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公开(公告)号:US20100090344A1
公开(公告)日:2010-04-15
申请号:US12540043
申请日:2009-08-12
申请人: Yukitoshi Ota , Hiroshige Hirano , Yutaka Itou , Koji Koike
发明人: Yukitoshi Ota , Hiroshige Hirano , Yutaka Itou , Koji Koike
CPC分类号: H01L24/05 , H01L22/32 , H01L23/53223 , H01L23/53238 , H01L2224/02166 , H01L2224/05073 , H01L2224/05093 , H01L2224/05096 , H01L2224/05166 , H01L2224/05181 , H01L2224/05187 , H01L2224/05624 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01014 , H01L2924/01019 , H01L2924/01022 , H01L2924/01029 , H01L2924/01033 , H01L2924/0105 , H01L2924/01073 , H01L2924/01078 , H01L2924/01082 , H01L2924/04953 , H01L2924/05042 , H01L2924/04941 , H01L2924/00014
摘要: A semiconductor device includes an insulating film formed on a semiconductor substrate, a contact wiring formed in the insulating film, a protective film formed on the contact wiring and the insulating film, an opening portion formed in the protective film, the contact wiring being exposed through the opening portion, and an electrode pad formed in the opening portion, the electrode pad being electrically connected to the contact wiring. A region where the contact wiring is not provided is present below the opening portion.
摘要翻译: 半导体器件包括形成在半导体衬底上的绝缘膜,形成在绝缘膜中的接触布线,形成在接触布线和绝缘膜上的保护膜,形成在保护膜中的开口部分,接触布线通过 开口部分和形成在开口部分中的电极焊盘,电极焊盘电连接到接触布线。 未设置接触配线的区域存在于开口部的下方。
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公开(公告)号:US08044482B2
公开(公告)日:2011-10-25
申请号:US12540043
申请日:2009-08-12
申请人: Yukitoshi Ota , Hiroshige Hirano , Yutaka Itou , Koji Koike
发明人: Yukitoshi Ota , Hiroshige Hirano , Yutaka Itou , Koji Koike
CPC分类号: H01L24/05 , H01L22/32 , H01L23/53223 , H01L23/53238 , H01L2224/02166 , H01L2224/05073 , H01L2224/05093 , H01L2224/05096 , H01L2224/05166 , H01L2224/05181 , H01L2224/05187 , H01L2224/05624 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01014 , H01L2924/01019 , H01L2924/01022 , H01L2924/01029 , H01L2924/01033 , H01L2924/0105 , H01L2924/01073 , H01L2924/01078 , H01L2924/01082 , H01L2924/04953 , H01L2924/05042 , H01L2924/04941 , H01L2924/00014
摘要: A semiconductor device includes an insulating film formed on a semiconductor substrate, a contact wiring formed in the insulating film, a protective film formed on the contact wiring and the insulating film, an opening portion formed in the protective film, the contact wiring being exposed through the opening portion, and an electrode pad formed in the opening portion, the electrode pad being electrically connected to the contact wiring. A region where the contact wiring is not provided is present below the opening portion.
摘要翻译: 半导体器件包括形成在半导体衬底上的绝缘膜,形成在绝缘膜中的接触布线,形成在接触布线和绝缘膜上的保护膜,形成在保护膜中的开口部分,接触布线通过 开口部分和形成在开口部分中的电极焊盘,电极焊盘电连接到接触布线。 未设置接触配线的区域存在于开口部的下方。
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公开(公告)号:US08810039B2
公开(公告)日:2014-08-19
申请号:US13323454
申请日:2011-12-12
申请人: Koji Takemura , Hiroshige Hirano , Masao Takahashi , Hikari Sano , Yutaka Itoh , Koji Koike
发明人: Koji Takemura , Hiroshige Hirano , Masao Takahashi , Hikari Sano , Yutaka Itoh , Koji Koike
CPC分类号: H01L24/05 , H01L22/32 , H01L2224/02166 , H01L2224/04042 , H01L2224/05093 , H01L2224/05094 , H01L2224/05095 , H01L2224/05553 , H01L2224/05554 , H01L2224/05556 , H01L2224/05624 , H01L2224/48463 , H01L2924/00014 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01015 , H01L2924/01033 , H01L2924/01057 , H01L2924/01074 , H01L2924/01079 , H01L2924/3025 , H01L2924/00
摘要: A semiconductor device includes: a semiconductor substrate; a first interlayer insulating film formed over the semiconductor substrate; a pad formed above the first interlayer insulating film; and a plurality of first interconnects spaced apart from each other in a portion of the first interlayer insulating film located below the pad. Below the pad, the first interconnects are formed in quadrangular plan shapes.
