摘要:
A table for a wafer polishing apparatus having superior heat-resistant, anti-thermal-shock, and anti-abrasion characteristics and capable of increasing the diameter of a semiconductor wafer while improving the quality of the wafer. The table (2) includes a plurality of superimposed bases (11) each of which is formed of silicide ceramic or carbide ceramic. The bases (11) are joined together by an adhesive layer (14). A fluid passage (12) is formed in a joining interface between the bases (11).
摘要:
A table for a wafer polishing apparatus having superior heat-resistant, anti-thermal-shock, and anti-abrasion characteristics and capable of increasing the diameter of a semiconductor wafer while improving the quality of the wafer. The table includes a plurality of superimposed bases each of which is formed of silicide ceramic or carbide ceramic. The bases are joined together by an adhesive layer. A fluid passage is formed in a joining interface between the bases.
摘要:
A table for a wafer polishing apparatus having superior heat-resistant, anti-thermal-shock, and anti-abrasion characteristics and capable of increasing the diameter of a semiconductor wafer while improving the quality of the wafer. The table includes a plurality of superimposed bases each of which is formed of silicide ceramic or carbide ceramic. The bases are joined together by an adhesive layer. A fluid passage is formed in a joining interface between the bases.
摘要:
A wafer holding plate for a wafer grinding apparatus. The plate includes a substrate having a wafer adhering surface to which a semiconductor wafer is adhered by an adhesive. The wafer adhering surface includes a mirror-like surface portion and a groove pattern, which anchors the adhesive. When the plate is used for grinding wafers, the quality and accuracy of the finished wafers is greatly improved.
摘要:
A wafer holding plate for a wafer grinding apparatus. The plate includes a substrate having a wafer adhering surface to which a semiconductor wafer is adhered by an adhesive. The wafer adhering surface includes a mirror-like surface portion and a groove pattern, which anchors the adhesive. When the plate is used for grinding wafers, the quality and accuracy of the finished wafers is greatly improved.
摘要:
A method for manufacturing a wafer holding plate for a wafer grinding apparatus wherein the plate includes a substrate having a wafer adhering surface to which a semiconductor wafer is adhered by an adhesive. The wafer adhering surface includes a mirror-like surface portion and a groove pattern, which anchors the adhesive. When the plate is used for grinding wafers, the quality and accuracy of the finished wafers is greatly improved.
摘要:
A method for manufacturing a wafer holding plate for a wafer grinding apparatus wherein the plate includes a substrate having a wafer adhering surface to which a semiconductor wafer is adhered by an adhesive. The wafer adhering surface includes a mirror-like surface portion and a groove pattern, which anchors the adhesive. When the plate is used for grinding wafers, the quality and accuracy of the finished wafers is greatly improved.
摘要:
This invention provides a novel speech coding system which recursively executes a filter-applied "Toeplitz characteristic" by causing a drive signal (i.e., an excitation signal) to be converted into a "Toeplitz matrix" when detecting a pitch period in which distortion of the input vector and the vector subsequent to the application of filter-applied computation to the drive signal vector in the pitch forecast called either "closed loop" or "compatible code book" is minimized. The vector quantization method substantially making up the speech coding system of the invention is characteristically used by the system.
摘要:
A wobble determination device 1 appropriately determines the wobble of a vehicle and does not cause inconvenience for a driver.The wobble determination device 1 includes a steering determination unit 41 that determines whether the driver of a vehicle performs sudden steering after a non-steering state of the driver is maintained for a predetermined period of time and performs sudden return steering over a steering position in the non-steering state in a direction opposite to a direction of the sudden steering after the sudden steering and a wobble determination unit 42 that determines that the vehicle wobbles when the steering determination unit 41 determines that the steering of the driver is the sudden return steering which is performed over the steering position in the non-steering state.
摘要:
The low-level consciousness determination system includes curved road determination means for determining whether a road on which the vehicle is traveling is a curved road and determining whether the vehicle is traveling on the outside of the curved road or on the inside of the curved road when the road is the curved road, threshold value setting means for setting different sudden steering determination threshold values when the curved road determination means determines that the road is not the curved road, when the curved road determination means determines that the vehicle is traveling on the outside of the curved road, and when the curved road determination means determines that the vehicle is traveling on the inside of the curved road, and sudden steering detection means for detecting the sudden steering on the basis of the threshold values set by the threshold value setting means after the non-steering state is detected.