公开(公告)号：US06881270B1

公开(公告)日：2005-04-19

申请号：US09710769

申请日：2000-11-09

申请人： Thomas Gebele ,  Jurgen Henrich ,  Stefan Bangert ,  Jürgen Honekamp ,  Elisabeth Budke ,  Jürgen Ulrich ,  Helmut Grimm

发明人： Thomas Gebele ,  Jurgen Henrich ,  Stefan Bangert ,  Jürgen Honekamp ,  Elisabeth Budke ,  Jürgen Ulrich ,  Helmut Grimm

IPC分类号： C23C14/24 ,  C23C14/32 ,  H01J37/32 ,  C23C16/00 ,  H05H1/02

CPC分类号： H01J37/32055 ,  C23C14/325 ,  H01J37/32422 ,  H01J37/32532

摘要： An electrode arrangement for the plasma-aided coating of a substrate (3) with a layer of material comprising at least one first and a second material component and for the production of a plasma discharge, more especially an arc discharge (35), having an anode arrangement (5), which provides the first material component at an anode material surface (13) for evaporation, and a cathode arrangement (7), which provides the second material component at a cathode material surface (25). The electrode arrangement is characterized in that the cathode material surface (25) is constituted by an evaporation-active part (27) supporting the plasma discharge (35) and an evaporation-inactive part (41) not supporting the plasma discharge. Preferably, a motion-producing means (49) is provided for moving the evaporation-inactive part (41) over the cathode material surface (25) in order to reduce deposit of material due to he first material component on the cathode material surface (25).

摘要翻译： 一种用于衬底（3）的等离子体辅助涂层的电极装置，其具有包括至少一种第一和第二材料组分的材料层，并且用于产生等离子体放电，更特别是电弧放电（35），具有 阳极装置（5），其在用于蒸发的阳极材料表面（13）处提供第一材料部件，以及在阴极材料表面（25）处提供第二材料部件的阴极装置（7）。 电极装置的特征在于，阴极材料表面（25）由支撑等离子体放电（35）的蒸发活性部分（27）和不支持等离子体放电的蒸发非活性部分（41）构成。 优选地，提供运动产生装置（49），用于将蒸发非活性部分（41）移动到阴极材料表面（25）上，以便减少由于第一材料成分在阴极材料表面（25）上沉积的材料 ）。

公开(公告)号：US06857307B2

公开(公告)日：2005-02-22

申请号：US10149179

申请日：2000-12-22

申请人： Thomas Gebele ,  Jürgen Henrich

发明人： Thomas Gebele ,  Jürgen Henrich

IPC分类号： G01M3/32 ,  G01N15/08

CPC分类号： G01M3/3281

摘要： The invention relates to a method and device for the determination of the gas permeability of a container, for example, a PET bottle. Said container is enclosed by a sheath, which hermetically seals the container from the environment. The intermediate space, between the container and the sheath, has only a very small volume in comparison to the volume of the container. The determination of the gas permeability is begun by bringing said intermediate space to, for example, atmospheric pressure, whilst the container is filled with a test gas by means of a special feed, until the container is at an overpressure relative to the intermediate space. The pressure in the intermediate space increases by means of the resulting diffusion of the test gas through the wall of the container into said intermediate space. The increase in pressure per unit time is a measure of the permeability of the container.

摘要翻译： 本发明涉及一种用于确定容器（例如PET瓶）的透气性的方法和装置。 所述容器由护套封闭，护套将容器与环境密封。 在容器和护套之间的中间空间与容器的体积相比只有非常小的体积。 通过使所述中间空间达到例如大气压，同时通过特殊进料填充试验气体，直到容器相对于中间空间处于过压状态，开始确定气体渗透性。 中间空间中的压力通过试验气体通过容器的壁进入所述中间空间而增加。 每单位时间的压力增加是容器的渗透性的量度。

公开(公告)号：US07114702B2

公开(公告)日：2006-10-03

申请号：US10928326

申请日：2004-08-27

申请人： Andreas Sauer

发明人： Andreas Sauer

IPC分类号： F16K25/00 ,  F16K3/00

CPC分类号： F16K3/207 ,  F16K3/0281

摘要： In a slide valve, especially for coating installations, for fluidic separation of two modules or chambers, interconnected through an opening, containing at least one slide plate, integrated in a housing transfixed by said opening, and which may be bidirectionally moved between an inactive position, releasing said opening, and an operating position, completely covering said opening, and at least a closing drive, which may be activated to act upon said slide plate in its operating position and for its sealing contact in a closed position against a sealing surface transfixing said housing, according to the invention, at least one of said closing drives is firmly attached inside housing, relative to the activating movement of said slide plate.

