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    Preparation of silicon substrate
    1.
    发明授权
    Preparation of silicon substrate 失效
    硅衬底的制备

    公开(公告)号：US06402973B1

    公开(公告)日：2002-06-11

    申请号：US09627073

    申请日：2000-07-27

    申请人： Yasushi Maeda ,  Masaharu Horiguchi ,  Shinji Makikawa ,  Seiki Ejima

    发明人： Yasushi Maeda ,  Masaharu Horiguchi ,  Shinji Makikawa ,  Seiki Ejima

    IPC分类号： H01L21306

    CPC分类号： G02B6/13 ,  G02B2006/12061 ,  G02B2006/12169 ,  G02B2006/12176

    摘要： A silicon substrate is prepared by furnishing a silicon substrate (10) having a step (11) of at least 5 &mgr;m high on one surface, forming by high pressure heat oxidation an oxide film (12) which is thinner than the step, and removing the oxide film on the higher surface region until the silicon surface is exposed in the higher surface region while leaving the oxide film on the lower surface region. Because of excellent electrical properties, minimized warpage, a substantially constant oxygen concentration, and a definitely ascertainable oxide-silicon boundary, the silicon substrate is suitable for use in optical waveguide devices.

    摘要翻译： 通过在一个表面上提供具有至少5μm高的台阶（11）的硅衬底（10）来制备硅衬底，通过高压热氧化形成比该步骤更薄的氧化膜（12），并除去 在较高的表面区域上的氧化膜直到硅表面暴露在较高的表面区域中，同时将氧化物膜留在下表面区域上。 由于优异的电性能，翘曲最小化，氧浓度基本恒定，以及绝对可确定的氧化物 - 硅界面，所以硅衬底适用于光波导器件。

    Method for preparing optical waveguide substrate
    2.
    发明授权
    Method for preparing optical waveguide substrate 失效
    光波导基板的制备方法

    公开(公告)号：US06615614B1

    公开(公告)日：2003-09-09

    申请号：US09610952

    申请日：2000-07-06

    申请人： Shinji Makikawa ,  Shigeru Konishi ,  Seiki Ejima

    发明人： Shinji Makikawa ,  Shigeru Konishi ,  Seiki Ejima

    IPC分类号： C03B1914

    CPC分类号： G02B6/136 ,  G02B6/122 ,  G02B6/132 ,  G02B2006/12038 ,  G02B2006/12061

    摘要： An optical waveguide substrate is prepared by forming grooves in a silicon substrate in accordance with the pattern of a desired waveguide device, thermally oxidizing the silicon substrate to form a peripheral quartz layer surrounding the grooves, burying in the grooves a doped quartz glass layer having a higher refractive index, abrading the surface of the resulting structure to be flat, and forming on the flat surface a glass layer having a lower refractive index. An optical waveguide substrate featuring no distortion of the core pattern, little warp, and a low loss can be produced in a simple manner.

    摘要翻译： 通过根据期望的波导器件的图案在硅衬底中形成沟槽，热氧化硅衬底以形成围绕沟槽的外围石英层来制备光波导衬底，在沟槽中埋设掺杂的石英玻璃层，其具有 更高的折射率，将所得结构的表面研磨成平坦的，并且在平坦表面上形成具有较低折射率的玻璃层。 可以以简单的方式产生不具有芯图案变形，少量翘曲和低损耗的光波导基板。

    Method for producing base material for optical fiber having deformed first clad, base material for optical fiber and optical fiber
    3.
    发明授权
    Method for producing base material for optical fiber having deformed first clad, base material for optical fiber and optical fiber 失效
    具有变形的第一包层，光纤用基材和光纤的光纤用基材的制造方法

    公开(公告)号：US06681074B1

    公开(公告)日：2004-01-20

    申请号：US09670019

    申请日：2000-09-26

    申请人： Jun Abe ,  Nobuyasu Mantoku ,  Shinji Makikawa ,  Seiki Ejima

    发明人： Jun Abe ,  Nobuyasu Mantoku ,  Shinji Makikawa ,  Seiki Ejima

    IPC分类号： G02B628

    CPC分类号： C03B37/01231 ,  C03B37/01225 ,  C03B37/01228 ,  C03B2203/12 ,  C03B2203/22 ,  G02B6/0283 ,  G02B6/03633 ,  Y02P40/57

