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25 条记录 (耗时 0.017 秒)

    Ceramic parts and a producing process thereof
    2.
    发明授权
    Ceramic parts and a producing process thereof 失效
    陶瓷部件及其制造方法

    公开(公告)号：US06258440B1

    公开(公告)日：2001-07-10

    申请号：US08982346

    申请日：1997-12-02

    申请人： Yasufumi Aihara ,  Shinji Kawasaki

    发明人： Yasufumi Aihara ,  Shinji Kawasaki

    IPC分类号： B32B326

    CPC分类号： C04B41/009 ,  C04B41/5346 ,  C04B41/91 ,  Y10T428/24355 ,  Y10T428/31 ,  Y10T428/315 ,  C04B41/0072 ,  C04B35/10 ,  C04B35/00 ,  C04B35/581

    摘要： A sintered ceramic part to be exposed to a corrosive gas, a surface of said ceramic part being machined, wherein each of grains exposed to the machined surface of the ceramic part is formed with a machined surface, and en edge of the machined surface of each of these grains is made round by material transfer. A process for producing such a sintered ceramic part includes the steps of: obtaining a machined body having a given shape by at least grinding a surface of a ceramic sintered body, and annealing the machined body.

    摘要翻译： 暴露于腐蚀性气体的烧结陶瓷部件，被加工的所述陶瓷部件的表面，其中暴露于陶瓷部件的加工表面的每个晶粒形成有加工表面，并且在每个加工表面的边缘 的这些颗粒通过材料转移制成圆形。 制造这种烧结陶瓷部件的方法包括以下步骤：通过至少研磨陶瓷烧结体的表面，并且对加工体进行退火，从而获得具有给定形状的加工体。

    Process for the production of lanthanum chromite films by plasma spraying
    5.
    发明授权
    Process for the production of lanthanum chromite films by plasma spraying 失效
    通过等离子体喷涂生产铬酸镧薄膜的方法

    公开(公告)号：US5332598A

    公开(公告)日：1994-07-26

    申请号：US984456

    申请日：1992-12-02

    申请人： Shinji Kawasaki ,  Makoto Murai ,  Yasufumi Aihara

    发明人： Shinji Kawasaki ,  Makoto Murai ,  Yasufumi Aihara

    IPC分类号： C23C4/02 ,  C23C4/10 ,  C23C4/18 ,  H01M4/88 ,  H01M8/02 ,  H01M8/12 ,  B05D1/08 ,  B05D5/12

    CPC分类号： C23C4/18 ,  C23C4/11 ,  H01M8/0215 ,  H01M8/0219 ,  Y02P70/56

    摘要： A process for the production of a lanthanum chromite film, including the steps of preparing a plasma spray powder by mixing 1-15 parts by weight of powdery chromium oxide powder to 100 parts by weight of powdery lanthanum chromite, this lanthanum chromite having a composition ratio of A sites to B-sites being in a range of 1:1 to 1:0.9, forming a plasma sprayed film by plasma spraying the plasma spray powder onto a substrate, and forming the lanthanum chromite film by heat treating the resulting plasma sprayed film. The plasma spray powder may be produced by preparing a mixed powder by adding 1-15 parts by weight of powdery chromium oxide to 100 parts by weight of a synthesis powder capable of producing the lanthanum chromite film by heat treatment, the synthesis powder containing at least chromium oxide and lanthanum chromite and the lanthanum chromite film having a composition ratio of A-sites to B-sites being in a range of 1:1 to 1:0.9, obtaining a synthesized product by heating the mixed powder, and granulating the synthesized product.

    摘要翻译： 一种生产亚铬酸镧膜的方法，包括以下步骤：通过将1-15重量份粉末状氧化铬粉末与100重量份粉末状亚铬酸镧混合来制备等离子喷涂粉末，该亚铬酸镧组成比 的B位置的比例范围为1：1〜1：0.9，通过将等离子喷涂粉末等离子喷涂到基板上而形成等离子体喷涂膜，通过热处理得到的等离子体喷涂膜 。 等离子喷涂粉末可以通过向100重量份的能够通过热处理生产亚铬酸镧膜的合成粉末中加入1-15重量份的粉末状氧化铬来制备混合粉末，所述合成粉末至少含有 氧化铬和亚铬酸镧，并且A位与B位的组成比在1：1〜1：0.9范围内的亚铬酸镧膜，通过加热混合粉末得到合成产物，并将合成产物 。

    ELECTROSTATIC CHUCK
    7.
    发明申请
    ELECTROSTATIC CHUCK 有权
    静电卡

    公开(公告)号：US20070223175A1

    公开(公告)日：2007-09-27

    申请号：US11687824

    申请日：2007-03-19

    申请人： Ikuhisa Morioka ,  Yasufumi Aihara ,  Hideyoshi Tsuruta

    发明人： Ikuhisa Morioka ,  Yasufumi Aihara ,  Hideyoshi Tsuruta

    IPC分类号： H01L21/683

    CPC分类号： H01L21/6831

    摘要： An electrostatic chuck includes a ceramic base having an electrode embedded in vicinity to a holding face for holding a substrate. On a back side of this ceramic base, provided are a terminal connected to the electrode, a wafer temperature control member, and an insulating member for insulating the temperature control member from the terminal. This insulating member has a flange portion on its end portion in contact with the ceramic base, and is made of highly thermal conductive ceramics.