摘要翻译: 半导体器件包括:半导体衬底; 形成在半导体衬底上的第一层间绝缘膜; 形成在第一层间绝缘膜上方的焊盘; 以及在位于所述垫下方的所述第一层间绝缘膜的部分中彼此间隔开的多个第一互连。 在焊盘下面,第一互连以四边形的平面形状形成。
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公开(公告)号:US20110095430A1
公开(公告)日:2011-04-28
申请号:US12984142
申请日:2011-01-04
申请人: Koji TAKEMURA , Hiroshige Hirano , Yutaka Itoh , Hikari Sano , Masao Takahashi , Koji Koike
发明人: Koji TAKEMURA , Hiroshige Hirano , Yutaka Itoh , Hikari Sano , Masao Takahashi , Koji Koike
IPC分类号: H01L23/485
CPC分类号: H01L23/585 , H01L21/76832 , H01L23/522 , H01L23/53295 , H01L23/562 , H01L2924/0002 , H01L2924/00
摘要: A semiconductor device includes at least three or more wiring layers stacked in an interlayer insulating film on a semiconductor substrate, a seal ring provided at the outer periphery of a chip region of the semiconductor substrate and a chip strength reinforcement provided in part of the chip region near the seal ring. The chip strength reinforcement is made of a plurality of dummy wiring structures and each of the plurality of dummy wiring structures is formed to extend across and within two or more of the wiring layers including one or none of the bottommost wiring layer and the topmost wiring layer using a via portion.
摘要翻译: 一种半导体器件包括在半导体衬底上的层间绝缘膜中堆叠的至少三个或更多个布线层,设置在半导体衬底的芯片区域的外周处的密封环和在芯片区域的一部分中提供的芯片强度增强 靠近密封圈。 芯片强度加强件由多个虚拟布线结构构成,并且多个虚设布线结构中的每一个形成为跨越两个或更多个布线层中的两个或更多个布线层,包括最下面的布线层和最上面的布线层 使用通孔部分。
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公开(公告)号:US08841753B2
公开(公告)日:2014-09-23
申请号:US13428992
申请日:2012-03-23
申请人: Koji Takemura , Hiroshige Hirano , Yutaka Itoh , Hikari Sano , Koji Koike
发明人: Koji Takemura , Hiroshige Hirano , Yutaka Itoh , Hikari Sano , Koji Koike
IPC分类号: H01L23/544
CPC分类号: H01L23/585 , H01L23/562 , H01L2924/0002 , H01L2924/00
摘要: A semiconductor device includes: an interlayer insulating film formed on a substrate; a wiring formed in the interlayer insulating film in a chip region of the substrate; a seal ring formed in the interlayer insulating film in a periphery of the chip region and continuously surrounding the chip region; and a first protective film formed on the interlayer insulating film having the wiring and the seal ring formed therein. A first opening is formed in the first protective film in a region located outside the seal ring when viewed from the chip region, and the interlayer insulating film is exposed in the first opening.
