Method of Forming Pattern Film, and Pattern Film Forming Apparatus
    1.
    发明申请
    Method of Forming Pattern Film, and Pattern Film Forming Apparatus 审中-公开
    形成图案膜的方法和图案成膜装置

    公开(公告)号:US20100178432A1

    公开(公告)日:2010-07-15

    申请号:US12223194

    申请日:2007-01-18

    IPC分类号: B05D5/12 B05C5/00

    摘要: An objective is to provide a method of forming a pattern film in which a dense conductive pattern with no defect can be formed even in a low temperature treatment, the formed pattern film having the same thickness as in the conventional method exhibits excellent properties of conductivity, film strength, transmittance and so forth together with improved stability at high temperature and humidity, and a pattern film with no lack can be stably formed with an easy-to-use apparatus, and to provide a pattern film forming apparatus thereof. Disclosed is a method of forming a pattern film possessing the steps of forming a thin film in a form of a predetermined geometric pattern on a substrate employing a solution comprising a metal ion, and subsequently treating the thin film via an atmospheric pressure plasma treatment to prepare a pattern film.

    摘要翻译: 本发明的目的是提供即使在低温处理中也能够形成无缺陷的致密导电图案的图案膜的形成方法,与现有方法相同厚度的成形图案膜表现出优异的导电性, 薄膜强度,透射率等,同时改善高温和高湿度下的稳定性,并且可以通过易于使用的设备稳定地形成不缺少的图案膜,并提供其图案成膜装置。 公开了一种形成图案膜的方法,该图案膜具有以下步骤:使用包含金属离子的溶液在基板上形成预定几何图案形式的薄膜,随后经由大气压等离子体处理来处理薄膜以制备 一个图案电影。

    Method for coating a substrate using inclined edge guides
    2.
    发明授权
    Method for coating a substrate using inclined edge guides 失效
    使用倾斜边缘引导件涂覆基板的方法

    公开(公告)号:US5895687A

    公开(公告)日:1999-04-20

    申请号:US823882

    申请日:1997-03-17

    IPC分类号: B05C5/00 G03C1/74 B05D1/30

    CPC分类号: B05C5/008 G03C1/74 Y10S118/04

    摘要: A method for producing a light-sensitive material. The method includes the steps of: discharging coating solution, including the light-sensitive material, from a coater die; forming a curtain layer of coating solution by causing the coating solution to fall from a die lip of the coater die in which the curtain layer is formed with an edge guide in which an end of the edge guide is arranged in the vicinity of the die lip and the other end of the edge guide is inclined toward the coater die in relation to the vertical line from the die lip; and coating a support with the coating solution by conveying the support at the downstream end of the curtain layer.

    摘要翻译: 一种感光材料的制造方法。 该方法包括以下步骤:从涂布机模具中排出包括感光材料的涂布溶液; 通过使涂布液从其上形成帘幕层的涂布机模具的模唇落下而形成涂层溶液帘幕层,边缘引导件将边缘引导件的端部布置在模唇附近 并且边缘引导件的另一端相对于来自模唇的垂直线朝着涂布机模具倾斜; 并通过在帘层的下游端输送支撑体,用涂布溶液涂覆支撑体。

    Layer formation method, and substrate with a layer formed by the method
    3.
    发明授权
    Layer formation method, and substrate with a layer formed by the method 有权
    层形成方法,以及通过该方法形成的层的衬底

    公开(公告)号:US07166335B2

    公开(公告)日:2007-01-23

    申请号:US10841115

    申请日:2004-05-07

    IPC分类号: C23C16/50

    摘要: A layer formation method is disclosed which comprises supplying gas to a discharge space, exciting the supplied gas at atmospheric pressure or at approximately atmospheric pressure by applying a high frequency electric field across the discharge space, and exposing a substrate to the excited gas, wherein the high frequency electric field is an electric field in which a first high frequency electric field and a second high frequency electric field are superposed, frequency ω2 of the second high frequency electric field is higher than frequency ω1 of the first high frequency electric field, strength V1 of the first high frequency electric field, strength V2 of the second high frequency electric field and strength IV of discharge starting electric field satisfy relationship V1≧IV>V2 or V1>IV≧V2, and power density of the second high frequency electric field is not less than 1 W/cm2.