    摘要翻译： 静电吸盘包括具有嵌入到用于保持基板的保持面附近的电极的陶瓷基体。 在该陶瓷基体的背面设置有与电极连接的端子，晶片温度控制部件以及用于将温度控制部件与端子绝缘的绝缘部件。 该绝缘构件在其与陶瓷基体接触的端部具有凸缘部，并且由高导热性陶瓷制成。

    Method of producing anti-corrosion member and anti-corrosion member
    8.
    发明授权
    Method of producing anti-corrosion member and anti-corrosion member 有权
    生产防腐蚀部件和防腐蚀部件的方法

    公开(公告)号：US06406799B1

    公开(公告)日：2002-06-18

    申请号：US09494987

    申请日：2000-01-31

    申请人： Yasufumi Aihara ,  Keiichiro Watanabe ,  Kiyoshi Araki

    发明人： Yasufumi Aihara ,  Keiichiro Watanabe ,  Kiyoshi Araki

    IPC分类号： B21D3900

    CPC分类号： C23C8/06 ,  C23C8/62 ,  Y10T428/12556

    摘要： A base member made of a metal in which aluminum is included, ceramics in which an aluminum element is included, or a composition member constructed by a metal in which aluminum and ceramics are included, is provided in a container in which a solid fluorine compound such as NaHF2 is filled. Then, the container is heated at a temperature higher than a decomposition temperature of the solid fluorine compound. After that, the base member is subjected to a heat treatment with the decomposed gas of the solid fluorine compound to form a fluoride layer on a surface of the base member. In this manner, it is possible to obtain an anti-corrosion member which shows a high corrosion property with respect to the corrosion gas of halogen series and its plasma, particularly with respect to chlorine gas and its plasma.

    摘要翻译： 在其中包含固体氟化合物的容器中设置由包含铝的金属制成的基材，包含铝元素的陶瓷或包含铝和陶瓷的金属构成的组合物构件 因为填充了NaHF2。 然后，在高于固体氟化合物的分解温度的温度下加热容器。 之后，用固体氟化合物的分解气体对基材进行热处理，在基材的表面形成氟化物层。 以这种方式，可以获得相对于卤素系列及其等离子体的腐蚀气体具有高腐蚀性的防腐蚀部件，特别是对于氯气及其等离子体。

    SUBSTRATE SUPPORTING MEMBER
    9.
    发明申请
    SUBSTRATE SUPPORTING MEMBER 有权
    基座支撑构件

    公开(公告)号：US20080138645A1

    公开(公告)日：2008-06-12

    申请号：US11867044

    申请日：2007-10-04

    申请人： Tetsuya KAWAJIRI ,  Yasufumi Aihara ,  Tomoyuki Fujii

    发明人： Tetsuya KAWAJIRI ,  Yasufumi Aihara ,  Tomoyuki Fujii

    IPC分类号： B32B3/26

    CPC分类号： H02N13/00 ,  H01L21/6833 ,  H01L21/68757 ,  Y10T428/12479 ,  Y10T428/24959 ,  Y10T428/249957 ,  Y10T428/249967 ,  Y10T428/249982 ,  Y10T428/249985 ,  Y10T428/265 ,  Y10T428/31678

    摘要： A substrate supporting member includes: a plate-shaped ceramic body having a surface serving as a substrate supporting surface; a plate-shaped composite material body which is joined to a surface of the ceramic body opposite to the substrate supporting surface with a joint material interposed therebetween and made of porous ceramic with pores filled with metal, the composite material body having a porosity of more than 0% and not more than 5%; and a metallic plate which is joined to a surface of the composite material body opposite to the surface joined to the ceramic body with a joint material interposed therebetween.

    摘要翻译： 基板支撑构件包括：具有用作基板支撑表面的表面的板状陶瓷体; 一种板状复合材料体，其与陶瓷体的与基板支撑面相对的表面与介于其间的接合材料接合，并由具有填充金属的孔的多孔陶瓷制成，复合材料体的孔隙率大于 0％不超过5％; 以及金属板，其与所述复合材料体的与所述陶瓷体接合的表面相对的表面接合，其间插入有接合材料。