摘要翻译: 半导体器件包括:形成在衬底上的层间绝缘膜; 在衬底的芯片区域中的层间绝缘膜中形成的布线; 密封环,形成在所述芯片区域的周围的所述层间绝缘膜中,并且连续地围绕所述芯片区域; 以及形成在其上形成有布线和密封环的层间绝缘膜上的第一保护膜。 当从芯片区域观察时,在位于密封环外侧的区域中的第一保护膜中形成第一开口,并且层间绝缘膜在第一开口中露出。
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公开(公告)号:US20090200677A1
公开(公告)日:2009-08-13
申请号:US12430439
申请日:2009-04-27
申请人: Koji TAKEMURA , Hiroshige Hirano , Yutaka Itoh , Hikari Sano , Masao Takahashi , Koji Koike
发明人: Koji TAKEMURA , Hiroshige Hirano , Yutaka Itoh , Hikari Sano , Masao Takahashi , Koji Koike
IPC分类号: H01L23/522
CPC分类号: H01L23/585 , H01L21/76832 , H01L23/522 , H01L23/53295 , H01L23/562 , H01L2924/0002 , H01L2924/00
摘要: A semiconductor device includes at least three or more wiring layers stacked in an interlayer insulating film on a semiconductor substrate, a seal ring provided at the outer periphery of a chip region of the semiconductor substrate and a chip strength reinforcement provided in part of the chip region near the seal ring. The chip strength reinforcement is made of a plurality of dummy wiring structures and each of the plurality of dummy wiring structures is formed to extend across and within two or more of the wiring layers including one or none of the bottommost wiring layer and the topmost wiring layer using a via portion.
摘要翻译: 一种半导体器件包括在半导体衬底上的层间绝缘膜中堆叠的至少三个或更多个布线层,设置在半导体衬底的芯片区域的外周处的密封环和在芯片区域的一部分中提供的芯片强度增强 靠近密封圈。 芯片强度加强件由多个虚拟布线结构构成,并且多个虚设布线结构中的每一个形成为跨越两个或更多个布线层中的两个或更多个布线层,包括最下面的布线层和最上面的布线层 使用通孔部分。
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公开(公告)号:US20070052068A1
公开(公告)日:2007-03-08
申请号:US11511306
申请日:2006-08-29
申请人: Koji Takemura , Hiroshige Hirano , Masao Takahashi , Hikari Sano , Yutaka Itoh , Koji Koike
发明人: Koji Takemura , Hiroshige Hirano , Masao Takahashi , Hikari Sano , Yutaka Itoh , Koji Koike
IPC分类号: H01L23/58
CPC分类号: H01L24/05 , H01L22/32 , H01L2224/02166 , H01L2224/04042 , H01L2224/05093 , H01L2224/05094 , H01L2224/05095 , H01L2224/05553 , H01L2224/05554 , H01L2224/05556 , H01L2224/05624 , H01L2224/48463 , H01L2924/00014 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01015 , H01L2924/01033 , H01L2924/01057 , H01L2924/01074 , H01L2924/01079 , H01L2924/3025 , H01L2924/00
摘要: A semiconductor device includes: a semiconductor substrate; a first interlayer insulating film formed over the semiconductor substrate; a pad formed above the first interlayer insulating film; and a plurality of first interconnects spaced apart from each other in a portion of the first interlayer insulating film located below the pad. Below the pad, the first interconnects are formed in quadrangular plan shapes.
摘要翻译: 半导体器件包括:半导体衬底; 形成在半导体衬底上的第一层间绝缘膜; 形成在第一层间绝缘膜上方的焊盘; 以及在位于所述垫下方的所述第一层间绝缘膜的部分中彼此间隔开的多个第一互连。 在焊盘下面,第一互连以四边形的平面形状形成。
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公开(公告)号:US07888801B2
公开(公告)日:2011-02-15
申请号:US12430439
申请日:2009-04-27
申请人: Koji Takemura , Hiroshige Hirano , Yutaka Itoh , Hikari Sano , Masao Takahashi , Koji Koike
发明人: Koji Takemura , Hiroshige Hirano , Yutaka Itoh , Hikari Sano , Masao Takahashi , Koji Koike
IPC分类号: H01L23/522
CPC分类号: H01L23/585 , H01L21/76832 , H01L23/522 , H01L23/53295 , H01L23/562 , H01L2924/0002 , H01L2924/00
摘要: A semiconductor device includes at least three or more wiring layers stacked in an interlayer insulating film on a semiconductor substrate, a seal ring provided at the outer periphery of a chip region of the semiconductor substrate and a chip strength reinforcement provided in part of the chip region near the seal ring. The chip strength reinforcement is made of a plurality of dummy wiring structures and each of the plurality of dummy wiring structures is formed to extend across and within two or more of the wiring layers including one or none of the bottommost wiring layer and the topmost wiring layer using a via portion.
