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公开(公告)号：US09978579B2
公开(公告)日：2018-05-22
申请号：US15221340
申请日：2016-07-27
Applicant: SCIENTA OMICRON AB
Inventor： Björn Wannberg
IPC: H01J49/48 , H01J37/05 , H01J49/00 , H01J49/06 , G01N23/227
CPC classification number: H01J49/48 , G01N23/2273 , G01N2223/085 , H01J37/05 , H01J49/0031 , H01J49/06 , H01J49/061 , H01J49/484 , H01J2237/0535
Abstract: The present invention relates to a method for determining at least one parameter related to charged particles emitted from a particle emitting sample, e.g. a parameter related to the energies, the start directions, the start positions or the spin of the particles. The method comprises the steps of guiding a beam of charged particles into an entrance of a measurement region by means of a lens system, and detecting positions of the particles indicative of said at least one parameter within the measurement region. Furthermore, the method comprises the steps of deflecting the particle beam at least twice in the same coordinate direction before entrance of the particle beam into the measurement region. Thereby, both the position and the direction of the particle beam at the entrance of the measurement region can be controlled in a way that to some extent eliminates the need for physical manipulation of the sample. This in turn allows the sample to be efficiently cooled such that the energy resolution in energy measurements can be improved.
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公开(公告)号：US20230314351A1
公开(公告)日：2023-10-05
申请号：US18012209
申请日：2021-06-10
Applicant: Scienta Omicron AB
Inventor： Jan KNUDSEN
IPC: G01N23/227
CPC classification number: G01N23/227
Abstract: A computer-implemented method is described for generating event-averaged and time-resolved spectra, from a plurality of time-resolved spectra of charged particles emitted from a surface (3) of a sample (2), at which surface (3) an event is repeated cyclically, the method comprising the steps of receiving (101), from the charged particle analyser (1), the plurality of time-resolved spectra covering a plurality of events, obtaining (102) at least one selected part (9, 10) of the series of time-resolved spectra, matching (103) the at least one selected part (9, 10) with other parts of the series of time-resolved spectra to find similar parts, and thereby determining points in time for other events in the plurality of events, and generating (104) the event-averaged and time-resolved spectra of the event based on the series of time-resolved charged particle energy spectra and the determined points in time.
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公开(公告)号：US09437408B2
公开(公告)日：2016-09-06
申请号：US14363405
申请日：2012-03-06
Applicant: Björn Wannberg
Inventor： Björn Wannberg
CPC classification number: H01J49/48 , G01N23/2273 , G01N2223/085 , H01J37/05 , H01J49/0031 , H01J49/06 , H01J49/061 , H01J49/484 , H01J2237/0535
Abstract: The present invention relates to a method for determining at least one parameter related to charged particles emitted from a particle emitting sample. The method comprises guiding a beam of charged particles into an entrance of a measurement region by means of a lens system, and detecting positions of the particles indicative of said at least one parameter within the measurement region. Furthermore, the method comprises deflecting the particle beam at least twice in the same coordinate direction before entrance of the particle beam into the measurement region. Thereby, both the position and the direction of the particle beam at the entrance of the measurement region can be controlled in a way that to some extent eliminates the need for physical manipulation of the sample. This in turn allows the sample to be efficiently cooled such that the energy resolution in energy measurements can be improved.