    摘要： There is disclosed a method for producing a base material for optical fiber having a deformed first clad consisting of at least a core, a first clad and a second clad, comprising a step of deforming a shape of a section of the first clad so that it may have at least one linear part when the first clad is formed around the core, a step of depositing porous glass fine particles as the second clad made of the same material as that of the first clad on a glass rod having the deformed first clad to form a porous glass base material, and a step of forming the second clad having a round section by vitrifying it. There can be provided a method for producing a base material for optical fiber wherein a lot of breakages or cracks on the surface of the base material can be prevented in a step of depositing porous glass fine particles for the second clad on the first clad, and base material for optical fiber having no defects, and an optical fiber having an efficient effect of being excited with excitation light.

    摘要翻译： 公开了一种用于制造光纤基材的方法，该基材具有由至少芯部，第一包层和第二包层构成的变形的第一包层，包括使第一包层的部分的形状变形的步骤， 当在芯周围形成第一包层时，可以具有至少一个直线部分;在具有变形的第一包层的玻璃棒上沉积多孔玻璃微粒作为由与第一包层相同的材料制成的第二包层的步骤 形成多孔玻璃基材，以及通过玻璃化形成具有圆形部分的第二包层的步骤。 可以提供一种用于制造光纤基材的方法，其中在在第一包层上沉积用于第二包层的多孔玻璃微粒的步骤中可以防止在基材表面上发生大量断裂或裂纹，以及 没有缺陷的光纤的基材，以及具有被激发光激发的有效效果的光纤。

    Method for making an optical waveguide substrate
    4.
    发明授权
    Method for making an optical waveguide substrate 失效
    制造光波导基板的方法

    公开(公告)号：US06436728B2

    公开(公告)日：2002-08-20

    申请号：US09836272

    申请日：2001-04-18

    申请人： Shinji Makikawa ,  Hiroshi Aoi ,  Masaaki Shirota ,  Seiki Ejima

    发明人： Shinji Makikawa ,  Hiroshi Aoi ,  Masaaki Shirota ,  Seiki Ejima

    IPC分类号： H01L2100

    CPC分类号： C30B29/06 ,  C30B33/005

    摘要： A method of making a high quality optical waveguide substrate is provided, in which the surface of a silicon substrate is oxidized through relatively large thickness and no foreign matter particles are adhered on the surface thereof. The silicon substrate to form a quartz film for the optical waveguide is mounted on a carbon contained ceramics sample base and is inserted into a carbon contained ceramics furnace core tube of which its external circumference is arranged in a heating furnace. When the inside of the furnace core tube is heated to 200 to 600° C. by the heating furnace, an oxidant gas for the silicon substrate surface is introduced, then by further heating up to 1200 to 1350° C., the silicon surface is thus oxidized.

    摘要翻译： 提供一种制造高质量光波导基板的方法，其中硅基板的表面被相对较大的厚度氧化，并且在其表面上没有附着异物颗粒。 将用于形成光波导的石英膜的硅基板安装在含碳的陶瓷样品基底上，并插入其外周设置在加热炉中的含碳陶瓷炉芯芯管中。 当通过加热炉将炉芯管的内部加热至200至600℃时，引入用于硅衬底表面的氧化剂气体，然后进一步加热至1200至1350℃，硅表面为 从而氧化。

    Method for producing base material for optical fiber having deformed first clad, base material for optical fiber and optical fiber
    5.
    发明申请
    Method for producing base material for optical fiber having deformed first clad, base material for optical fiber and optical fiber 审中-公开
    具有变形的第一包层，光纤用基材和光纤的光纤用基材的制造方法

