公开(公告)号：US07859278B2

公开(公告)日：2010-12-28

申请号：US11674205

申请日：2007-02-13

申请人： Dietmar Runge ,  Stojan Kanev ,  Claus Dietrich

发明人： Dietmar Runge ,  Stojan Kanev ,  Claus Dietrich

IPC分类号： G01R1/04

CPC分类号： G01R1/07342

摘要： A probe holder in which the probe needle has a slight horizontal offset under the action of a vertical force comprises a probe holder for a probe needle, wherein the holder is adapted, for fastening and electrical contact-connection, on a carrier device of a test apparatus and has a holder arm having a needle holder at the free end thereof to fasten the probe needle, and a fastening arm for connecting the holder arm to the carrier device. The holder arm and fastening arm are connected to one another by a parallel guide whereby horizontal offset of the needle tip on account of external forces can be reduced or even prevented making it easier for the probe needle to carry out a vertical yielding movement, with almost no rotation of the probe needle about a horizontal axis.

摘要翻译： 其中探针在垂直力作用下具有轻微水平偏移的探针支架包括用于探针的探针支架，其中该支架用于紧固和电接触连接在测试的载体装置上 装置，并且具有在其自由端具有针保持器的保持臂，用于固定探针，以及用于将保持臂连接到承载装置的紧固臂。 保持臂和紧固臂通过平行的引导件彼此连接，由此可以减少或甚至防止针尖由于外力引起的水平偏移，从而使探针更容易进行垂直屈服运动，几乎可以 探头针绕水平轴不旋转。

公开(公告)号：US20090314051A1

公开(公告)日：2009-12-24

申请号：US12488702

申请日：2009-06-22

申请人： Victar KHUTKO ,  Andrej RUMIANTSEV ,  Stojan KANEV

发明人： Victar KHUTKO ,  Andrej RUMIANTSEV ,  Stojan KANEV

IPC分类号： G01D18/00 ,  G01R19/00

CPC分类号： G01R35/007 ,  G01R27/28 ,  G01R31/2872

摘要： In a method for calibration of a measurement unit for determination of electrical properties of electronic components using at least one planar calibration standard, an electrical measurement quantity is measured at two different temperatures. The electrical property of the calibration standard is known at at least one temperature or is to be determined by calculation. A temperature coefficient is determined from both measured quantities, which describes the relative change of the electrical property of the calibration standard accompanying the temperature change and with which the electrical property of the calibration standard is determined at a measurement temperature. From the change in electrical property, an error coefficient of the measurement unit is determined. A method is also provided for determination of an electrical property of an electronic component, using the calibration method.

摘要翻译： 在使用至少一个平面校准标准来确定电子元件的电特性的测量单元的校准方法中，在两个不同温度下测量电测量量。 校准标准品的电学性质在至少一个温度下是已知的，或通过计算来确定。 温度系数由两个测量量确定，其描述伴随温度变化的校正标准的电性能的相对变化，并且在测量温度下确定校准标准的电性能。 根据电气特性的变化，确定测定单元的误差系数。 还提供了一种用于使用校准方法确定电子部件的电特性的方法。

公开(公告)号：US20090085595A1

公开(公告)日：2009-04-02

申请号：US12329968

申请日：2008-12-08

申请人： Stojan KANEV ,  Hans-Jurgen FLEISCHER ,  Stefan KREISSIG ,  Jorg KIESEWETTER

发明人： Stojan KANEV ,  Hans-Jurgen FLEISCHER ,  Stefan KREISSIG ,  Jorg KIESEWETTER

IPC分类号： G01R1/073

CPC分类号： G01R31/2891 ,  G01R31/2887

摘要： A method for perpendicular positioning of a probe card relative to a test substrate, includes storing a separation position approached in a first positioning step as a distance between the needle tips of the probe card and the substrate, storing a contact position approached in a second positioning step until the probe card contacts the substrate, and displaying an image of the needle tips. For avoiding erroneous operation after a probe card has been changed, when imaging the needle tips, the stored contact position is imaged and is changed until presentation of this contact position corresponds to actual height of the tips appropriate for the respective probe card and this setting is then stored as a new contact position. A display device presents the needle tips and the stored contact position and is connected to a memory, a recording device and an input device which changes the contact position.