Abstract translation: 本发明涉及一种用于确定与从发射颗粒发射的样品发射的带电粒子有关的至少一个参数的方法。 该方法包括通过透镜系统将带电粒子束引导到测量区域的入口，以及在测量区域内检测指示所述至少一个参数的粒子的位置。 此外，该方法包括在粒子束进入测量区域之前将粒子束在相同坐标方向上偏转至少两次。 因此，能够以在某种程度上消除对样品的物理操作的需要的方式来控制测量区域入口处的粒子束的位置和方向。 这反过来允许样品被有效地冷却，从而能够提高能量测量中的能量分辨率。
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公开(公告)号：US20220020580A1
公开(公告)日：2022-01-20
申请号：US17311264
申请日：2019-12-06
Applicant: Scienta Omicron AB
Inventor： Peter AMANN , Anders NILSSON
Abstract: An aperture device (31) is described, which is attachable to a lens system (13). The lens system (13) is arranged to form a particle beam of charged particles, emitted from a sample surface (Ss).The aperture device (31) comprises an end surface (S) which is to be arranged facing the sample surface (Ss), at least one aperture (38) arranged in the end surface (S), a length axis (32) which extends through the centre of said at least one aperture (38), and at least one gas outlet (10), which is arranged at a transverse distance (T) perpendicular from the length axis (32), and is arranged to direct gas into a volume between at least one aperture (38) and the sample surface (Ss). The end surface (S) within a distance, equal to 1/3 of the transverse distance (T), perpendicular from the length axis (32) has a variation along the length axis (32) being smaller than 1/6 of the transverse distance (T).
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公开(公告)号：US11002693B2
公开(公告)日：2021-05-11
申请号：US16506168
申请日：2019-07-09
Applicant: Scienta Omicron AB
Inventor： Tomas Wiell , Christopher Liljenberg , Pål Palmgren
IPC: G01N23/2273 , H01J35/06 , G21K1/06 , H01J49/44 , H01J49/06
Abstract: The present invention relates to a hard X-ray photoelectron spectroscopy (HAXPES) system comprising an X-ray tube, an X-ray monochromator, and a sample. The X-ray tube provides a beam of photons, which via the X-ray monochromator is directed through the system so as to excite electrons from the illuminated sample. The X-ray tube is connected to a monochromator vacuum chamber in which the X-ray monochromator is configured to monochromatize and focus the beam onto the sample. The monochromator vacuum chamber is connected to an analysis vacuum chamber, the illuminated sample being mounted inside the analysis vacuum chamber and the analysis vacuum chamber being connected to an electron energy analyser. The electron energy analyser is mounted onto the analysis vacuum chamber. Further, the beam of photons provided from the X-ray tube is divergent and has an energy above 6 keV. The X-ray monochromator also comprises a curved optical element arranged to both monochromatize and focus the diverging beam of photons.
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Patent Agency Ranking
公开(公告)号：US20180269054A1
公开(公告)日：2018-09-20
申请号：US15981795
申请日：2018-05-16
Applicant: SCIENTA OMICRON AB
Inventor： Björn WANNBERG
CPC classification number: H01J49/48 , G01N23/2273 , G01N2223/085 , H01J37/05 , H01J49/0031 , H01J49/06 , H01J49/061 , H01J49/484 , H01J2237/0535
Abstract: The present invention relates to a method for determining at least one parameter related to charged particles emitted from a particle emitting sample, e.g. a parameter related to the energies, the start directions, the start positions or the spin of the particles. The method comprises the steps of guiding a beam of charged particles into an entrance of a measurement region by means of a lens system, and detecting positions of the particles indicative of said at least one parameter within the measurement region. Furthermore, the method comprises the steps of deflecting the particle beam at least twice in the same coordinate direction before entrance of the particle beam into the measurement region. Thereby, both the position and the direction of the particle beam at the entrance of the measurement region can be controlled in a way that to some extent eliminates the need for physical manipulation of the sample. This in turn allows the sample to be efficiently cooled such that the energy resolution in energy measurements can be improved.
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公开(公告)号：US20160336166A1
公开(公告)日：2016-11-17
申请号：US15221340
申请日：2016-07-27
Applicant: SCIENTA OMICRON AB
Inventor： Björn WANNBERG
IPC: H01J49/48
CPC classification number: H01J49/48 , G01N23/2273 , G01N2223/085 , H01J37/05 , H01J49/0031 , H01J49/06 , H01J49/061 , H01J49/484 , H01J2237/0535
Abstract: The present invention relates to a method for determining at least one parameter related to charged particles emitted from a particle emitting sample, e.g. a parameter related to the energies, the start directions, the start positions or the spin of the particles. The method comprises the steps of guiding a beam of charged particles into an entrance of a measurement region by means of a lens system, and detecting positions of the particles indicative of said at least one parameter within the measurement region. Furthermore, the method comprises the steps of deflecting the particle beam at least twice in the same coordinate direction before entrance of the particle beam into the measurement region. Thereby, both the position and the direction of the particle beam at the entrance of the measurement region can be controlled in a way that to some extent eliminates the need for physical manipulation of the sample. This in turn allows the sample to be efficiently cooled such that the energy resolution in energy measurements can be improved.