    公开(公告)号：US20050100306A1

    公开(公告)日：2005-05-12

    申请号：US10627875

    申请日：2003-07-28

    申请人： Jun Abe ,  Nobuyasu Mantoku ,  Shinji Makikawa ,  Seiki Ejima

    发明人： Jun Abe ,  Nobuyasu Mantoku ,  Shinji Makikawa ,  Seiki Ejima

    IPC分类号： G02B6/02 ,  C03B37/012 ,  C03B37/018 ,  G02B6/00 ,  G02B6/10

    CPC分类号： C03B37/01231 ,  C03B37/01225 ,  C03B37/01228 ,  C03B2203/12 ,  C03B2203/22 ,  G02B6/0283 ,  G02B6/03633 ,  Y02P40/57

    摘要： There is disclosed a method for producing a base material for optical fiber having a deformed first clad consisting of at least a core, a first clad and a second clad, comprising a step of deforming a shape of a section of the first clad so that it may have at least one linear part when the first clad is formed around the core, a step of depositing porous glass fine particles as the second clad made of the same material as that of the first clad on a glass rod having the deformed first clad to form a porous glass base material, and a step of forming the second clad having a round section by vitrifying it. There can be provided a method for producing a base material for optical fiber wherein a lot of breakages or cracks on the surface of the base material can be prevented in a step of depositing porous glass fine particles for the second clad on the first clad, and base material for optical fiber having no defects, and an optical fiber having an efficient effect of being excited with excitation light.

    摘要翻译： 公开了一种用于制造光纤基材的方法，该基材具有由至少芯部，第一包层和第二包层构成的变形的第一包层，包括使第一包层的部分的形状变形的步骤， 当在芯周围形成第一包层时，可以具有至少一个直线部分;在具有变形的第一包层的玻璃棒上沉积多孔玻璃微粒作为由与第一包层相同的材料制成的第二包层的步骤 形成多孔玻璃基材，以及通过玻璃化形成具有圆形部分的第二包层的步骤。 可以提供一种用于制造光纤基材的方法，其中在在第一包层上沉积用于第二包层的多孔玻璃微粒的步骤中可以防止在基材表面上发生大量断裂或裂纹，以及 没有缺陷的光纤的基材，以及具有被激发光激发的有效效果的光纤。

    Apparatus and method for making multi-branching optical coupler
    8.
    发明授权
    Apparatus and method for making multi-branching optical coupler 失效
    制造多分支光耦合器的装置和方法

    公开(公告)号：US06301412B1

    公开(公告)日：2001-10-09

    申请号：US09106019

    申请日：1998-06-29

    申请人： Tsuneo Mori ,  Masaaki Shirota ,  Seiki Ejima ,  Jun Abe ,  Sayuri Maeda ,  Kazuo Koya

    发明人： Tsuneo Mori ,  Masaaki Shirota ,  Seiki Ejima ,  Jun Abe ,  Sayuri Maeda ,  Kazuo Koya

    IPC分类号： G02B626

    CPC分类号： G02B6/2856

    摘要： A mask having a center hole for passing through a center fiber, which is one of multiple fibers, and multiple surrounding holes for passing through surrounding fibers, which are the remainder of the multiple fibers, and a stress adjusting unit for holding stresses generated in the center fiber and surrounding fibers to a desired constant value, respectively, are installed. The surrounding fibers are rotated around the center fiber by rotating the mask. The center fiber and the surrounding fibers that have been twisted around the center fiber are heated with a heating apparatus and drawn. The center fiber and the surrounding fibers are fixed using a clamp installed between the stress adjusting unit and the heating apparatus.

    摘要翻译： 具有用于穿过作为多根纤维之一的中心纤维的中心孔的掩模和用于穿过作为多纤维的其余部分的周围纤维的多个环绕孔以及用于保持在所述多个纤维中产生的应力的应力调节单元 中心纤维和周围纤维分别安装到所需的恒定值。 通过旋转掩模使周围的纤维围绕中心纤维旋转。 围绕中心纤维扭转的中心纤维和周围的纤维用加热装置加热并拉伸。 中心纤维和周围的纤维使用安装在应力调节单元和加热装置之间的夹具来固定。