摘要:
A substrate processing system capable of supplying a processing liquid containing fine bubbles at a high concentration without generating large sized bubbles in a middle of a supply line of the processing liquid is disclosed. There is provided a substrate processing system comprising: a gas dissolved water generation tank; a chemical liquid dilution module; and a substrate processing module. The substrate processing module comprises a processing liquid supply nozzle configured to supply the processing liquid onto a substrate. The processing liquid supply nozzle has a decompression release portion configured to generate fine bubbles of a gas from a diluted chemical liquid. The processing liquid supply nozzle is configured to supply the diluted chemical liquid containing fine bubbles in a process scrubbing the substrate.
摘要:
A dust removal device installed on a slide rail of an automatic door is provided. The slide rail includes a slide groove on the bottom side thereof and is connected to a plurality of door panels. The slide rail includes a top plate, where a plurality of dust discharging holes is disposed. The dust removal device further includes a dust extracting case disposed on the top plate. The dust extracting includes an air passage at the inside, which communicates with the plurality of dust discharging holes. The dust removal device further includes a negative pressure device connected to the dust extracting case so as to generate a negative pressure at the inside of the dust extracting case and the air passage.
摘要:
A system and method for preventing contamination of an array of fiber optic connectors. The system includes a housing for retaining the array of fiber optic connectors in an adjacent relation and an arrangement for delivering pressurized gas into said housing to prevent external contamination entering said housing and causing debris on a surface of one or more of the connectors. A control arrangement is provided for deactivating air flow after all optical connections are covered and protected from contamination.
摘要:
Apparatus for drifting away loose items from an area, has a container with an outlet port and is rotatably supported on a base member. A top member is fixedly connected to the base member above the container. The top member has a fan that is adapted to draw air from the exterior through an inlet port and discharge the air into the interior of the container to exit from the outlet port. A motor is secured to the top member, the motor being adapted to engage with and rotate the container relative to the base member and the top member, such that the air exiting from the outlet port is driven in a circular direction.
摘要:
The present disclosure generally relates to an electronic device peripheral cleaning cabinet and a method for cleaning such peripherals. In an example, a peripheral cleaning cabinet includes a cabinet body, a door, a cabinet gas line, and a support shelf. The cabinet body includes an exhaust port. The door is mechanically coupled to the cabinet body. The cabinet gas line includes a gas valve and a nozzle. The gas valve is fluidly coupled to the nozzle. The nozzle is disposed in the cabinet body. The cabinet gas line is configured to supply a gas to flow into the cabinet body. The support shelf is disposed in the cabinet body and is configured to support a peripheral. The support shelf is configured to allow the gas to flow from the nozzle, through the support shelf, and to the exhaust port.
摘要:
In order to obtain a contaminant removal device capable of improving contaminant removal performance regardless of a structure formed on a surface of an object, in the contaminant removal device, contaminant attached to the object is removed by a gas sprayed out of a nozzle having a gas outlet, and an aperture ratio of opposing end portions of the gas outlet is set smaller than an aperture ratio of a central portion of the gas outlet.
摘要:
The present disclosure provides embodiments of a system and method for detecting processing chamber condition. The embodiments include performing a wafer-less processing step in a processing chamber to determine the condition of the chamber walls. Based on an analysis of the residual gas resulting from the wafer-less processing step, an operator or a process controller can determine whether the chamber walls have deteriorated to such an extent as to be cleaned.
摘要:
A device is described for protecting a sensor window. The device includes a two-piece nozzle system and is configured for generating a first and a second fluid flow, a first piece of the two-piece nozzle system being fixedly situated with respect to the sensor window, and a second piece of the two-piece nozzle system being configured for assuming different positions with respect to the first piece of the two-piece nozzle system, and the two-piece nozzle system being aligned with respect to the sensor window to direct a predominant portion of the first fluid flow in parallel to the sensor window and to direct a predominant portion of the second fluid flow in the direction onto the sensor window.
摘要:
A method is provided for operating a dishwasher (1) in the form of a batch dishwasher, which has a treatment chamber (2) for accommodating washware to be cleaned. Provision is made, during an adsorption phase, for air to be conducted out of the treatment chamber (2) through a sorption unit (41), which contains a reversibly dehydratable dry material, in such a way that the dry material absorbs moisture from the air stream, wherein the air is then returned to the treatment chamber (2). Provision is further made, during a desorption phase, for the dry material of the sorption unit (41) to be heated in such a way that moisture is desorbed from the dry material as steam. During the desorption phase, the sorption unit (41) is subjected to forced ventilation only to such an extent that recondensation of desorbed steam in the sorption unit (41) itself is effectively prevented.
摘要:
The disclosure discloses a convenient cleaning apparatus and cleaning method for an industrial control computer, including an industrial control computer body (1), and a heat dissipation hole is formed in a front side wall of the industrial control computer body (1), and a heat dissipation net (2) is arranged in the heat dissipation hole; a first cleaning device is arranged inside the industrial control computer body (1), and the first cleaning device is configured to clean the heat dissipation net (2); a plurality of heat dissipation fins (3) are arranged on an outer wall of an upper end of the industrial control computer body (1); and a second cleaning device is arranged outside the industrial control computer body (1), and the second cleaning device is configured to clean the heat dissipation fins (3). In the disclosure, by providing the first cleaning device and second cleaning device, cleaning of the heat dissipation net and the heat dissipation fins can be completed, which reduces the dust attached to the surfaces of the heat dissipation net and the heat dissipation fins to achieve high efficient heat dissipation. In addition, there is no need for a worker to clean, which reduces labor intensity of the worker, and also improves safety of cleaning for the industrial control computer body.