    摘要翻译: 公开了一种层形成方法,其包括向放电空间供应气体,通过在放电空间上施加高频电场,将基底暴露于激发气体,在大气压或大气压下激发供应的气体,其中, 高频电场是第一高频电场和第二高频电场叠加的电场,第二高频电场的频率ω2 <2>高于频率ω 1,第二高频电场的强度V SUB> 1,第二高频电场的强度V SUB> 2 < 放电起始电场的强度IV满足关系V 1 = IV> V 2或V 1 IV> = V 2 第二高频电场的功率密度不小于1W / cm 2。

    Curtain coating with dynamic surface tension control of layers
    4.
    发明授权
    Curtain coating with dynamic surface tension control of layers 失效
    窗帘涂层具有动态表面张力控制层

    公开(公告)号:US5871821A

    公开(公告)日:1999-02-16

    申请号:US823884

    申请日:1997-03-17

    IPC分类号: B05C5/00 B05D1/30 G03C1/74

    CPC分类号: G03C1/74 B05C5/008 Y10S118/04

    摘要: A method for producing light-sensitive material by using a curtain layer of coating solution. The method includes the steps of: discharging coating solution, including the light-sensitive material, from a coater die; forming a curtain layer of coating solution by causing the coating solution to fall from a die lip of the coater die in which the coating solution has at least 3 layers and a relational structure of dynamic surface tensions of the layers, satisfying the equation: .DELTA.K=.sigma.intermediate.sub.min -.sigma.outer.sub.max .gtoreq.0�mN/m! in which, .sigma.intermediated.sub.min �mN/m! represents the minimum value of dynamic surface tension of an intermediate layer among the layers, .sigma.outers.sub.max �mN/m! represents the maximum value of dynamic surface tension of an outer layer among the layers; and coating a continuous support with the coating solution.

    摘要翻译: 通过使用涂布液帘幕来生产感光材料的方法。 该方法包括以下步骤:从涂布机模具中排出包括感光材料的涂布溶液; 通过使涂布液从涂层溶液的至少3层的涂布机模具的模唇和层的动态表面张力的关系结构下降而形成涂层溶液的帘层,满足以下等式:DELTA K 西格玛中间分辨率= m [mN / m],其中,σ中间值min [mN / m]表示层间中间层的动态表面张力的最小值,σoutersmax [mN / m]表示 层间外层动态表面张力的最大值; 并用涂布溶液涂覆连续的载体。

    Plasma treatment method at atmospheric pressure
    6.
    发明授权
    Plasma treatment method at atmospheric pressure 失效
    大气压等离子体处理方法

    公开(公告)号:US06849306B2

    公开(公告)日:2005-02-01

    申请号:US10222318

    申请日:2002-08-16

    IPC分类号: H01J37/32 H05H1/24

    CPC分类号: H01J37/32009 H01J37/32825

    摘要: A plasma treatment method for surface treatment of a substrate with an atmospheric pressure plasma treatment apparatus is disclosed. The apparatus has a first electrode and a second electrode opposed to each other, a discharge space between the opposed electrodes, a voltage application means for applying voltage across the discharge space, a gas supply means for supplying a reactive gas and an inert gas to the discharge space. The method is one wherein the reactive gas at the discharge space is excited at atmospheric pressure or at approximately atmospheric pressure by applying voltage through the voltage application means to generate discharge plasma, and a substrate is exposed to the discharge plasma to be subjected to surface treatment, and wherein the reactive gas is not directly in contact with the discharge surface of the first electrode or the second electrode.

    摘要翻译: 公开了一种用大气压等离子体处理装置对衬底进行表面处理的等离子体处理方法。 该装置具有彼此相对的第一电极和第二电极,相对电极之间的放电空间,用于在放电空间上施加电压的电压施加装置,用于向该放电空间供应反应性气体和惰性气体的气体供给装置 放电空间。 该方法是其中放电空间处的反应气体在大气压或大气压下通过施加电压通过电压施加装置激发以产生放电等离子体,并且将衬底暴露于放电等离子体进行表面处理 ,并且其中所述反应性气体不直接与所述第一电极或所述第二电极的放电表面接触。

    Layer formation method, and substrate with a layer formed by the method
    7.
    发明授权
    Layer formation method, and substrate with a layer formed by the method 有权
    层形成方法,以及通过该方法形成的层的衬底

