公开(公告)号：US5679496A

公开(公告)日：1997-10-21

申请号：US566703

申请日：1995-12-04

申请人： Youichi Ohsawa ,  Satoshi Watanabe ,  Katsuyuki Oikawa ,  Akinobu Tanaka ,  Yoshio Kawai ,  Jiro Nakamura

发明人： Youichi Ohsawa ,  Satoshi Watanabe ,  Katsuyuki Oikawa ,  Akinobu Tanaka ,  Yoshio Kawai ,  Jiro Nakamura

IPC分类号： C07C381/12 ,  G03F7/004 ,  H01L21/027 ,  G03F7/26

CPC分类号： G03F7/0045 ,  C07C381/12 ,  Y10S430/106 ,  Y10S430/111

摘要： A chemically amplified positive resist composition contains a novel trifluoromethanesulfonic or p-toluenesulfonic acid sulfonium salt having at least one tert-butoxycarbonylmethoxy group as an acid labile group. The composition is highly sensitive to high energy radiation, especially KrF excimer laser and has high sensitivity, resolution and plasma etching resistance while the resulting resist pattern is heat resistant.

摘要翻译： 化学放大正型抗蚀剂组合物含有具有至少一个叔丁氧基羰基甲氧基作为酸不稳定基团的新型三氟甲磺酸或对甲苯磺酸锍盐。 该组合物对高能辐射高度敏感，特别是KrF准分子激光器，并且具有高灵敏度，分辨率和等离子体耐蚀刻性，同时产生的抗蚀剂图案是耐热的。

公开(公告)号：US5629134A

公开(公告)日：1997-05-13

申请号：US539759

申请日：1995-10-06

申请人： Katsuyuki Oikawa ,  Toshinobu Ishihara ,  Fujio Yagihashi ,  Akinobu Tanaka ,  Yoshio Kawai ,  Jiro Nakamura

发明人： Katsuyuki Oikawa ,  Toshinobu Ishihara ,  Fujio Yagihashi ,  Akinobu Tanaka ,  Yoshio Kawai ,  Jiro Nakamura

IPC分类号： G03F7/004 ,  G03F7/039 ,  G03C1/492 ,  G03C1/494 ,  G03C1/76

CPC分类号： G03F7/0045 ,  Y10S430/106

摘要： In a chemically amplified positive resist composition comprising an organic solvent, an alkali soluble resin, an acid generator, and an optional dissolution inhibitor, a salt of a pyridine which may have an alkyl, alkoxy, amino or dialkylamino group with an alkylsulfonic acid, arylsulfonic acid or halogen atom is blended. Because of high sensitivity to deep UV and resolution and elimination of the PED problem causing T-top pattern configuration and the skirting phenomenon, the resist composition is improved in dimensional precision and lends itself to fine patterning.

摘要翻译： 在包含有机溶剂，碱溶性树脂，酸产生剂和任选的溶解抑制剂的化学放大型正性抗蚀剂组合物中，可以具有烷基磺酸的烷基，烷氧基，氨基或二烷基氨基的吡啶盐，芳基磺酸 酸或卤素原子混合。 由于对深UV和分辨率的高灵敏度以及消除引起T顶部图案构型和裙边现象的PED问题，抗蚀剂组合物的尺寸精度提高，并且适合精细图案化。

公开(公告)号：US5612170A

公开(公告)日：1997-03-18

申请号：US569659

申请日：1995-12-08

申请人： Katsuya Takemura ,  Junji Tsuchiya ,  Toshinobu Ishihara ,  Akinobu Tanaka ,  Yoshio Kawai ,  Jiro Nakamura

发明人： Katsuya Takemura ,  Junji Tsuchiya ,  Toshinobu Ishihara ,  Akinobu Tanaka ,  Yoshio Kawai ,  Jiro Nakamura

IPC分类号： G03F7/004 ,  G03F7/075 ,  G03C1/73

CPC分类号： G03F7/0045 ,  G03F7/0755 ,  G03F7/0757 ,  Y10S430/115 ,  Y10S430/122

摘要： A positive resist composition based on a silicone polymer contains a photo acid generator which will decompose to generate an acid upon exposure to radiation. The silicone polymer includes hydroxybenzyl units wherein some OH groups are replaced by t-butoxycarbonyl, t-butoxycarbonylmethyl, trimethylsilyl or tetrahydropyranyl groups. In a first form, the photo acid generator is a specific onium salt having at least one phenyl group with a t-alkoxy, t-butoxycarbonyloxy or t-butoxycarbonylmethoxy substituent. In a second form, the composition further contains a nitrogenous compound. In a third form, the composition further contains a dissolution inhibitor in the form of a specific silicone compound. The composition is sensitive to high energy radiation and has high sensitivity and resolution.