Abstract translation: 本发明涉及一种用于确定与从颗粒发射样品发射的带电粒子有关的至少一个参数的方法。 与能量，起始方向，起始位置或颗粒的旋转相关的参数。 该方法包括以下步骤：通过透镜系统将带电粒子束引导到测量区域的入口，以及在测量区域内检测表示所述至少一个参数的粒子的位置。 此外，该方法包括以下步骤：在粒子束进入测量区域之前将粒子束在相同的坐标方向上偏转至少两次。 因此，能够以在某种程度上消除对样品的物理操作的需要的方式来控制测量区域入口处的粒子束的位置和方向。 这反过来允许样品被有效地冷却，从而能够提高能量测量中的能量分辨率。
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公开(公告)号：US20240331993A1
公开(公告)日：2024-10-03
申请号：US18693037
申请日：2022-09-07
Applicant: Scienta Omicron AB
Inventor： Patrik KARLSSON
CPC classification number: H01J49/22 , H01J49/0004 , H01J49/025 , H01J49/44
Abstract: A charged particle spectrometer is described, which comprises an imaging energy analyser and an electrostatic lens system, having a first deflector and optionally a second deflector operable to cause deflection of the charged particles in a coordinate direction a first and, if applicable, also a second time before the entrance into the imaging energy analyser. The spectrometer also comprises a control unit which is configured to control the nominal spatial position of the electrostatic lens system and to control the scanning in an angular mode of the spectrometer using a lens table. A computer program for controlling the control unit is also described.
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公开(公告)号：US20240310309A1
公开(公告)日：2024-09-19
申请号：US18546706
申请日：2022-02-03
Applicant: Scienta Omicron AB
Inventor： Mikael OLOFSSON
IPC: G01N23/227
CPC classification number: G01N23/227
Abstract: Described are illumination control devices, for an analyser arrangement and method of using thereof. The analyser arrangement is configured to determine at least one parameter related to charged particles emitted from a sample. The illumination control device comprises an input for input electromagnetic radiation, and is configured to control the illumination of the sample to induce the emission of charged particles from the sample and to operate in at least a first mode and a second mode, wherein the illumination control device in the first mode, is configured to illuminate a first area of the sample with a first part of the input electromagnetic radiation and a second area part of the first area of the sample with a second part of the input electromagnetic radiation, and in a second mode, is configured to illuminate the second area of the sample with the second part of the input electromagnetic radiation.
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公开(公告)号：US20240110882A1
公开(公告)日：2024-04-04
申请号：US18274580
申请日：2022-01-19
Applicant: Scienta Omicron AB
Inventor： Mikael OLOFSSON , Patrik KARLSSON
IPC: G01N23/2273 , H01J49/06
CPC classification number: G01N23/2273 , H01J49/06
Abstract: Described is an angle-resolving photoelectron spectrometer comprising an electrostatic lens system having a first end and a second end, and arranged to form a beam of electrons emitted from a measurement area on a sample surface, and to transport the electrons to the second end, wherein the first lens element is configured to be arranged at a positive voltage in relation to the sample. The spectrometer comprises at least a first shielding electrode with a limiting aperture, arranged such that the angle between the optical axis and any point on the limiting aperture is larger than 45° and smaller than 70, and at least one compensation electrode which is arranged around the optical axis at a larger distance from the measurement area than the first lens element. The compensation electrode is configured to be arranged at a negative voltage in relation to the sample.
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