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    Micro-fluid ejection devices, methods for making micro-fluid ejection heads, and micro-fluid ejection head having high resistance thin film heaters
    2.
    发明授权
    Micro-fluid ejection devices, methods for making micro-fluid ejection heads, and micro-fluid ejection head having high resistance thin film heaters 失效
    微流体喷射装置，用于制造微流体喷射头的方法和具有高电阻薄膜加热器的微流体喷射头

    公开(公告)号：US07673972B2

    公开(公告)日：2010-03-09

    申请号：US11683572

    申请日：2007-03-08

    申请人： Yimin Guan ,  Stuart Jacobsen ,  Carl Edmond Sullivan

    发明人： Yimin Guan ,  Stuart Jacobsen ,  Carl Edmond Sullivan

    IPC分类号： B41J2/05

    CPC分类号： B41J2/14129 ,  B41J2202/03 ,  B41J2202/11 ,  Y10T29/49401

    摘要： Micro-fluid ejection devices, methods for making micro-fluid ejection heads, and micro-fluid ejection heads, including a micro-fluid ejection head. One such micro-fluid ejection head has relatively high resistance thin film heaters adjacent to a substrate. The thin film material comprises silicon, metal, and carbon (SiMC wherein M is a metal). Each thin film heater has a sheet resistance ranging from about 100 to about 600 ohms per square and a thickness ranging from about 100 to about 800 Angstroms.

    摘要翻译： 微流体喷射装置，用于制造微流体喷射头的方法和微流体喷射头，包括微流体喷射头。 一个这种微流体喷射头具有与基底相邻的相对较高的电阻薄膜加热器。 薄膜材料包括硅，金属和碳（SiMC，其中M是金属）。 每个薄膜加热器的薄层电阻范围为约100至约600欧姆/平方，厚度范围为约100至约800埃。

    Micro-Fluid Ejection Devices, Methods For Making Micro-Fluid Ejection Heads, and Micro-Fluid Ejection Head Having High Resistance Thin Film Heaters
    3.
    发明申请
    Micro-Fluid Ejection Devices, Methods For Making Micro-Fluid Ejection Heads, and Micro-Fluid Ejection Head Having High Resistance Thin Film Heaters 失效
    微流体喷射装置，制造微流体喷射头的方法和具有高电阻薄膜加热器的微流体喷射头

    公开(公告)号：US20080165227A1

    公开(公告)日：2008-07-10

    申请号：US11683572

    申请日：2007-03-08

    申请人： Yimin Guan ,  Stuart Jacobsen ,  Carl Edmond Sullivan

    发明人： Yimin Guan ,  Stuart Jacobsen ,  Carl Edmond Sullivan

    IPC分类号： B41J2/05

    CPC分类号： B41J2/14129 ,  B41J2202/03 ,  B41J2202/11 ,  Y10T29/49401

    摘要： Micro-fluid ejection devices, methods for making micro-fluid ejection heads, and micro-fluid ejection heads, including a micro-fluid ejection head. One such micro-fluid ejection head has relatively high resistance thin film heaters adjacent to a substrate. The thin film material comprises silicon, metal, and carbon (SiMC wherein M is a metal). Each thin film heater has a sheet resistance ranging from about 100 to about 600 ohms per square and a thickness ranging from about 100 to about 800 Angstroms.

    摘要翻译： 微流体喷射装置，用于制造微流体喷射头的方法和微流体喷射头，包括微流体喷射头。 一个这种微流体喷射头具有与基底相邻的相对较高的电阻薄膜加热器。 薄膜材料包括硅，金属和碳（SiMC，其中M是金属）。 每个薄膜加热器的薄层电阻范围为约100至约600欧姆/平方，厚度范围为约100至约800埃。

    Micro-Fluid Ejection Devices, Methods for Making Micro-Fluid Ejection Heads, And Micro-Fluid Ejection Head Having High Resistance Thin Film Heaters
    4.
    发明申请
    Micro-Fluid Ejection Devices, Methods for Making Micro-Fluid Ejection Heads, And Micro-Fluid Ejection Head Having High Resistance Thin Film Heaters 有权
    微流体喷射装置，制造微流体喷射头的方法和具有高电阻薄膜加热器的微流体喷射头

    公开(公告)号：US20110094102A1

    公开(公告)日：2011-04-28

    申请号：US12690955

    申请日：2010-02-16

    申请人： Yimin Guan ,  Stuart Jacobsen ,  Carl Sullivan

    发明人： Yimin Guan ,  Stuart Jacobsen ,  Carl Sullivan

    IPC分类号： B23P17/00

    CPC分类号： B41J2/14129 ,  B41J2202/03 ,  B41J2202/11 ,  Y10T29/49401

    摘要： Micro-fluid ejection devices, methods for making micro-fluid ejection heads, and micro-fluid ejection heads, including a micro-fluid ejection head. One such micro-fluid ejection head has relatively high resistance thin film heaters adjacent to a substrate. The thin film material comprises silicon, metal, and carbon (SiMC wherein M is a metal). Each thin film heater has a sheet resistance ranging from about 100 to about 600 ohms per square and a thickness ranging from about 100 to about 800 Angstroms.