公开(公告)号：US20090021275A1

公开(公告)日：2009-01-22

申请号：US11947129

申请日：2007-11-29

申请人： Stojan Kanev ,  Hans-Jurgen Fleischer ,  Stefan Kreissig ,  Jorg Kiesewetter

发明人： Stojan Kanev ,  Hans-Jurgen Fleischer ,  Stefan Kreissig ,  Jorg Kiesewetter

IPC分类号： G01R1/067 ,  G01R31/02

CPC分类号： G01R31/2891 ,  G01R31/2887

摘要： A method for perpendicular positioning of a probe card relative to a test substrate, includes storing a separation position approached in a first positioning step as a distance between the needle tips of the probe card and the substrate, storing a contact position approached in a second positioning step until the probe card contacts the substrate, and displaying an image of the needle tips. For avoiding erroneous operation after a probe card has been changed, when imaging the needle tips, the stored contact position is imaged and is changed until presentation of this contact position corresponds to actual height of the tips appropriate for the respective probe card and this setting is then stored as a new contact position. A display device presents the needle tips and the stored contact position and is connected to a memory, a recording device and an input device which changes the contact position.

摘要翻译： 一种用于相对于测试基板垂直定位探针卡的方法，包括将在第一定位步骤中接近的分离位置存储为探针卡的针尖与基底之间的距离，存储在第二定位中接近的接触位置 一直到探针卡接触基板，并显示针尖的图像。 为了避免在探针卡改变之后的错误操作，当成像针尖时，存储的接触位置成像并改变，直到该接触位置的呈现对应于适合于相应探针卡的尖端的实际高度，并且该设置为 然后存储为新的联系人位置。 显示装置呈现针尖和存储的接触位置，并且连接到存储器，记录装置和改变接触位置的输入装置。

公开(公告)号：US20080284457A1

公开(公告)日：2008-11-20

申请号：US12111222

申请日：2008-04-29

申请人： Ulf HACKIUS ,  Frank FEHRMANN ,  Juliane BUSCH ,  Ralf KELLER

发明人： Ulf HACKIUS ,  Frank FEHRMANN ,  Juliane BUSCH ,  Ralf KELLER

IPC分类号： G01R31/26 ,  H01L21/67

CPC分类号： H01L21/67294 ,  G01R31/2891

摘要： In a device and a method for positioning an object, a drive of a movement device is controlled. To this end, a visual joystick is actuated, as a result of which a moveable actuator is moved, at least linearly by means of a display of a control unit of the movement device, into a position, in which a direction of movement, which can be implemented with the drive, is displayed symbolically. The drive for the movement of the object in the displayed direction of movement is initiated by means of a switching function of the actuator.

摘要翻译： 在用于定位物体的装置和方法中，控制移动装置的驱动器。 为此，启动视觉操纵杆，结果使可移动致动器至少通过移动装置的控制单元的显示线性地移动到移动方向的位置 可以用驱动器实现，以符号方式显示。 通过致动器的切换功能来启动在显示的移动方向上的物体的移动驱动。

公开(公告)号：US20080224426A1

公开(公告)日：2008-09-18

申请号：US12048323

申请日：2008-03-14

申请人： Michael TEICH ,  Karsten STOLL ,  Axel SCHMIDT ,  Stojan KANEV ,  Jorg KIESEWETTER

发明人： Michael TEICH ,  Karsten STOLL ,  Axel SCHMIDT ,  Stojan KANEV ,  Jorg KIESEWETTER

IPC分类号： B23B31/12

CPC分类号： G01R1/04 ,  G01R31/2865 ,  H01L21/68714 ,  H01L21/68757 ,  Y10T279/11 ,  Y10T279/18

摘要： A chuck with triaxial construction comprises a receiving surface for a test substrate and arranged below the receiving surface: an electrically conductive first surface element, an electrically conductive second surface element electrically insulated therefrom, and an electrically conductive third surface element electrically insulated therefrom, and, between the first and the second surface element, a first insulation element and, between the second and the third surface element, a second insulation element. A chuck for very low current measurements which can be used to prevent the occurrence of leakage currents and a triboelectric charge and which is configured favourably in terms of production, is achieved because at least one of the electrically conductive surface elements is mechanically connected to at least one insulation element and has an elasticity that compensates for an expansion difference resulting from differences in different coefficients of expansion between a respective surface element and an adjoining insulation element.