摘要翻译： 在滑阀中，特别是用于涂覆装置的两个模块或室的流体分离，通过开口相互连接，该开口包含至少一个滑动板，该滑动板集成在由所述开口固定的壳体中，并且可以在非活动位置之间双向移动 释放所述开口和完全覆盖所述开口的操作位置以及至少一个闭合驱动器，所述操作位置可以被致动以在其操作位置作用在所述滑板上，并且其闭合位置处的密封接触抵抗密封表面的固定 根据本发明，所述壳体中的至少一个相对于所述滑板的启动运动被牢固地附接在壳体内。

公开(公告)号：US07041588B2

公开(公告)日：2006-05-09

申请号：US10871968

申请日：2004-06-18

申请人： Marcus Bender

发明人： Marcus Bender

IPC分类号： H01L21/44

CPC分类号： C23C14/086 ,  Y10T428/31504

摘要： In a method for producing ITO layers on substrates, especially for the production of organic light-emitting diodes, part of the ITO layer thickness is applied first by sputter-deposition, at a controlled temperature profile, in such manner that the formation of crystallization nuclei is prevented; subsequently, the partially coated substrate is heated to a temperature above the recrystallization temperature of the ITO layer, and then the rest of the ITO layer is sputter-deposited.

摘要翻译： 在用于在基板上制造ITO层的方法中，特别是用于生产有机发光二极管的方法中，首先通过溅射沉积，以受控的温度分布，以结晶核的形成 被阻止 随后，将部分涂覆的基板加热到高于ITO层的再结晶温度的温度，然后溅射沉积ITO层的其余部分。

公开(公告)号：US20050264185A1

公开(公告)日：2005-12-01

申请号：US11128469

申请日：2005-05-13

申请人： Uwe Hoffmann

发明人： Uwe Hoffmann

IPC分类号： H05B33/10 ,  G02F1/13 ,  H01L27/00 ,  H01L51/00 ,  H01L51/40 ,  H01L51/50 ,  H01L51/52 ,  H05B33/00 ,  H05B33/14 ,  H05B33/28

CPC分类号： H01L51/5203 ,  H01L51/5221 ,  H01L2251/5315 ,  H01L2251/5361

摘要： A method of producing organic light-emitting surface elements (OLEDs), wherein first a first electrode, an organic functional layer and a second electrode are deposited successively on a substrate. The method is used to produce the second electrode in the form of an interference layer system having n metallic sublayers and n+1 oxidic sublayers. The layers are disposed in pairs that each enclose a metallic sublayer therebetween, with n being an integer and ≧1. This method has the advantage of a very high light transmission for designing top-emitter OLEDs that cover a large surface area, while at the same time keeping the sheet resistance of the junction electrode located away from the substrate very low, thereby enabling operation at less than 10 V.

摘要翻译： 一种制造有机发光表面元件（OLED）的方法，其中首先将第一电极，有机功能层和第二电极依次沉积在衬底上。 该方法用于产生具有n个金属子层和n + 1个氧化亚层的干涉层系统形式的第二电极。 这些层成对设置，其间各自包围金属子层，其中n为整数，> = 1。 该方法具有非常高的光透射率的优点，用于设计覆盖大表面积的顶部发光OLED，同时保持接合电极远离衬底的薄层电阻非常低，从而使得能够在较少的 超过10 V.