摘要翻译： 基于有机硅聚合物的正型抗蚀剂组合物含有光致酸产生剂，其将在暴露于辐射时分解产生酸。 有机硅聚合物包括其中一些OH基被叔丁氧基羰基，叔丁氧基羰基甲基，三甲基甲硅烷基或四氢吡喃基代替的羟基苄基单元。 在第一种形式中，光酸产生剂是具有至少一个具有叔烷氧基，叔丁氧基羰基氧基或叔丁氧基羰基甲氧基取代基的苯基的特定鎓盐。 在第二种形式中，组合物还含有含氮化合物。 在第三种形式中，组合物还含有特定硅氧烷化合物形式的溶解抑制剂。 该成分对高能辐射敏感，灵敏度高，分辨率高。

公开(公告)号：US5457003A

公开(公告)日：1995-10-10

申请号：US99398

申请日：1993-07-30

申请人： Akinobu Tanaka ,  Hiroshi Ban ,  Jiro Nakamura ,  Takao Kimura ,  Yoshio Kawai

发明人： Akinobu Tanaka ,  Hiroshi Ban ,  Jiro Nakamura ,  Takao Kimura ,  Yoshio Kawai

IPC分类号： G03F7/075

CPC分类号： G03F7/0757 ,  Y10S430/122 ,  Y10S430/123

摘要： A resist material comprises a polysiloxane obtained by hydrolysis and condensation with dehydration of one or more alkoxysilanes having an oxirane ring, or of a mixture of the alkoxysilane(s) having an oxirane ring and one or more alkoxysilanes having no oxirane ring, and an acid generator. The resist material may contain one or more of a spectral sensitizer, an organic polymer having a hydroxyl group or an epoxy compound. Resist patterns are formed by coating an organic polymer on a substrate and then the resist material on the film of the organic polymer to form a two layer resist having a bottom layer of the organic polymer and top layer of the resist material, prebaking, imagewise exposing high radiation, postbaking, and developing the resist with alkaline solutions to remove an unexposed portion of the top layer, and dry etching the bottom layer using the relic of the resist material as a mask. the temperature of the post baking is preferably lower than that of the prebaking.

摘要翻译： 抗蚀剂材料包括通过水解和缩合得到的聚硅氧烷，所述聚硅氧烷通过脱水一个或多个具有环氧乙烷环的烷氧基硅烷，或具有环氧乙烷环的烷氧基硅烷和一个或多个不具有环氧乙烷环的烷氧基硅烷的混合物和酸 发电机。 抗蚀剂材料可以含有一种或多种光谱增感剂，具有羟基的有机聚合物或环氧化合物。 通过在有机聚合物的膜上涂覆有机聚合物，然后在有机聚合物的膜上涂覆抗蚀剂材料形成具有有机聚合物的底层和抗蚀剂材料的顶层的双层抗蚀剂，预烘烤，成像曝光 高辐射，后烘烤，并用碱性溶液显影抗蚀剂以除去顶层的未曝光部分，并使用抗蚀剂材料的遗物作为掩模干蚀刻底层。 后烘烤的温度优选低于预烘烤的温度。

公开(公告)号：US20100074800A1

公开(公告)日：2010-03-25

申请号：US12444845

申请日：2007-10-17

申请人： Takashi Miwa ,  Yasuko Maruo ,  Jiro Nakamura ,  Tatsuya Kunioka ,  Seizo Sakata

发明人： Takashi Miwa ,  Yasuko Maruo ,  Jiro Nakamura ,  Tatsuya Kunioka ,  Seizo Sakata

IPC分类号： G01N31/00 ,  G01N31/22 ,  G01N21/77

CPC分类号： G01N31/224 ,  G01N21/783 ,  Y10T436/206664

摘要： A vessel (102) containing a detector solution (101) is prepared. The detector solution (101) is an aqueous solution prepared by dissolving a detector component containing a dye which changes its color when reacting with ozone gas, a humectant, and an ultraviolet absorber having a hydrophilic group. A prepared sheet-like carrier (103) is dipped in the detector solution (101) for, e.g., 30 sec, thereby forming an impregnated sheet (104) by impregnating the sheet-like carrier (103) with the detector solution (101). The impregnated sheet (104) is then dried by evaporating the solvent (medium) such as water contained in the impregnated sheet (104), thereby forming a sheet-like ozone detecting device (105).

