和方法,其中该装置包括皱纹平整装置,其被构造成使叠层结构中的褶皱平坦化,所述叠层结构包括基底基板和层压在基底基板上的石墨烯薄膜; 以及第一层压装置,其被配置为将第一基板层叠在所述石墨烯膜上,其中,当所述褶皱变平装置与所述基底基板接触时,所述皱纹变平装置向所述基底基板施加真空。