公开(公告)号：US20050252768A1

公开(公告)日：2005-11-17

申请号：US11121563

申请日：2005-05-04

申请人： Stefan Bangert ,  Frank Fuchs ,  Ralph Lindenberg ,  Andreas Lopp ,  Uwe Schussler ,  Tobias Stolley

发明人： Stefan Bangert ,  Frank Fuchs ,  Ralph Lindenberg ,  Andreas Lopp ,  Uwe Schussler ,  Tobias Stolley

IPC分类号： C23C14/34 ,  C23C14/35 ,  C23C14/56 ,  H01J37/34 ,  C23C14/32

CPC分类号： H01J37/3455 ,  C23C14/352 ,  C23C14/56 ,  H01J37/3405 ,  H01J2237/3325

摘要： This invention relates to a coater for the coating, in particular, of large-area substrates by means of cathode sputtering, the coater having a coating chamber and, provided therein, a cathode assembly (2) where the material to be sputtered is located on a target (4) with a curved surface, the material to be sputtered being located, in particular, on the lateral surface of a cylinder, there being in a single coating chamber for a coherent coating zone at least three, preferably more, cathode assemblies (2) with rotatable, curved targets (4) positioned one beside the other.

摘要翻译： 本发明涉及一种用于通过阴极溅射涂覆，特别是大面积基板的涂布机，涂布机具有涂覆室，并且在其中设置阴极组件（2），其中待溅射的材料位于 具有弯曲表面的靶（4），待溅射的材料特别地位于圆柱体的侧表面上，在单个涂覆室中用于粘附涂层区域，至少三个，优选更多的阴极组件 （2）具有位于另一个旁边的可旋转的弯曲目标（4）。

公开(公告)号：US20050217993A1

公开(公告)日：2005-10-06

申请号：US11093799

申请日：2005-03-30

申请人： Thomas Gebele ,  Jurgen Henrich ,  Manfred Weimann

发明人： Thomas Gebele ,  Jurgen Henrich ,  Manfred Weimann

IPC分类号： C03C17/00 ,  C23C14/35 ,  C23C14/54 ,  C23C14/56 ,  C23C16/00

CPC分类号： C23C14/566 ,  C23C14/56

摘要： A multistage lock chamber device with at least two lock chambers, a first pump set for evacuating a first lock chamber, and a second pump set for evacuating a second lock chamber. The first pump set (P1) may evacuate both the first and the second lock chamber, or both jointly. The first pump set may also be utilized as a prior pumping stand of the second pump set. Additionally, an integrated third pump set can be utilized as a pre-pumping stand for the second pump set and/or first pump set. Alternately or additionally, the device can include at least one buffer unit, whose buffer volume is being utilized to produce a sudden decline in pressure inside the lock chamber by means of pressure equalization.

摘要翻译： 一种具有至少两个锁定室的多级锁定室装置，用于抽空第一锁定室的第一泵组和用于抽空第二锁定室的第二泵组。 第一泵组（P1）可以同时排空第一和第二锁定室，或二者共同排空。 第一泵组也可以用作第二泵组的先前泵站。 此外，集成的第三泵组可以用作第二泵组和/或第一泵组的预泵站。 替代地或另外地，装置可以包括至少一个缓冲单元，其缓冲体积被利用以通过压力均衡来产生锁定室内的压力的突然下降。

公开(公告)号：US20050223995A1

公开(公告)日：2005-10-13

申请号：US11090579

申请日：2005-03-25

申请人： Andreas Sauer ,  Gert Rodling

发明人： Andreas Sauer ,  Gert Rodling

IPC分类号： F04B37/16 ,  B01D8/00 ,  C03C17/00 ,  C23C14/34 ,  C23C14/56 ,  C23C16/00 ,  H05H1/24

CPC分类号： C23C14/564 ,  C23C14/56

摘要： A vacuum treatment installation, in particular a coating line for the continuous coating of plate-like substrates moving continuously along the line, preferably a glass-coating line having at least one, preferably a plurality of successively arranged vacuum chambers (1) or chamber zones (2 to 8, 17) that are pumped out by means of at least one, preferably a plurality of pumping means (21), with at least one chamber or one chamber Zone being provided at the top of the chamber with a cover (20, 30) to which at least one pumping means is connected, the cover being configured such that it forms a cover space (28) and projects with the cover space over the chamber or the chamber zones.