    摘要翻译： 微流体喷射装置，用于制造微流体喷射头的方法和微流体喷射头，包括微流体喷射头。 一个这种微流体喷射头具有与基底相邻的相对较高的电阻薄膜加热器。 薄膜材料包括硅，金属和碳（SiMC，其中M是金属）。 每个薄膜加热器的薄层电阻范围为约100至约600欧姆/平方，厚度范围为约100至约800埃。

    METHOD FOR REMOVING DIAMOND LIKE CARBON RESIDUE FROM A DEPOSITION/ETCH CHAMBER USING A PLASMA CLEAN
    6.
    发明申请
    METHOD FOR REMOVING DIAMOND LIKE CARBON RESIDUE FROM A DEPOSITION/ETCH CHAMBER USING A PLASMA CLEAN 审中-公开
    使用等离子体清洁从沉积/蚀刻室中除去钻石类碳残留物的方法

    公开(公告)号：US20080214007A1

    公开(公告)日：2008-09-04

    申请号：US11681582

    申请日：2007-03-02

    申请人： Maria Wang ,  Erika Leigh Shoemaker ,  Mary Roby ,  Stuart Jacobsen

    发明人： Maria Wang ,  Erika Leigh Shoemaker ,  Mary Roby ,  Stuart Jacobsen

    IPC分类号： H01L21/311

    CPC分类号： C23C16/26 ,  C23C16/4405

    摘要： Provided is a method for removing diamond like carbon residue from a deposition chamber. This method, in one embodiment, may include subjecting a deposition chamber including diamond like carbon residue to a plasma clean in the presence of fluorine containing gas and oxygen containing gas. The method may further include purging the deposition chamber having been subjected to the plasma clean with an inert gas, and pumping the deposition chamber having been subjected to the plasma clean.

    摘要翻译： 提供了从沉积室除去类金刚石碳残渣的方法。 在一个实施方案中，该方法可以包括在含氟气体和含氧气体存在的情况下对包括类金刚石碳残余物的沉积室进行等离子体清洁。 该方法可以进一步包括用惰性气体清洗已经进行等离子体清洁的沉积室，并泵送已经经过等离子体清洁的沉积室。

    Inkjet Printhead Incorporating a Memory Array
    7.
    发明申请
    Inkjet Printhead Incorporating a Memory Array 审中-公开

    公开(公告)号：US20060274125A1

    公开(公告)日：2006-12-07

    申请号：US11460280

    申请日：2006-07-27

    申请人： Stuart Jacobsen ,  Mary Roby ,  Erika Shoemaker ,  Maria Wang

    发明人： Stuart Jacobsen ,  Mary Roby ,  Erika Shoemaker ,  Maria Wang

    IPC分类号： B41J2/05

    CPC分类号： B41J2/17546 ,  B41J2/14 ,  B41J2202/17

    摘要： A thermal inkjet printhead 100 of the present invention includes a heating element 110, an ink chamber, control circuitry 108, an ink reservoir, and a memory array 106. The control circuitry 108 causes the heating element to generate thermal energy thereby causing ink within the ink chamber to generate bubbles of ink, which are then expelled through a nozzle. The ink reservoir replenishes used ink in the ink chamber. The memory array 106 stores and provides the identification parameters for the thermal inkjet printhead 100. The identification parameters are typically provided during initialization of the printer and include color(s) of ink (e.g., black, green, red, blue), a number of nozzles on the thermal inkjet printhead, an addressing frequency, nozzle spacing, heating architecture, and the like. The identification parameters can include other information such as a unique serial identification number for the thermal inkjet printhead, manufacturer serial number, lot number, date of manufacture, compatible printers, ink capacity, ink remaining, re-ordering information for replacement ink cartridges, and the like.

    Inkjet printhead incorporating a memory array
    9.
    发明申请
    Inkjet printhead incorporating a memory array 有权
    包含存储器阵列的喷墨打印头

    公开(公告)号：US20060007258A1

    公开(公告)日：2006-01-12

    申请号：US10888407

    申请日：2004-07-09

    申请人： Stuart Jacobsen ,  Mary Roby ,  Erika Shoemaker ,  Maria Wang

    发明人： Stuart Jacobsen ,  Mary Roby ,  Erika Shoemaker ,  Maria Wang

    IPC分类号： B41J29/393

    CPC分类号： B41J2/17546 ,  B41J2/14 ,  B41J2202/17

    摘要： A thermal inkjet printhead 100 of the present invention includes a heating element 110, an ink chamber, control circuitry 108, an ink reservoir, and a memory array 106. The control circuitry 108 causes the heating element to generate thermal energy thereby causing ink within the ink chamber to generate bubbles of ink, which are then expelled through a nozzle. The ink reservoir replenishes used ink in the ink chamber. The memory array 106 stores and provides the identification parameters for the thermal inkjet printhead 100. The identification parameters are typically provided during initialization of the printer and include color(s) of ink (e.g., black, green, red, blue), a number of nozzles on the thermal inkjet printhead, an addressing frequency, nozzle spacing, heating architecture, and the like. The identification parameters can include other information such as a unique serial identification number for the thermal inkjet printhead, manufacturer serial number, lot number, date of manufacture, compatible printers, ink capacity, ink remaining, re-ordering information for replacement ink cartridges, and the like.

    摘要翻译： 本发明的热喷墨打印头100包括加热元件110，墨水室，控制电路108，墨水储存器和存储器阵列106。 控制电路108使加热元件产生热能，从而使墨室内的墨水产生墨水泡沫，然后通过喷嘴排出墨水。 墨水容器补充墨水室中的用过的墨水。 存储器阵列106存储并提供用于热喷墨打印头100的识别参数。 通常在打印机的初始化期间提供识别参数，并且包括墨水的颜色（例如，黑色，绿色，红色，蓝色），热喷墨打印头上的多个喷嘴，寻址频率，喷嘴间隔，加热结构 ，等等。 识别参数可以包括其他信息，例如热喷墨打印头的唯一串行识别号码，制造商序列号，批号，制造日期，兼容打印机，墨水容量，剩余墨水，更换墨盒的重新排序信息，以及 类似。