摘要翻译： 制备容纳检测器溶液（101）的容器（102）。 检测器溶液（101）是通过将含有与臭氧气体，湿润剂和具有亲水基团的紫外线吸收剂反应而变色的染料的检测剂成分溶解而成的水溶液。 将准备的片状载体（103）浸渍在检测器溶液（101）中，例如30秒，由此通过用检测器溶液（101）浸渍片状载体（103）形成浸渍片材（104） 。 然后通过蒸发包含在浸渍片材（104）中的水的溶剂（介质）干燥浸渍的片材（104），从而形成片状臭氧检测装置（105）。

公开(公告)号：US5966923A

公开(公告)日：1999-10-19

申请号：US251078

申请日：1999-02-16

申请人： Jiro Nakamura

发明人： Jiro Nakamura

IPC分类号： B61B10/00 ,  B65G17/38 ,  B65G45/08 ,  F16G13/02 ,  B21L9/04

CPC分类号： B65G17/38 ,  F16G13/02 ,  B65G2201/06

摘要： A conventional chain capable of reserving lubricating oil is complex in shape and expensive since each chain plate is formed with countersunk recesses and through-openings. Since the recesses are formed in an overlap region, the chain tends to rattle, producing noise. In the present invention according to which lubricating oil is fed toward a connecting pin, the lubricating oil is transferred to the connecting pin to effect intended lubrication. Part of the lubricating oil thus fed adheres to the recessed surfaces of the recesses and is prevented from immediately flowing down by viscous friction resistance and surface tension in the recessed surfaces. Thus, the oil is held in its adhering state. The lubricating oil gradually flows down to be used for lubrication as the chain moves. Thereby, after the chain has passed by an oil feeder, the connecting pin of the chain stays in such a state that oil is fed continuously for a long time.

摘要翻译： 能够保留润滑油的常规链条的形状复杂并且昂贵，因为每个链板形成有埋头孔和通孔。 由于凹部形成在重叠区域中，链条倾向于发出咔嗒声，产生噪音。 在本发明中，向连接销供给润滑油的情况下，润滑油被转移到连接销以实现预期的润滑。 这样进料的润滑油的一部分粘附到凹槽的凹陷表面，并且防止其在凹陷表面中的粘性摩擦阻力和表面张力立即下降。 因此，油保持在其粘附状态。 随着链条的移动，润滑油逐渐向下流动，用于润滑。 因此，在链条通过供油器之后，链条的连接销保持长时间连续供给油的状态。

公开(公告)号：US4724944A

公开(公告)日：1988-02-16

申请号：US835153

申请日：1986-03-03

申请人： Akira Koshigai ,  Jiro Nakamura

发明人： Akira Koshigai ,  Jiro Nakamura

IPC分类号： B62D65/18 ,  B65G17/16

CPC分类号： B62D65/18

摘要： The system for suspendingly transporting bodies according to the invention comprises a carriage (4) movable along a predetermined path (P) as guided by guide rails (2) and a support (5) mounted to a lower portion of the carriage (4) through suspenders (32A, 32B). The support (5) comprises a support frame (28) tiltable relative to the carriage (4) and a hanger (30) attached to the support frame (28) and rotatable about a vertical axis (29), the hanger (30) being adapted to support a body (X) thereon. The support frame (28) has lock devices (31) for locking the hanger (30). At a specified location there are disposed a release device (51) for releasing each lock device (31) and a hanger handling device (60) which engages the hanger (30) from below to turn it through a specified angle.

摘要翻译： 根据本发明的用于悬挂输送体的系统包括：滑架（4），其可沿着由导轨（2）引导的预定路径（P）移动;以及支撑件（5），其安装到滑架（4）的下部， 吊带（32A，32B）。 所述支撑件（5）包括相对于所述滑架（4）可倾斜的支撑框架（28）和附接到所述支撑框架（28）并且可绕垂直轴线（29）旋转的悬挂器（30），所述衣架 适于在其上支撑身体（X）。 支撑框架（28）具有用于锁定衣架（30）的锁定装置（31）。 在指定位置处设置有用于释放每个锁定装置（31）的释放装置（51）和从下方接合衣架（30）的衣架处理装置（60），以将其转动到指定的角度。