摘要翻译： 一种真空处理装置，特别是用于连续涂覆沿着该线连续移动的板状基底的涂层线，优选玻璃涂层线具有至少一个，优选多个连续布置的真空室（1）或室区 （2至8,17），其通过至少一个优选多个泵送装置（21）泵出，其中至少一个室或一个室区域设置在所述室的顶部处，其具有盖（20 ，30），所述至少一个泵送装置连接到所述盖上，所述盖构造成使得其形成盖空间（28）并且与所述盖空间一起突出在所述室或所述室区域上方。

公开(公告)号：US07479189B2

公开(公告)日：2009-01-20

申请号：US10547718

申请日：2004-03-11

申请人： Uwe Schüssler ,  Stefan Bangert ,  Jürgen Henrich

发明人： Uwe Schüssler ,  Stefan Bangert ,  Jürgen Henrich

IPC分类号： B05C15/00

CPC分类号： C03C17/001 ,  C03C17/002 ,  C23C14/56 ,  C23C14/566 ,  F16K1/2007 ,  F16K1/205 ,  F16K1/2085 ,  F16K1/24 ,  F16K51/02

摘要： The present invention relates to a coating plant, especially a vacuum coating plant, with a charging lock, especially a rectangular vacuum lock for a coating chamber, with a lock aperture (13) having a length of at least 1000 mm that comprises a shutter (6) for closing and opening the lock aperture and a latch (7) to secure the shutter, wherein there are provided means for moving the shutter and the latch from a first open position to a second closed position, and vice versa, these means assuring also that the movements of the shutter (6) and the latch (7) will be coupled with each other in such manner that the shutter (6) will be automatically secured by the latch (7) after the shutter has been closed and will be released again before it is opened.

摘要翻译： 本发明涉及一种具有充电锁，特别是用于涂覆室的矩形真空锁的涂覆设备，特别是真空镀膜设备，其具有长度至少为1000mm的锁定孔（13），其包括快门（ 6）用于关闭和打开锁定孔，以及用于固定闸门的闩锁（7），其中设置有用于将闸板和闩锁从第一打开位置移动到第二关闭位置的装置，反之亦然，这些装置确保 还有，快门（6）和闩锁（7）的运动将以这样的方式彼此联接，使得在快门关闭之后快门（6）将被闩锁（7）自动固定，并且将是 在开放之前再次释放。

公开(公告)号：US20060226004A1

公开(公告)日：2006-10-12

申请号：US11279047

申请日：2006-04-07

申请人： HANS BUCHBERGER ,  ANDREAS GEISS ,  JORG KREMPEL-HESSE ,  DIETER HAAS

发明人： HANS BUCHBERGER ,  ANDREAS GEISS ,  JORG KREMPEL-HESSE ,  DIETER HAAS

IPC分类号： C23C14/00

CPC分类号： C23C14/56 ,  H01J37/32431 ,  H01J37/32458

摘要： A machine for coating a transparent substrate for the production of display screens comprises a coating chamber that has a modular design. Each of the modules 1 features a chamber section 2, a first support 3 that is arranged removably in or at the chamber section 2, and a second support 4 that is arranged removably at the first support 3. Whereas the first support 3 bears the cathodes, the second support 4 is formed as a cover at which are arranged the pumps for producing a vacuum in the coating chamber. Carriers 3 and 4 can be removed laterally from the chamber section 2 to such an extent that areas 11a, 11b accessible to persons can be formed between the module components. In this way, the components of the machine are readily accessible, for example for maintenance purposes. Work can be done simultaneously on the cathodes and in the chamber interior.

摘要翻译： 用于涂覆用于生产显示屏的透明基板的机器包括具有模块化设计的涂布室。 每个模块1具有腔室部分2，可移除地布置在腔室部分2中或在腔室部分2中的第一支撑件3，以及可拆卸地布置在第一支撑件3处的第二支撑件4。 而第一支撑件3具有阴极，第二支撑件4形成为盖，在该盖处布置有用于在涂覆室中产生真空的泵。 载体3和4可以从腔室部分2侧向移除到可以在模块部件之间形成人员可接近的区域11a，11b。 以这种方式，机器的组件容易接近，例如用于维护目的。 可以在阴极和室内同时进行工作。