摘要翻译： 具有三轴结构的卡盘包括用于测试基板的接收表面并且布置在接收表面下方：导电的第一表面元件，与其电绝缘的导电的第二表面元件和与其电绝缘的导电的第三表面元件， 在第一和第二表面元件之间，第一绝缘元件和第二和第三表面元件之间的第二绝缘元件。 实现了用于非常低的电流测量的卡盘，其可用于防止泄漏电流和摩擦电荷的发生，并且在生产方面被有利地配置，这是因为至少一个导电表面元件至少机械地连接到 一个绝缘元件并且具有补偿由相应的表面元件和相邻绝缘元件之间的不同膨胀系数的差异引起的膨胀差的弹性。

公开(公告)号：US07332923B2

公开(公告)日：2008-02-19

申请号：US11368748

申请日：2006-03-06

申请人： Steffen Schott ,  Stojan Kanev

发明人： Steffen Schott ,  Stojan Kanev

IPC分类号： G01R1/067 ,  G01R31/02 ,  H01R11/00

CPC分类号： G01R1/06772

摘要： A test probe for executing high-frequency measurements comprises: a coaxial high-frequency wave guide containing an inner conductor and an outer conductor for delivering a primary electrical potential and a secondary electrical potential, respectively, a supporting structure conductively connected to at least the outer conductor and to at least two contact elements for creating a contact with an electronic circuit to be tested. The support structure is provided with conductive paths for the transmission respectively of a high-frequency signal from the inner conductor and a high-frequency ground potential from the outer conductor to at least one contact element and each conductive path is conductively connected to the inner or outer conductor. The support structure has at least one U-shaped cut-out with a width essentially equivalent to an outer diameter of the wave guide and sides of the U-shaped cut-out are connected to the outer conductor.

摘要翻译： 用于执行高频测量的测试探针包括：同轴高频波导，其包含分别用于传送初级电位和次级电位的内部导体和外部导体，分别与至少外部导电连接的支撑结构 导体和至少两个接触元件，用于与待测试的电子电路产生接触。 支撑结构设置有用于将来自内部导体的高频信号和来自外部导体的高频接地电位分别传输到至少一个接触元件的导电路径，并且每个导电路径导电连接到内部或 外导体。 支撑结构具有至少一个U形切口，其宽度基本上等于波导管的外径，并且U形切口的侧面连接到外导体。

公开(公告)号：US07282930B2

公开(公告)日：2007-10-16

申请号：US11314624

申请日：2005-12-21

申请人： Uwe Beier ,  Dietmar Runge ,  Stefan Kreissig ,  Steffen Grauer ,  Matthias Rottka ,  Botho Hirschfeld ,  Joerg Kiesewetter

发明人： Uwe Beier ,  Dietmar Runge ,  Stefan Kreissig ,  Steffen Grauer ,  Matthias Rottka ,  Botho Hirschfeld ,  Joerg Kiesewetter

IPC分类号： G01R31/302

CPC分类号： G01R31/2831

摘要： A device for testing thin elements, such as wafers or individual substrates, while at the same time offering a facility for inspecting the reverse side of the thin elements is provided in which any deflection of the substrate as a consequence of high contact power of the probe card is avoided and which is also suitable for substrate diameters of 200 mm and above. The device includes a stable plate with a central opening positioned on the basic construction, a frame which can be moved and/or turned on the plate in an x/y direction and, if required, in a theta direction, a highly-rigid substrate support which can be mounted in the frame, and substrates which can be mounted on the substrate support, wherein the mounting is effected through a vacuum, using mechanical elements (clamping ring, clamping foil or other suitable clamping elements), gel pack pads, or adhesive etc.

