Hyperbranched polymer, production method therefor and resist composition containing hyperbranched polymer
    2.
    发明申请
    Hyperbranched polymer, production method therefor and resist composition containing hyperbranched polymer 审中-公开
    超支化聚合物,其制备方法和含有超支化聚合物的抗蚀剂组合物

    公开(公告)号:US20070148585A1

    公开(公告)日:2007-06-28

    申请号:US11473348

    申请日:2006-06-22

    IPC分类号: G03C1/00

    摘要: The present invention provides a hyperbranched polymer suitable as a polymer material for nanofabrication, in particular, photolithography. The hyperbranched polymer of the present invention is characterized by having a core portion prepared by a living radical polymerization of chloromethyl styrene or the like, and an acid decomposition group such as p-tert-butoxy styrene, which is linked to the core portion and present at the end of a molecule of the polymer.

    摘要翻译: 本发明提供了一种适用于纳米加工的高分子材料的超支化聚合物,特别是光刻法。 本发明的超支化聚合物的特征在于具有通过氯甲基苯乙烯等的活性自由基聚合制备的核心部分和与核心部分连接并存在的酸分解基团如对叔丁氧基苯乙烯 在聚合物分子的末端。

    Degassing apparatus for removing dissolved gas from liquids

    公开(公告)号:US11311821B2

    公开(公告)日:2022-04-26

    申请号:US16464851

    申请日:2017-11-02

    IPC分类号: B01D19/00 C02F1/20

    摘要: The degassing apparatus removes liquid from a vacuum tank (1) with a suction pump (6) and supplies that liquid to a storage tank (9), sprays storage tank liquid into the vacuum tank through a convergent nozzle (7), removes gas from liquid in a state of reduced pressure inside the vacuum tank, and stores the degassed liquid in the storage tank. The storage tank is an airtight hermetically sealed tank provided with a reduced pressure retaining valve that discharges gas accumulated inside the storage tank.

    Automatic choke
    10.
    发明授权
    Automatic choke 有权
    自动扼流圈

    公开(公告)号:US07213555B2

    公开(公告)日:2007-05-08

    申请号:US11075728

    申请日:2005-03-10

    IPC分类号: F02M1/08 F02M1/10

    CPC分类号: F02M1/08 F02D41/067

    摘要: A choke valve is controlled finely suited to the running state of an engine. A throttle valve 8 and a choke valve 9 are provided in series on an intake pipe 6, and the opening degree of the choke valve 9 is controlled by a stepping motor. The choke valve opening degree upon start of engine (start opening degree) is determined depending on the engine temperature. The stepping motor 11 is initialized at the fully closed side of the choke valve 9 when the power source for starting the engine is turned on. The start opening degree of the choke valve is judged to be closer to the fully closed side or fully opened side, and the stepping motor 11 is initialized at the fully closed side if judged to be close to the fully closed side, and at the fully opened side if at the fully opened side.

    摘要翻译: 控制阀适合发动机的运行状态。 节流阀8和阻流阀9串联设置在进气管6上,阻尼阀9的开度由步进马达控制。 发动机起动时的阻气门开度(起动开度)根据发动机温度来决定。 当启动发动机的动力源被接通时,步进马达11在阻流阀9的全封闭侧被初始化。 阻塞阀的开始开度判断为更接近全封闭侧或全开侧,并且如果判断为接近完全关闭侧,则步进电机11在完全关闭侧被初始化,并且在完全闭合侧 如果在完全打开的一侧打开一边。