System and method for characterizing a physical property of a sample

    公开(公告)号:US12196719B2

    公开(公告)日:2025-01-14

    申请号:US17867743

    申请日:2022-07-19

    Inventor: Changhong Cao

    Abstract: There is described a system for characterizing a physical property of a sample. The system generally has a microelectromechanical system (MEMS) device having a framework, a shuttle member extending along a longitudinal orientation within the framework, a shuttle actuator having obliquely extending arms extending between the framework and the shuttle member, the shuttle actuator configured for expanding the arms upon application of electricity thereacross, said expanding applying a force onto the shuttle member and moving the shuttle member at least partly in the longitudinal orientation, and a socket positioned adjacent a tip of the shuttle member; and a MEMS chip receiving the sample and being configured for insertion into the socket, whereby, when the MEMS chip is received in the socket and loaded with the sample, the force applied onto the shuttle member is transferred into stress internal to the MEMS chip via the tip of the shuttle member.

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