摘要翻译： 提供了用于测试诸如晶片或单独基板的薄元件的装置，同时提供用于检查薄元件的反面的设备，其中作为探针的高接触功率的结果的基板的任何偏转 避免卡片，也适用于200mm及以上的基材直径。 该装置包括具有位于基本结构上的中心开口的稳定板，可在x / y方向上移动和/或转动板的框架，并且如果需要，在θ方向上可以是高度刚性的基板 可以安装在框架中的支撑件以及可以安装在基板支撑件上的基板，其中通过真空使用机械元件（夹紧环，夹紧箔或其它合适的夹紧元件），凝胶封装垫或 粘合剂等

公开(公告)号：US07235990B1

公开(公告)日：2007-06-26

申请号：US11299487

申请日：2005-12-12

申请人： Stefan Kreissig ,  Joerg Kiesewetter

发明人： Stefan Kreissig ,  Joerg Kiesewetter

IPC分类号： G01R31/02

CPC分类号： G01R31/2886

摘要： A probe station allows for effective EMI shielding of the passage of the probe through the wall of the housing of such probe station. The probe is freely movable in the X, Y and Z directions. The probe station comprises a housing having at least one aperture through which a probe can extend, a chuck for supporting a test device, the chuck being arranged inside the housing, at least one probe support for supporting a probe, the probe support being arranged relative to the housing such that a first portion of the probe extends into the housing through one of said apertures, at least one positioning mechanism enabling at least one of said probe and said chuck to move relative to the other, and is characterized in that at least one electrically conductive, elastic bellows is attached to the edge of an aperture which provides a variable passage for the probe.

摘要翻译： 探针台允许通过探针台的壳体的壁对探针的通道进行有效的EMI屏蔽。 探头可以在X，Y和Z方向上自由移动。 探针台包括一个壳体，该壳体具有至少一个探针能够延伸穿过的孔口，用于支撑测试装置的卡盘，卡盘布置在壳体内部，至少一个用于支撑探针的探针支架，探针支架相对于 所述探针的第一部分通过所述孔中的一个延伸到所述壳体中，所述至少一个定位机构使所述探针和所述卡盘中的至少一个能够相对于另一个移动，并且其特征在于至少 一个导电的弹性波纹管连接到孔的边缘，为探针提供可变通道。

公开(公告)号：US07057408B2

公开(公告)日：2006-06-06

申请号：US10879622

申请日：2004-06-29

申请人： Stefan Schneidewind ,  Claus Dietrich ,  Jörg Kiesewetter ,  Stojan Kanev ,  Stefan Kreissig ,  Frank Fehrmann ,  Hans-Jürgen Fleischer

发明人： Stefan Schneidewind ,  Claus Dietrich ,  Jörg Kiesewetter ,  Stojan Kanev ,  Stefan Kreissig ,  Frank Fehrmann ,  Hans-Jürgen Fleischer

IPC分类号： G01R31/02

CPC分类号： G01R31/2886

摘要： A method of contacting a contact area with the tip of a contact needle (contact tip) in a prober and the arrangement of such a prober, is based on the object of ensuring reliable contacting and direct observation of the establishment of the contact between the contact tip and the contact area when contacting contact pads of small dimensions. The prober substantially includes a base frame with a movement device including a clamping fixture for receiving a semiconductor wafer and also contact needles, which are arranged opposite the free surface of the semiconductor wafer. The contacting of the contact tips initially requires a horizontal positioning of the semiconductor wafer, so that the contact area and the contact tip are one above the other and at a distance from each other, and subsequently moving vertically in the direction of the contact tip, until a contact of the contact tips with the contact area is established. The object is achieved by the vertical movement of the semiconductor wafer until the end position is reached being directly observed in a horizontal direction of observation and, for this purpose, an observation device is arranged in such a way that the observation axis runs in the spacing above the free wafer surface.

摘要翻译： 接触区域与探针中的接触针尖（接触尖端）接触的方法以及这种探测器的布置的方法基于确保可靠接触和直接观察触点之间的接触的建立的目的 接触小尺寸接触垫时的接触面和接触面积。 探测器基本上包括具有移动装置的基架，该移动装置包括用于接收半导体晶片的夹持夹具以及与半导体晶片的自由表面相对布置的接触针。 接触尖端的接触最初需要半导体晶片的水平定位，使得接触面和接触尖端彼此之间并且彼此间隔一定距离，随后沿接触尖端的方向垂直移动， 直到接触尖端与接触区域的接触被建立。 该目的是通过半导体晶片的垂直移动直到达到最终位置在水平观察方向上直接观察为目的，为此目的，观察装置以这样的方式布置，使得观察轴以间隔 在自由晶片表面上方。