    公开(公告)号:US06759100B2

    公开(公告)日:2004-07-06

    申请号:US10378695

    申请日:2003-03-04

    IPC分类号: C23C1650

    摘要: A layer formation method is disclosed which comprises supplying gas to a discharge space, exciting the supplied gas at atmospheric pressure or at approximately atmospheric pressure by applying a high frequency electric field across the discharge space, and exposing a substrate to the excited gas, wherein the high frequency electric field is an electric field in which a first high frequency electric field and a second high frequency electric field are superposed, frequency &ohgr;2 of the second high frequency electric field is higher than frequency &ohgr;1 of the first high frequency electric field, strength V1 of the first high frequency electric field, strength V2 of the second high frequency electric field and strength IV of discharge starting electric field satisfy relationship V1≧IV>V2 or V1>IV≧V2, and power density of the second high frequency electric field is not less than 1 W/cm2.

    摘要翻译: 公开了一种层形成方法,其包括向放电空间供应气体,通过在放电空间上施加高频电场,将基底暴露于激发气体,在大气压或大气压下激发供应的气体,其中, 高频电场是第一高频电场和第二高频电场叠加的电场,第二高频电场的频率ω2高于第一高频电场的频率ω1,强度V1 在第一高频电场中,第二高频电场的强度V2和放电起始电场的强度IV满足关系V1> = IV> V2或V1> IV> = V2,第二高频电场的功率密度 场不小于1W / cm 2。

    Light-sensitive material and coating apparatus thereof
    8.
    发明授权
    Light-sensitive material and coating apparatus thereof 失效
    感光材料及其涂布装置

    公开(公告)号:US06248406B1

    公开(公告)日:2001-06-19

    申请号:US08998489

    申请日:1997-12-26

    IPC分类号: B05D130

    CPC分类号: B05C5/008 Y10S118/04

    摘要: A coating apparatus for coating a conveyed support with an emulsion for a photographic light-sensitive material by letting the emulsion flow down between a pair of edge guides so as to form a curtain layer of the emulsion. The apparatus includes a slide surface, having a slit and inclined for a predetermined angle to the horizontal axis, for supplying the emulsion; side plates provided on both edges of the slide surface; the pair of edge guides each provided on respective one of the edges; and plural solution injecting outlets, each provided on respective one of the side plates, for supplying auxiliary solution; in which a coating operation of the conveyed support with the emulsion is conducted while the auxiliary solution is being flowed down along the edge guides at a flow rate between 0.3 cc/min. and 3.0 cc/min. from each of the solution injecting outlets.

    摘要翻译: 一种涂布装置,用于通过使乳液在一对边缘引导件之间向下流动以便形成乳液的帘层而用于通过用于照相感光材料的乳液涂布被输送的支撑体。 该装置包括一个滑动表面,具有狭缝并且倾斜与水平轴线成预定的角度,用于供应乳液; 设置在滑动表面的两个边缘上的侧板; 所述一对边缘引导件各自设置在所述边缘的相应一个上; 以及多个溶液注入口,每个设置在相应的一个侧板上,用于供应辅助溶液; 其中当辅助溶液沿着边缘引导件以0.3cc / min的流速向下流动时,进行所输送的支撑体与乳液的涂覆操作。 和3.0cc / min。 从每个解决方案注射出口。

    Method of using an evaporation source
    10.
    发明授权
    Method of using an evaporation source 失效
    蒸发源的使用方法

    公开(公告)号:US4551303A

    公开(公告)日:1985-11-05

    申请号:US528215

    申请日:1983-08-31

    IPC分类号: C23C14/54 C22C28/00

    CPC分类号: C23C14/548

    摘要: An evaporation source designed so that two or more materials to be evaporated are heated to evaporate by respective heaters, as well as method of using such an evaporation source are disclosed. The evaporation source further includes means for detecting the temperature of the slowly evaporating material and means for controlling the heaters on the basis of the detected temperature. The method of using this evaporation source comprises controlling the temperature of the slowly evaporating material in order to control the temperature of the evaporation source in such a manner that the respective materials are simultaneously heated to evaporate and deposit a film on a substrate.

    摘要翻译: 设计为使得两种或更多待蒸发的材料被加热以通过各自的加热器蒸发的蒸发源,以及使用这种蒸发源的方法。 蒸发源还包括用于检测缓慢蒸发的材料的温度的装置和用于基于检测到的温度来控制加热器的装置。 使用该蒸发源的方法包括控制缓慢蒸发的材料的温度,以便以这样的方式控制蒸发源的温度,使得各个材料被同时加热以蒸发并将膜沉积在基底上。