公开(公告)号：US09630634B2

公开(公告)日：2017-04-25

申请号：US14815456

申请日：2015-07-31

申请人： Jiro Nakamura

发明人： Jiro Nakamura

IPC分类号： B61J1/00 ,  B61B13/12 ,  B65G49/04

CPC分类号： B61J1/00 ,  B61B13/125 ,  B65G49/0445

摘要： A traveling route structure of a conveying traveling body has a traveling route with an area intersecting a crossing aisle, and has a movable rail horizontally openable and closable between a connection working position that connects guide rails in front and rear of the crossing aisle and a retracting position lateral to the crossing aisle. The movable rail has front and a rear movable rails arranged in a line when the movable rails are in the connection working position. Each of the movable rails is pivotally supported so as to be horizontally rotatable about a vertical spindle at each outer end portion positioned outside of the crossing aisle. A locking means couples inner end portions of both movable rails together, with the inner end portions being adjacent to each other when the movable rails are in the connection working position.

公开(公告)号：US20100183480A1

公开(公告)日：2010-07-22

申请号：US12440214

申请日：2007-10-02

申请人： Yasuko Maruo ,  Takashi Miwa ,  Jiro Nakamura ,  Tatsuya Kunioka

发明人： Yasuko Maruo ,  Takashi Miwa ,  Jiro Nakamura ,  Tatsuya Kunioka

IPC分类号： G01J1/48

CPC分类号： G01N31/225 ,  G01N21/783 ,  Y10T436/206664

摘要： An aqueous solution is formed by dissolving a dye made of alizarin and a humectant made of glycerin, and alkalized by dissolving a base (alkaline substance), thereby preparing a detector solution (101) in which the content of the humectant is about 20 wt %. An impregnated carrier (104) impregnated with the detector solution (101) is formed by dipping for 30 sec a sheet-like carrier (103) made of cellulose filter paper in the detector solution (101) so that the carrier (103) is impregnated with the detector solution (101). The impregnated carrier (104) is pulled up from the detector solution (101), and dried in dry nitrogen by evaporating a solvent such as water contained in the impregnated carrier (104), thereby forming an ozone detecting device (105).

摘要翻译： 通过将由茜素制成的染料和由甘油制成的湿润剂溶解并通过溶解碱（碱性物质）碱化而形成水溶液，由此制备其中保湿剂的含量为约20重量％的检测剂溶液（101） 。 浸渍有检测器溶液（101）的浸渍载体（104）通过在检测器溶液（101）中浸渍30秒的由纤维素滤纸制成的片状载体（103）形成，使载体（103）浸渍 与检测器溶液（101）。 将浸渍的载体（104）从检测器溶液（101）中拉出，并通过蒸发包含在浸渍载体（104）中的水的溶剂在干燥氮气中干燥，从而形成臭氧检测装置（105）。

公开(公告)号：US07484616B2

公开(公告)日：2009-02-03

申请号：US11958470

申请日：2007-12-18

申请人： Jiro Nakamura

发明人： Jiro Nakamura

IPC分类号： B65G47/34

CPC分类号： B61B10/02 ,  B62D65/18 ,  B65G35/08 ,  B65G2201/0294

摘要： A transportation facility in which an object transported while being suspended from a hanger such as a trolley conveyor is transferred on to a carriage of a carriage-type transportation device for a certain section of a route. At the start point, there is an object receiving means at the under side of a traveling route of a traveling body. An object support device is lifted relative to the hanger of the traveling body and the object receiving means is caused to receive the object (W) from the hanger. At the end of the transportation, an object return means is provided for lowering the object support device relative to the hanger to transfer the object to the hanger. In the transportation route, the traveling body is switched to a state in which drive is released and a hanger engagement means is engaged with the hanger so that the traveling body can be pulled and moved by the carriage.

摘要翻译： 其中将物体从诸如滑车输送机的悬挂架悬挂的物体转移到用于某一段路线的托架型运输装置的托架上的运输设施。 在起点处，在行进体的行进路径的下侧有一个物体接收装置。 物体支撑装置相对于行进体的吊架提升，并且使物体接收装置从吊架接收物体（W）。 在运输结束时，提供物体返回装置用于相对于衣架降低物体支撑装置以将物体转移到衣架。 在运输路线中，行驶体切换到驱动被释放的状态，并且衣架接合装置与吊架接合，使得行驶体能够被滑架拉动和移动。