SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

    公开(公告)号:US20230321696A1

    公开(公告)日:2023-10-12

    申请号:US18128892

    申请日:2023-03-30

    申请人: EBARA CORPORATION

    摘要: A substrate processing system capable of supplying a processing liquid containing fine bubbles at a high concentration without generating large sized bubbles in a middle of a supply line of the processing liquid is disclosed. There is provided a substrate processing system comprising: a gas dissolved water generation tank; a chemical liquid dilution module; and a substrate processing module. The substrate processing module comprises a processing liquid supply nozzle configured to supply the processing liquid onto a substrate. The processing liquid supply nozzle has a decompression release portion configured to generate fine bubbles of a gas from a diluted chemical liquid. The processing liquid supply nozzle is configured to supply the diluted chemical liquid containing fine bubbles in a process scrubbing the substrate.

    System and method for dust contamination prevention and removal in fiber-optic panel-mount assemblies
    3.
    发明授权
    System and method for dust contamination prevention and removal in fiber-optic panel-mount assemblies 有权
    光纤面板安装组件防尘除尘系统和方法

    公开(公告)号:US09207454B1

    公开(公告)日:2015-12-08

    申请号:US13842983

    申请日:2013-03-15

    发明人: David Bakhmutsky

    IPC分类号: G02B6/00 G02B27/00 G02B6/44

    摘要: A system and method for preventing contamination of an array of fiber optic connectors. The system includes a housing for retaining the array of fiber optic connectors in an adjacent relation and an arrangement for delivering pressurized gas into said housing to prevent external contamination entering said housing and causing debris on a surface of one or more of the connectors. A control arrangement is provided for deactivating air flow after all optical connections are covered and protected from contamination.

    摘要翻译: 一种用于防止光纤连接器阵列的污染的系统和方法。 该系统包括用于保持相邻关系的光纤连接器阵列的壳体和用于将加压气体输送到所述壳体中以防止外部污染物进入所述壳体并且导致一个或多个连接器的表面上的碎屑的装置。 提供了一种控制装置,用于在所有光学连接被覆盖并防止污染之后停用空气流。

    APPARATUS AND METHOD FOR CLEARING DEBRIS
    4.
    发明申请
    APPARATUS AND METHOD FOR CLEARING DEBRIS 审中-公开
    用于清除DEBRIS的装置和方法

    公开(公告)号:US20150114435A1

    公开(公告)日:2015-04-30

    申请号:US14067749

    申请日:2013-10-30

    IPC分类号: A01G1/12 E01H5/10

    摘要: Apparatus for drifting away loose items from an area, has a container with an outlet port and is rotatably supported on a base member. A top member is fixedly connected to the base member above the container. The top member has a fan that is adapted to draw air from the exterior through an inlet port and discharge the air into the interior of the container to exit from the outlet port. A motor is secured to the top member, the motor being adapted to engage with and rotate the container relative to the base member and the top member, such that the air exiting from the outlet port is driven in a circular direction.

    摘要翻译: 用于从一个区域漂移物品的装置,具有一个具有出口的容器,并可旋转地支撑在基座上。 顶部构件在容器上方固定地连接到基座构件。 顶部构件具有适于从外部通过入口吸入空气并将空气排放到容器的内部以从出口排出的风扇。 马达被固定到顶部构件上,马达适于与容器相对于基座构件和顶部构件接合并旋转,使得从出口排出的空气沿圆周方向被驱动。

    Electronic device peripheral cleaning cabinet

    公开(公告)号:US11969770B2

    公开(公告)日:2024-04-30

    申请号:US17736476

    申请日:2022-05-04

    IPC分类号: B08B13/00 B08B5/02

    CPC分类号: B08B5/02 B08B2205/00

    摘要: The present disclosure generally relates to an electronic device peripheral cleaning cabinet and a method for cleaning such peripherals. In an example, a peripheral cleaning cabinet includes a cabinet body, a door, a cabinet gas line, and a support shelf. The cabinet body includes an exhaust port. The door is mechanically coupled to the cabinet body. The cabinet gas line includes a gas valve and a nozzle. The gas valve is fluidly coupled to the nozzle. The nozzle is disposed in the cabinet body. The cabinet gas line is configured to supply a gas to flow into the cabinet body. The support shelf is disposed in the cabinet body and is configured to support a peripheral. The support shelf is configured to allow the gas to flow from the nozzle, through the support shelf, and to the exhaust port.

    METHOD FOR OPERATING A DISHWASHER, AND DISHWASHER
    9.
    发明申请
    METHOD FOR OPERATING A DISHWASHER, AND DISHWASHER 有权
    操作洗碗机的方法和洗碗机

    公开(公告)号:US20160088996A1

    公开(公告)日:2016-03-31

    申请号:US14893592

    申请日:2014-06-05

    IPC分类号: A47L15/48 B01D53/26 A47L15/00

    摘要: A method is provided for operating a dishwasher (1) in the form of a batch dishwasher, which has a treatment chamber (2) for accommodating washware to be cleaned. Provision is made, during an adsorption phase, for air to be conducted out of the treatment chamber (2) through a sorption unit (41), which contains a reversibly dehydratable dry material, in such a way that the dry material absorbs moisture from the air stream, wherein the air is then returned to the treatment chamber (2). Provision is further made, during a desorption phase, for the dry material of the sorption unit (41) to be heated in such a way that moisture is desorbed from the dry material as steam. During the desorption phase, the sorption unit (41) is subjected to forced ventilation only to such an extent that recondensation of desorbed steam in the sorption unit (41) itself is effectively prevented.

    摘要翻译: 提供了一种以批次洗碗机的形式操作洗碗机(1)的方法,该洗碗机具有用于容纳待清洗的清洁用具的处理室(2)。 规定在吸附阶段期间,空气通过含有可逆脱水干燥材料的吸附单元(41)导出处理室(2),使得干燥材料从 空气流,其中空气然后返回到处理室(2)。 在解吸阶段期间进一步规定吸附单元(41)的干燥材料被加热,使得湿气以蒸汽的形式从干燥材料中脱附。 在解吸阶段期间,吸附单元(41)仅受到强制通风,只有这样才能有效地防止吸附单元(41)中的解吸蒸汽的再凝结。

    Convenient cleaning apparatus and cleaning method for industrial control computer

    公开(公告)号:US20240033785A1

    公开(公告)日:2024-02-01

    申请号:US17610166

    申请日:2021-08-31

    发明人: Yongzheng HUANG

    IPC分类号: B08B1/04 B08B1/00 B08B5/02

    摘要: The disclosure discloses a convenient cleaning apparatus and cleaning method for an industrial control computer, including an industrial control computer body (1), and a heat dissipation hole is formed in a front side wall of the industrial control computer body (1), and a heat dissipation net (2) is arranged in the heat dissipation hole; a first cleaning device is arranged inside the industrial control computer body (1), and the first cleaning device is configured to clean the heat dissipation net (2); a plurality of heat dissipation fins (3) are arranged on an outer wall of an upper end of the industrial control computer body (1); and a second cleaning device is arranged outside the industrial control computer body (1), and the second cleaning device is configured to clean the heat dissipation fins (3). In the disclosure, by providing the first cleaning device and second cleaning device, cleaning of the heat dissipation net and the heat dissipation fins can be completed, which reduces the dust attached to the surfaces of the heat dissipation net and the heat dissipation fins to achieve high efficient heat dissipation. In addition, there is no need for a worker to clean, which reduces labor intensity of the worker, and also improves safety of cleaning for the industrial control computer body.