摘要翻译: 一种半导体器件包括在半导体衬底上的层间绝缘膜中堆叠的至少三个或更多个布线层,设置在半导体衬底的芯片区域的外周处的密封环和在芯片区域的一部分中提供的芯片强度增强 靠近密封圈。 芯片强度加强件由多个虚拟布线结构构成,并且多个虚设布线结构中的每一个形成为跨越两个或更多个布线层中的两个或更多个布线层,包括最下面的布线层和最上面的布线层 使用通孔部分。
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公开(公告)号:US08237281B2
公开(公告)日:2012-08-07
申请号:US12984142
申请日:2011-01-04
申请人: Koji Takemura , Hiroshige Hirano , Yutaka Itoh , Hikari Sano , Masao Takahashi , Koji Koike
发明人: Koji Takemura , Hiroshige Hirano , Yutaka Itoh , Hikari Sano , Masao Takahashi , Koji Koike
IPC分类号: H01L23/495
CPC分类号: H01L23/585 , H01L21/76832 , H01L23/522 , H01L23/53295 , H01L23/562 , H01L2924/0002 , H01L2924/00
摘要: A semiconductor device includes at least three or more wiring layers stacked in an interlayer insulating film on a semiconductor substrate, a seal ring provided at the outer periphery of a chip region of the semiconductor substrate and a chip strength reinforcement provided in part of the chip region near the seal ring. The chip strength reinforcement is made of a plurality of dummy wiring structures and each of the plurality of dummy wiring structures is formed to extend across and within two or more of the wiring layers including one or none of the bottommost wiring layer and the topmost wiring layer using a via portion.
摘要翻译: 一种半导体器件包括在半导体衬底上的层间绝缘膜中堆叠的至少三个或更多个布线层,设置在半导体衬底的芯片区域的外周处的密封环和在芯片区域的一部分中提供的芯片强度增强 靠近密封圈。 芯片强度加强件由多个虚拟布线结构构成,并且多个虚设布线结构中的每一个形成为跨越两个或更多个布线层中的两个或更多个布线层,包括最下面的布线层和最上面的布线层 使用通孔部分。
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公开(公告)号:US08164163B2
公开(公告)日:2012-04-24
申请号:US12029969
申请日:2008-02-12
申请人: Koji Takemura , Hiroshige Hirano , Yutaka Itoh , Hikari Sano , Koji Koike
发明人: Koji Takemura , Hiroshige Hirano , Yutaka Itoh , Hikari Sano , Koji Koike
IPC分类号: H01L23/544
CPC分类号: H01L23/585 , H01L23/562 , H01L2924/0002 , H01L2924/00
摘要: A semiconductor device includes: an interlayer insulating film formed on a substrate; a wiring formed in the interlayer insulating film in a chip region of the substrate; a seal ring formed in the interlayer insulating film in a periphery of the chip region and continuously surrounding the chip region; and a first protective film formed on the interlayer insulating film having the wiring and the seal ring formed therein. A first opening is formed in the first protective film in a region located outside the seal ring when viewed from the chip region, and the interlayer insulating film is exposed in the first opening.
摘要翻译: 半导体器件包括:形成在衬底上的层间绝缘膜; 在衬底的芯片区域中的层间绝缘膜中形成的布线; 密封环,形成在所述芯片区域的周围的所述层间绝缘膜中,并且连续地围绕所述芯片区域; 以及形成在其上形成有布线和密封环的层间绝缘膜上的第一保护膜。 当从芯片区域观察时,在位于密封环外侧的区域中的第一保护膜中形成第一开口,并且层间绝缘膜在第一开口中露出。
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